Hearth target supply device of RPD equipment

Abstract

The utility model discloses a target supply device for a hearth of RPD equipment. The hearth is provided with a vacuum chamber; the target supplying device comprises a conveying mechanism, at least one target placing area is arranged on each of the two sides of the conveying mechanism, and a carrier for placing a target material is arranged in the conveying mechanism in a sliding mode; the conveying mechanism is provided with at least one target supply mechanism in the sliding direction of the conveying mechanism, each target supply mechanism corresponds to the target inlet of the corresponding vacuum cavity, and the target supply mechanisms are used for feeding the target materials into the vacuum cavities through the target inlets; and the target ejecting mechanisms are installed below the target supplying mechanisms in a matched mode, and the target ejecting mechanisms are used for ejecting the target materials on the carriers into the corresponding target supplying mechanisms. Therefore, the target feeding difficulty can be reduced, and the target feeding speed of the target material is improved; and moreover, the exposure time of the target material in the air can be shortened, and the normal use of the target material is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to solar photovoltaic coating technology field especially relates to a RPD equipment hearth target supply device. BACKGROUND

[0002] The RPD (reactive plasma deposition) coating equipment can prepare the conductive film with higher quality and better performance due to its working principle, and is a newly emerging thin film deposition equipment. The RPD coating principle can be briefly described as follows: the target surface is bombarded by a plasma beam, and in a vacuum environment, the sublimated target particles react with the reaction gas in the plasma area to form the required prepared thin film.

[0003] The hearth is the main process chamber of the RPD equipment, and the target material supply position of the hearth of the current RPD coating equipment is at the bottom of the hearth due to its reaction principle. The target ingot (i.e. target material) is a necessary consumable for the RPD coating equipment, and needs to be supplied in time during the RPD equipment coating process.

[0004] However, the production capacity of the RPD equipment is small in the current industry use stage, and although the manual hearth target supply can meet the equipment use demand, there are still problems such as narrow space at the target position at the bottom of the hearth and difficulty in manual target supply. It is more difficult to manually supply the target for the multi-hearth RPD equipment, and there is a certain risk for manual target supply at the bottom of the hearth during the equipment operation process. In addition, due to the characteristics of some target materials, the target material should not be exposed to air for a long time, and the target material needs to be quickly sent into the hearth feeding turntable after being taken out, but because the space at the target position is limited, the manual target operation is not convenient, and the target speed is too slow, which can easily cause the target material to absorb moisture in the air and affect the use of the target material. UTILITY MODEL CONTENTS

[0005] The utility model provides a kind of RPD equipment hearth target supply device, to solve the problem of slow target speed and difficult target in prior art RPD equipment hearth.

[0006] The technical scheme of the utility model is a kind of RPD equipment hearth target supply device, and the hearth is provided with a vacuum chamber;The target supply device comprises:

[0007] A transmission mechanism is provided on both sides of the transmission mechanism at least one target area, and a carrier for placing target material is slidably arranged in the transmission mechanism;

[0008] A target supply mechanism is provided on the transmission mechanism along its sliding direction, and each target supply mechanism is correspondingly connected to the target inlet of the vacuum chamber, and the target supply mechanism is used to send the target material into the vacuum chamber through the target inlet;

[0009] A top target mechanism is matched and installed below each of the target supply mechanisms, and is used to push the target material on the carrier into the corresponding target supply mechanism.

[0010] Further, the target supply mechanism comprises a first base provided with a sealed chamber, a target supply turntable is rotationally connected in the sealed chamber, and a plurality of limiting through holes for placing the target material are arranged along the circumferential direction of the target supply turntable.

[0011] The bottom of the sealed chamber is matched with a bottom disc, the top lifting end of the top target mechanism is matched with a first through hole matched with the limiting through hole of the target supply turntable, and a first target feeding channel is matched between the first through hole and the top lifting end of the top target mechanism.

[0012] Further, a first plug valve is arranged in the first target feeding channel, and the first plug valve is used to isolate external air from entering the sealed chamber.

[0013] Further, a second target feeding channel is further arranged above the target supply turntable, and the second target feeding channel is used to transport the target material in the target supply turntable into the vacuum chamber.

[0014] Further, a second plug valve is arranged in the second target feeding channel, and the second plug valve is used to isolate the gas in the sealed chamber from flowing into the vacuum chamber.

[0015] Further, the top target mechanism comprises a second base, a lifting motor is arranged on the second base, a lifting end of the lifting motor is connected with a top rod, and the top rod is used to lift the target material and is matched to enter the target supply mechanism.

[0016] Further, the top target mechanism further comprises guide rails vertically distributed along the second base, and a sliding block is slidingly connected to the guide rails, and the sliding block is respectively connected with the lifting end of the lifting motor and the top rod.

[0017] Further, a plurality of storage spaces for accommodating the target material are arranged on the top of the carrier along the length direction of the carrier, a second through hole is arranged at the bottom of the storage space, the size of the second through hole is smaller than the size of the target material and larger than the size of the top rod.

[0018] Further, the opening of the top of the storage space is rounded.

[0019] Further, the transmission mechanism is matched with the target supply mechanism and is provided with a detachable protective cover assembly, and the protective cover assembly is used to prevent dust in the external air from polluting the target material on the carrier.

[0020] Further, the protective cover assembly comprises a mounting bracket, a first protective cover, and a second protective cover.

[0021] Each of the target supply mechanism is provided with a mounting bracket on the transmission mechanism on both sides of the sliding direction, the mounting bracket is provided with a mounting groove along the side of the sliding direction, and the adjacent two mounting grooves are matched with the first shield;

[0022] The top of the adjacent two mounting brackets is matched with the second shield, the second shield is matched with the third through hole for the upper part of the target supply mechanism to extend, and at least one fixing knob is arranged between the top of the adjacent two second shields and the corresponding second shield and the mounting bracket at the edge, and the fixing knob is used for fastening the top of the adjacent second shield and the corresponding second shield and the mounting bracket at the edge.

[0023] Further, at least one grating safety device is arranged in the transmission mechanism, and the grating safety device is used for detecting whether an object enters the transmission mechanism.

[0024] Compared with the prior art, the utility model has at least the following beneficial effects:

[0025] The worker only needs to place the carrier filled with target material on the sliding rail of the transmission mechanism in the target placing area, and then the transmission mechanism slides the carrier to below the target inlet of the corresponding target supply mechanism, and then the target supply mechanism pushes the target material on the carrier into the target supply mechanism, thereby reducing the target loading difficulty, improving the target loading speed of the target material, and improving the production efficiency and reliability of the entire RPD equipment; and the exposure time of the target material in the air can be reduced, thereby reducing the risk of the target material absorbing moisture and other pollutants in the air, and ensuring the normal use of the target material. BRIEF DESCRIPTION OF DRAWINGS

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the utility model belongs; the terms used in the specification of the application are only for the purpose of describing specific embodiments and are not intended to limit the utility model; the terms "include" and "have" in the specification and claims of the utility model and the above description of drawings are intended to cover non-exclusive inclusion. The terms "first", "second" and the like in the specification and claims of the utility model or the above description of drawings are used to distinguish different objects, not to describe a specific order.

[0027] In order to more clearly illustrate the technical scheme in the embodiments of the utility model, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating creative labor.

[0028] Figure 1 The utility model provides a front view of target device is provided for the utility model;

[0029] Figure 2 For Figure 1 The utility model provides a section view of carrier is provided for the utility model;

[0030] Figure 3 The utility model provides a left view of top target mechanism is provided for the utility model;

[0031] Figure 4 The utility model provides a plan view of partial internal structure of target device is provided for the utility model;

[0032] Figure 5 The utility model provides a section view of carrier is provided for the utility model;

[0033] Figure 6 The utility model provides a partial structure schematic view of target device is provided for the utility model;

[0034] Figure 7 For Figure 6 The utility model provides an enlarged schematic view of reference sign A in

[0035] Figure 8 For Figure 6 The utility model provides an enlarged schematic view of reference sign B in

[0036] Reference sign:

[0037] 10, transmission mechanism; 111, sliding rail; 112, execution motor;

[0038] 20, target releasing area; 211, emergency stop button;

[0039] 30, carrier; 311, storage space; 312, second through hole; 313, sliding piece;

[0040] 40, target providing mechanism; 411, first base; 412, closed chamber; 413, target providing turntable; 414, limiting through hole; 415, bottom disc; 416, first through hole; 417, first target inlet channel; 418, first plug-in valve; 419, second target inlet channel; 420, second plug-in valve; 421, rotation motor; 422, fourth through hole;

[0041] 50, top target mechanism; 511, second base; 512, lifting motor; 513, jacking rod; 514, guide rail; 515, sliding block; 516, buffer piece;

[0042] 60, shield assembly; 611, mounting bracket; 612, first shield; 613, second shield; 614, mounting groove; 615, third through hole; 616, fixing knob; 6161, rotating part; 6162, matching structure;

[0043] 70, grating security device;

[0044] 100, target material. DETAILED DESCRIPTION

[0045] In order to make the technical problems, technical schemes and beneficial effects of the present application more clear, the present application will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application. Therefore, the features described in the specification are used to explain one of the embodiments of the present application, but it does not mean that each embodiment of the present application must have the features described. In addition, it should be noted that the specification describes many features. Although some features can be combined together to show possible system designs, these features can also be used in other combinations that are not explicitly described. Therefore, unless otherwise stated, the described combination is not intended to limit.

[0046] The principles and structures of the present application will be described in detail below in combination with the drawings and embodiments.

[0047] In one embodiment, as shown in Figure 1 The present application provides an RPD equipment furnace target supply device, the furnace is provided with a vacuum chamber (not shown, the same below) ; the target supply device comprises:

[0048] A transmission mechanism 10, at least one target placing area 20 is provided on both sides of the transmission mechanism 10, and a carrier 30 for placing a target material 100 is slid in the transmission mechanism 10;

[0049] A target supply mechanism 40, the transmission mechanism 10 is provided with at least one target supply mechanism 40 along the sliding direction thereof, each target supply mechanism 40 corresponds to a target inlet of the vacuum chamber respectively, and the target supply mechanism 40 is used for sending the target material 100 into the vacuum chamber through the target inlet;

[0050] A target pushing mechanism 50, the target pushing mechanism 50 is matched and installed below each target supply mechanism 40, and the target pushing mechanism 50 is used for pushing the target material 100 on the carrier 30 into the corresponding target supply mechanism 40.

[0051] It can be understood that the transmission mechanism 10 is suspendedly installed at the bottom of the vacuum chamber of the furnace through the column of the vacuum chamber, and the transmission mechanism 10 comprises at least one sliding rail 111 for sliding the carrier 30, and each sliding rail 111 is matched with an executing motor 112 for driving the carrier 30 to slide on the sliding rail 111, so as to match the carrier 30 to slide below the target inlet of the corresponding target supply mechanism 40, so that the target material 100 on the carrier 30 is pushed into the target inlet by the target pushing mechanism 50, thereby delivering the target material 100 into the target supply mechanism 40.

[0052] In the embodiment, the target supply mechanism 40 is exemplified as four; of course, the target supply mechanism 40 can also be provided with two, three and more than four according to actual needs, thereby supplying targets for a corresponding number of furnaces, which is not limited herein.

[0053] In this way, the worker only needs to place the carrier 30 filled with the target material 100 on the sliding rail 111 of the transmission mechanism 10 in the target placing area 20, and then the transmission mechanism 10 slides the carrier 30 below the target inlet of the corresponding target supply mechanism 40, and then the target pushing mechanism 50 pushes the target material 100 on the carrier 30 into the target inlet, thereby delivering the target material 100 into the target supply mechanism 40, thereby reducing the difficulty of target loading, improving the target loading speed of the target material 100, and improving the production efficiency and reliability of the entire RPD equipment; and the exposure time of the target material 100 in the air can also be reduced, thereby reducing the risk of the target material 100 absorbing moisture and other pollutants in the air, and ensuring the normal use of the target material 100.

[0054] Of course, in some embodiments, the transmission mechanism 10 can not only adopt the transmission mode of linear sliding rails, but also adopt other transmission modes that can realize reciprocating linear motion, such as ball screw transmission mode, motor synchronous belt transmission mode, gear and rack transmission mode, etc., which is not limited herein.

[0055] Specifically, the target placing area 20 is horizontally extended from the bottom of the vacuum chamber to the outside of the furnace through a sliding rail 111 of sufficient length, so as to provide sufficient space for manual target placing and safety, thereby improving the safety and target placing speed of manual target placing.

[0056] In some embodiments, as shown in Figure 2 The target supply mechanism 40 comprises a first base 411 provided with a sealed chamber 412, a target supply turntable 413 is rotationally connected in the sealed chamber 412, and a plurality of limiting through holes 414 for placing the target material 100 are uniformly arranged along the circumferential direction of the target supply turntable 413.

[0057] The closed chamber 412 corresponds to the bottom of the target supply turntable 413 and is matched with a bottom plate 415. The bottom plate 415 corresponds to the lifting end of the top target mechanism 50 and is matched with a first through hole 416 corresponding to the limiting through hole 414. The first through hole 416 and the lifting end of the top target mechanism 50 are matched with a first target inlet channel 417.

[0058] It can be understood that the target supply turntable 413 can rotate in the closed chamber 412 through the corresponding rotating motor 421. The rotating end of the rotating motor 421 penetrates the bottom plate 415 and is connected with the target supply turntable 413. The bottom plate 415 does not rotate in the closed chamber 412. When the lifting end of the top target mechanism 50 lifts the target 100, it sequentially passes through the first target inlet channel 417, the first through hole 416 and the limiting through hole 414, so that only the target 100 is in the limiting through hole 414. Then, the target supply turntable 413 rotates to rotate the target 100 in the limiting through hole 416 corresponding to the first through hole 416 to the bottom plate 415, that is, the bottom of the target 100 contacts the bottom plate 415. Then, the top target mechanism 50 is lowered to the original position and lifts a new target 100 to the next limiting through hole 414.

[0059] Of course, in some embodiments, in order to prevent the target 100 from being damaged by friction with the bottom plate 415, the rotating speed of the target supply turntable 413 in the embodiment is relatively slow, and the bottom of the target 100 is polished, so as to effectively reduce the friction between the target 100 and the bottom plate 415 and ensure that the target 100 is not damaged.

[0060] In a further embodiment, in order to ensure the sealing of the closed chamber 412, as shown in Figure 2 A first plug valve 418 is arranged in the first target inlet channel 417. The first plug valve 418 is used to isolate external air from entering the closed chamber 412.

[0061] In some embodiments, as shown in Figure 2 The top of the target supply turntable 413 is further provided with a second target inlet channel 419. The second target inlet channel 419 is used to transport the target 100 in the target supply turntable 413 into the vacuum chamber.

[0062] It can be understood that the first target inlet channel 417 and the second target inlet channel 419 are not in the same vertical plane, but are located on opposite sides of the target supply turntable 413. The first target inlet channel 417 and the second target inlet channel 419 can also guide the target 100 to rise vertically to the target supply turntable 413 through the first target inlet channel 417 and to the vacuum chamber through the second target inlet channel 419.

[0063] Specifically, the chassis 415 also has a fourth through hole 422 corresponding to the second target inlet channel 419, and a lifting component is matched below the fourth through hole 422 (the structure of the lifting component is similar to that of the target supply mechanism 40). The lifting end of the lifting component is located directly below the fourth through hole 422 and does not extend into the fourth through hole 422. Then, when the target supply turntable 413 rotates the limiting through hole 414 on which the target material 100 is installed to be above the fourth through hole 422, the target material 100... If the target is 0, it will enter the fourth through hole 422 and be received by the lifting end of the lifting assembly. At this time, the target supply turntable 413 will stop rotating. Then, the lifting end of the lifting assembly will lift the target 100 through the fourth through hole 422, the limiting through hole 414, and the second target inlet channel 419 in sequence, and finally send it into the vacuum chamber for reaction. Then, the lifting end of the lifting assembly will descend to its original position, and the target supply turntable 413 will rotate again to send the next target 100 into the vacuum chamber, thus forming a cycle.

[0064] In a further embodiment, to ensure the airtightness of the vacuum chamber, such as Figure 2 As shown, a second insert valve 420 is provided in the second target inlet channel 419. The second insert valve 420 is used to prevent air in the sealed chamber 412 from flowing into the vacuum chamber.

[0065] In some embodiments, such as Figures 2-3 As shown, the target-lifting mechanism 50 includes: a second base 511, on which a lifting motor 512 is provided, and the lifting end of the lifting motor 512 is connected to a top rod 513, which is used to lift the target material 100 and match it into the target supply mechanism 40.

[0066] Thus, when the target-lifting mechanism 50 needs to lift the target material 100 into the limiting through hole 414 of the target supply turntable 413, and when the limiting through hole 414 without a target material 100 is aligned with the first through hole 416, the control unit of the RPD equipment will control the target supply turntable 413 to stop rotating and start the lifting motor 512. The lifting motor 512 drives the top rod 513 to lift, so that the top rod 513 drives the target material 100 through the first target inlet channel 417 and the first through hole 416 in sequence. Finally, only the target material 100 enters the limiting through hole 414. Then the control unit controls the target supply turntable 413 to rotate, aligning the next limiting through hole 414 without a target material 100 with the first through hole 416. Then the lifting motor 512 drives the target material 100 into the limiting through hole 414 through the top rod 513, thus forming a cycle.

[0067] The top of the push rod 513 is also provided with a buffer 516 to ensure that the push rod 513 will not damage the target 100 when it lifts the target 100.

[0068] In a further embodiment, to ensure the stability of the target lifting mechanism 50 during the lifting or lowering process, as shown in Figure 3 The target lifting mechanism 50 further comprises guide rails 514 vertically arranged along the second base 511, and sliding blocks 515 are slidably connected to the guide rails 514, and the sliding blocks 515 are respectively connected to the lifting ends of the lifting motors 512 and the top rods 513.

[0069] In this way, the lifting motors 512 can drive the sliding blocks 515 to lift or lower along the guide rails 514, and then the sliding blocks 515 drive the top rods 513 to lift or lower, so as to ensure that the target lifting mechanism 50 can smoothly move up and down along the predetermined track, avoid shaking and bumping, ensure the stability of the target 100 during lifting, and enhance the safety of the RPD equipment during operation.

[0070] It should be noted that the top rod 513 is preferably an L-shaped rod, so as to form a spaced arrangement between the top rod 513 and the second base 511, facilitating the lifting of the target 100 by the top rod 513.

[0071] In some embodiments, as shown in Figures 4-5 The top of the carrier 30 is provided with a plurality of storage spaces 311 for accommodating the targets 100 along the length direction thereof, and the bottom of each storage space 311 is provided with a second through hole 312, and the size of the second through hole 312 is smaller than the size of the target 100 and larger than the size of the top rod 513.

[0072] It can be understood that the shape of the second through hole 312 is preferably circular, the shape of the target 100 is preferably cylindrical, and the shape of the top rod 513 is preferably cylindrical. Therefore, the diameter of the second through hole 312 is smaller than the diameter of the target 100, which can prevent the target 100 from falling from the second through hole 312; and the diameter of the second through hole 312 is larger than the diameter of the top rod 513, which can ensure that the top rod 513 can pass through the second through hole 312 to lift the target 100 to the first target inlet channel 417.

[0073] Specifically, the carrier 30 is provided with a sliding member 313 in the direction in which the transverse displacement of the carrier 30 is limited, and the sliding member 313 can match the sliding of the slide rail 111, so that the part of the carrier 30 provided with the storage space 311 is suspended, so that the top rod 513 below can pass through the second through hole 312 to lift the target 100 to the first target inlet channel 417.

[0074] In a further embodiment, the opening of the top of the storage space 311 is rounded.

[0075] Thus, when all the limiting through holes 414 in the target supply disc 413 are filled with target materials 100, the control unit will control the lifting motor 512 to move downward so as to lower the target material 100 on the top rod 513 into the storage space 311 of the carrier 30. The opening at the top of the storage space 311 is rounded, which can prevent the target material 100 from breaking when it is lowered and accidentally collides with the storage space 311. If the target material 100 collides with a sharp edge, it will break. On the other hand, when the position of the corresponding storage space 311 of the carrier 30 deviates from the position of the first target feeding channel 417, the rounded corner can also have a certain centering and guiding effect on the lowered target material 100.

[0076] In some embodiments, in order to ensure that the target material 100 remains clean during the target feeding process, as shown in Figure 6 The transmission mechanism 10 is provided with a detachable protective cover assembly 60 corresponding to the target feeding mechanism 40, which is used to prevent dust in the external air from polluting the target material 100 on the carrier 30.

[0077] In a further embodiment, as shown in Figure 6 and 8 The protective cover assembly 60 includes a mounting bracket 611, a first cover 612, and a second cover 613.

[0078] Each of the target feeding mechanisms 40 is provided with a mounting bracket 611 on the transmission mechanism 10 on both sides along the sliding direction. The mounting bracket 611 is provided with a mounting groove 614 along the side of the sliding direction. The adjacent two mounting grooves 614 are matched with the first cover 612.

[0079] The top of the adjacent two mounting brackets 611 is matched with the second cover 613. The second cover 613 is provided with a third through hole 615 for the upper part of the target feeding mechanism 40 to protrude. The top of the adjacent two second covers 613 and the mounting bracket 611 at the edge and the corresponding second cover 613 are each provided with at least one fixing knob 616 for fastening the adjacent second covers 613 and the top of the mounting bracket 611 at the edge and the corresponding second cover 613.

[0080] Thus, when it is necessary to remove the second cover 613 to check the condition of the device inside, the maintenance worker can rotate the fixing knob 616 in the opposite direction to loosen the adjacent second covers 613, thereby facilitating disassembly.

[0081] It can be understood that, as Figure 7As shown, the fixed knob part 616 proposed in the embodiment includes a screw rod (not shown, the same below), the top of which is provided with a rotating part 6161 for easy holding and rotating, wherein the top of each mounting bracket 611 is matched with the screw rod inserted into the screw rod, and the screw rod is matched with the cooperation structure 6162 corresponding to the edge of the second cover 613. Then, the cooperation structure 6162 is matched and connected with the edge part of the adjacent second cover 613 after the adjacent mounting bracket 611 is installed with the second cover 613. When the user manually rotates the rotating part 6161 in the forward direction, the cooperation structure 6162 interacts with the edge part of the corresponding second cover 613 in the rotating process, which gradually presses the adjacent second cover 613 or the top of the mounting bracket 611 located at the edge and the corresponding second cover 613. When the rotating part 6161 rotates to the predetermined position, it reaches a locking state, thereby achieving the fastening effect.

[0082] In some embodiments, as shown in Figure 4 The transmission mechanism 10 is also provided with at least one grating safety device 70 for detecting whether an object enters the transmission mechanism 10.

[0083] Because there is a certain space between the transmission mechanism 10 and the target placing area 20, so that the carrier 30 of the target placing area 20 enters the slide rail 111 of the transmission mechanism 10, and the carrier 30 slides through the slide rail 111 at a high speed. If an object collides at this time, it will cause damage to the target material 100 on the carrier 30, and even damage to the entire transmission mechanism 10. Therefore, in order to avoid this situation, at least one grating safety device 70 is arranged on the transmission mechanism 10. If the grating safety device 70 detects that an external object enters the transmission mechanism 10 during the transmission of the target material 100 by the transmission mechanism 10, the grating safety device 70 will transmit an abnormal detection signal to the control unit, and then the control unit will control the entire target supply device to stop running after receiving the signal. After removing the abnormal object, the target supply device is restarted.

[0084] Of course, in some embodiments, as shown in Figure 6 The target placing area 20 is also provided with an emergency stop button 211, so that the operation of the target supply device can be stopped in time in case of an accident.

[0085] Obviously, the above-described embodiments are only a part of the embodiments of the present application, rather than all the embodiments, and the preferred embodiments of the present application are given in the drawings, but do not limit the patent scope of the present application. The present application can be realized in many different forms, and conversely, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing specific embodiments, or equivalently replace some of the technical features. Any equivalent structure made by using the content of the present application specification and drawings, directly or indirectly used in other related technical fields, is also within the patent protection scope of the present application.

Claims

1. An RPD apparatus target supply arrangement for a chamber provided with a vacuum chamber; characterized in that, The target supply device comprises: A conveying mechanism (10) is provided with at least one target placing area (20) on both sides of the conveying mechanism (10), and a carrier (30) for placing target materials slides in the conveying mechanism (10); A target supply mechanism (40) is provided on the conveying mechanism (10) along the sliding direction of the conveying mechanism (10), and each target supply mechanism (40) corresponds to a target inlet of the vacuum chamber, and the target supply mechanism (40) is used for feeding target materials into the vacuum chamber through the target inlet; A target lifting mechanism (50) is matched and installed below each target supply mechanism (40), and the target lifting mechanism (50) is used for lifting the target materials on the carrier (30) into the corresponding target supply mechanism (40).

2. The RPD apparatus hearth target supply of claim 1, wherein, The target supply mechanism (40) comprises a first base (411) provided with a sealed chamber (412), and a target supply rotating disc (413) is rotatably connected in the sealed chamber (412), and a plurality of limiting through holes (414) for placing target materials are arranged on the target supply rotating disc (413) along the circumferential direction of the target supply rotating disc (413). A bottom disc (415) is matched and arranged at the bottom of the target supply rotating disc (413), a first through hole (416) matched with the limiting through hole (414) is arranged on the lifting end of the target lifting mechanism (50), and a first target feeding channel (417) is matched and arranged between the first through hole (416) and the lifting end of the target lifting mechanism (50).

3. The RPD apparatus hearth target supply of claim 2, wherein, A first plug valve (418) is arranged in the first target feeding channel (417), and the first plug valve (418) is used for isolating external air from entering the sealed chamber (412).

4. The RPD apparatus hearth target supply of claim 2, wherein, A second target feeding channel (419) is further arranged above the target supply rotating disc (413), and the second target feeding channel (419) is used for conveying the target materials in the target supply rotating disc (413) into the vacuum chamber.

5. The RPD apparatus hearth target supply of claim 4, wherein, A second plug valve (420) is arranged in the second target feeding channel (419), and the second plug valve (420) is used for isolating the gas in the sealed chamber (412) from flowing into the vacuum chamber.

6. The RPD apparatus hearth target supply of claim 1, wherein, The target lifting mechanism (50) comprises a second base (511), a lifting motor (512) is arranged on the second base (511), a lifting end of the lifting motor (512) is connected with a lifting rod (513), and the lifting rod (513) is used for lifting the target materials and matched into the target supply mechanism (40).

7. The RPD apparatus hearth target supply of claim 6, wherein, The target lifting mechanism (50) further comprises guide rails (514) vertically distributed on the second base (511), and a sliding block (515) is slidably connected on the guide rails (514), and the sliding block (515) is connected with the lifting end of the lifting motor (512) and the lifting rod (513).

8. The RPD apparatus hearth target supply of claim 6, wherein, A plurality of storage spaces (311) for accommodating the target materials are arranged on the top of the carrier (30) along the length direction of the carrier (30), a second through hole (312) is arranged at the bottom of the storage space (311), the size of the second through hole (312) is smaller than the size of the target materials, and the size of the second through hole (312) is larger than the size of the lifting rod (513).

9. The RPD apparatus hearth target supply of claim 8, wherein, The opening of the top of the storage space (311) is chamfered.

10. The RPD apparatus hearth target supply of claim 1, wherein, The transmission mechanism (10) is provided with a detachable protective cover assembly (60) corresponding to the target supply mechanism (40), which is used to prevent dust in the external air from polluting the target material on the carrier (30).

11. The RPD apparatus hearth target supply of claim 10, wherein, The protective cover assembly (60) comprises a mounting bracket (611), a first cover (612) and a second cover (613). Each of the target supply mechanisms (40) is provided with a mounting bracket (611) on the transmission mechanism (10) on both sides along the sliding direction, and the mounting bracket (611) is provided with a mounting groove (614) along the side edge of the sliding direction, and two adjacent mounting grooves (614) are matched with a first cover (612). The top of two adjacent mounting brackets (611) is matched with a second cover (613), and the second cover (613) is matched with a third through hole (615) for the upper part of the target supply mechanism (40) to extend out, and at least one fixing knob (616) is arranged between two adjacent second covers (613) and the top of the mounting bracket (611) at the edge and the corresponding second cover (613), which is used to fasten the second cover (613) and the top of the mounting bracket (611) at the edge and the corresponding second cover (613).

12. The RPD apparatus hearth target supply of claim 1, wherein, The transmission mechanism (10) is further provided with at least one grating safety device (70) for detecting whether an object enters the transmission mechanism (10).

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