Coil lifting assembly and crystal growth furnace

Abstract

The utility model discloses a coil lifting assembly and a crystal growth furnace, which comprise a plurality of nut lead screw mechanisms, a high-speed motor and a low-speed motor which are arranged in the circumferential direction of a coil, the coil is connected with nuts of the nut lead screw mechanisms, lead screws of the plurality of nut lead screw mechanisms are respectively connected with the same cardan shaft through a transmission mechanism, and the cardan shaft is connected with the high-speed motor and the low-speed motor. The universal shaft can drive lead screws of the nut lead screw mechanisms to rotate synchronously, and the two ends of the universal shaft are connected with the high-speed motor and the low-speed motor through clutches respectively. The high-speed motor and the low-speed motor are used for driving the lead screw to move, switching of the high speed and the low speed of lifting of the coil is achieved through switching of the clutch, and in the loading process, the high-speed motor is connected with the universal shaft through the clutch, so that the coil is driven to move at a high speed; and in the silicon carbide crystal growth process, the low-speed motor is connected with the universal shaft through the clutch, so that the coil is driven to operate at an extremely low speed and extremely high precision.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of coil heating, particularly relates to a coil lifting assembly and a crystal growing furnace. BACKGROUND

[0002] Silicon carbide is one of important third generation semiconductor materials, because it has the characteristics of wide band gap, high saturation electron mobility, high breakdown strength, high thermal conductivity, is widely used in power electronics, radio frequency devices, optoelectronic devices and other fields.

[0003] At present, the growth of silicon carbide crystal generally adopts physical vapor transport method, namely PVT method.

[0004] Thermal field control is the core of PVT growth process, and has a decisive influence on the quality of grown silicon carbide crystal. In order to improve the utilization rate of silicon carbide powder, the powder at the bottom of the graphite crucible can be transported, and the distribution of the thermal field needs to be adjusted during the growth process, and the high temperature zone slowly moves down with the consumption of the powder.

[0005] In actual production, the commonly used method is to change the thermal field distribution in the graphite crucible by adjusting the lifting of the induction coil. In the process of growing silicon carbide, the coil lifting requires to run at a very low speed and a very high precision, such as 0.05mm / h. During the loading process, the induction coil needs to be adjusted to different initial positions according to different process requirements, in order to improve the work efficiency, the induction coil also needs to move at a faster speed, such as 50mm / min.

[0006] The traditional coil lifting mechanism usually uses multiple motors to drive the screw to drive the coil to move up and down, or uses a linear module to drive. The driving mode using multiple motors has high synchronization requirement for the motors, and the motor synchronization problem often causes blockage; the linear module driving can only be connected with one side of the coil, and the stability of movement is not high. INVENTION CONTENTS

[0007] Therefore, the present application provides a coil lifting assembly and a crystal growing furnace to solve the above at least one technical problem.

[0008] In the first aspect, the present application provides a coil lifting assembly, comprising a plurality of nut screw mechanisms arranged circumferentially on a coil, a high-speed motor and a low-speed motor, the coil is connected with the nut of the nut screw mechanism, the screws of the plurality of nut screw mechanisms are respectively connected with the same universal shaft through a transmission mechanism, so that the universal shaft can drive the screws of the plurality of nut screw mechanisms to rotate synchronously, and the universal shaft is respectively connected with the high-speed motor and the low-speed motor through a clutch at both ends.

[0009] In some embodiments, the transmission mechanism comprises a first gear on the lead screw and a second gear on the universal shaft engaged with the first gear.

[0010] In some embodiments, the universal shaft comprises a plurality of drive shafts connected by a universal joint, and the second gear is disposed on the drive shafts.

[0011] In some embodiments, a guide rod is further provided axially parallel to the coil, and the coil is slidingly connected to the guide rod by a sliding mechanism, so that the coil can slide relative to the guide rod.

[0012] In some embodiments, a fixing block is provided on the guide rod, and the lead screw is rotationally connected to the fixing block.

[0013] In some embodiments, a guide groove is provided on the coil, and the fixing block is slidingly connected to the guide groove.

[0014] In some embodiments, the nut is disposed on the guide groove.

[0015] In some embodiments, a fixing ring is coaxially connected to both ends of the coil, and the sliding mechanism comprises a sliding block connected to the fixing ring, and the sliding block is provided with a through hole slidingly sleeved on the guide rod.

[0016] In some embodiments, the two fixing rings at both ends of the coil are connected by a plurality of axial supports, and the sliding block and the guide groove are disposed on the axial supports.

[0017] In some embodiments, the coil is sleeved on the long crystal furnace.

[0018] Compared with the prior art, the present application has the following beneficial effects:

[0019] The present application drives the lead screw to move by two high-speed and low-speed motors, and switches by a clutch, realizes the speed switching of the coil lifting, so that the high-speed motor is connected with the universal shaft through the clutch during the loading process, so that the coil can move at a faster speed, and during the silicon carbide crystal growth process, the low-speed motor is connected with the universal shaft through the clutch, so that the coil runs at a very low speed and a very high precision. By driving a plurality of lead screws at the same time, the coil is driven to move up and down, ensuring the stability of the coil movement; the guide rod is increased to realize the accurate guidance of the coil movement, preventing jamming. BRIEF DESCRIPTION OF DRAWINGS

[0020] The utility model will be explained in detail below in combination with specific embodiments and drawings, in order to show details, facilitate understanding its principle, it is not necessarily drawn to scale, similar reference signs can be described similar components in different views. The drawings generally show the embodiments discussed herein in an example rather than limiting manner. Among them:

[0021] Figure 1 It is the three-dimensional schematic view of another angle of the coil lifting assembly arranged on the crystal growing furnace.

[0022] Figure 2 It is the three-dimensional schematic view of another angle of the coil lifting assembly arranged on the crystal growing furnace. Figure 1

[0023] Figure 3 It is the front view schematic view of the coil lifting assembly arranged on the crystal growing furnace.

[0024] Figure 4 It is the three-dimensional schematic view of another angle of the coil lifting assembly arranged on the crystal growing furnace. Figure 3

[0025] Figure 5 It is the schematic view of the bevel gear transmission mechanism.

[0026] In the drawings, 1, crystal growing furnace;2, coil;4, high-speed motor;5, low-speed motor;6, lead screw;7, nut;8, transmission mechanism;81, first gear;82, second gear;9, universal shaft;91, shaft section;92, cross universal joint;93, connecting rod;10, clutch;11, guide rod;12, fixed ring;13, sliding block;14, fixed block;15, axial support;16, guide slot;161, side plate;162, bottom plate. DETAILED DESCRIPTION

[0027] The following are specific embodiments of the utility model, and the technical scheme of the utility model will be further described in combination with the drawings, but the utility model is not limited to these embodiments, the following implementation ways do not limit the utility model involved in the claims. In addition, all combinations of the features explained in the implementation ways are not necessarily necessary for the solution of the utility model.

[0028] The principle and structure of the utility model will be explained in detail below in combination with the drawings and embodiments.

[0029] EMBODIMENT

[0030] As Figure 1 , 2 ​​, 3, 4, the embodiment is used for long crystal furnace 1 on the coil lifting assembly are described in detail, coil 2 lifting assembly includes a number of nut screw mechanism, high-speed motor 4, low-speed motor 5 around the coil 2, the coil 2 of the present embodiment is set on the long crystal furnace 1, so that the long crystal furnace 1 can be heated, the number of nut screw mechanism is three around the coil 2. Coil 2 can be inductive coil 2, so as to long crystal furnace 1 electromagnetic induction heating.

[0031] As shown in Figure 1 The coil 2 is connected with the nut 7 of the nut screw mechanism, and the screw rod 6 of the three nut screw mechanisms is respectively connected with the same universal shaft 9 through the transmission mechanism 8, so that the universal shaft 9 can drive the screw rod 6 of the three nut screw mechanisms to rotate synchronously, and the universal shaft 9 is respectively connected with the high-speed motor 4 and the low-speed motor 5 through the clutch 10 at both ends. In this way, the high-speed motor 4 or the low-speed motor 5 can be selected to control the connection of the universal shaft 9 through the clutch 10, so as to control the synchronous high-speed rotation or low-speed rotation of the screw rod 6 of the three nut screw mechanisms. For example, in the loading process, in order to improve the working efficiency, the high-speed motor 4 is connected with the universal shaft 9 through the clutch 10, so as to drive the coil 2 to move at a faster speed; and in the process of silicon carbide crystal growth, the low-speed motor 5 is connected with the universal shaft 9 through the clutch 10, so as to drive the coil 2 to run at a very low speed and high precision, so as to control the slow and accurate downward movement of the high temperature zone with the consumption of powder, so as to meet the process requirements of crystal growth.

[0032] The nut screw mechanism is a kind of mechanical transmission device, which converts the rotary motion of the screw rod 6 into the linear motion of the nut 7 through the relative rotary motion of the screw rod 6 and the nut 7 (or screw sleeve) sleeved on the screw rod 6, so as to control the lifting movement of the coil 2 connected with the nut 7. The clutch 10 can be an electromagnetic clutch, which is a kind of mechanical device for controlling rotation transmission by using electromagnetic principle, commonly used for realizing the connection and separation of power in mechanical system. It controls the action of the clutch through the electromagnetic force generated by power supply, and is suitable for transmission system which needs quick connection or disconnection. It belongs to the prior art and will not be described here. Of course, other clutches can also be used, as long as they can facilitate the connection and separation of the rotation of the motor and the universal shaft 9.

[0033] As shown in Figure 5As shown, the transmission mechanism 8 of the embodiment comprises a first gear on the lead screw 6 and a second gear 82 on the universal shaft 9, which is engaged with the first gear 81. The rotation of the first gear 81 and the second gear 82 is transmitted, so that the universal shaft 9 can drive the lead screw 6 to rotate, thereby realizing the transmission of the rotation of the motor to the lead screw 6. Since the lead screw 6 and the universal shaft 9 of the embodiment are perpendicular to each other, the first gear 81 and the second gear 82 are bevel gears, thereby realizing the rotation transmission between the vertical shafts.

[0034] As shown in Figure 1 , 4 , the universal shaft 9 comprises a plurality of driving shafts connected by universal joints. The universal shaft 9 of the embodiment comprises three rod-shaped shaft segments 91, which are connected by connecting rods 93 and cross universal joints 92, thereby forming a universal shaft 9 that can surround the crystal growth furnace 1. The second gear 82 is arranged on each of the shaft segments 91, that is, the shaft segments 91 are connected with the lead screw 6 through the transmission mechanism 8.

[0035] As shown in Figure 1 , 2 , in order to stabilize the lifting of the coil 2 relative to the crystal growth furnace 1, three guide rods 11 are arranged axially parallel to the coil 2. The coil 2 is connected with the guide rods 11 through a sliding mechanism, so that the coil 2 can slide relative to the guide rods 11, thereby guiding the movement of the coil 2 and stabilizing the movement of the coil 2, so that higher movement precision or faster movement speed can be obtained. The guide rods 11 of the embodiment are fixedly connected with the crystal growth furnace 1 at both ends, and the coaxial fixing ring 12 is connected at both ends of the coil 2. The sliding mechanism comprises a sliding block 13 connected with the fixing ring 12, and a through hole is arranged on the sliding block 13 to slide on the guide rod 11, thereby realizing the sliding fit of the coil 2 and the guide rod 11, so that the coil 2 can move up and down stably under the guidance of the guide rod 11.

[0036] As shown in Figure 1 , 2 , the guide rod 11 is provided with a strip-shaped fixed block 14 extending radially outward relative to the coil 2, and the lead screw 6 is rotationally fitted with the fixed block 14. The fixed block 14 plays a positioning role for the lead screw 6, so that the lead screw 6 can stably rotate around its own axis.

[0037] As shown in Figure 1 , 2As shown, the two fixing rings 12 at both ends of the coil 2 are connected by three axial supports 15. In this embodiment, the supports are three plates, each plate corresponding to the guide rod 11. Radially, the plate is located inside the guide rod. The upper and lower ends of the plate are respectively connected to the upper and lower fixing rings 12. The plate and the fixing rings 12 form a cylindrical support frame for fixing the coil 2. The slider 13 is fixed on the plate, thereby guiding the coil 2 relative to the guide rod 11.

[0038] like Figure 1 , 2 As shown in Figure 3, the coil 2 is provided with a guide groove 16. In this embodiment, the guide groove 16 is fixed on the plate. The guide groove 16 includes two triangular side plates 161 and a bottom plate 162 located at the bottom of the two side plates 161. The nut 7 is disposed on the bottom plate 162 of the guide groove 16. When the lead screw 6 rotates relative to the nut 7, the nut 7 moves up and down relative to the lead screw 6, thereby driving the guide groove 16 to move up and down, thus realizing the up and down movement of the coil 2. The fixing block 14 is slidably engaged with the guide groove 16, that is, the fixing block 14 is located between the two side plates 161. When the guide groove 16 moves up and down, the fixing block 14 slides relative to the guide groove 16, thereby playing a guiding role for the guide groove 16.

[0039] The specific embodiments described herein are merely illustrative examples illustrating the spirit of this utility model. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, without departing from the spirit of this utility model or exceeding the scope defined by the appended claims.

Claims

1. A coil lifting assembly, characterized in that, The device includes several nut and screw mechanisms arranged circumferentially around the coil, a high-speed motor, and a low-speed motor. The coil is connected to the nut of the nut and screw mechanism. The screws of the several nut and screw mechanisms are respectively connected to the same universal joint through a transmission mechanism, so that the universal joint can drive the screws of the several nut and screw mechanisms to rotate synchronously. The two ends of the universal joint are respectively connected to the high-speed motor and the low-speed motor through clutches.

2. The coil lifting assembly according to claim 1, characterized in that, The transmission mechanism includes a first gear located on the lead screw and a second gear located on the universal joint that meshes with the first gear.

3. The coil lifting assembly according to claim 2, characterized in that, The universal joint includes several drive shafts connected by universal joints, and the second gear is disposed on the drive shaft.

4. The coil lifting assembly according to claim 1, characterized in that, It also includes a guide rod parallel to the axial direction of the coil, and the coil and the guide rod are slidably connected by a sliding mechanism, so that the coil can slide relative to the guide rod.

5. The coil lifting assembly according to claim 4, characterized in that, A fixing block is provided on the guide rod, and the lead screw is rotatably engaged with the fixing block.

6. The coil lifting assembly according to claim 5, characterized in that, The coil is provided with a guide groove, and the fixing block is slidably engaged with the guide groove.

7. The coil lifting assembly according to claim 6, characterized in that, The nut is disposed on the guide groove.

8. The coil lifting assembly according to claim 6, characterized in that, The coil is coaxially connected to a fixed ring at both ends, and the sliding mechanism includes a slider connected to the fixed ring. The slider has a through hole that slides on the guide rod.

9. The coil lifting assembly according to claim 8, characterized in that, The two fixed rings at both ends of the coil are connected by several axial supports, and the slider and the guide groove are disposed on the axial supports.

10. A crystal growth furnace, characterized in that, Includes the coil lifting assembly as described in any one of claims 1 to 9, wherein the coil is fitted onto the crystal growth furnace.

Images