Heating device capable of rapidly raising temperature

Abstract

The utility model relates to the technical field of semiconductor heating devices, and discloses a heating device capable of heating quickly, which comprises a box body, fixed columns are fixedly arranged at the front ends and the rear ends of the two sides between the inner bottom surface and the inner top surface of the box body, movable plates are arranged at the upper ends and the lower ends of the outer surfaces of the four fixed columns, and the movable plates are fixed on the box body. Two-way screws are rotationally embedded in the middle points of the two sides between the inner top face and the inner bottom face of the box body, a fixing plate is fixedly arranged at the middle point of the position between the inner walls of the two sides of the box body, and a material box is movably embedded in the front end face of the fixing plate. According to the utility model, after the mounting plates fixedly provided with the heating pipes are embedded in the two movable plates, the upper end and the lower end of a material placed in the material box can be heated, the two-way screw rod arranged in the box body can better drive the movable plates to move, and meanwhile, the movable plates and the fixed plate can be separated, so that the material box is convenient to use. Therefore, the material box can be drawn out, and the materials can be replaced.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor heating device technical field especially relates to a kind of heating device of quick heating. BACKGROUND

[0002] The heater is an important component of semiconductor equipment, and the core component of the heater is a heating pipe. The heating pipe is a tubular electric heating element composed of a metal pipe, a spiral high-temperature resistance wire, and crystalline magnesium oxide powder. The high-temperature resistance wire is evenly distributed in the metal pipe, and the interstitial part is filled with crystalline magnesium oxide powder with good thermal conductivity and insulation performance. When current passes through the high-temperature resistance wire, heat is generated and diffused to the surface of the metal pipe through the magnesium oxide powder, and then transferred to the heated object or air to achieve the purpose of heating.

[0003] The inventor found that the prior art has the following problems in the process of implementing the present application: Currently, most of the existing heating devices heat semiconductor materials by placing them on the end surface of the heating pad. Since the heating pad can only preferentially heat the side of the material that is in contact with it during heating, it may result in low heating efficiency and uneven heating during the heating and fixing process. Therefore, the present application provides a heating device that can quickly heat to solve the problems mentioned in the background art. SUMMARY

[0004] The utility model discloses a heating device that can quickly heat to solve the problems mentioned in the background art. By embedding an installation plate with a heating pipe in two movable plates, the upper and lower ends of the material placed in the material box can be heated. The bidirectional screw in the box can better drive the movable plate to move in position, and the movable plate and the fixed plate can also be separated, so that the material box can be pulled out for replacement.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] A heating device that can quickly heat includes a box. Fixed columns are fixedly arranged on both sides of the inner bottom surface and the inner top surface of the box, near the front end and the rear end. Four movable plates are arranged on the outer surface of the four fixed columns, near the upper end and the lower end. Bidirectional screws are rotatably embedded in the middle points between the inner top surface and the inner bottom surface of the box on both sides. A fixed plate is fixedly arranged between the inner walls of the box at the middle point. A material box is movably embedded in the front end surface of the fixed plate.

[0007] The box is clamped and embedded with a double-shaft servo motor at the midpoint of the lower end, both sides of the double-shaft servo motor are fixedly provided with transmission shafts, both lower ends of the two bidirectional screws are rotatably penetrated through the inner bottom surface of the box, both lower ends of the two bidirectional screws are fixedly provided with first bevel gears, and both lower end surfaces of the two movable plates are embedded with mounting plates.

[0008] Further, one end of each of the two transmission shafts is fixedly provided with a second bevel gear, and the two first bevel gears are respectively meshedly connected with the two second bevel gears.

[0009] Further, both sides of the two movable plates are movably sleeved on the outer surfaces of the four fixed columns, and the midpoints of both sides of the two movable plates are threadedly sleeved on the upper ends and the lower ends of the outer surfaces of the two bidirectional screws.

[0010] Further, the upper ends of both sides of the front end surface of the box are rotatably provided with door plates, and the upper end surfaces of the two movable plates are embedded with heat shields.

[0011] Further, the lower end surfaces of the two mounting plates are embedded with heating pipes, and the upper ends of the midpoints of the two heating pipes are penetrated through the midpoints of the movable plates and the heat shields.

[0012] Further, the upper end midpoints of the two movable plates are clamped with electric heating devices, and the upper ends of the two heating pipes are clamped with the lower end midpoints of the two electric heating devices.

[0013] Further, the lower end midpoint of the inclined surface of the front end surface of the box is embedded with a control panel, and both sides of the lower end surface of the box are fixedly provided with supporting blocks.

[0014] The utility model has the advantages of the following beneficial effects:

[0015] 1、 the heating device of the utility model can quickly heat, after the mounting plate is embedded and arranged at the lower end of the movable plate, the heating pipe is embedded and fixed at the lower end surface of the mounting plate, the upper end of the heating pipe is connected with the electric heating device clamped and arranged at the upper end surface of the movable plate, the electric heating device can heat the heating pipe, the heat shield is embedded and arranged at the upper end of the movable plate, the heat shield can assist in heating when the material in the material box is heated, the heating pipe can heat the material better after the two movable plates are clamped and embedded on the upper end surface and the lower end surface of the fixed plate, and the lower end surface of the material box is provided with heat conduction holes, so that the heating pipe at the lower end can heat the material better.

[0016] 2. The heating device capable of rapid heating, by rotatingly embedding the bidirectional screw rods on the two sides of the box body, the movable plate is threadedly sleeved on the outer surfaces of the two bidirectional screw rods at the upper end and the lower end, the movable plate is driven to adjust the height of the heating pipe in the movable plate when the bidirectional screw rods rotate, the heating pipe in the movable plate can adjust the heating height of the material, and the four fixed columns fixedly arranged in the box body can movably connect the two sides of the two movable plates, so that the fixed columns can assist the movement of the movable plates. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a closed state axonometric view of the utility model;

[0018] Figure 2 is a first axonometric view of the utility model in an unfolded state;

[0019] Figure 3 is a second axonometric view of the utility model in an unfolded state;

[0020] Figure 4 is a box body cross-sectional view of the utility model;

[0021] Figure 5 is a heating structure axonometric view of the utility model;

[0022] Figure 6 is a movable plate cross-sectional view of the utility model.

[0023] Legend:

[0024] 1, box body; 2, door plate; 3, control panel; 4, support block; 5, electric heating device; 6, heat shield; 7, material box; 8, fixed column; 9, bidirectional screw rod; 10, movable plate; 11, fixed plate; 12, first bevel gear; 13, second bevel gear; 14, transmission shaft; 15, double-shaft servo motor; 16, mounting plate; 17, heating pipe. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0026] Reference Figures 1 to 6The utility model provides a kind of heating device capable of quick temperature rise, including box 1, fixedly arranged with fixed column 8 between the bottom surface and the inner top surface of box 1 two sides near front end and rear end, the upper end and the lower end of the outer surface of four fixed columns 8 are provided with movable plate 10, the midpoint of the inner top surface and the inner bottom surface of box 1 two sides are rotatably embedded with two-way screw rod 9, the midpoint between the inner wall of the two sides of box 1 is fixedly provided with fixed plate 11, and the front end surface of fixed plate 11 is movably embedded with material box 7;

[0027] The midpoint of the lower end of box 1 is connected and embedded with double-shaft servo motor 15, and the output end of the two sides of double-shaft servo motor 15 is fixedly provided with transmission shaft 14; the lower end of the two two-way screw rods 9 is rotatably penetrated through the inner bottom surface of box 1, and the lower end of the two two-way screw rods 9 is fixedly provided with first bevel gear 12; the lower end surface of the two movable plates 10 is embedded with mounting plate 16.

[0028] Specifically, after fixedly arranging fixed column 8 on the inside two sides near front end and rear end of box 1, two movable plates 10 can be movably sleeved on the outer surface of four fixed columns 8, so that movable plate 10 can be better lifted and moved; after rotatably embedding two-way screw rod 9 at the midpoint of the two sides inside box 1, movable plate 10 can be threadedly sleeved on the outer surface between the two two-way screw rods 9; when two-way screw rod 9 rotates, movable plate 10 can be lifted and moved; after fixedly arranging fixed plate 11 between the inner wall of the two sides of box 1, material box 7 can be movably embedded on the front end surface of fixedly arranged fixed plate 11; the movable plate 10 can drive the embedded mounting plate 16 and heating pipe 17 inside to heat the auxiliary material in material box 7.

[0029] Referring to Figure 4 One end of the two transmission shafts 14 is fixedly provided with second bevel gear 13, and the two first bevel gears 12 are meshingly connected with the two second bevel gears 13.

[0030] Specifically, after fixedly arranging transmission shaft 14 on the two sides of double-shaft servo motor 15 embedded in the lower end inside box 1, second bevel gear 13 can be fixedly arranged on one end of transmission shaft 14; after meshingly connecting second bevel gear 13 with first bevel gear 12 fixedly arranged on the lower end surface of two-way screw rod 9, double-shaft servo motor 15 can drive two two-way screw rods 9 to synchronously rotate.

[0031] Referring to Figure 4 And Figure 5 The two sides of the two movable plates 10 are movably sleeved on the outer surface of the four fixed columns 8, and the midpoints of the two sides of the two movable plates 10 are threadedly sleeved on the upper end and the lower end of the outer surface of the two two-way screw rods 9.

[0032] Specifically, the movable plate 10 is sleeved on the outer surface of the four fixed columns 8, which can better move up and down. The movable plate 10 is threaded on the outer surface of the upper end and the lower end of the bidirectional screw rod 9, which can better drive the movable plate 10 to move up and down in the box body 1. The two movable plates 10 can be embedded with the upper end face and the lower end face of the fixed plate 11. After embedding and connecting, the heating pipe 17 arranged in the movable plate 10 can better heat the material in the material box 7.

[0033] Referring to Figure 1 and Figure 2 , the door plate 2 is rotatably arranged on the upper end of the front end face of the box body 1. The upper end face of the two movable plates 10 is embedded with the heat shield 6.

[0034] Specifically, the door plate 2 is rotatably arranged on the front end face of the box body 1. When closed, it can form a sealed space inside the box body 1, which can prevent heat from escaping. The midpoint of the door plate 2 is made of transparent material, which can better observe the inside of the box body 1. The heat shield 6 is embedded on the upper end face of the movable plate 10, which can assist in heating and quickly heat up when heating.

[0035] Referring to Figure 5 and Figure 6 , the two mounting plates 16 are embedded with the heating pipes 17 at the lower end face. The upper end of the midpoint of the two heating pipes 17 penetrates the midpoint of the movable plate 10 and the heat shield 6.

[0036] Specifically, the heating pipe 17 is embedded and fixed on the lower end face of the mounting plate 16. The upper end of the midpoint of the heating pipe 17 penetrates the heat shield 6 and the movable plate 10, and is connected with the electric heating device 5.

[0037] Referring to Figure 5 and Figure 6 , the electric heating device 5 is connected to the upper end of the two movable plates 10. The upper end of the two heating pipes 17 is respectively connected to the midpoint of the lower end face of the two electric heating devices 5.

[0038] Specifically, the electric heating device 5 is connected to the upper end of the movable plate 10 by bolts. The electric heating device 5 can heat the heating pipe 17, so that the heating pipe 17 can heat the material in the material box 7. The electric heating device 5 is a conventional electric heater.

[0039] Referring to Figure 1 and Figure 2 , the control panel 3 is embedded in the midpoint of the lower end of the front end face of the box body 1. The support block 4 is fixedly arranged on the lower end face of the box body 1.

[0040] Specifically, after the control panel 3 is embedded at the lower end of the front end face of the box body 1, the control panel 3 can control the use of the double-shaft servo motor 15 and the two electric heaters, the control panel 3 is integrated with a button display screen, supports temperature setting, lifting speed adjustment and preset program calling, ensures heating uniformity through double-shaft synchronous control, and after the support block 4 is fixedly arranged at the lower end face of the box body 1, the support block 4 can assist in supporting the device, and the lower end face of the support block 4 is provided with a rubber pad, so that the device can be prevented from slipping when being placed on a smooth plane.

[0041] Working principle: in use, the worker can open the two panels arranged, pull out the material box 7 embedded in the movable plate 10, put the existing material to be heated into the material box 7, embed the material box 7 placed with the material into the front end face of the fixed plate 11, close the two door plates 2, start the double-shaft servo motor 15 arranged at the lower end of the box body 1 through the control panel 3 arranged, so that the rotating bidirectional screw rod 9 drives the two movable plates 10 to move up and down, after the movable plate 10 and the fixed plate are embedded, the double-shaft servo motor 15 is closed through the control panel 3, and then the two electric heating devices 5 arranged are opened through the control panel 3, so that the heating pipe 17 arranged can heat the material in the material box 7.

[0042] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and not for limiting the present application, although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, it still can modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features, any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application, should be included in the protection scope of the present application.

Claims

1. A heating device capable of rapid heating, comprising a housing (1), characterized in that: Fixed columns (8) are fixedly installed on both sides of the inner bottom surface and inner top surface of the box (1) near the front end and near the rear end. Movable plates (10) are installed on the upper and lower ends of the outer surfaces of the four fixed columns (8). Bidirectional screws (9) are rotatably embedded at the midpoint of both sides of the inner top surface and inner bottom surface of the box (1). Fixed plates (11) are fixedly installed at the midpoint of the inner walls on both sides of the box (1). A material box (7) is movably embedded on the front end of the fixed plate (11). A dual-axis servo motor (15) is snapped into the lower midpoint of the housing (1). A transmission shaft (14) is fixedly installed on both sides of the output end of the dual-axis servo motor (15). The two bidirectional screws (9) rotate through the lower ends of the housing (1) on both sides of the bottom surface. A first bevel gear (12) is fixedly installed on the lower ends of the two bidirectional screws (9). An installation plate (16) is embedded in the lower end surface of the two movable plates (10).

2. The heating device capable of rapid heating according to claim 1, characterized in that: Each of the two drive shafts (14) has a second bevel gear (13) fixedly installed at one end, and the two first bevel gears (12) are respectively meshed with the two second bevel gears (13).

3. The heating device capable of rapid heating according to claim 1, characterized in that: The two movable plates (10) are respectively movably sleeved on the outer surfaces of the four fixed columns (8) on both sides, and the midpoints of the two movable plates (10) are respectively threaded onto the upper and lower ends of the outer surfaces of the two bidirectional screws (9).

4. The heating device capable of rapid heating according to claim 1, characterized in that: The front end of the box (1) is provided with door panels (2) on both sides near the upper end, and the upper end of the two movable plates (10) is provided with heat insulation covers (6).

5. A heating device capable of rapid heating according to claim 1, characterized in that: Heating tubes (17) are embedded in the lower end face of the two mounting plates (16), and the upper end of the two heating tubes (17) passes through the midpoint of the movable plate (10) and the midpoint of the heat insulation cover (6).

6. A heating device capable of rapid heating according to claim 5, characterized in that: Electric heating devices (5) are snapped onto the upper midpoint of both movable plates (10), and the upper ends of the two heating tubes (17) are snapped onto the lower midpoints of the two electric heating devices (5).

7. A heating device capable of rapid heating according to claim 1, characterized in that: A control panel (3) is embedded at the midpoint of the lower inclined surface of the front end face of the box (1), and support blocks (4) are fixedly installed on both sides of the lower end face of the box (1).

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