Graphite boat for tubular plasma enhanced chemical vapor deposition equipment

Abstract

The utility model relates to a graphite boat for tubular plasma enhanced chemical vapor deposition equipment, the graphite boat comprises at least two graphite rod groups and at least one movable rod group, the graphite rod groups are arranged at intervals, and each graphite rod group is provided with at least one first graphite contact; each movable rod set is provided with at least two second graphite contacts, the first graphite contacts and the second graphite contacts form a clamping gap, and the clamping gap is used for being provided with at least one battery piece. The graphite contacts form an adjustable clamping gap, so that when the battery piece is inserted, the battery piece is stably fixed, the conductive quality between the graphite contacts and the battery piece is improved, the friction between the battery piece and the clamp can be reduced, and the surface of the battery piece is prevented from being scratched and the like in the inserting process.

Description

Technical Field

[0001] This application relates to the field of graphite boat technology related to battery coating, specifically to a graphite boat for a tubular plasma-enhanced chemical vapor deposition apparatus. Background Technology

[0002] In the production of solar cells, tubular plasma-enhanced chemical vapor deposition (PECVD) equipment is an indispensable and crucial piece of equipment. During the coating deposition process, the traditional method uses multiple graphite boats as carriers for the solar cells. However, due to the small spacing between adjacent graphite boats in existing structures, the surface of the solar cells is easily scratched during insertion, resulting in scratches that affect the forming quality of the solar cells and reduce their efficiency. Furthermore, the extensive use of graphite boats increases the cost of graphite during the deposition process, leading to higher manufacturing costs.

[0003] In addition, existing graphite boat structures generally fix the solar cells to the surface of the graphite boat sheet, which makes one side of the solar cell blocked, making it difficult for the reactive gas to reach it and preventing double-sided deposition. The cells need to be flipped over to deposit the other side, which takes a long time and increases the risk of scratching the solar cells.

[0004] Therefore, there is an urgent need to design a new graphite boat structure to solve the above problems and achieve low-cost, high-quality double-sided deposition. Utility Model Content

[0005] To overcome the shortcomings of the prior art, this application provides a graphite boat for a tubular plasma-enhanced chemical vapor deposition (PECVD) apparatus, specifically adopting the following technical solution:

[0006] A graphite boat for a tubular plasma-enhanced chemical vapor deposition apparatus, the graphite boat comprising at least two sets of graphite rods and at least one set of movable rods.

[0007] The graphite rods are arranged at intervals, and each group of graphite rods is provided with at least one first graphite contact.

[0008] Each set of the movable rods is provided with at least two second graphite contacts, and the first graphite contact and the second graphite contact form a clamping gap, which is used to configure at least one battery cell.

[0009] The clamping gap formed by the first and second graphite contacts allows for direct clamping and power supply of the battery cells, and facilitates cell replacement during battery cell insertion.

[0010] Optionally, each graphite rod assembly includes two longitudinal graphite rods and one transverse graphite rod. The two longitudinal graphite rods are arranged opposite each other, and the transverse graphite rod is located at the lower end of the longitudinal graphite rods. The longitudinal graphite rods and the transverse graphite rod form a U-shaped frame with an upper opening. The U-shaped frame graphite rod assembly can serve as a current conduction path to provide stable power to the placed solar cells, while also facilitating the placement and removal of the solar cells from the upper opening of the U-shaped frame.

[0011] Optionally, each of the longitudinal graphite rods has at least one first graphite contact distributed along its own axial direction, and the first graphite contact extends along the X-axis to the side of the solar cell. The first graphite contacts allow for electrical connection between the graphite rod assembly and the corresponding solar cell, reducing the contact area between the graphite and the battery. Furthermore, to enhance electrical contact reliability, the number of first graphite contacts can be appropriately increased to ensure the stability of the electric field formed by the solar cell.

[0012] Optionally, the graphite boat further includes two graphite electrode rods with opposite polarities, distributed opposite each other on the left and right sides of the graphite boat, with the rods parallel to the Z-axis. One rod is connected to the positive terminal of an external power supply, and the other to the negative terminal. This electrode arrangement allows for the connection of opposite electrodes to adjacent groups of solar cells, creating a stable electric field between them. This provides a favorable electric field environment for the deposition process, promoting stable ionization of the reactive gas and ensuring its stable and uniform deposition on the cell surface, thus guaranteeing the stability and consistency of the deposition process. Furthermore, since both sides of a single solar cell can contact the reactive gas, double-sided deposition is possible.

[0013] Optionally, one end of each transverse graphite rod extends into a connecting tab along the X-axis. The connecting tabs of adjacent transverse graphite rods are staggered, and each connecting tab connects to the nearest electrode graphite rod. The connecting tabs allow each graphite rod group to be connected to its corresponding electrode graphite rod. Furthermore, since the connecting tabs of adjacent graphite rod groups connect to electrode graphite rods of different polarities, adjacent solar cells can have opposite polarities, thus providing a stable electric field.

[0014] Optionally, at least one graphite boat is disposed within each of the clamping gaps, the graphite boat being in close contact with one side of the battery cell. Furthermore, to ensure uniform current distribution on the battery cell, a graphite boat can be disposed for each battery cell, i.e., the battery cell is fixed onto the graphite boat, and then the graphite boat is placed within the clamping gap.

[0015] Optionally, the movable rod assembly includes a first ceramic rod and an axial drive mechanism. The second graphite contacts are arranged axially along the first ceramic rod. The axial drive mechanism drives the first ceramic rod to move axially, changing the distance of the clamping gap formed between the first and second graphite contacts. The axial drive mechanism can change the clamping gap distance by moving the first ceramic rod. During the insertion process, the clamping gap distance is widened to effectively reduce friction between the battery cell and the clamp, preventing scratches on the battery cell surface. After insertion, the clamping gap distance is narrowed to ensure stable clamping of the battery cell by the graphite contacts.

[0016] Optionally: The movable rod assembly is provided in two sets, and the two sets of movable rod assemblies are arranged opposite each other at a position slightly above the side of the graphite boat.

[0017] Optionally, the graphite boat further includes multiple supporting ceramic rods arranged on the sides of the graphite boat. These supporting ceramic rods support the graphite rod assembly and the battery cells. The aforementioned supporting ceramic rods serve as the main support structure of the graphite boat, effectively supporting the graphite rod assembly, battery cells, and other structures to ensure structural rigidity.

[0018] Optionally, a ceramic ring is disposed on the U-shaped frame formed by the longitudinal graphite rod and the transverse graphite rod, and the ceramic ring is sleeved on the supporting ceramic rod. This structure makes it easy to disassemble a single graphite rod assembly, and thus the number of graphite rod assemblies can be freely changed according to actual deposition requirements, enabling the deposition of different numbers of solar cells and achieving the conversion between high and low single-tube production capacity.

[0019] Beneficial effects

[0020] The technical solution of this application achieves the following beneficial effects:

[0021] The graphite boat of this application forms an adjustable clamping gap through graphite rods and movable rods with graphite contacts. By controlling the clamping gap distance of the graphite contacts, the clamping gap distance can be increased during the cell insertion operation, effectively reducing friction between the cell and the fixture and avoiding scratches or other damage to the cell surface during insertion. At the same time, after insertion, the clamping gap distance can be reduced to stably fix the cell, increase the conductivity between the graphite contacts and the cell, and greatly improve the yield and quality of the cells. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the graphite boat structure in an embodiment of this application.

[0023] Figure 2 This is a schematic diagram of the structure of the first graphite contact and the second graphite contact in the loosened state in the embodiments of this application.

[0024] Figure 3 This is a schematic diagram of the structure of the first graphite contact and the second graphite contact in the clamping state in the embodiments of this application.

[0025] Figure 4 This is a schematic diagram of the layout structure of the connecting tabs on the graphite rod assembly in an embodiment of this application.

[0026] The specific meanings of the reference numerals in the attached figures are as follows:

[0027] 1-Graphite rod assembly; 101-Longitudinal graphite rod; 102-Transverse graphite rod; 2-Modible rod assembly; 201-First ceramic rod; 202-Axial drive mechanism; 3-Electrode graphite rod; 4-Supporting ceramic rod; 5-Ceramic ring; 6-Connecting tab; 7-Second graphite contact; 8-First graphite contact; 9-Battery cell. Detailed Implementation

[0028] The present application will now be further described with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present application and should not be construed as limiting the scope of protection of the present application. It should be noted that the following detailed descriptions are exemplary and intended to provide further explanation of the present application.

[0029] To clearly illustrate the spatial layout and relative positions of the components in this application, a spatial rectangular coordinate system is established based on the viewpoint presented in the accompanying drawings. The X-axis corresponds to the width of the view structure (left-right direction), the Y-axis corresponds to the height of the view structure, and the Z-axis corresponds to the length of the view structure. The above directional descriptions are for ease of description and simplification only, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this application.

[0030] Traditional tubular plasma-enhanced chemical vapor deposition (PEVCD) equipment typically uses multiple spaced graphite boats as the carriers for solar cells, connected by ceramic rods and rings to maintain a relatively stable positional relationship and enhance the overall structural strength of the graphite boat. However, in this structure, the solar cells are fixed by the graphite boat's locking points, and the side of the solar cell closest to the graphite boat is limited by the size of the boat's aperture. The size and shape of the aperture affect the contact area between the graphite boat and the silicon wafer, as well as the deposition effect. Some graphite boats even lack apertures, resulting in deposition only on one side of the solar cell, severely hindering deposition efficiency. To address these issues, this embodiment creatively designs a graphite boat structure that abandons the traditional graphite boat structure, directly utilizing the solar cell to construct the reaction electric field. It also allows for the clamping and releasing of the solar cell, making assembly and disassembly more convenient and reducing the risk of scratches.

[0031] Specifically, in combination Figure 1 As shown in the embodiment of this application, a graphite boat for a tubular plasma-enhanced chemical vapor deposition (PECVD) apparatus is disclosed. The graphite boat adopts a modular structure design and includes at least two sets of graphite rod groups 1 and at least one set of movable rod groups 2. The graphite rod groups 1 mainly serve as carriers and power supply circuits for the battery cells 9, providing stable support and power supply for the battery cells 9. The movable rod groups 2 perform the functions of clamping and releasing the battery cells 9.

[0032] More specifically, in this embodiment, the graphite rod groups 1 are arranged at intervals, and each group of graphite rod groups 1 is provided with at least one first graphite contact 8; while each group of movable rod groups 2 is provided with at least two first graphite contacts 7. Generally, each graphite rod group 1 needs to correspond to at least one first graphite contact 7. The first graphite contact 8 and the first graphite contact 7 form a clamping gap, which is used to configure at least one battery cell 9. Through the clamping gap formed by the first graphite contact 8 and the first graphite contact 7 in the above structure, the battery cell 9 can be directly clamped and powered simultaneously. Furthermore, when it is necessary to replace the battery cell 9, that is, when performing the battery cell 9 insertion operation, it can be ensured that the battery cell 9 is disassembled without damage, ensuring the safety of the battery cell 9 replacement process.

[0033] Specifically, such as Figure 1 As shown, in this embodiment, each graphite rod group 1 includes two longitudinal graphite rods 101 and one transverse graphite rod 102. The two longitudinal graphite rods 101 are arranged opposite each other, providing a stable longitudinal support foundation for the graphite rod group 1 structure. The transverse graphite rod 102 is located at the lower end of the longitudinal graphite rods 101, and the ends of the longitudinal graphite rods 101 are respectively connected and fixed to the lower ends of the transverse graphite rods 102, forming a U-shaped frame with an upper opening through the longitudinal graphite rods 101 and the transverse graphite rods 102. Utilizing the excellent electrical conductivity of graphite material, the U-shaped frame graphite rod group 1 can construct a stable and efficient current conduction path, providing stable power supply to the placed battery cell 9 and ensuring the stable operation of the battery cell 9. In addition, the upper opening design of the U-shaped frame constitutes a convenient operating channel for the battery cell 9, making it easier to place and remove the battery cell 9 from the upper opening of the U-shaped frame. In practical applications, operators can quickly and smoothly place the battery cell 9 through the upper opening; when the battery cell 9 needs to be replaced or maintained, it can also be easily removed through the upper opening, effectively improving operational efficiency and significantly reducing operational complexity and time costs.

[0034] More specifically, in this embodiment, each of the longitudinal graphite rods 101 has at least one first graphite contact 8 distributed along its own axial direction, and the first graphite contact 8 extends along the X-axis to the side position of the corresponding battery cell 9. In this embodiment, the X-axis direction refers to the width direction of the graphite boat, with the central axis of the graphite boat as a reference; the left side of the graphite boat refers to the negative X-axis direction, and the right side refers to the positive X-axis direction. Using the aforementioned first graphite contact 8, an electrical connection can be achieved between the graphite rod assembly 1 and the corresponding battery cell 9. Compared to traditional large-area contact methods, this significantly reduces the contact area between graphite and the battery. This design not only reduces contact resistance but also reduces the risk of surface damage to the battery cell 9 due to excessive contact area, effectively improving the performance and lifespan of the battery cell 9. The first graphite contact 8 allows for an electrical connection between the graphite rod assembly 1 and the corresponding battery cell 9, reducing the contact area between graphite and the battery. Furthermore, to further enhance the reliability of the electrical contact, the number of first graphite contacts 8 can be appropriately increased according to actual needs. This embodiment can form a multi-point contact conductive network on the side of the battery cell 9 by reasonably arranging multiple first graphite contacts 8, so that the electric field distribution formed by the battery cell 9 during operation is more uniform and stable, thereby ensuring the power output quality of the battery cell 9, avoiding power loss and performance degradation caused by electric field instability, and significantly improving the working efficiency and stability of the entire battery module.

[0035] It should be noted that the graphite contacts used in this embodiment can adopt an embedded structure design. That is, by setting contact extensions at the corresponding positions of the longitudinal graphite rod 101, the graphite contacts are directly opposite the side of the battery cell 9. At the same time, the graphite contacts with good conductivity are tightly embedded in the groove of the contact extensions, and the contact surface is specially polished to make it fit tightly with the side of the battery cell 9. This reduces the contact resistance and ensures a stable electrical connection between the contacts and the battery cell 9.

[0036] Furthermore, the movable lever assembly 2 described in this embodiment is an important structure for achieving stable clamping and safe insertion of the battery cell 9, such as... Figure 2 and Figure 3 As shown, the movable rod assembly 2 includes a first ceramic rod 201 and an axial drive mechanism 202. In this embodiment, the axial drive mechanism 202 is disposed at the end of the first ceramic rod 201. The first graphite contacts 7 are arranged in a linear array along the axial direction of the first ceramic rod 201. The axial drive mechanism 202 drives the first ceramic rod 201 to move axially, thereby changing the distance of the clamping gap formed between the first graphite contacts 8 and the first graphite contacts 7.

[0037] It should be noted that the aforementioned axial drive mechanism 202 employs a precision transmission design, typically utilizing a stepper motor-driven screw and nut transmission system or a high-precision hydraulic cylinder drive mechanism. In this embodiment, through precise control of the axial drive mechanism 202, the first ceramic rod 201 can be driven to move stably and accurately in a linear direction along its axial direction. Combined with... Figure 2 and Figure 3 As shown, during the insertion of the battery cell 9, the axial drive mechanism 202 drives the first ceramic rod 201 to move in a specific direction according to a preset program or external control command, thereby expanding the clamping gap between the first graphite contact 8 and the first graphite contact 7. The first ceramic rod 201 is made of a ceramic material with high hardness and low coefficient of friction. Combined with the expanded clamping gap, this effectively reduces the frictional resistance between the battery cell 9 and the clamp during insertion, preventing scratches, wear, and other damage to the surface of the battery cell 9 due to excessive friction, thus significantly improving the yield of the battery cell 9.

[0038] It should be noted that, as Figure 1 As shown, the movable rod group 2 in this embodiment has two sets, and the two sets of movable rod groups 2 are arranged opposite each other at a slightly upper position on the side of the graphite boat. This symmetrical layout design ensures that the clamping force on the battery cell 9 is more uniform during clamping, effectively avoiding damage or deformation of the battery cell 9 due to uneven force. Furthermore, the two sets of opposite movable rod groups 2 can cooperate with other structural components of the graphite boat, ensuring stable clamping of the battery cell 9 while providing reliable guidance and positioning for safe insertion, significantly improving the efficiency and accuracy of battery cell insertion.

[0039] Furthermore, such as Figure 1 As shown, in this embodiment, two graphite electrode rods 3 with opposite polarities are also provided on both sides of the graphite boat. These two graphite electrode rods 3 are distributed opposite each other on the left and right sides of the graphite boat, and are parallel to the Z-axis direction, which in this embodiment refers to the length direction of the graphite boat. One graphite electrode rod 3 is connected to the positive terminal of an external power supply, and the other is connected to the negative terminal. Through this electrode arrangement, opposite electrodes can be connected to adjacent sets of solar cells 9, forming a stable electric field between them. This provides a good electric field environment for the deposition process, promoting stable ionization of the reactive gas and ensuring that the ionized gas is stably and uniformly deposited on the surface of the solar cell 9, thus guaranteeing the stability and consistency of the deposition process. Furthermore, since both sides of a single solar cell 9 can contact the reactive gas, a double-sided deposition effect can be achieved.

[0040] Furthermore, combining Figure 4As shown, in this embodiment, one end of the transverse graphite rod 102 in each graphite rod group 1 extends along the X-axis to form a connecting tab 6, and the connecting tabs 6 of adjacent transverse graphite rods 102 are staggered left and right. Each connecting tab 6 is connected to the nearest electrode graphite rod 3. For example, in this embodiment, the connecting tabs 6 of graphite rod groups 1 in odd-numbered positions extend to the left side of the graphite boat and connect to the electrode graphite rod 3 located on the left, while the connecting tabs 6 of graphite rod groups 1 in even-numbered positions extend to the right side of the graphite boat and connect to the electrode graphite rod 3 located on the right. Through the connecting tabs 6, each graphite rod group 1 can be electrically connected to the corresponding electrode graphite rod 3. Furthermore, since the connecting tabs 6 of adjacent graphite rod groups 1 are connected to electrode graphite rods 3 of different polarities, the polarities of adjacent solar cells 9 can be opposite, thereby providing a stable electric field and facilitating the ionization of the reactant gas.

[0041] Furthermore, it should be noted that, in this embodiment, since the graphite rod assembly 1 adopts a modular design, to facilitate the assembly and disassembly of a single graphite rod assembly 1 and the electrode graphite rod 3, a conductive elastic element can be provided at the end of the connecting tab 6. For example, a spring can be provided at the end of the connecting tab 6, and a graphite block can be provided at the end of the spring. When the graphite rod assembly 1 is installed, the corresponding connecting tab 6 can fit tightly against the surface of the corresponding electrode graphite rod 3. At the same time, when the graphite rod assembly 1 is disassembled, the connecting tab 6 can be easily disassembled and detached from the electrode graphite rod 3.

[0042] Furthermore, the graphite boat structure in this embodiment primarily utilizes the clamping gap formed by the relative arrangement of the first graphite contact 8 and the first graphite contact 7 to power and fix the battery cell 9. The graphite boat with this structure has significant dual functional characteristics: on the one hand, during the double-sided deposition process of the battery cell 9, the battery cell 9 can be directly placed within the clamping gap. Because the first graphite contact 8 and the first graphite contact 7 provide stable clamping and positioning for the battery cell 9, it ensures that the battery cell 9 remains stable during the double-sided deposition process, and both sides can receive deposition treatment uniformly, thereby effectively improving the quality and efficiency of double-sided deposition; on the other hand, for some single-sided deposition scenarios, this graphite boat structure, by configuring graphite boat sheets on the battery cell 9, achieves uniform current distribution and flexible placement of the battery cell 9. Specifically, a graphite boat can be provided on at least one side of each solar cell 9, and the solar cell 9 can be fixed to the graphite boat using suitable fixing methods such as bonding or snap-fitting, so that the solar cell 9 and the graphite boat form a stable assembly. This assembly is then placed within the clamping gap formed by the first graphite contact 8 and the first graphite contact 7. Because graphite has good conductivity and current-equalizing properties, the graphite boat can achieve uniform current distribution on the solar cell 9, avoiding deposition defects caused by uneven current distribution, and effectively improving the stability of the single-sided deposition process and the performance consistency of the solar cell 9. This method not only further enhances the stability of the solar cell 9 during the deposition process but also facilitates batch operation and management of the solar cells 9, improving production efficiency.

[0043] To support the graphite boat, the graphite boat of this application is preferably provided with four supporting ceramic rods 4, such as... Figure 1 As shown, four supporting ceramic rods 4 are arranged at the corners of the graphite boat. It should be noted that the number of supporting ceramic rods 4 is not specifically limited in this embodiment; other numbers of supporting ceramic rods (e.g., 6, 8, etc.) can be used to achieve the structural support function of the graphite boat. Furthermore, in this embodiment, ceramic rings 5 ​​are arranged on the U-shaped frame formed by the longitudinal graphite rods 101 and the transverse graphite rods 102. For example, in this embodiment, ceramic rings 5 ​​are arranged at the corners of the U-shaped frame. The ceramic rings 5 ​​are fitted onto the corresponding supporting ceramic rods 4, and the corners of the graphite rod assembly 1 can be fixed to the supporting ceramic rods 4 through the ceramic rings 5.

[0044] The aforementioned supporting ceramic rod 4 serves as the main support structure of the graphite boat, supporting the graphite rod assembly 1 and the solar cells 9 mounted on it. This ensures sufficient rigidity for the entire graphite boat structure and allows it to stably bear the weight during processes such as chemical vapor deposition of the solar cells 9, preventing structural deformation or collapse. The ceramic ring 5 structure enables a detachable connection between the individual graphite rod assembly 1 and the supporting ceramic rod 4. In actual production, operators can easily disassemble or install the graphite rod assembly 1 according to different deposition requirements. When high-capacity production is needed per tube, the number of graphite rod assemblies 1 can be increased, thereby increasing the number of solar cells 9 supported at one time. When low-capacity production is required, such as sample production or small-batch production, the number of graphite rod assemblies 1 can be reduced, flexibly adjusting the production capacity. This structural design allows the same graphite boat to adapt to the deposition requirements of different numbers of solar cells 9, enabling the conversion between high and low single-tube production capacities, greatly improving the applicability and production flexibility of the graphite boat. Furthermore, in this embodiment, by adjusting the length of the ceramic ring 5 on each graphite rod group 1, the distance positioning of adjacent graphite rod groups 1 can also be achieved. That is, by adjusting the length of the ceramic ring 5 in each graphite rod group 1, when multiple graphite rod groups 1 are assembled onto the supporting ceramic rod 4, the ceramic rings 5 ​​of adjacent graphite rod groups 1 abut against each other, and the spacing between adjacent graphite rod groups 1 is fixed.

[0045] The above description is only a preferred embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A graphite boat for a tubular plasma-enhanced chemical vapor deposition apparatus, characterized in that, The graphite boat includes at least two sets of graphite rods (1) and at least one set of movable rods (2). The graphite rod groups (1) are arranged at intervals, and each group of graphite rod groups (1) is provided with at least one first graphite contact (8); Each set of the movable rods (2) is provided with at least two second graphite contacts (7), the first graphite contact (8) and the second graphite contact (7) form a clamping gap, and the clamping gap is used to configure at least one battery cell (9).

2. The graphite boat according to claim 1, characterized in that, Each graphite rod group (1) includes two longitudinal graphite rods (101) and one transverse graphite rod (102). The two longitudinal graphite rods (101) are arranged opposite to each other, and the transverse graphite rod (102) is located at the lower end of the longitudinal graphite rods (101). The longitudinal graphite rods (101) and the transverse graphite rods (102) form a U-shaped frame with an upper opening.

3. The graphite boat according to claim 2, characterized in that, Each of the longitudinal graphite rods (101) has at least one first graphite contact (8) distributed along its own axial direction, and the first graphite contact (8) extends along the X-axis to the side of the battery cell (9).

4. The graphite boat according to claim 2, characterized in that, The graphite boat also includes two graphite electrode rods (3) with opposite polarities. The two graphite electrode rods (3) are distributed opposite each other on the left and right sides of the graphite boat. The graphite electrode rods (3) are parallel to the Z-axis direction. One of the graphite electrode rods (3) is connected to the positive terminal of the external power supply, and the other graphite electrode rod (3) is connected to the negative terminal of the external power supply.

5. The graphite boat according to claim 4, characterized in that, One end of the transverse graphite rod (102) extends into a connecting tab (6) along the X-axis direction. The connecting tabs (6) of adjacent transverse graphite rods (102) are staggered from left to right, and each connecting tab (6) is connected to the nearest electrode graphite rod (3).

6. The graphite boat according to claim 1, characterized in that, Each of the clamping gaps is provided with at least one graphite boat sheet, which is in close contact with one side of the battery sheet (9).

7. The graphite boat according to claim 1, characterized in that, The movable rod assembly (2) includes a first ceramic rod (201) and an axial drive mechanism (202). The second graphite contact (7) is arranged axially along the first ceramic rod (201). The axial drive mechanism (202) drives the first ceramic rod (201) to move axially, thereby changing the clamping gap distance formed between the first graphite contact (8) and the second graphite contact (7).

8. The graphite boat according to claim 7, characterized in that, The movable rod assembly (2) is provided in two sets, and the two sets of movable rod assemblies (2) are arranged opposite each other at a position slightly above the side of the graphite boat.

9. The graphite boat according to claim 2, characterized in that, The graphite boat also includes multiple supporting ceramic rods (4), which are arranged on the side of the graphite boat and are used to support the graphite rod assembly (1) and the battery cell (9).

10. The graphite boat according to claim 9, characterized in that, A ceramic ring (5) is disposed on the U-shaped frame formed by the longitudinal graphite rod (101) and the transverse graphite rod (102), and the ceramic ring (5) is sleeved on the supporting ceramic rod (4).

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