Device for online detection of filtering effect of NF membrane

Abstract

The utility model discloses a device for detecting the filtering effect of an NF membrane on line, which comprises an NF membrane filtering system formed by connecting a plurality of NF membrane filters in parallel, each NF membrane filter is provided with a liquid inlet and a liquid outlet, each NF membrane filter is also provided with a sampling port, the sampling ports of all the NF membrane filters are connected with a UV (ultraviolet) meter, and the UV meter is connected with the liquid inlet and the liquid outlet. And the filtration effect of the NF membrane filter is detected through UV meter detection. The absorbance of the TMAH is measured through the high-precision spectrometer (UV meter), the filtering effect of the NF membrane is monitored in real time, the NF membrane abnormity can be found in time, product defects and downtime are reduced, meanwhile, the maintenance strategy is optimized, and the production cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of online detection NF membrane filtration effect's device. BACKGROUND

[0002] With the rapid development of display industry, as one of the key processes, the stability and efficiency of developing process have a direct impact on product quality and production cost. The main component of developing solution is tetramethylammonium hydroxide (TMAH), which can be recycled after being filtered by NF membrane. This not only reduces production cost, but also reduces environmental pollution. However, when NF membrane is abnormal, the filtration effect decreases, which leads to the ineffective removal of resist in developing solution, thereby affecting product yield, and even causing production line shutdown and reduced productivity.

[0003] The current equipment does not install real-time monitoring device for NF membrane filtration effect, which cannot evaluate the filtration effect in real time. The decline of filtration effect can only be indirectly discovered through downstream product abnormalities (such as uneven development, pattern defects, etc.), which has obvious hysteresis. SUMMARY

[0004] The utility model provides a kind of online detection NF membrane filtration effect's device to solve the problems existing in the prior art described above. High-precision spectrometer (UV meter) measures the absorbance of TMAH solution at a specific wavelength to analyze its optical properties. By measuring absorbance, the content of TMAH solution PR can be quantified to evaluate its cleanliness. Real-time monitoring can detect problems at an early stage of NF membrane filtration effect decline, trigger equipment alarm and arrange NF membrane replacement plan in advance.

[0005] The utility model adopts the technical scheme:

[0006] A kind of online detection NF membrane filtration effect's device, including the NF membrane filtration system formed by the parallel connection of several NF membrane filters, liquid inlet and liquid outlet are provided on each NF membrane filter, sampling port is also provided on each NF membrane filter, the sampling port of all NF membrane filters is connected with UV meter, and the filtration effect of NF membrane filter is detected by UV meter detection.

[0007] Further, a detection flow path is provided at the sampling port of each NF membrane filter, and a manual valve and a one-way valve are respectively provided in the liquid flow direction of the detection flow path.

[0008] Further, a plurality of liquid inlets are provided on the UV meter, a multi-channel switching valve is connected to each liquid inlet, and the liquid inlet of the multi-channel switching valve is connected to a plurality of detection flow paths.

[0009] Further, the wavelength range of the UV meter is 400-600 nm.

[0010] The utility model has the advantages of the following:

[0011] The utility model can discover NF membrane abnormality in time, reduce product defects and downtime, optimize maintenance strategy, and reduce production cost. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 The utility model structural diagram.

[0013] Figure 2 The utility model is UV meter structure diagram. DETAILED DESCRIPTION

[0014] The utility model will be further described below in combination with the drawings.

[0015] As Figure 1 And Figure 2 The utility model discloses an online detection NF membrane filtration effect's device, including the NF membrane filtration system that is formed by the parallel connection of a plurality of NF membrane filters 1, is equipped with the liquid inlet and the liquid outlet on every NF membrane filter 1, and the liquid inlet is used for inputting the developing solution (TMAH solution) of filtering, and the liquid outlet is used for outputting the developing solution after filtering.

[0016] 1 / 4 sampling port is arranged on every NF membrane filter 1, is used for connecting UV meter, and realizes the detection of the filtration effect of NF membrane filter 1 through UV meter detection.

[0017] Sampling port is equipped with detection flow path, and manual valve 11 and check valve 12 are respectively arranged in the liquid flow direction of detection flow path. Install after check valve 12, prevent sample solution backflow, ensure the stability and accuracy of detection system.

[0018] UV meter 2 is equipped with a plurality of liquid inlets, and multi-channel switching valve 21 is connected on every liquid inlet, and the liquid inlet of multi-channel switching valve 21 is connected with a plurality of detection flow paths.

[0019] Multi-channel switching valve 21 is used for controlling different NF membrane filtration liquid to enter UV meter detection, realizes the round robin detection of multiple NF membranes through automatic switching, and improves the coverage of system.

[0020] UV meter 2 uses 400-600nm wavelength range, detects the absorbance of entering liquid, and evaluates the cleanliness of TMAH solution and the filtration effect of NF membrane through absorbance data.

[0021] Protective shell 3 is arranged on the outside of UV meter 2, to avoid UV meter 2 from being damaged. After detection, through the liquid discharge pipe on UV meter 2, return to the recovery tank.

[0022] The UV meter uploads data, the cleanliness of the TMAH solution and the filtering effect of the NF membrane are evaluated through the absorbance data, and the result can be output to the main device, and an alarm can be directly sent and the main device can be connected when an abnormality is found.

[0023] The above merely describes preferred embodiments of the present application, and it should be noted that those skilled in the art can make several improvements without departing from the principles of the present application, and these improvements should also be considered within the protection scope of the present application.

Claims

1. An apparatus for online detection of NF membrane filtration effect, comprising an NF membrane filtration system formed by a plurality of NF membrane filters (1) connected in parallel, wherein each NF membrane filter (1) is provided with an inlet and an outlet, characterized in that: Each NF membrane filter (1) is also provided with a sampling port. All sampling ports of the NF membrane filters (1) are connected to a UV meter (2). The filtration effect of the NF membrane filter (1) is detected by the UV meter.

2. The device for online detection of NF membrane filtration effect as described in claim 1, characterized in that: Each NF membrane filter (1) has a detection flow path at its sampling port, and a manual valve (11) and a check valve (12) are provided in the liquid flow direction of the detection flow path.

3. The device for online detection of NF membrane filtration effect as described in claim 2, characterized in that: The UV meter (2) is provided with several liquid inlets, and a multi-channel switching valve (21) is connected to each liquid inlet. The liquid inlet of the multi-channel switching valve (21) is connected to multiple detection flow paths.

4. The device for online detection of NF membrane filtration effect as described in claim 1, characterized in that: The wavelength range of the UV meter (2) is 400-600nm.

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