Vacuum cavity cleaning and sealing assembly

Abstract

The utility model discloses a vacuum cavity cleaning and sealing assembly which comprises a cavity body, two inserting grooves are formed in the top side of the cavity body, an installation adjusting assembly is arranged between the two inserting grooves, a connecting box is arranged below the installation adjusting assembly, a connecting plate is fixedly installed in the connecting box, and a second motor is fixedly installed on the top side of the connecting plate. A connecting block and an adjusting block in the installation adjusting assembly are stably connected through cooperation of an inserting plate and an inserting groove, a threaded column, a threaded hole and a threaded groove, the distance between the connecting block and the adjusting block can be adjusted, it is ensured that equipment can be installed on cavities of different sizes, and in the cleaning assembly, a second motor drives a gear, so that a first toothed plate and a second toothed plate meshed with the gear move in the opposite directions; the cleaning tool can drive the cleaning plates to adjust the distance to adapt to cavities with different inner diameters, meanwhile, the cleaning plates with different lengths can be replaced, the cleaning requirements of the cavities with different depths are met, and the problem that a traditional cleaning tool with the fixed size cannot cover the different cavities is solved in an all-around mode.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum cavity technical field especially relates to a vacuum cavity cleaning and sealing assembly. BACKGROUND

[0002] In the modern industrial production and scientific research field, the application of vacuum cavity is extremely wide, involves semiconductor manufacturing, material science, aerospace and other multiple key industries, and the cleanliness and sealing property of the internal environment play a decisive role in production process and experimental results, however, the existing vacuum cavity cleaning and sealing assembly has many problems when dealing with different size cavities.

[0003] The traditional vacuum cavity cleaning device adopts fixed size cleaning plate or cleaning brush, when facing the inner walls of vacuum cavities with different sizes, these tools cannot flexibly adjust the cleaning range, and when using fixed size cleaning tools, for smaller cavities, the cleaning assembly may not reach all corners, leading to incomplete cleaning, and for larger cavities, the cleaning tool cannot cover the entire inner wall, so that impurities remain in the cavity, affecting the purity of the vacuum environment in the chip manufacturing process, and thus reducing the chip yield, therefore, a vacuum cavity cleaning and sealing assembly is proposed to solve the above problems. SUMMARY

[0004] In view of the deficiencies of the prior art, the utility model provides a vacuum cavity cleaning and sealing assembly for solving the problems in the background art.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A vacuum cavity cleaning and sealing assembly, comprising a cavity body, two insertion slots are formed on the top side of the cavity body, an installation and adjustment assembly is arranged between the two insertion slots, a connecting box is arranged below the installation and adjustment assembly, a connecting plate is fixedly installed in the connecting box, a second motor is fixedly installed on the top side of the connecting plate, a gear is rotatably penetrated through the connecting plate and fixedly sleeved with the output end of the second motor, a first toothed plate and a second toothed plate are arranged on the outer side of the gear, the first toothed plate and the second toothed plate are engaged with the gear, cleaning assemblies are arranged on the sides away from each other of the first toothed plate and the second toothed plate, and a driving assembly is arranged between the connecting box and the installation and adjustment assembly.

[0007] Preferably, the installation and adjustment assembly comprises two insertion plates inserted in the two insertion slots, a connecting block and an adjustment block are fixedly connected to the top sides of the two insertion plates respectively, a insertion hole is formed in one side of the connecting block, and the adjustment block is inserted into the insertion hole formed in the connecting block.

[0008] Preferably, the top side of the connecting block and the top side of the adjusting block are respectively provided with a threaded hole and a plurality of threaded slots, a threaded column is threadedly installed in the threaded hole, and the other end of the threaded column is threadedly installed into the threaded slot aligned with the threaded hole.

[0009] Preferably, the cleaning assembly comprises installation slots formed in the top sides of the first toothed plate and the second toothed plate, installation blocks inserted into the two installation slots, cleaning plates fixedly connected to the sides of the two installation blocks away from each other, and the sides of the two cleaning plates away from each other being in abutment with the inner wall of the cavity body.

[0010] Preferably, the driving assembly comprises a connecting frame fixedly connected to the bottom side of the connecting block, a first motor fixedly installed on the inner wall of the bottom side of the connecting frame, and an output end of the first motor rotatingly penetrating through the connecting frame and fixedly connected to the top side of the connecting box.

[0011] Preferably, the connecting box is provided with sliding holes on the two sides, guide blocks slidingly installed in the two sliding holes, the two guide blocks being T-shaped, and the sides of the two guide blocks close to each other being fixedly connected to the sides of the first toothed plate and the second toothed plate away from each other.

[0012] Preferably, the cavity body is provided with a vacuum pump on the outer side and a cover plate on the top side.

[0013] Compared with the prior art, the utility model has the advantages that:

[0014] 1. The connecting block and the adjusting block in the installation and adjusting assembly are stably connected through the cooperation of the plugboard and the plug slot, the threaded column, the threaded hole and the threaded slot, and the distance between the two can be adjusted, so that the equipment can be installed on different size cavities, in the cleaning assembly, the second motor drives the gear to move in the opposite direction with the first toothed plate and the second toothed plate engaged, drives the cleaning plate to adjust the distance, can adapt to different inner diameter cavities, at the same time, different length cleaning plates can be replaced, meet the cleaning needs of different depth cavities, and the problem that the traditional fixed size cleaning tool cannot cover different cavities is solved in all directions.

[0015] 2. The cleaning plate can be synchronously rotated by the rotation of the connecting box driven by the first motor, so that the inner wall of the cavity body can be cleaned comprehensively and carefully, and the guide block can provide stable guidance and limiting when the first toothed plate and the second toothed plate move, so that the first toothed plate and the second toothed plate are always engaged with the gear, and the cleaning plate is stably adjusted. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a three-dimensional schematic view of the structure of the utility model;

[0017] Figure 2 It is a sectional view schematic view of the structure of the utility model;

[0018] Figure 3 Part of the structure of the utility model connection block parts schematic diagram;

[0019] Figure 4 Part of the structure of the utility model gear parts schematic diagram.

[0020] In the figure: 1, cavity body; 2, cover plate; 3, vacuum pump; 4, slot; 5, connecting block; 6, adjusting block; 7, plugboard; 8, threaded hole; 9, threaded groove; 10, threaded column; 11, connecting frame; 12, first motor; 13, connecting box; 14, connecting plate; 15, second motor; 16, gear; 17, first toothed plate; 18, second toothed plate; 19, mounting groove; 20, mounting block; 21, cleaning plate; 22, guide block. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0022] Refer to Figures 1-4The utility model provides a vacuum cavity cleaning seal assembly, including cavity body 1, the top side of cavity body 1 is equipped with two slots 4, be provided with installation adjustment assembly between two slots 4, the lower portion of installation adjustment assembly is provided with connecting box 13, connecting plate 14 is fixedly installed in connecting box 13, the top side of connecting plate 14 is fixedly installed with second motor 15, the output of second motor 15 rotates and penetrates connecting plate 14 and fixedly covers the gear 16 of tooth, the outside of gear 16 is provided with first toothed plate 17 and second toothed plate 18 respectively, first toothed plate 17 and second toothed plate 18 all are engaged with gear 16, first toothed plate 17 and second toothed plate 18 are provided with cleaning assembly on the side away from each other, drive assembly is provided between connecting box 13 and installation adjustment assembly, by being provided with second motor 15, after the completion fixed of connecting block 5 and adjustment block 6, opens second motor 15, its operation drives gear 16 clockwise rotation, because first toothed plate 17 and second toothed plate 18 all are engaged with gear 16, when gear 16 clockwise rotation, first toothed plate 17 and second toothed plate 18 will along opposite direction away from each other, and then synchronously drive two cleaning plates 21 connected with each other away from, when the side of two cleaning plates 21 away from each other all just with the inner wall of cavity body 1 contact, second motor 15 stops operation, at this time, start first motor 12, first motor 12 operation drives connecting box 13 rotation, and then drives two cleaning plates 21 to do rotary motion, the inner wall of cavity body 1 is cleaned, in this way, cleaning plate 21 can overall and carefully cover the every corner of cavity body 1, ensure that any tiny impurity and stain on the inner wall can be effectively removed, this design not only greatly improves the cleaning efficiency, and compared with traditional cleaning mode, significantly reduce the demand of manual intervention, maximum reduce the risk of introducing new impurity due to improper human operation.

[0023] Specifically, the mounting adjusting assembly includes two plug-in plates 7, the top side of each of the two plug-in plates 7 is fixedly connected with a connecting block 5 and an adjusting block 6, one side of the connecting block 5 is provided with a plug hole, the adjusting block 6 is plugged into the plug hole of the connecting block 5, the top side of the connecting block 5 and the top side of the adjusting block 6 are respectively provided with a threaded hole 8 and a plurality of threaded slots 9, a threaded column 10 is threadedly installed in the threaded hole 8, the other end of the threaded column 10 is threadedly installed into the threaded slot 9 aligned with the threaded hole 8, by providing the connecting block 5 and the adjusting block 6, during installation, the adjusting block 6 is first plugged into the plug hole of the connecting block 5, when the plug-in plates 7 fixedly connected to the bottom side of the connecting block 5 and the adjusting block 6 are moved to directly above the two plug-in slots 4, the two plug-in plates 7 are respectively plugged into the two plug-in slots 4, so that the installation of the connecting block 5 and the adjusting block 6 is initially completed, then the threaded column 10 is threadedly installed into the threaded hole 8 of the connecting block 5, the threaded column 10 is continuously rotated so that the other end thereof is threadedly installed into the threaded slot 9 aligned therewith, thereby realizing the stable and fixed connection between the connecting block 5 and the adjusting block 6, this installation method is not only simple to operate, even non-professionals can quickly get started, but also has high structural stability after connection, can effectively resist the vibration and impact generated during equipment operation, ensures long-term stable operation of the equipment under various complex working conditions, greatly reduces the risk of failure and maintenance cost caused by loose connection.

[0024] Specifically, the cleaning assembly includes that the top side of the first toothed plate 17 and the second toothed plate 18 is provided with a mounting slot 19, the two mounting slots 19 are respectively plugged into the mounting block 20, the side away from each other of the two mounting blocks 20 is fixedly connected with the cleaning plate 21, the side away from each other of the two cleaning plates 21 is matched with the inner wall of the cavity body 1, by providing the mounting block 20, and because the two cleaning plates 21 are respectively plugged into the two mounting slots 19 through the two mounting blocks 20, when cleaning the cavity body 1 with different depths, the cleaning plate 21 with a corresponding length can be replaced, so that better cleaning can be performed, whether it is a shallow cavity or a special cavity with a large depth, the most appropriate length of the cleaning plate 21 can be matched, in actual operation, the staff only needs to simply pull out the original combination of the mounting block 20 and the cleaning plate 21, and insert a new combination with an appropriate length, so that the replacement can be quickly completed, greatly saving the time and cost of redesigning or reforming the cleaning equipment due to the difference in cavity depth, ensuring efficient and accurate cleaning operation in various application scenarios.

[0025] Specific, the drive assembly includes the bottom side of the connecting block 5 is fixedly connected with the connecting frame 11, the bottom side of the connecting frame 11 is fixedly installed with the first motor 12, the output end of the first motor 12 is rotatably penetrated through the connecting frame 11 and is fixedly connected with the top side of the connecting box 13, by being provided with the first motor 12, and because the output end of the first motor 12 is fixedly connected with the top side of the connecting box 13, when the two cleaning plates 21 are both attached to the inner wall of the cavity body 1, the first motor 12 can be started to drive the connecting box 13 to rotate, so that the two cleaning plates 21 are in rotary motion to clean the inner wall of the cavity body 1.

[0026] Specific, the connecting box 13 is provided with sliding holes on both sides, and the two sliding holes are slidably installed with guide blocks 22, the two guide blocks 22 are both T-shaped, and the sides of the two guide blocks 22 close to each other are fixedly connected with the sides of the first tooth plate 17 and the second tooth plate 18 away from each other, respectively, the outer side of the cavity body 1 is provided with a vacuum pump 3, and the top side of the cavity body 1 is provided with a cover plate 2, by being provided with the two guide blocks 22, the two guide blocks 22 can provide stable guiding and limiting effect when the first tooth plate 17 and the second tooth plate 18 are close to or away from each other, so as to ensure that the first tooth plate 17 and the second tooth plate 18 are always engaged with the gear 16.

[0027] The electrical components appearing in this document are all connected with the main controller and 220V mains of the outside world, and the main controller can be a conventional known device such as a computer.

[0028] In use: in the installation process, first, the adjusting block 6 is inserted into the insertion hole of the connecting block 5, when the two insertion plates 7 fixedly connected to the bottom sides of the connecting block 5 and the adjusting block 6 are moved to the top of the two insertion grooves 4, the two insertion plates 7 are respectively inserted into the two insertion grooves 4, so that the installation of the connecting block 5 and the adjusting block 6 is initially completed, then the threaded column 10 is screwed into the threaded hole 8 of the connecting block 5, and the threaded column 10 is continuously rotated to be screwed into the threaded groove 9 aligned with the threaded column 10, so that the stable fixed connection between the connecting block 5 and the adjusting block 6 is realized, after the fixing is completed, the second motor 15 is started, and the rotation of the gear 16 is driven clockwise, since the first tooth plate 17 and the second tooth plate 18 are engaged with the gear 16, when the gear 16 rotates clockwise, the first tooth plate 17 and the second tooth plate 18 will move away from each other in opposite directions, thereby synchronously driving the two cleaning plates 21 connected thereto to move away from each other, when the sides of the two cleaning plates 21 moving away from each other are in contact with the inner wall of the cavity body 1, the second motor 15 stops running, at this time, the first motor 12 is started, and the rotation of the connecting box 13 is driven by the operation of the first motor 12, thereby driving the two cleaning plates 21 to rotate, and the inner wall of the cavity body 1 is cleaned, and because the distance between the two cleaning plates 21 can be flexibly adjusted by the second motor 15, this makes the device can adapt to the cleaning requirements of the inner wall of the cavity body 1 of different sizes, in addition, the distance between the connecting block 5 and the adjusting block 6 can also be adjusted, which ensures that the cleaning device can be installed on the cavity body 1 of different sizes, greatly improving the versatility and applicability of the device.

[0029] It should be noted that, in this text, relational terms such as first and second and the like are used merely to distinguish one entity or action from another, without necessarily requiring or implying that there is any such actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof are intended to cover non-exclusive inclusions, so that a process, method, article, or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or inherent to such a process, method, article, or device.

[0030] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A vacuum chamber cleaning seal assembly comprising a chamber body (1), characterized in that, The top side of the cavity body (1) is provided with two insertion grooves (4), and a mounting and adjusting assembly is arranged between the two insertion grooves (4). A connecting box (13) is arranged below the mounting and adjusting assembly, and a connecting plate (14) is fixedly installed in the connecting box (13). A second motor (15) is fixedly installed on the top side of the connecting plate (14). The output end of the second motor (15) penetrates through the connecting plate (14) and is fixedly sleeved with a gear (16). The outer side of the gear (16) is respectively provided with a first toothed plate (17) and a second toothed plate (18). The first toothed plate (17) and the second toothed plate (18) are engaged with the gear (16). Cleaning assemblies are arranged on the sides away from each other of the first toothed plate (17) and the second toothed plate (18). A driving assembly is arranged between the connecting box (13) and the mounting and adjusting assembly.

2. A vacuum chamber cleaning seal assembly as claimed in claim 1, wherein, The mounting and adjusting assembly includes two insertion grooves (4) in which insertion plates (7) are inserted. The top sides of the two insertion plates (7) are fixedly connected with a connecting block (5) and an adjusting block (6), respectively. The connecting block (5) is provided with a insertion hole on one side. The adjusting block (6) is inserted into the insertion hole of the connecting block (5).

3. A vacuum chamber cleaning seal assembly as claimed in claim 2, wherein, The top side of the connecting block (5) and the top side of the adjusting block (6) are respectively provided with a threaded hole (8) and a plurality of threaded grooves (9). A threaded column (10) is threadedly installed in the threaded hole (8). The other end of the threaded column (10) is threadedly installed into a threaded groove (9) aligned with the threaded hole (8).

4. A vacuum chamber cleaning seal assembly as claimed in claim 1, wherein, The cleaning assembly includes that the top sides of the first toothed plate (17) and the second toothed plate (18) are provided with mounting grooves (19). Two mounting blocks (20) are inserted into the two mounting grooves (19). The sides away from each other of the two mounting blocks (20) are fixedly connected with cleaning plates (21). The sides away from each other of the two cleaning plates (21) are fitted with the inner wall of the cavity body (1).

5. A vacuum chamber cleaning seal assembly as claimed in claim 2, wherein, The driving assembly includes that the bottom side of the connecting block (5) is fixedly connected with a connecting frame (11). The bottom side inner wall of the connecting frame (11) is fixedly installed with a first motor (12). The output end of the first motor (12) penetrates through the connecting frame (11) and is fixedly connected with the top side of the connecting box (13).

6. A vacuum chamber cleaning seal assembly as claimed in claim 1, wherein, The two sides of the connecting box (13) are provided with sliding holes. Two guide blocks (22) are slidingly installed in the two sliding holes. The two guide blocks (22) are T-shaped. The sides close to each other of the two guide blocks (22) are fixedly connected with the sides away from each other of the first toothed plate (17) and the second toothed plate (18).

7. A vacuum chamber cleaning seal assembly as claimed in claim 1, wherein, The outer side of the cavity body (1) is provided with a vacuum pump (3). The top side of the cavity body (1) is provided with a cover plate (2).

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