Pipeline cleaning tool
By designing a pipe cleaning fixture, high-pressure water jets are used to flush away burrs, solving the problem of burr blockage inside semiconductor devices, achieving efficient cleaning and reducing the risk of blockage.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-04
- Publication Date
- 2026-03-24
AI Technical Summary
In semiconductor equipment, burrs can break off during processing and block internal channels, causing blockages in certain areas.
Design a pipe cleaning fixture, including a fixture body, an inlet pipe and an outlet pipe, to flush branch pipes and main channels with high-pressure water flow. By using fewer outlet pipes than branch pipes, burrs can be cleaned and removed.
Effectively removes burrs, reduces the number of burrs inside instruments, reduces the risk of blockage, improves cleaning efficiency, and reduces the probability of pipeline blockage.
Smart Images

Figure CN224025974U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of pipeline cleaning technology, and in particular to a pipeline cleaning tool. Background Technology
[0002] In the semiconductor industry, some instruments have evenly spaced branch pipes. All branch pipes connect to the main channel inside the instrument. During processing, burrs are generated at the intersection of the main channel and the branch pipes. At the same time, many burrs are also generated on the inner walls of the main channel and the branch pipes. Water or air may pass through the instrument. Under the action of water or air flow, the burrs are washed off and then enter the pipes inside the instrument. The burrs will block the pipes with smaller diameters inside the instrument, eventually causing blockage problems in some areas of the instrument. Utility Model Content
[0003] The purpose of this utility model is to provide a pipe cleaning tool that solves the problem of blockage caused by burrs falling off the tool under the existing technology.
[0004] To achieve this objective, the present invention adopts the following technical solution: The present invention provides a pipe cleaning fixture, including a fixture body, an inlet pipe on the upper side of the fixture body, an outlet pipe on the fixture body, the inlet pipe and the outlet pipe being connected, the outlet pipe being connected to a branch pipe of the instrument, the inlet pipe being connected to a water source both inside and outside, and the number of outlet pipes being less than the number of branch pipes.
[0005] Preferably, the tooling body has a receiving cavity, the water inlet pipe is connected to the receiving cavity, the water outlet pipe is connected to the receiving cavity, and three sets of the water outlet pipes are provided on the receiving cavity.
[0006] Preferably, the outlet edge of the water pipe is provided with a groove in the circumference, and a sealing ring is placed in the groove, the sealing ring abutting against the instrument.
[0007] Preferably, the tooling body is rectangular cube-shaped, with the water inlet pipe located at the top and the water outlet pipe located at the bottom of the tooling body.
[0008] Preferably, the lower side of the tooling body protrudes to form a limiting plate, the limiting plate includes two sets, the water outlet pipe is opened between the limiting plates, and the instrument is inserted into the gap between the limiting plates.
[0009] Preferably, the limiting plate has weight-reducing holes.
[0010] Preferably, one end of the receiving cavity is formed with a threaded hole, and a plug is screwed into the threaded hole.
[0011] Beneficial effects: When the water source is connected to the inlet pipe, the high-pressure water will flow through the inlet pipe to the outlet pipe, and then into the branch pipe of the instrument. The water will then flow along the branch pipe into the main channel. By flushing the main channel and branch pipes, burrs can be washed off. The burrs will then be discharged along the branch pipes of the other unconnected pipes of the instrument. The pipe cleaning tool can clean the burrs, ultimately reducing the number of burrs in the instrument, thereby reducing the problem of blockage in the instrument. Attached Figure Description
[0012] Figure 1 This is a schematic diagram of the main working body of the tooling of this utility model;
[0013] Figure 2 This is a cross-sectional view of the main working part of the tooling of this utility model.
[0014] In the diagram: 1. Tooling body; 11. Inlet pipe; 12. Outlet pipe; 13. Receiving cavity; 14. Groove; 15. Limiting plate; 151. Weight reduction hole; 16. Plug; 2. Branch pipe; 3. Main channel. Detailed Implementation
[0015] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.
[0016] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0017] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0018] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0019] In the current technology, semiconductor devices have different types of channels. During the processing, burrs are generated at the intersection of the main channel and the branch channel. Water and gas flow through the device, and these burrs can enter the device's pipeline circulation, causing blockages.
[0020] To solve the above problems, such as Figures 1 to 2 As shown, this utility model provides a pipe cleaning tool, including a tool body 1, an inlet pipe 11 on the upper side of the tool body 1, an outlet pipe 12 on the tool body 1, the inlet pipe 11 and the outlet pipe 12 are connected, the outlet pipe 12 is connected to the branch pipe 2 of the tool, the inlet pipe 11 is connected to a water source inside and outside, and the number of inlet pipes 11 is less than the number of branch pipes 2.
[0021] Since the number of outlet pipes 12 is less than the number of branch pipes 2, water flows into the inlet pipe 11 and then enters the branch pipe 2 along the outlet pipe 12, flushing the burrs in the branch pipe 2 and the main channel 3. After the burrs are flushed off, they will flow along the water flow and eventually flow out along the branch pipe 2 of the unconnected pipe cleaning tool, thus cleaning the internal pipes of the instrument, reducing the number of burrs, and ultimately reducing the occurrence of pipe blockage problems. High-pressure airflow can also be sent into the inlet pipe 11 to dry the branch pipe 2 and the main channel 3 inside the instrument.
[0022] A receiving cavity 13 is formed within the main body 1 of the tooling. The inlet pipe 11 is connected to the receiving cavity 13, and the outlet pipe 12 is also connected to the receiving cavity 13. Three sets of outlet pipes 12 are provided on the receiving cavity 13. By providing three sets of outlet pipes 12, the water flow in the inlet pipe 11 can be divided into three branches and enter the branch pipes 2 simultaneously. After cleaning, the pipe cleaning tooling can be dragged to move to the remaining branch pipes 2, which can improve the cleaning efficiency and clean all three sets of branch pipes 2 at the same time.
[0023] A groove 14 is provided around the outlet edge of the water outlet pipe 12, and a sealing ring is placed in the groove 14. The sealing ring abuts against the instrument. Since the water pressure entering the inlet pipe 11 is relatively large, a sealing ring is installed around the water outlet pipe 12 to prevent water from leaking to the outside, to prevent the water pressure from dropping, and to ensure the effect of water flow in rinsing burrs.
[0024] The main body of the tooling is rectangular cube. The water inlet pipe 11 is located at the top, and the water outlet pipe 12 is located at the bottom of the main body of the tooling. The water inlet pipe 11 is on the top and the water outlet pipe 12 is on the bottom. The water flow can increase its own flow rate by gravity, which makes the cleaning effect of burrs better and improves the cleaning ability of the water flow.
[0025] The lower side of the main body of the tooling 1 has a protrusion forming a limiting plate 15. The limiting plate 15 includes two sets, with the water outlet pipe 12 opened between the limiting plates 15, and the instrument inserted into the gap between the limiting plates 15. After the pipe cleaning tool has finished cleaning the lower branch pipe 2, it is pushed to slide, so that the water outlet pipe 12 connects with the uncleaned branch pipe 2. The limiting plate 15 can fix the pipe cleaning tool, so that the pipe cleaning tool will not shake.
[0026] The limiting plate 15 has a weight reduction hole 151, which can reduce the weight of the pipe cleaning tool itself. At the same time, the weight reduction hole 151 makes it easier for cleaning personnel to move the pipe cleaning tool. The operator can hold the edge of the weight reduction hole 151, which makes it easy for the operator to move the tool.
[0027] One end of the receiving cavity 13 has a threaded hole, and a plug 16 is screwed into the threaded hole. The plug 16 can be unscrewed to facilitate cleaning the inside of the receiving cavity 13 and avoid blockage inside the pipe cleaning tool.
[0028] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A pipe cleaning tool, characterized in that, The tooling includes a main body (1), an inlet pipe (11) on the upper side of the main body (1), an outlet pipe (12) on the main body (1), the inlet pipe (11) and the outlet pipe (12) are connected, the outlet pipe (12) is connected to the branch pipe (2) of the instrument, the inlet pipe (11) is connected to a water source inside and outside, and the number of outlet pipes (12) is less than the number of branch pipes (2).
2. The pipeline cleaning fixture according to claim 1, characterized in that, The tooling body (1) has a receiving cavity (13) formed inside. The water inlet pipe (11) is connected to the receiving cavity (13), and the water outlet pipe (12) is connected to the receiving cavity (13). Three sets of the water outlet pipes (12) are provided on the receiving cavity (13).
3. The pipeline cleaning fixture according to claim 1, characterized in that, The outlet edge of the water pipe (12) is provided with a groove (14) in the circumferential direction, and a sealing ring is placed in the groove (14), which abuts against the instrument.
4. The pipeline cleaning fixture according to claim 1, characterized in that, The tooling body (1) is rectangular cube, the water inlet pipe (11) is located at the top, and the water outlet pipe (12) is located on the lower side of the tooling body (1).
5. The pipeline cleaning fixture according to claim 4, characterized in that, The tool body (1) has a protrusion on the lower side to form a limiting plate (15). The limiting plate (15) includes two sets. The water outlet pipe (12) is opened between the limiting plates (15). The instrument is inserted into the gap between the limiting plates (15).
6. The pipeline cleaning fixture according to claim 5, characterized in that, The limiting plate (15) has a weight reduction hole (151).
7. The pipeline cleaning fixture according to claim 2, characterized in that, One end of the receiving cavity (13) is formed with a threaded hole, and a plug (16) is screwed into the threaded hole.