Solar photovoltaic silicon wafer vacuum drying tank

Abstract

The utility model belongs to the technical field of solar photovoltaic vacuum drying, and particularly relates to a solar photovoltaic silicon wafer vacuum drying tank. The utility model provides a solar photovoltaic silicon wafer vacuum drying tank which can be provided with a jacking assembly, a rack, a driving gear assembly and a sliding assembly on a tank body and tank covers, so that 1, one tank cover is driven by the jacking assembly and the driving gear assembly to move to the upper part of the other tank cover; the two tank covers can be opened and closed by only needing the occupied space of the two tank bodies, the space needed by actual operation is compressed, the working procedure running path is shortened, the space utilization rate is increased, and the linkage performance between the structures is better; and 2, the jacking assembly not only can reduce the opening difficulty of the tank cover in a negative pressure state, but also can improve the sealing performance of the tank cover in a downward pressing manner, so that the vacuum drying effect on the solar photovoltaic silicon wafer is improved.

Description

Technical Field

[0001] This utility model belongs to the field of solar photovoltaic vacuum drying technology, and in particular relates to a vacuum drying tank for solar photovoltaic silicon wafers. Background Technology

[0002] In the existing hot air circulation drying technology in the production and processing of solar cells, in order to clean the impurities on the outer surface of the silicon wafer, the solar photovoltaic silicon wafer is usually inserted into a wet basket, and then the carrier basket is placed inside the cleaning machine for cleaning and texturing processes. After the slow water washing is completed, a large amount of water stains are attached to the surface of the silicon wafer and the carrier basket. At this time, it is necessary to quickly dry the water stains on the surface.

[0003] Traditional drying processes in the industry employ hot air circulating trough-type drying devices, primarily using PTC heating and high-pressure blowers for hot air circulation drying. These trough devices mainly consist of: a trough body, a trough cover opening and closing sealing device, an external heating and circulation system, a dehumidification device, and a temperature control and safety protection system. The trough cover uses a left-right swing arm opening and closing mechanism driven by a cylinder. The drawback of this structure is the large operating space required for opening and closing the trough cover, its susceptibility to interference with other equipment, and its increased travel distance for the robotic arm, ultimately impacting drying efficiency.

[0004] For example, Chinese utility model patent with patent publication number CN214792242U and publication date of November 19, 2021 discloses a vacuum drying tank, the structure of which includes: a tank body, a vacuum, an inlet, a tank cover door, a magnetic fluid sealing mechanism, and a driving mechanism; wherein, a sealing element is provided on the tank body, and the tank cover door includes a first cover and a second cover movably connected to the first cover, the first cover being located above the second cover, and the second cover being abutted against the sealing element under the drive of the driving component to seal the tank body.

[0005] The general structural principle of the vacuum drying tank in this utility model patent is as follows: the target to be dried is placed inside the tank, the vacuum pump draws out the gas in the tank to form a vacuum state and connects with the vacuum pump, the sealing element on the tank is arranged around the opening of the tank and forms a seal with the tank cover door, the first cover and the second cover are movably connected so that the second cover can abut against the sealing element under the action of the driving mechanism to press the sealing element tightly, thereby achieving the sealing of the tank.

[0006] However, in actual use, the vacuum drying tank still has at least the following two shortcomings, which are the technical problems that this utility model aims to solve.

[0007] 1. The vacuum drying tank requires a large operating space, and simple assembly cannot solve the problem of idle space, increases the running path of the robotic arm, and results in low space utilization.

[0008] 2. Sealing the tank with only rubber rings is not effective, and moisture and impurities can easily accumulate near the seal, causing secondary contamination of the silicon wafers.

[0009] Therefore, in summary, there is an urgent need for a new type of vacuum drying tank with tighter fit between adjacent tanks and better sealing effect. Utility Model Content

[0010] This utility model provides a vacuum drying tank for solar photovoltaic silicon wafers. By setting a lifting component, rack, drive gear component, and sliding component on the tank body and tank cover, it achieves the following: 1. The lifting component and drive gear component move one tank cover above the other, requiring only the space occupied by two tank bodies to open and close the two tank covers, reducing the space required for actual operation, shortening the process path, improving space utilization, and improving the linkage performance between the structures; 2. The lifting component not only reduces the difficulty of opening the tank cover under negative pressure, but also increases the sealing performance of the tank cover by pressing down, improving the vacuum drying effect on the solar photovoltaic silicon wafers.

[0011] The technical solution adopted by this utility model to solve the above problems is: a vacuum drying tank for solar photovoltaic silicon wafers, including two adjacent tanks, two tank covers respectively disposed on the two tanks, two lifting components respectively disposed on both ends of the tanks and used to lift / press down the tank covers, a rack disposed on the side end of the tank cover, a drive gear assembly disposed between the two tanks and used to move one of the tank covers to the top of the other tank cover by meshing with the rack lifted by the lifting components, and a sliding component disposed on the tank and used to install the lifting components so that the lifting components move with the rack.

[0012] A further preferred technical solution is that the drive gear assembly includes a rotary motor disposed between the two slots, a first driving gear disposed on the output end of the rotary motor, two first driven gears meshing on both sides of the first driving gear and used to mesh with the rack, and a first mounting bracket disposed on the side end of the slot and used to mount the first driving gear and the first driven gear.

[0013] A further preferred technical solution is that: there are two drive gear assemblies, which are used to drive the racks on opposite sides of the slot cover respectively.

[0014] A further preferred technical solution is that the drive gear assembly further includes a first auxiliary gear disposed on the output shaft of the rotary motor and located below the first driving gear, a second mounting bracket disposed on the side end of the groove and located on the opposite side of the rotary motor, a second auxiliary gear disposed on the second mounting bracket and at the same height as the first auxiliary gear, a transmission belt disposed on the first auxiliary gear and meshing with the second auxiliary gear, a transmission shaft disposed on the second auxiliary gear, a second driving gear disposed on the second mounting bracket and located at the upper end of the transmission shaft, and two second driven gears disposed on the second mounting bracket and meshing with both sides of the second driving gear and used to drive the groove cover to move.

[0015] A further preferred technical solution is that the lifting assembly includes a lifting cylinder disposed on the sliding assembly, and a support plate disposed at the output end of the lifting cylinder and used to connect the slot cover.

[0016] A further preferred technical solution is that the sliding assembly includes a fixed plate disposed on the side end of the groove, a slide rail disposed on the fixed plate, and a sliding block disposed on the slide rail and used to install the lifting cylinder.

[0017] A further preferred technical solution is that the groove cover is provided with a U-shaped groove for avoiding adjacent lifting cylinders.

[0018] A further preferred technical solution includes a rotating pressing assembly disposed on the side end of the groove body and used to seal the groove cover.

[0019] A further preferred technical solution is that the rotating pressing assembly includes a rotating telescopic motor disposed on the side wall of the groove body away from the lifting assembly, an extension block disposed at the output end of the rotating telescopic motor and extending towards the groove cover for pressing the groove cover, and a pressing block disposed at the end of the extension block away from the rotating telescopic motor.

[0020] A further preferred technical solution is that: a U-shaped hanging rod is provided on the lower surface of the rack, and a support roller is provided on the U-shaped hanging rod.

[0021] The beneficial effects of this utility model are:

[0022] 1. By using a lifting assembly and a drive gear assembly to open and close the two tank covers in a staggered and phased manner, the operating space required for the vacuum drying tank for solar photovoltaic silicon wafers is reduced, the process path is shortened, and the space and structural utilization rates are improved; 2. The lifting and pressing functions of the lifting assembly not only reduce the difficulty of opening the tank covers under negative pressure, but also improve the sealing effect of the tank covers; 3. The rotating pressing assembly further enhances the sealing performance of the tank covers, ensuring the drying effect of the solar photovoltaic silicon wafers. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a perspective view of the present invention.

[0025] Figure 2 This is a three-dimensional structural view of the present invention.

[0026] Figure 3 for Figure 2 A magnified view of part A in the image.

[0027] Figure 4 This is a schematic diagram showing the position of the lifting component in this utility model.

[0028] Figure 5 This is a schematic diagram of the drive gear assembly in this utility model.

[0029] Figure 6 This is a front view of the two groove covers in this utility model when they are sealed.

[0030] Figure 7 This is a front view of the lifting assembly in this utility model when it lifts one of the slot covers.

[0031] Figure 8 This is a front view of one of the slot covers in this utility model when it is opened.

[0032] Figure 9 This is a side view of one of the slot covers in this utility model when it is open.

[0033] Figure 10 This is a top view of the present invention.

[0034] The meanings of the markings in the diagram are as follows:

[0035] 1. Tank body; 2. Tank cover; 3. Lifting assembly; 4. Rack; 5. Drive gear assembly; 6. Sliding assembly; 7. U-shaped groove; 8. Rotating pressing assembly; 9. U-shaped hanging rod; 10. Support roller.

[0036] Lifting cylinder 31, support plate 32, rotary motor 51, first gear assembly 52, first mounting bracket 53, second mounting bracket 54, second gear assembly 55, transmission belt 56, transmission shaft 57, fixing plate 61, slide rail 62, sliding block 63, rotary telescopic motor 81, extension block 82, pressure block 83, T-shaped mounting plate 84;

[0037] First driving gear 52a, first driven gear 52b, first auxiliary gear 52c, second auxiliary gear 55a, second driving gear 55b, and second driven gear 55c. Detailed Implementation

[0038] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following description is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention.

[0039] The directional terms such as up, down, left, right, front, back, front, back, top, bottom, etc., mentioned or possibly mentioned in this specification are defined relative to the structure shown in the accompanying drawings. The terms "inner" and "outer" refer to the direction toward or away from the geometric center of a specific component, respectively. These are relative concepts and may therefore vary depending on their location and usage. Therefore, these or other directional terms should not be interpreted as restrictive terms.

[0040] As attached Figure 1-10 As shown, a vacuum drying tank for solar photovoltaic silicon wafers includes two adjacent tank bodies 1, two tank covers 2 respectively disposed on the two tank bodies 1, two lifting components 3 respectively disposed on both ends of the tank body 1 for lifting / pressing down the tank covers 2, a rack 4 disposed on the side end of the tank cover 2, a drive gear assembly 5 disposed between the two tank bodies 1 and used to move one of the tank covers 2 to above the other tank cover 2 by meshing with the rack 4 lifted by the lifting components 3, and a sliding component 6 disposed on the tank body 1 for mounting the lifting components 3 so that the lifting components 3 move with the rack 4.

[0041] In this embodiment, the vacuum drying tank for solar photovoltaic silicon wafers includes two tank bodies 1 and two tank covers 2. Each tank body 1 has a mounting rack for placing flower baskets. The tank body 1 has the conventional setup of a vacuum drying tank, with good sealing performance, including but not limited to nitrogen purging inlet and outlet, an extraction port connected to a vacuum pump, and a heating plate on the inner wall of the tank body for heating and drying the flower baskets and the air inside the tank body 1. Due to the good deformation resistance of metal, the tank bodies 1 and tank covers 2 can be made of metal plates. Teflon is sprayed onto the surfaces of the tank bodies 1 and tank covers 2 to ensure the vacuum chamber is free of metal ions. Each tank cover 2 covers the tank body 1, and a lifting assembly 3 is provided on the lower surface of the portion protruding from the tank body 1. The two lifting assemblies 3 support the two opposite sides of the tank cover 2, allowing the tank cover 2 to be opened or closed by lifting or pressing down, thereby reducing the difficulty of opening or closing the tank cover 2.

[0042] Furthermore, the rack 4 is disposed on the side end of the slot cover 2 and is configured to cooperate with the drive gear assembly 5. The drive gear assembly 5 is misaligned with the slot cover 2 sealed on the slot body 1. When the slot cover 2 is sealed to the slot body 1, the rack 4 on the slot cover 2 is not on the same plane as the drive gear assembly 5. When the slot cover 2 needs to be opened, the two lifting components 3 at the lower end of the slot cover 2 to be opened are activated to lift the slot cover 2 to a certain height, so that the slot cover 2 is separated from the slot body 1. At this time, the rack 4 on the lifted slot cover 2 is at the same level and meshes with the drive gear assembly 5. Activating the drive gear assembly 5 can drive the lifted slot cover 2 to move horizontally above the other slot cover 2 so that the flower basket can be placed into the slot body 1 where the slot cover 2 is opened. The solar photovoltaic silicon wafer vacuum drying tank includes two tank bodies 1 and two tank covers 2. Therefore, it is necessary to selectively drive the lifting component 3 at the lower end of one of the tank covers 2. By utilizing the height difference and cooperating with the drive gear assembly 5, the two tank covers 2 can be opened and closed at different times and in different positions, thus compressing the usable space of the two tank bodies 1. At the same time, the drive gear assembly 5, which is located between the two tank bodies 1, moves the two tank covers 2, increasing the utilization rate of the structure. The drive gear assembly 5 cannot move or open the two tank covers 2 simultaneously. In addition, the sliding component 6 allows the lifting component 3 to move with the tank cover 2, ensuring structural stability and safety.

[0043] The drive gear assembly 5 includes a rotary motor 51 disposed between the two slots 1, a first drive gear 52a disposed on the output end of the rotary motor 51, two first driven gears 52b meshing on both sides of the first drive gear 52a and used to mesh with the rack 4, and a first mounting bracket 53 disposed on the side end of the slot 1 and used to mount the first drive gear 52a and the first driven gears 52b.

[0044] In this embodiment, the drive gear assembly 5 includes the rotary motor 51, the first gear assembly 52, and the first mounting bracket 53. The rotary motor 51 serves as the power source for driving the rotation of the first gear assembly 52. ​​When the rotary motor 51 starts, it drives the rotation of the first gear assembly 52 at the output end of the rotary motor 51. At this time, the rack 4 meshing with the first gear assembly 52 moves horizontally, thereby moving the slot cover 2 lifted by the lifting assembly 3 to the top of another slot cover 2. After placing the basket, the opened slot cover 2 is reset to complete the opening or closing operation of one set of slot covers 2. The above operation is then performed on the other set of slot covers 2 so that both slots 1 can vacuum dry the silicon wafers. The first mounting bracket 53 is used to mount the rotary motor 51 and the first gear assembly 52. ​​The first mounting bracket 53 is fixed on the groove 1. The first mounting bracket 53 includes a lower end plate for mounting the rotary motor 51 and an upper end plate for mounting the first gear assembly 52. ​​The rotary motor 51 passes through the first mounting bracket 53 and is connected to the first gear assembly 52. ​​Preferably, the first gear assembly 52 includes a first driving gear 52a and a first driven gear 52b. The first driving gear 52a is connected to the output end of the rotary motor 51. The first driven gear 52b is meshed on both sides of the first driving gear 52a. When the rack 4 is lifted, the first driven gear 52b can engage with the rack 4, thereby driving the rack 4 to move horizontally.

[0045] There are two drive gear assemblies 5, which are used to drive the racks 4 on opposite sides of the slot cover 2 respectively.

[0046] In this embodiment, two drive gear assemblies 5 are provided, which are arranged opposite to each other on the two sides of the slot cover 2. By respectively meshing with the racks 4 at the side ends of the slot cover 2, the two slot covers 2 are driven to move in a staggered manner, thereby compressing the operating space for opening or closing the slot cover 2. The two drive gear assemblies 5 mesh with the two ends of the slot cover 2, making the movement of the slot cover 2 more stable and the operation accuracy and efficiency higher.

[0047] The drive gear assembly 5 further includes a first auxiliary gear 52c disposed on the output shaft of the rotary motor 51 and located below the first drive gear 52a; a second mounting bracket 54 disposed on the side end of the groove 1 and located on the opposite side of the rotary motor 51; a second auxiliary gear 55a disposed on the second mounting bracket 54 and at the same height as the first auxiliary gear 52c; a transmission belt 56 disposed on the first auxiliary gear 52c and meshing with the second auxiliary gear 55a; a transmission shaft 57 disposed on the second auxiliary gear 55a; a second drive gear 55b disposed on the second mounting bracket 54 and located at the upper end of the transmission shaft 57; and two second driven gears 55c disposed on the second mounting bracket 54, meshing with both sides of the second drive gear 55b, and used to drive the groove cover 2 to move.

[0048] In this embodiment, a single rotary motor 51 can drive the first gear assembly 52 and the second gear assembly 55 on both sides of the slot cover 2 to rotate, thereby improving the smoothness of the drive gear assembly 5 in moving the slot cover 2 and increasing the structural linkage performance. The drive gear assembly 5 also includes a second gear assembly 55 disposed opposite to the first gear assembly 52 on the other side. The first gear assembly 52 and the second gear assembly 55 are located on two opposite sides of the slot cover 2 and are used to mesh with the rack 4 after being lifted. The second gear assembly 55 rotates with the rotation of the first gear assembly 52. ​​The second gear assembly 55 is mounted on the opposite side of the rotary motor 51 through the second mounting bracket 54. The first gear assembly 52 drives the second gear assembly 55 to rotate through the transmission belt 56 and the transmission shaft 57, thereby meshing with the rack 4 at the other end of the raised slot cover 2. Preferably, the first gear assembly 52 further includes a first auxiliary gear 52c disposed on the output shaft of the rotary motor 51 and offset from the first driving gear 52a. The first driving gear 52a is disposed on the upper end plate of the first mounting bracket 53, and the first auxiliary gear 52c is disposed on the lower end plate of the first mounting bracket 53. The second gear assembly 55 includes a second auxiliary gear 55a, a second driving gear 55b, and a second driven gear 55c. The second auxiliary gear 55a is disposed on the second mounting bracket 54 and is located on the same horizontal plane as the first auxiliary gear 52c. The first auxiliary gear 52c is connected to the second auxiliary gear 55a through the transmission belt 56. When the first auxiliary gear 52c rotates, it drives the transmission shaft 57 on the second auxiliary gear 55a to rotate, thereby driving the second driving gear 55b and the second driven gear 55c located on both sides of the second driving gear 55b to rotate, so as to mesh with the rack 4c located near the second driven gear 55c. The diameters of the first driving gear 52a and the second driven gear 55c may be smaller than the diameters of the first driven gear 52b and the second driven gear 55c.

[0049] The lifting assembly 3 includes a lifting cylinder 31 disposed on the sliding assembly 6, and a support plate 32 disposed at the output end of the lifting cylinder 31 and used to connect the slot cover 2.

[0050] In this embodiment, the support plate 32 is fixedly installed on the lower outer surface of the groove cover 2. Activating the lifting cylinder 31 can separate or seal the groove cover 2 from the groove body 1. The lifting cylinder 31 can reduce the difficulty of opening the groove body 1 when it is under negative pressure to a certain extent, and at the same time increase the sealing effect of the groove cover 2.

[0051] The sliding assembly 6 includes a fixing plate 61 disposed on the side end of the groove 1, a slide rail 62 disposed on the fixing plate 61, and a sliding block 63 disposed on the slide rail 62 and used to install the lifting cylinder 31.

[0052] In this embodiment, the sliding assembly 6 is used to mount the lifting cylinder 31 and allow the lifting cylinder 31 to move with the slot cover 2. The sliding assembly 6 can be respectively disposed at both ends of the two slot bodies 1, or a set of sliding assemblies 6 can be used to allow the movement of two lifting cylinders 31 on the same side. Since the lifting cylinder 31 needs to move between the two slot bodies 1 when moving with the slot cover 2, the length of the sliding assembly 6 must meet the movement path of the lifting cylinder 31. Preferably, the sliding assembly 6 allows the movement of two lifting cylinders 31 on the same side. The sliding assembly 6 includes the fixing plate 61, the slide rail 62, and the sliding block 63. The fixing plate 61 is mounted on the side wall of the slot body 1, and the sliding block 63 is used to mount the lifting cylinder 31, so that the lifting cylinder 31 can move horizontally on the slide rail 62. (See attached diagram) Figure 2 As shown, when the drive gear assembly 5 also includes the second gear assembly 55, in order to avoid the transmission belt 56 interfering with the horizontal movement of the lifting cylinder 31, the transmission belt 56 should be located below the sliding assembly 6.

[0053] The groove cover 2 is provided with a U-shaped groove 7 for avoiding the adjacent lifting cylinder 31.

[0054] In this embodiment, when the gap between the two grooves 1 is small, after the groove cover 2 moves to the upper end of the other groove cover 2, the lifting cylinder 31 on the upper groove cover 2 is easily blocked by the lower groove cover 2, causing the upper groove cover 2 to be unable to be fully opened, thus making it inconvenient to put the flower basket into the groove 1. Therefore, the U-shaped groove 7 is provided on the side of the groove cover 2 near the moving side of the adjacent lifting cylinder 3, so as to avoid the lifting cylinder 31 on the adjacent groove cover 2 and compress the adjacent gap between the two grooves 1.

[0055] It also includes a rotating pressing assembly 8 disposed on the side end of the groove 1 and used to seal the groove cover 2.

[0056] In this embodiment, the function of the rotating pressing component 8 is to improve the sealing effect of the slot cover 2 by driving the rotating pressing component 8 to press down on the side of the slot cover 2 when it is necessary to seal the slot cover 2. The rotating pressing component 8 is disposed on the side of the slot body 1 and located on the adjacent side of the lifting component 3. Before the slot cover 2 needs to be opened, the rotating pressing component 8 is rotated to avoid obstructing the lifting operation of the slot cover 2; when the slot cover 2 needs to be sealed, the rotating pressing component 8 is rotated to obstruct the slot cover 2 and press down to increase the sealing effect of the rotating pressing component 8 on the side of the slot cover 2.

[0057] The rotating pressing assembly 8 includes a rotating telescopic motor 81 disposed on the side wall of the groove 1 away from the lifting assembly 3, an extension block 82 disposed at the output end of the rotating telescopic motor 81 and extending toward the groove cover 2 for pressing the groove cover 2, and a pressing block 83 disposed at the end of the extension block 82 away from the rotating telescopic motor 81.

[0058] In this embodiment, the rotary telescopic motor 81 is a conventional motor. The output end of the rotary telescopic motor 81 can both rotate and lift. Activating the rotary telescopic motor 81 drives the extension block 82 to rotate and lift. The rotary telescopic motor 81 is mounted on the side wall of the groove 1 via the T-shaped mounting plate 84. The T-shaped mounting plate 84 includes a vertical plate that fits against the groove 1, and an extension plate located in the middle of the vertical plate and extending away from the groove 1. The extension plate is used to mount the rotary telescopic motor 81, so that the rotary telescopic motor 81 is detachably mounted on the side wall of the groove 1. One end of the extension block 82 is connected to the output end of the telescopic motor 81, and the other end extends toward the slot cover 2. The pressure block 83 is located at the end of the extension block 82 away from the output end of the rotary telescopic motor 81. When the rotary telescopic motor 81 is started, the extension block 82 and the pressure block 83 can limit and block the slot cover 2. When the slot cover 2 needs to be opened, the rotary telescopic motor 81 drives the extension block 82 and the pressure block 83 to rotate toward the side away from the slot body 1, so as not to interfere with the lifting of the slot cover 2. The operation is simple.

[0059] The lower surface of the rack 4 is provided with a U-shaped hanging rod 9, and a support roller 10 is provided on the U-shaped hanging rod 9.

[0060] In this embodiment, after the slot cover 2 is lifted, there is a certain distance between it and the other slot cover 2. The support of the slot cover 2 is mainly achieved by the lifting components 3 at both ends. The U-shaped hanging rod 9 and the support roller 10 are arranged so that when the slot cover 2 moves above the other slot cover 2, the support roller 10 on the upper slot cover 2 contacts the lower slot cover 2. This not only supports the upper slot cover 2 but also does not increase the difficulty of moving the slot cover 2 above the other slot cover 2. The U-shaped hanging rod 9 and the support roller 10 are set on the lower surface of the rack 4 and do not interfere with the slot body 1. At least four support rollers 10 are provided and support the four corners of the slot cover 2. The diameter of the support roller 10 is smaller than the distance between the two slot covers 2 after the slot cover 2 is lifted. At the same time, when the slot cover 2 is lifted and moves to the other slot cover 2, the support roller 10 contacts the lower slot cover 2. Preferably, the lower end of the rack 4 is provided with a mounting groove for mounting the support roller 10, so as to reduce the interference of the protruding support roller 10 with other structures.

[0061] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of this utility model.

Claims

1. A vacuum drying slot for solar photovoltaic silicon wafers, comprising two slot bodies (1) arranged adjacently, two slot covers (2) arranged on the two slot bodies (1) respectively, characterized in that, Also included are two jacking assemblies (3) arranged respectively on both ends of the groove body (1) and used for jacking down the groove cover (2), a rack (4) arranged on the side end of the groove cover (2), a drive gear assembly (5) arranged between the two groove bodies (1) and used for translating one of the groove covers (2) above the other groove cover (2) by engaging the rack (4) jacked by the jacking assembly (3), and a sliding assembly (6) arranged on the groove body (1) and used for mounting the jacking assembly (3) so that the jacking assembly (3) moves with the rack (4).

2. The solar photovoltaic silicon wafer vacuum drying slot according to claim 1, characterized in that, The drive gear assembly (5) includes a rotary motor (51) arranged between the two groove bodies (1), a first driving gear (52a) arranged on the output end of the rotary motor (51), two first driven gears (52b) arranged on both sides of the first driving gear (52a) and used for engaging the rack (4), and a first mounting frame (53) arranged on the side end of the groove body (1) and used for mounting the first driving gear (52a) and the first driven gear (52b).

3. The solar photovoltaic silicon wafer vacuum drying slot according to claim 2, characterized in that, The drive gear assembly (5) is two, respectively used for driving the rack (4) on the opposite sides of the groove cover (2).

4. The solar photovoltaic silicon wafer vacuum drying slot according to claim 2, characterized in that, The drive gear assembly (5) further includes a first auxiliary gear (52c) arranged on the output shaft of the rotary motor (51) and below the first driving gear (52a), a second mounting frame (54) arranged on the side end of the groove body (1) and located on the opposite side of the rotary motor (51), a second auxiliary gear (55a) arranged on the second mounting frame (54) and at the same height as the first auxiliary gear (52c), a transmission belt (56) arranged on the first auxiliary gear (52c) and engaging the second auxiliary gear (55a), a transmission shaft (57) arranged on the second auxiliary gear (55a), a second driving gear (55b) arranged on the second mounting frame (54) and located on the upper end of the transmission shaft (57), and two second driven gears (55c) arranged on the second mounting frame (54) and engaging on both sides of the second driving gear (55b) and used for driving the groove cover (2) to move.

5. The solar photovoltaic silicon wafer vacuum drying slot according to claim 1, characterized in that, The jacking assembly (3) includes a jacking cylinder (31) arranged on the sliding assembly (6), and a support plate (32) arranged on the output end of the jacking cylinder (31) and used for connecting the groove cover (2).

6. The solar photovoltaic silicon wafer vacuum drying slot according to claim 5, characterized in that, The sliding assembly (6) includes a fixed plate (61) arranged on the side end of the groove body (1), a sliding rail (62) arranged on the fixed plate (61), and a sliding block (63) arranged on the sliding rail (62) and used for mounting the jacking cylinder (31).

7. The solar photovoltaic silicon wafer vacuum drying slot according to claim 5, characterized in that, A U-shaped groove (7) is arranged on the groove cover (2) for avoiding the adjacent jacking cylinder (31).

8. The solar photovoltaic silicon wafer vacuum drying slot according to claim 1, characterized in that, A rotary jacking-down assembly (8) is further arranged on the side end of the groove body (1) and used for sealing the groove cover (2).

9. The solar photovoltaic silicon wafer vacuum drying slot according to claim 8, characterized in that, The rotating and pressing assembly (8) comprises a rotating telescopic motor (81) arranged on the side wall of the groove body (1) away from the jacking assembly (3), an extension block (82) arranged at the output end of the rotating telescopic motor (81) and extending towards the groove cover (2) and used for pressing the groove cover (2), and a pressing block (83) arranged at the end of the extension block (82) away from the rotating telescopic motor (81).

10. The solar photovoltaic silicon wafer vacuum drying slot according to claim 1, characterized in that, The lower surface of the rack (4) is provided with a U-shaped hanging rod (9), and a supporting roller (10) is arranged on the U-shaped hanging rod (9).

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