Tray

Abstract

The embodiment of the utility model provides a tray, which comprises a tray main body, a tray main body, a tray main body, a tray main body and a tray main body, the tray main body is provided with an accommodating cavity, the accommodating cavity is used for accommodating leaked materials, and the materials comprise a liquid medium; the bearing plate is located at a cavity opening of the containing cavity, the first end face, away from the containing cavity, of the bearing plate is used for bearing the materials, the bearing plate is provided with a flow guide hole, and the flow guide hole is communicated with the containing cavity so that the materials can enter the containing cavity through the flow guide hole; the monitoring part is located in the containing cavity and used for monitoring the height of the materials in the containing cavity and sending out a monitoring signal; and the alarm is coupled with the monitoring part and is used for receiving the monitoring signal and triggering an alarm. By adopting the technical scheme, the probability that liquid leaks to the ground can be reduced.

Description

TECHNICAL FIELD

[0001] The embodiment of the present disclosure relates to the field of material transportation equipment, in particular to a tray. BACKGROUND

[0002] In the production, transportation, storage and flow process of semiconductor devices, the material is transported by a tray and a forklift. In the process of transporting the material by the tray, the material may leak to the ground.

[0003] Therefore, how to set the tray to reduce the probability of material leaking to the ground is a problem worth discussing. CONTENT OF THE UTILITY MODEL

[0004] Therefore, the embodiment of the present disclosure provides a tray which can reduce the probability of liquid leaking to the ground.

[0005] To solve the above technical problems, the embodiment of the present disclosure provides a tray, wherein the tray comprises:

[0006] A tray body has a containing cavity, and the containing cavity is used for containing leaked material, wherein the material comprises a liquid medium;

[0007] A bearing plate is located at the cavity opening of the containing cavity, and the first end face of the bearing plate away from the containing cavity is used for bearing the material, wherein the bearing plate has a flow guide hole, and the flow guide hole is in communication with the containing cavity, so that the material can enter the containing cavity through the flow guide hole;

[0008] A monitoring member is located in the containing cavity and is used for monitoring the height of the material in the containing cavity and sending a monitoring signal;

[0009] An alarm is coupled with the monitoring member and is used for receiving the monitoring signal and triggering an alarm.

[0010] Optionally, the tray further comprises:

[0011] A processor is coupled with the monitoring member and is used for receiving the monitoring signal and sending a notification to a mobile terminal.

[0012] Optionally, the first end face further has:

[0013] A flow guide groove, at least one end of the flow guide groove is connected with the flow guide hole, so that the material enters the flow guide hole through the flow guide groove.

[0014] Optionally, the bearing plate further has:

[0015] An assembly hole is provided through the bearing plate and is in communication with the containing cavity, and is used for moving the bearing hole.

[0016] Optionally, the tray body has:

[0017] A liquid discharge channel is provided through the tray body, and a first end of the liquid discharge channel is in communication with the accommodation cavity for outputting the material in the accommodation cavity to outside of the tray body.

[0018] Optionally, the tray further comprises:

[0019] A switch element is provided at a second end of the liquid discharge channel for controlling the conduction and the closing of the liquid discharge channel.

[0020] The accommodation cavity has a recess at a cavity opening, the bearing plate is embedded in the recess, and the bearing plate abuts against a bottom surface of the recess adjacent to a second end surface of the accommodation cavity.

[0021] Optionally, the tray body has:

[0022] A first support table is provided at a side wall of the accommodation cavity, a top surface of the first support table has a same height as a bottom surface of the recess, and the top surface of the first support table abuts against the second end surface of the bearing plate.

[0023] Optionally, the tray body has:

[0024] A second support table is provided with a gap from the side wall of the accommodation cavity, a top surface of the second support table has a same height as the bottom surface of the recess, and the top surface of the second support table abuts against the second end surface of the bearing plate.

[0025] Optionally, the tray further comprises:

[0026] A slope body is provided at an outer side surface of the tray body in a wedge structure, so that a container containing the material is moved from the ground to the first end surface of the bearing plate via a slope surface of the slope body, or the container containing the material is moved from the first end surface of the bearing plate to the ground via the slope surface of the slope body.

[0027] Compared with the prior art, the technical scheme of the embodiment of the present disclosure has the following advantages:

[0028] In the embodiments of the present disclosure, the tray body is capable of accommodating leaked materials by being provided with an accommodating cavity; the first end face of the bearing plate away from the accommodating cavity is used for bearing the materials; the bearing plate is provided with a flow guide hole in communication with the accommodating cavity, and the materials can enter the accommodating cavity through the flow guide hole; the monitoring member is located in the accommodating cavity and is capable of monitoring the height of the materials in the accommodating cavity and emitting a monitoring signal; the alarm is coupled with the monitoring member and is capable of receiving the monitoring signal and triggering an alarm to prompt the staff that the amount of the materials in the accommodating cavity reaches an alarm amount, thereby reducing the probability that the materials in the accommodating cavity overflow the accommodating cavity and the probability that the materials leak to the ground. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings needed to be used in the embodiments of the present disclosure or the prior art description will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present disclosure, and other drawings can be obtained by those skilled in the art without creative effort on the basis of these drawings.

[0030] Fig. 1 A perspective view of a tray in the embodiments of the present disclosure is shown;

[0031] Fig. 2 A top view of a bearing plate in the embodiments of the present disclosure is shown;

[0032] Fig. 3 A perspective view of a tray body in the embodiments of the present disclosure is shown.

[0033] Reference signs:

[0034] Tray body 100, accommodating cavity 110, embedded groove 120, first support table 130, second support table 140, monitoring member 150;

[0035] Bearing plate 200, flow guide hole 210, flow guide groove 220, assembly hole 230;

[0036] Slope body 300. DETAILED DESCRIPTION

[0037] As known from the background, in the production, transportation, storage and flow process of semiconductor devices, materials are involved in the consignment, and the consignment of materials is usually realized by the cooperation of a tray and a forklift. In the process of consigning materials by the tray, there is a problem of materials leaking to the ground.

[0038] For example, in a chemical polishing process, a polishing liquid is used. When the polishing liquid is shipped, there is a problem of leakage of the polishing liquid from the container due to the sealing of the container storing the polishing liquid, the degree of jolt during shipping, and the like. The leaked polishing liquid reaches the ground along the top surface of the tray, which easily causes a safety hazard.

[0039] In some embodiments, the tray can have a receiving cavity, and the top surface of the tray has a flow guide hole in communication with the receiving cavity. When the material leaks from the container, the leaked material can enter the receiving cavity through the flow guide hole, i.e., the receiving cavity can collect the leaked material, thereby reducing the probability of the material leaking to the ground and improving the safety during shipping.

[0040] However, when the amount of the leaked material exceeds the volume of the receiving cavity, the material still leaks to the ground, causing a safety hazard.

[0041] To solve the above technical problems, in the embodiments of the present disclosure, the tray body can accommodate the leaked material by being provided with a receiving cavity; the first end surface of the bearing plate away from the receiving cavity is used to bear the material, the bearing plate is provided with a flow guide hole in communication with the receiving cavity, and the material can enter the receiving cavity through the flow guide hole; the monitoring member is located in the receiving cavity and can monitor the height of the material in the receiving cavity and send a monitoring signal; the alarm is coupled with the monitoring member and can receive the monitoring signal and trigger an alarm to prompt the staff that the amount of the material in the receiving cavity reaches an alarm amount, thereby reducing the probability of the material in the receiving cavity overflowing the receiving cavity and the probability of the material leaking to the ground.

[0042] To make the above-mentioned purposes, features and benefits of the present disclosure more obvious and easy to understand, the specific embodiments of the present disclosure will be described in detail below with reference to the drawings.

[0043] Reference is made to Figs. 1-3 , wherein, Fig. 1 a perspective view of a tray in an embodiment of the present disclosure is shown, Fig. 2 a top view of a bearing plate in an embodiment of the present disclosure is shown, Fig. 3 a perspective view of a tray body in an embodiment of the present disclosure is shown.

[0044] Reference is made to Figs. 1-3 , the tray can include a tray body 100.

[0045] Specifically, the tray body 100 is a housing structure having a receiving cavity 110 for accommodating the leaked material, wherein the material can be a liquid medium, such as a polishing liquid.

[0046] In some embodiments, the tray can further include a bearing plate 200.

[0047] Specifically, the bearing plate 200 is located at the cavity opening of the accommodating cavity 110, and a first end surface of the bearing plate 200 is used to bear the material, wherein the first end surface of the bearing plate 200 is an end surface away from the accommodating cavity 110.

[0048] In some embodiments, the tray body 100 is provided with an embedding groove 120 on the side wall at the cavity opening of the accommodating cavity 110.

[0049] Specifically, the side wall size of the embedding groove 120 is greater than the side wall size of the accommodating cavity 110, the side wall size of the embedding groove 120 is matched with the outer edge size of the bearing plate 200, the bearing plate 200 is embedded in the embedding groove 120, and a second end surface of the bearing plate 200 is in contact with the bottom surface of the embedding groove 120, wherein the second end surface of the bearing plate 200 is an end surface adjacent to the accommodating cavity 110.

[0050] By providing the embedding groove 120, the probability that the bearing plate 200 moves relative to the embedding groove 120 in a direction perpendicular to the side wall of the embedding groove 120 can be reduced, and on the other hand, the groove bottom of the embedding groove 120 can provide support to the bearing plate 200.

[0051] In some embodiments, the tray body 100 can further have a support table.

[0052] Specifically, the height of the top surface of the support table is consistent with the height of the bottom surface of the embedding groove 120, and when the bearing plate 200 is embedded in the embedding groove 120, the top surface of the support table is in contact with the second end surface of the bearing plate 200, which can increase the contact area of the tray body 100 and the bearing plate 200, thereby reducing the stress on the unit contact area of the bearing plate 200, and thus reducing the probability of deformation or damage of the bearing plate 200 due to stress.

[0053] In some embodiments, the support table can have a first support table 130.

[0054] Specifically, the first support table 130 is located at the side wall of the accommodating cavity 110, and the height of the top surface of the first support table 130 is consistent with the height of the bottom surface of the embedding groove 120, and when the bearing plate 200 is embedded in the embedding groove 120, the top surface of the first support table 130 is in contact with the second end surface of the bearing plate 200.

[0055] Specifically, the first support platform 130 can increase the contact area of the tray body 100 with the bearing plate 200 near the side wall of the accommodating cavity 110, thereby reducing the probability of deformation or damage of the bearing plate 200 at the side wall of the accommodating cavity 110.

[0056] In some embodiments, the number of the first support platform 130 can be multiple. For example, four.

[0057] Specifically, multiple first support platforms 130 are distributed along the circumference of the accommodating cavity 110, for example, the first support platforms 130 are uniformly distributed along the circumference of the accommodating cavity 110, and the number of the first support platforms 130 can be even, and the first support platforms 130 are oppositely arranged in pairs.

[0058] In some embodiments, the first support platform 130 can be integrally arranged with the side wall of the accommodating cavity 110, and the first support platform 130 is a convex structure of the side wall of the accommodating cavity 110 in the direction parallel to the bearing plate 200. In this way, the structure can be simplified, and the preparation of the tray body 100 is facilitated.

[0059] Reference Fig. 3 The shape of the first support platform 130 includes a prism with a small upper part and a large lower part, and the side wall of the prism is an outwardly inclined side wall.

[0060] In some embodiments, the support platform can have a second support platform 140.

[0061] Specifically, the second support platform 140 has a gap with the side wall of the accommodating cavity 110, the height of the top surface of the second support platform 140 is consistent with the height of the bottom surface of the embedding groove 120, and when the bearing plate 200 is embedded in the embedding groove 120, the top surface of the second support platform 140 is in contact with the second end surface of the bearing plate 200.

[0062] Specifically, the second support platform 140 can increase the contact area of the tray body 100 with the bearing plate 200 at the position away from the side wall of the accommodating cavity 110, thereby reducing the probability of deformation or damage of the bearing plate 200 at the position away from the side wall of the accommodating cavity 110.

[0063] In some embodiments, the number of the second support platform 140 can be multiple. For example, four.

[0064] Specifically, multiple second support platforms 140 are symmetrically arranged on the bottom surface of the accommodating cavity 110 with the central axis of the accommodating cavity 110 as the axis.

[0065] In some embodiments, the tray has a drain channel (not shown in the figures) and a switch member (not shown in the figures).

[0066] Specifically, a first end of the drain channel is in communication with the accommodation cavity 110 for outputting the leaked material collected in the accommodation cavity 110 to outside of the tray body 100, and a second end of the drain channel is provided with the switch member for controlling the conduction and the closing of the drain channel.

[0067] In some embodiments, the first end of the drain channel is located on a bottom surface of the accommodation cavity 110, and the height of the first end of the drain channel is less than or equal to the lowest height of the bottom surface of the accommodation cavity 110, the second end of the drain channel is located on an outer side wall of the tray body 100, and the height of the first end of the drain channel is higher than the height of the second end of the drain channel. In this way, the discharge rate of the material in the accommodation cavity 110 can be improved.

[0068] In some embodiments, the first end of the drain channel is located on a side wall of the accommodation cavity 110 close to the bottom surface of the accommodation cavity 110, and the second end of the drain channel is located on the outer side wall of the tray body 100, and the height of the first end of the drain channel is higher than or equal to the height of the second end of the drain channel.

[0069] By locating the second end of the drain channel on the outer side wall of the tray body 100, the switch member is also located on the outer side wall of the tray body 100, so that the switch member can be directly exposed within the horizontal visual angle, facilitating subsequent manual operation of the switch member.

[0070] In some embodiments, the switch member can be one of a plug or a faucet.

[0071] In some embodiments, the number of drain channels can be multiple, for example, four.

[0072] In some embodiments, the tray can further include a monitoring member 150.

[0073] Specifically, the monitoring member 150 is arranged in the accommodation cavity 110, and the monitoring member 150 can be a liquid sensor for monitoring the height of the material collected in the accommodation cavity 110.

[0074] In some embodiments, the monitoring member 150 can be a capacitive sensor or a photoelectric liquid level sensor, and the monitoring member 150 can be fixedly arranged on the side wall of the accommodation cavity 110. The distance between the monitoring member 150 and the bottom surface of the accommodation cavity 110 is a preset height, and when the height of the material exceeds the preset height and submerges the monitoring member 150, the monitoring member 150 sends a monitoring signal.

[0075] For example, the monitoring member 150 can be an ultrasonic liquid level sensor, the monitoring member 150 is fixedly arranged on the second end surface of the bearing plate 200, the distance between the monitoring member 150 and the top surface of the material is a preset distance, when the distance between the monitoring member 150 and the top surface of the material is less than the preset distance, the monitoring member 150 sends a monitoring signal.

[0076] In some embodiments, the number of monitoring members 150 can be multiple, for example, four.

[0077] Specifically, the heights of the multiple monitoring members 150 are consistent, and the multiple monitoring members 150 are uniformly distributed along the circumference of the tray. In this way, the inclination of the tray can be determined according to the monitoring results of the multiple monitoring members 150.

[0078] In some embodiments, the tray can further include an alarm (not shown in the figure).

[0079] Specifically, the alarm can be coupled with the monitoring member 150, for example, electrically connected, the alarm is adapted to receive the monitoring signal and trigger an alarm to prompt the staff that the amount of the material in the accommodation cavity 110 reaches an alarm amount, and the infusion channel needs to be immediately turned on to process the material in the accommodation cavity 110, thereby reducing the probability of the material in the accommodation cavity 110 overflowing out of the accommodation cavity 110.

[0080] In some embodiments, the alarm can be arranged on the tray. For example, the alarm can be arranged on the outer side wall of the tray body 100. For example, the alarm can be arranged on the second end surface of the bearing plate 200.

[0081] In some embodiments, the tray can further include a processor (not shown in the figure).

[0082] Specifically, the processor can be coupled with the monitoring member 150, for example, Bluetooth connection or wireless access technology (WiFi) connection, the processor is adapted to receive the monitoring signal and send a notification to a mobile terminal such as a mobile phone to prompt the staff that the amount of the material in the accommodation cavity 110 reaches an alarm amount, and the infusion channel needs to be immediately turned on to process the material in the accommodation cavity 110, thereby reducing the probability of the material in the accommodation cavity 110 overflowing out of the accommodation cavity 110.

[0083] In some embodiments, the processor can be arranged on the outer side wall of the tray.

[0084] In some embodiments, the processor can be a central processing unit (CPU), a microprocessor, a field programmable gate array (FPGA), or the like.

[0085] In some embodiments, the bearing plate 200 can have a flow guide hole 210.

[0086] Specifically, the flow guide hole 210 penetrates the first end surface and the second end surface of the bearing plate 200 and communicates with the accommodation cavity 110. In this way, the material leaked onto the bearing plate 200 can enter the accommodation cavity 110 through the flow guide hole 210, achieving the collection of the material.

[0087] In some embodiments, the number of flow guide holes 210 is multiple.

[0088] Specifically, multiple flow guide holes 210 are arrayed on the first end surface of the bearing plate 200, which can increase the amount of material leaked onto the bearing plate 200 entering the accommodation cavity 110 through the flow guide hole 210, thereby reducing the probability of the material directly leaking to the ground.

[0089] In some embodiments, the bearing plate 200 can also have a flow guide groove 220.

[0090] Specifically, at least one end of the flow guide groove 220 is directly or indirectly connected with the flow guide hole 210, and the material leaked onto the bearing plate 200 can enter the flow guide hole 210 through the flow guide groove 220.

[0091] Reference Fig. 2 The outermost flow guide groove 220 on the first end surface surrounds all flow guide holes 210.

[0092] In some embodiments, the bearing plate 200 can also have an assembly hole 230.

[0093] Specifically, the assembly hole 230 penetrates the first end surface and the second end surface of the bearing plate 200 and communicates with the accommodation cavity 110, and the size of the assembly hole 230 is greater than that of the flow guide hole 210. On the one hand, the material leaked onto the bearing plate 200 can enter the accommodation cavity 110 through the assembly hole 230, achieving the collection of the material; on the other hand, when it is necessary to disassemble the bearing plate 200, the worker can move the bearing plate 200 through the assembly hole 230.

[0094] In some embodiments, the number of bearing plates 200 can be multiple. For example, two.

[0095] Specifically, when one of the plurality of bearing plates 200 is damaged, only the damaged bearing plate 200 can be replaced, thereby improving the reuse rate of the bearing plate 200 and reducing the use cost of the tray.

[0096] In some embodiments, the tray can further include a slope body 300.

[0097] Specifically, the slope body 300 is a wedge-shaped structure arranged on the outer side of the tray body 100, and is configured to accommodate the container of the material to move from the ground to the first end surface of the bearing plate 200 through the slope surface of the slope body 300, or to accommodate the container of the material to move from the first end surface of the bearing plate 200 to the ground through the slope surface of the slope body 300.

[0098] In some embodiments, the slope body 300 can be integrally arranged with the tray body 100 or independently arranged with the tray body 100.

[0099] It can be understood that, in the description of the present application, the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0100] It can be understood that the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0101] It can be understood that, in the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood in a broad sense, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0102] It can be understood that, in the present application, unless otherwise explicitly specified and limited, a first feature is "on" or "under" a second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "over", "above" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the first feature is higher in horizontal height than the second feature. The first feature "under", "below" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the first feature is lower in horizontal height than the second feature.

[0103] It can be understood that, when an element is referred to as being "fixed" or "set" on another element, it can be directly on the other element or there can be an intermediate element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there can be an intermediate element.

[0104] It can be understood that, in the present application, the term "and / or" is only a description of the association relationship of the associated objects, and indicates that there can be three relationships, for example, A and / or B can indicate that A exists alone, A and B exist together, and B exists alone. In addition, the character " / " in the present application indicates that the associated objects before and after the character " / " are in an "or" relationship.

[0105] It can be understood that the above describes a plurality of embodiment schemes provided by the embodiments of the present disclosure, and each optional mode introduced by each embodiment scheme can be combined, cross-referenced in the case of no conflict, thereby extending a plurality of possible embodiment schemes, which can be considered as disclosed and disclosed embodiment schemes of the present disclosure.

[0106] Although the embodiments of the present disclosure are disclosed as above, the present disclosure is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure, and therefore the protection scope of the present disclosure should be subject to the scope defined by the claims.

Claims

1. A tray, characterized in that, include: The tray body has a receiving cavity for receiving leaked material, wherein the material includes a liquid medium; The cavity opening has a groove; The tray body has a first support platform, which is located on the side wall of the receiving cavity. The height of the top surface of the first support platform is the same as the height of the bottom surface of the groove. The shape of the first support platform includes: a prism that is smaller at the top and larger at the bottom, and the side wall of the prism is an outwardly inclined side wall. A support plate is located at the opening of the accommodating cavity. The first end face of the support plate away from the accommodating cavity is used to support the material. The support plate has a guide hole that communicates with the accommodating cavity so that the material can enter the accommodating cavity through the guide hole. A monitoring device, located within the accommodating cavity, is used to monitor the height of the material within the accommodating cavity and to emit a monitoring signal; An alarm, coupled to the monitoring device, is used to receive the monitoring signal and trigger an alarm; The guide groove on the first end face is connected at least one end to the guide hole so that the material enters the guide hole through the guide groove. The outermost guide groove on the first end face surrounds all the guide holes. An assembly hole is located on the support plate, the assembly hole passes through the support plate and communicates with the receiving cavity, and is used to move the support plate; The size of the assembly hole is larger than the size of the guide hole.

2. The pallet according to claim 1, characterized in that, Also includes: A processor, coupled to the monitoring device, is used to receive the monitoring signal and send a notification to the mobile terminal.

3. The tray according to claim 1, characterized in that, The tray body has: A drain channel passes through the tray body, and the first end of the drain channel is connected to the receiving cavity, for discharging the material in the receiving cavity to the outside of the tray body.

4. The tray according to claim 3, characterized in that, Also includes: A switching element is disposed at the second end of the drainage channel and is used to control the opening and closing of the drainage channel.

5. The pallet according to claim 1, characterized in that, The support plate is embedded in the groove, and the second end face of the support plate adjacent to the accommodating cavity abuts against the bottom surface of the groove.

6. The pallet according to claim 1, characterized in that, The top surface of the first support platform abuts against the second end face of the bearing plate.

7. The tray according to claim 1, characterized in that, The tray body has: The second support platform has a gap with the side wall of the accommodating cavity. The height of the top surface of the second support platform is the same as the height of the bottom surface of the groove. The top surface of the second support platform abuts against the second end face of the bearing plate.

8. The pallet according to claim 1, characterized in that, Also includes: The slope, which is a wedge-shaped structure, is disposed on the outer side of the pallet body so that the container holding the material can move from the ground through the slope surface of the slope to the first end face of the support plate, or the container holding the material can move from the first end face of the support plate through the slope surface of the slope to the ground.

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