Supporting device and glue uniformizing system

Abstract

The utility model discloses a supporting device applied to a glue uniformizing system. Comprising a first flat plate, a second flat plate, a connecting plate and a limiting plate, wherein the first flat plate is obliquely arranged relative to the horizontal diameter of the glue uniformizing wheel; the second flat plate and the first flat plate are arranged in parallel and staggered; the connecting plate is connected between the first flat plate and the second flat plate; the first flat plate and the second flat plate are of a parallel and staggered structural design, under the condition that the abutting position of the glue scraping part and the glue uniformizing wheel is not changed, the installation height between the glue scraping part and the base can be increased, the installation space below the glue uniformizing wheel is enlarged, and a solution tank which occupies a large space and is used for containing the glue uniformizing wheel can be conveniently arranged below the glue uniformizing wheel; meanwhile, the first flat plate is obliquely arranged relative to the horizontal diameter of the glue uniformizing wheel, so that the edges and corners of the glue scraping part abut against the glue uniformizing wheel, the contact area of the glue scraping part and the glue uniformizing wheel is reduced, and the glue scraping part can effectively scrape away glue adhering to the periphery of the glue uniformizing wheel.

Description

Technical Field

[0001] This utility model relates to a spin coating system, and more particularly to a support device used in the spin coating system. Background Technology

[0002] Before applying glue, the glue application system first uses a rotating glue-spreading wheel to remove excess glue from the glue outlet. Then, it dilutes the glue adhering to the outer circumference of the glue-spreading wheel. Finally, it uses a scraper to remove the diluted glue from the outer circumference of the glue-spreading wheel, ensuring that the glue-spreading distance between the glue outlet and the glue-spreading wheel is always kept within the set threshold.

[0003] However, due to space constraints, such as after installing a scraper and a base supporting the scraper near the glue-spreading wheel, it is impossible to arrange a container tank to hold the glue-spreading wheel and cleaning fluid below the glue-spreading wheel.

[0004] For the reasons mentioned above, there is an urgent need to provide a support device for a spin coating system that can solve the above problems. Utility Model Content

[0005] The purpose of this utility model is to overcome the shortcomings of the prior art and provide a support device that raises the installation height between the scraper and the base while keeping the contact position between the scraper and the leveling wheel unchanged, thereby expanding the installation space below the leveling wheel and facilitating the arrangement of a large-space solution tank for cleaning the leveling wheel below the leveling wheel.

[0006] This utility model is implemented as follows: a support device, the glue-spreading system including a glue-spreading wheel for rotating the belt to remove excess glue at the glue outlet, a glue-scraping part for scraping off the glue on the outer circumference of the glue-spreading wheel, a support device for mounting the glue-scraping part, and a base for mounting the support device, wherein the support device includes:

[0007] The first plate is inclined relative to the horizontal diameter of the coating roller;

[0008] The second plate is used to be parallel to and offset from the first plate;

[0009] A connecting plate is fixedly connected between the first plate and the second plate;

[0010] A limiting plate is used to detachably connect with the first plate to press and limit the adhesive scraping part installed between the first plate and the limiting plate.

[0011] Furthermore, the first plate is provided with a step for placing the adhesive scraper.

[0012] Furthermore, a first clearance is provided at the included angle of the step to avoid the sharp corner of the adhesive scraping part.

[0013] Furthermore, the support device also includes a fastener that passes through the limiting plate and is screwed to the first plate, the fastener rotating and translating along its axis to lock the limiting plate onto the first plate.

[0014] Preferably, the angle formed by the intersection of the extension line of the first flat plate and the horizontal diameter of the glue-spreading wheel is 100-170°.

[0015] Preferably, the connecting plate is arranged perpendicularly or obliquely to the first plate and the second plate, respectively.

[0016] Furthermore, a second clearance is provided at the angle between the first plate and the connecting plate to allow the corner of the limiting plate to be avoided.

[0017] Furthermore, the second plate is provided with a connection port for connecting to the base.

[0018] Preferably, the first plate, the connecting plate, and the second plate are integrally formed.

[0019] This utility model also provides a glue-spreading system, including a glue-spreading wheel for rotating the belt to remove excess glue from the glue outlet, a scraper for removing glue from the outer circumference of the glue-spreading wheel, a base, and a solution tank containing a cleaning solution. The cleaning solution in the solution tank is used to dilute the glue adhering to the outer circumference of the glue-spreading wheel. It also includes the aforementioned support device, with the scraper mounted on the support device, and the support device being detachably mounted on the base.

[0020] This utility model provides a support device for use in a spin coating system. It includes a first plate inclined relative to the horizontal diameter of a spin coating wheel, a second plate parallel to and offset from the first plate, a connecting plate connecting the first and second plates, and a limiting plate detachably connected to the first plate for pressing and limiting the coating scraper. The parallel and offset structure between the first and second plates raises the installation height between the coating scraper and the base, expanding the installation space below the spin coating wheel. This facilitates the placement of a large solution tank to accommodate the spin coating wheel. Simultaneously, the inclined first plate relative to the horizontal diameter of the spin coating wheel ensures that the edges of the coating scraper contact the spin coating wheel, reducing the contact area and allowing the coating scraper to effectively remove adhesive adhering to the outer circumference of the spin coating wheel. This ensures that the spin coating distance between the spin coating wheel and the outlet remains within a set threshold, guaranteeing a uniform amount of adhesive applied to the semiconductor substrate. Attached Figure Description

[0021] To more clearly illustrate the technical solution of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a structural diagram of the spin coating system provided in an embodiment of this utility model.

[0023] Figure 2 This is a structural diagram of the glue scraping part of the glue-spreading system provided in this embodiment of the utility model being installed on the support device.

[0024] Figure 3 This is a structural diagram of the support device in the gelling system provided in this embodiment of the utility model.

[0025] Figure 4 This is a structural diagram of the support device in a uniform coating system provided in another embodiment of this utility model.

[0026] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings.

[0027] The reference numerals in the attached figures are explained as follows:

[0028] Spreading roller 100, horizontal diameter D1, vertical diameter D2;

[0029] The thickness T2 of the adhesive scraping part 200;

[0030] Support device 300, first plate 310, step 311, thickness T1 of step 311, first clearance 312, second clearance 313, second plate 320, connection port 321, connecting plate 330, limiting plate 340, fastener 350, length L of second plate 320;

[0031] Base 400;

[0032] Solution tank 500. Detailed Implementation

[0033] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or state relationship based on the orientation or state relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0034] Furthermore, in addition to indicating location or state relationships, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in certain situations to indicate a dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0035] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0036] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts, which may be the same or different in type and construction, and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0037] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0038] like Figure 1 As shown, this utility model also provides a glue-spreading system, including a glue-spreading wheel 100 for rotating the glue outlet to remove excess glue, a scraper part 200 for removing glue from the outer periphery of the glue-spreading wheel 100, a support device 300 for mounting the scraper part 200, a base 400 for mounting the support device 300, and a solution tank 500 containing cleaning liquid. The cleaning liquid in the solution tank 500 is used to dilute the glue adhering to the outer periphery of the glue-spreading wheel 100. In this embodiment, part of the outer periphery of the glue-spreading wheel 100 is located in the solution tank 500. During the rotation of the glue-spreading wheel 100, the cleaning liquid in the solution tank 500 is used to dilute the glue adhering to the outer periphery of the glue-spreading wheel 100.

[0039] like Figure 2 As shown, the support device 300 includes:

[0040] The first plate 310 is inclined relative to the horizontal diameter D1 of the coating roller 100;

[0041] The second plate 320 is set parallel to and offset from the first plate 310;

[0042] A connecting plate 330 is fixedly connected between the first plate 310 and the second plate 320. Preferably, one end of the connecting plate 330 is vertically connected to the end of the first plate 310, and the other end of the connecting plate 330 is vertically connected to the beginning of the second plate 320.

[0043] The limiting plate 340 is detachably connected to the first plate 310 to press and limit the adhesive scraper 200 installed between the first plate 310 and the limiting plate 340.

[0044] In this embodiment, the scraping part 200 is preferably a cuboid structure with edges 210 on all four sides, and the material is soft rubber.

[0045] This utility model provides a support device 300, wherein a first plate 310 is inclined relative to the horizontal diameter D1 of the uniform coating wheel 100, and the first plate 310 and the second plate 320 are parallel and staggered. With the abutment position between the scraper 200 and the uniform coating wheel 100 remaining unchanged, the installation height between the scraper 200 and the base 400 can be raised, expanding the installation space below the uniform coating wheel 100. This facilitates the arrangement of a large-space solution tank 500 to accommodate the uniform coating wheel 100 below it; simultaneously, it can also... The scraper 200 is positioned at an optimal scraping position, which is the position where the first plate 310 is inclined relative to the horizontal diameter D1 of the coating roller 100. This allows the edges of the scraper 200 to abut against the coating roller 100, reducing the contact area between the scraper 200 and the coating roller 100. This enables the scraper 200 to effectively scrape off the adhesive adhering to the outer periphery of the coating roller 100, ensuring that the coating distance between the coating section 200 and the adhesive outlet is always kept within a set threshold, thus guaranteeing a uniform amount of adhesive applied to the semiconductor substrate through the adhesive outlet.

[0046] In addition, the small contact area between the scraper 200 and the applicator 100 makes it easier for the operator to observe whether there is a gap between the scraper 200 and the applicator 100 during the installation of the scraper 200, so as to determine the contact state between the scraper 200 and the applicator 100 (such as whether there is a gap after contact or no gap after contact).

[0047] like Figure 2 and Figure 3 As shown, further, the end of the first plate 310 is provided with a step 311 for placing the scraper part 200. The thickness T1 of the step 311 is smaller than the thickness T2 of the scraper part 200. The included angle of the step 311 is provided with a first clearance 312 for avoiding the corner 210. The first clearance 312 plays a role in protecting the corner 210 and avoids the phenomenon that the scraper part 200 on the step 311 will be damaged when subjected to force due to the corner not being cleared.

[0048] Furthermore, the support device 300 also includes a fastener 350 that passes through the limiting plate 340 and is screwed to the first plate 310. The fastener 350 rotates and translates along its axis to lock the limiting plate 320 onto the first plate 310. In this embodiment, the fastener 350 is preferably a bolt, which is screwed in and easy to disassemble and assemble, making it convenient to replace the damaged scraper part 200 in a timely manner.

[0049] Preferably, the angle formed by the intersection of the extension line of the first plate 310 and the horizontal diameter D1 of the glue-spreading wheel 100 is 100 to 170°, and in this embodiment, it is preferably 135°. At this angle, the contact area between the edge 210 of the glue-scraping part 200 on the first plate 310 and the glue-spreading wheel 100 is minimized, and the glue-scraping effect is optimal.

[0050] Preferably, the connecting plate 330 is arranged perpendicularly or obliquely to the first plate 310 and the second plate 320 respectively. In this embodiment, the included angle between the connecting plate 330 and the first plate 310 is equal to the included angle between the connecting plate 330 and the second plate 320.

[0051] Preferably, the connecting plate 330 is vertically arranged between the first plate 310 and the second plate 320, respectively, with the first plate 310 and the second plate 320 having the largest gap. When the first plate 310 is inclined relative to the horizontal diameter D1 of the glue-spreading wheel 100 and the length L of the second plate 320 remains unchanged, the installation height between the glue-scraping part 200 and the base 400 can be raised, further expanding the installation space below the glue-spreading wheel 100.

[0052] Furthermore, a second clearance 313 is provided at the angle between the first plate 310 and the connecting plate 330 to avoid the corner of the limiting plate 340, thereby increasing the contact area between the limiting plate 340 and the first plate 310 and improving the firmness of the limiting plate 340 in limiting the glue scraping part 200.

[0053] Furthermore, the second plate 320 is provided with a connection port 321 for connecting with the base 400. In this embodiment, the connection port 321 is preferably a threaded hole. There are multiple threaded holes arranged in an array to improve the stability and firmness between the second plate 320 and the base 400.

[0054] In another embodiment, the connection port 321 can also be configured as an elongated waist-shaped hole through which a bolt can pass and move. The bolt passes through the elongated waist-shaped hole and is screwed to the base 400 for mounting the second plate 320 on the base 400, so that the bolt can move within the elongated waist-shaped hole and adjust the distance between the scraping part 200 and the glue-equalizing wheel 100.

[0055] Preferably, the first plate 310, the second plate 320 and the connecting plate 330 are integrally formed, which simplifies the processing, saves assembly time and reduces costs.

[0056] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications are also considered to be within the protection scope of this utility model.

Claims

1. A support device, characterized in that, This is applied to a spin coating system, which includes a spin coating wheel for rotating the belt to remove excess adhesive from the outlet, a scraper that slides against the spin coating wheel to scrape off the adhesive from the outer circumference of the spin coating wheel, a support device for mounting the scraper, and a base for mounting the support device. The support device includes: The first plate is inclined relative to the horizontal diameter of the coating roller; The second plate is used to be parallel to and offset from the first plate; A connecting plate is fixedly connected between the first plate and the second plate; A limiting plate is used to detachably connect with the first plate to press and limit the adhesive scraping part installed between the first plate and the limiting plate.

2. The support device according to claim 1, characterized in that, The first plate is provided with a step for placing the glue scraper.

3. The support device according to claim 2, characterized in that, The step is provided with a first clearance at the included angle to avoid the sharp corner of the adhesive scraper.

4. The support device according to claim 2, characterized in that, Includes a fastener that passes through the limiting plate and is screwed to the first plate, the fastener rotating and translating along its axis to lock the limiting plate onto the first plate.

5. The support device according to claim 1, characterized in that, The angle formed by the extension of the first plate and the horizontal diameter of the glue-spreading wheel is 100-170°.

6. The support device according to claim 1, characterized in that, The connecting plate is respectively positioned perpendicularly or at an angle to the first plate and the second plate.

7. The support device according to claim 6, characterized in that, A second clearance is provided at the angle between the first plate and the connecting plate to allow the corner of the limiting plate to be avoided.

8. The support device according to claim 1, characterized in that, The second plate is provided with a connection port for connecting to the base.

9. The support device according to claim 8, characterized in that, The first plate, the connecting plate, and the second plate are integrally formed.

10. A spin coating system, characterized in that, The device includes a coating wheel for rotating the belt to remove excess adhesive from the outlet, a scraper for removing adhesive from the outer circumference of the coating wheel, a base, and a solution tank containing a cleaning solution. The cleaning solution in the solution tank is used to dilute the adhesive adhering to the outer circumference of the coating wheel. It also includes a support device as described in any one of claims 1 to 9, wherein the scraper is mounted on the support device, and the support device is mounted on the base.

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