Furnace door flange structure and vertical furnace

Abstract

The utility model provides a furnace door flange structure and a vertical furnace, the furnace door flange structure comprises a flange plate body, the flange plate body is provided with a plurality of furnace mouths communicated with a reaction chamber, and the furnace mouths are arranged corresponding to movable furnace doors; the furnace mouth protruding flanges are arranged on the side, away from the reaction cavity, of the flange plate body and surround the corresponding furnace mouths, and the ends, away from the flange plate body, of the furnace mouth protruding flanges abut against the first sealing pieces in the movable furnace door; according to the utility model, the service life of the sealing element can be prolonged, the manual operation and maintenance time can be shortened, the manual operation and maintenance cost is reduced, and the investment and energy consumption of equipment are reduced.

Description

Technical Field

[0001] This utility model belongs to the field of solar photovoltaic cell manufacturing, and more specifically, it relates to a furnace door flange structure and a vertical furnace. Background Technology

[0002] Currently, the photovoltaic industry uses two types of furnaces for processes such as diffusion, oxidation, annealing, doping, PECVD (plasma-enhanced chemical vapor deposition), and LPCVD (low-pressure chemical vapor deposition): vertical furnaces and horizontal furnaces. Both types of furnaces require silicon wafers or crystals to be loaded into a specific carrier and fed into the reaction chamber inside the furnace for processing. By heating the reaction chamber and introducing specific reaction gases, specific processes such as coating, diffusion, oxidation, and thin film deposition are achieved on the silicon wafers or crystals.

[0003] In the existing layout of vertical furnaces, the furnace cover is fixed, while the furnace door is movable, and the entry and exit of the carrier can be controlled by opening and closing the furnace door. When the furnace door is first opened, a large amount of heat rushes out, which adversely affects the service life of the seals at the furnace door end.

[0004] Therefore, how to extend the service life of the seals at the furnace door end has become an urgent problem to be solved. Utility Model Content

[0005] The purpose of this utility model is to provide a furnace door flange structure and a vertical furnace to solve the problem that the sealing parts at the furnace door end are easily damaged by high temperatures in the prior art.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] This utility model first provides a furnace door flange structure, which is disposed at the opening end of the reaction chamber inside the furnace, including:

[0008] The flange body has multiple furnace openings that communicate with the reaction chamber, and the furnace openings are correspondingly set with the movable furnace door;

[0009] Multiple furnace opening raised flanges are located on the side of the flange body away from the reaction chamber and are arranged around the corresponding furnace openings. The end of the furnace opening raised flange away from the flange body abuts against the first sealing element in the movable furnace door.

[0010] Furthermore, it also includes multiple fixed flanges, each fixed flange including an external protrusion that protrudes from the flange body on the side away from the reaction chamber, with the end of the external protrusion away from the flange body abutting against a second seal in a removable ferrule.

[0011] Furthermore, the flange body has a central hole for the rotating connection end of the boat bracket that carries the carrier in the reaction chamber to pass through. An inner convex ring is provided around the central hole on the side of the flange body away from the reaction chamber, and an outer convex ring is provided on the side edge of the flange body.

[0012] Furthermore, it also includes multiple reinforcing ribs, which are spaced apart on the side of the flange body away from the reaction chamber, and the opposite ends of the reinforcing ribs are connected to the inner convex ring and the outer convex ring.

[0013] Furthermore, it also includes a cover and multiple first baffles. The first baffles are connected between two adjacent reinforcing ribs and together with the inner or outer convex rings, they form an open water-cooled chamber. The reinforcing ribs have through holes that connect two adjacent water-cooled chambers. The cover is placed on the flange body and seals the openings.

[0014] Furthermore, it also includes multiple second-stage water plates, which are connected between two adjacent reinforcing ribs and divide the water-cooled chamber into multiple sub-chambers.

[0015] Furthermore, the sidewall of the cover is fitted to the outer convex ring by a third sealing element.

[0016] Furthermore, the side edge of the flange body is provided with multiple fixing lugs for fixing the furnace door flange structure.

[0017] Furthermore, the raised flange at the furnace opening is provided with an insulation layer and a heat insulation layer that separates the insulation layer from the movable furnace door.

[0018] This utility model also provides a vertical furnace, including a furnace body with a reaction chamber and a furnace door flange structure as described above, the furnace door flange structure being disposed at the opening end of the reaction chamber.

[0019] The beneficial effects of the furnace door flange structure and vertical furnace provided by this utility model are as follows:

[0020] 1. A corresponding furnace opening raised flange is installed at the furnace opening of the flange body. The raised shape of the furnace opening raised flange makes the first sealing element in the movable furnace door away from the furnace opening, thereby keeping the first sealing element away from the heat source and helping to extend the service life of the first sealing element.

[0021] 2. The furnace opening flange is equipped with a heat insulation layer and a heat insulation layer to form a heat insulation and heat-insulating structure. This can ensure the uniformity of the furnace opening temperature and at the same time prevent heat from being transferred to the movable furnace door, so as to prevent excessive heat from damaging the movable furnace door and the first seal.

[0022] 3. The fixed flange includes an external protrusion. The protruding shape of the external protrusion keeps the second seal in the removable sleeve away from the flange body, thereby keeping the second seal away from the heat source and helping to extend the service life of the second seal.

[0023] 4. Form a single-layer or multi-layer water-cooled structure to ensure the performance of the furnace door flange structure at high temperatures and reduce deformation. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a front view of the furnace door flange structure in this utility model;

[0026] Figure 2 This is a perspective view of the furnace door flange structure in this utility model;

[0027] The main markings in the attached figures are as follows:

[0028] 1. Flange body; 2. Furnace opening; 3. Furnace opening raised flange; 4. Fixed lug; 5. Fixed flange; 6. Center hole; 7. Inner raised ring; 8. Outer raised ring; 9. Reinforcing rib; 10. Reinforcing plate; 11. Water baffle. Detailed Implementation

[0029] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0030] In existing vertical furnace layouts, the furnace lid is fixed, while the small furnace door at the main door end is movable. The small door controls the entry and exit of the carrier. When the small door is first opened, a large amount of heat rushes out, negatively impacting the lifespan of the door's seals. Furthermore, with increasing cost reduction and efficiency improvements, production capacity is growing, leading to larger reaction chamber volumes and larger furnace door diameters. This makes replacing the door seals increasingly time-consuming and labor-intensive. Moreover, due to heat loss, when the carrier filled with silicon wafers to be processed is placed into the reaction chamber, it needs to be reheated, resulting in further energy waste.

[0031] In response to this, this utility model proposes a furnace door flange structure and a vertical furnace, which can extend the service life of the seals at different locations, reduce heat loss caused by frequent replacement of seals, and at the same time reduce the time and cost of manual operation and maintenance, as well as reduce equipment investment and energy consumption.

[0032] In practical applications, the furnace door flange structure is located at the open end of the reaction chamber inside the furnace.

[0033] Please refer to the following: Figure 1 and Figure 2 The furnace door flange structure includes:

[0034] The flange body 1 has multiple furnace openings 2 that communicate with the reaction chamber, and the furnace openings 2 are correspondingly set with the movable furnace door;

[0035] Multiple furnace opening protruding flanges 3 are located on the side of the flange body 1 away from the reaction chamber and are arranged around the corresponding furnace opening 2. The end of the furnace opening protruding flange 3 away from the flange body 1 abuts against the first sealing element in the movable furnace door.

[0036] This utility model adopts a furnace opening protrusion flange 3 with a corresponding furnace opening 2 at the flange body 1. The protrusion shape of the furnace opening protrusion flange 3 makes the first sealing element in the movable furnace door move away from the furnace opening 2, thereby keeping the first sealing element away from the heat source and helping to extend the service life of the first sealing element.

[0037] It should be noted that the furnace opening 2 is connected and fitted to the movable furnace door to achieve a seal on the reaction chamber. The number of furnace opening raised flanges 3 is the same as that of furnace opening 2, and the number of furnace opening raised flanges 3 can be set to 2 or 4, etc. Preferably, the number of furnace opening raised flanges 3 is set to 2, and the two furnace opening raised flanges 3 can be arranged in a straight line or diagonally.

[0038] In some embodiments, the furnace opening protruding flange 3 is provided with an insulation layer and a heat insulation layer that separates the insulation layer from the movable furnace door.

[0039] The furnace opening flange 3 is equipped with a heat insulation layer and a heat insulation layer to form a heat insulation and heat-insulating structure. This can ensure the uniformity of the temperature at the furnace opening 2, while also preventing heat from being transferred to the movable furnace door, thus preventing excessive heat from damaging the movable furnace door and the first seal.

[0040] It should be noted that the thermal insulation layer is made of thermal insulation cotton, and the heat insulation layer is made of heat insulation cotton.

[0041] In some embodiments, such as Figure 2 As shown, the side edge of the flange body 1 is provided with multiple fixing lugs 4 for fixing the furnace door flange structure.

[0042] Multiple fixing lugs 4 are provided on the flange body 1 to facilitate fixing the entire furnace door flange structure to the frame.

[0043] It should be noted that the number of fixing lugs 4 can be set to 6, 8, or 10, etc., and is not limited here. Moreover, the number and position of fixing lugs 4 can be adjusted according to the diameter of flange body 1. The shape of fixing lugs 4 can be square, semi-cylindrical, or irregular, etc., and is not limited here.

[0044] In some embodiments, such as Figure 2 As shown, the furnace door flange structure also includes multiple fixed flanges 5. The fixed flange 5 includes an external protrusion that protrudes from the flange body 1 on the side away from the reaction chamber. The end of the external protrusion away from the flange body 1 abuts against the second seal in the removable sleeve.

[0045] The present invention provides a fixed flange 5 with an external protrusion. The protruding shape of the external protrusion allows the second seal in the detachable sleeve to be moved away from the flange body 1, thereby keeping the second seal away from the heat source and helping to extend the service life of the second seal.

[0046] It should be noted that the number of fixed flanges 5 can be set to 4, 8, or 10, etc., and the number and position of the fixed flanges 5 can be adjusted according to the diameter of the flange body 1. Alternatively, all the fixed flanges 5 can be divided into two groups of fixed flanges spaced apart between the two furnace openings 2. The number of fixed flanges 5 in different fixed flange groups can be the same or different. For example, each of the two fixed flange groups consists of 5 fixed flanges. Furthermore, the fixed flanges 5 can be used for evacuation, observation windows, or auxiliary heating. Preferably, when the fixed flange 5 is used for auxiliary heating, the fixed flange 5 is hollow inside and contains an electric heating wire. The fixed flange 5 also includes an inner protrusion that passes through the flange body 1 and extends into the reaction chamber. This inner protrusion extends into the reaction chamber, compensating for the low-temperature zone at the bottom of the furnace body along the axial direction, thereby ensuring the temperature uniformity within the furnace body.

[0047] In some embodiments, such as Figure 2 As shown, the flange body 1 has a central hole 6, which is used for the rotating connection end of the boat bracket that carries the carrier in the reaction chamber to pass through. The flange body 1 has an inner convex ring 7 around the central hole 6 on the side away from the reaction chamber, and an outer convex ring 8 on the side edge of the flange body 1.

[0048] The presence of an inner convex ring 7 and an outer convex ring 8 on the flange body 1 enhances the overall stability of the furnace door flange structure and facilitates the addition of more components to the inner convex ring 7, the outer convex ring 8, and the space between them, making expansion easier.

[0049] In some embodiments, the furnace door flange structure further includes a plurality of reinforcing ribs 9, which are spaced apart on the side of the flange body 1 away from the reaction chamber, and the opposite ends of the reinforcing ribs 9 are connected to the inner convex ring 7 and the outer convex ring 8.

[0050] By adding multiple reinforcing ribs 9 between the inner convex ring 7 and the outer convex ring 8 on the flange body 1, the overall stability of the furnace door flange structure is significantly improved.

[0051] It should be noted that the number of reinforcing ribs 9 can be set to 6, 8 or 10, etc., and the number and position of the reinforcing ribs 9 can be adjusted according to the diameter of the flange body 1.

[0052] In addition, multiple reinforcing plates 10 can be installed on the flange body 1 between the furnace opening raised flange 3 and the inner raised ring 7 to further improve the overall stability of the furnace door flange structure.

[0053] In some embodiments, the furnace door flange structure further includes a cover and a plurality of first baffles. The first baffles are connected between two adjacent reinforcing ribs 9 and together with the inner convex ring 7 or the outer convex ring 8, they form an open water-cooled chamber. The reinforcing ribs 9 have through holes that connect the two adjacent water-cooled chambers, thereby forming a single-layer water-cooled structure to ensure the performance of the metal furnace door flange structure at high temperatures and reduce deformation.

[0054] At the same time, the cover is placed on the flange body 1 and the opening is sealed. The side wall of the cover and the outer convex ring 8 are fitted together by a third sealing element, which can ensure that the cover and the flange body 1 are sealed together to prevent adverse effects caused by cooling water leakage.

[0055] In addition, the furnace door flange structure also includes multiple second water plates, which are connected between two adjacent reinforcing ribs 9 and divide the water-cooled chamber into multiple sub-chambers, thus forming a multi-layer water-cooled structure, which can better ensure the service life of the furnace door flange structure.

[0056] It should be noted that the flange body 1 may be provided with single or multiple layers of baffle plates 11. On the one hand, this can enhance the overall stability of the furnace door flange structure. On the other hand, it can cooperate with other components on the flange body 1 to form a cooling water flow channel to cool the local or overall structure of the furnace door flange.

[0057] In a first optional embodiment, a single-layer baffle plate 11, i.e., a first baffle plate, is provided on the flange body 1. Specifically, the first baffle plate is connected between two adjacent reinforcing ribs 9 and together with the inner convex ring 7, forms an open water-cooled chamber. The reinforcing ribs 9 have through holes connecting the two adjacent water-cooled chambers, thereby forming a cooling water flow channel. The flange body 1 is also provided with an inlet and an outlet that communicate with the cooling water flow channel. This embodiment mainly targets the cooling of a local area on the flange body 1 located beside the central hole 6.

[0058] In a second optional embodiment, a single-layer baffle plate 11, i.e., a first baffle plate, is provided on the flange body 1. Specifically, the first baffle plate is connected between two adjacent reinforcing ribs 9 and together with the outer protruding ring 8, forms an open water-cooled chamber. The reinforcing ribs 9 have through holes connecting the two adjacent water-cooled chambers, thereby forming a cooling water flow channel. The flange body 1 is also provided with an inlet and an outlet that communicate with the cooling water flow channel. The cooling water flowing into the cooling water flow channel will flow through the fixed flange 5. This embodiment mainly targets the cooling of a local area on the flange body 1 located next to the fixed flange 5.

[0059] In a third optional embodiment, a single-layer baffle plate 11, i.e., a first baffle plate, is provided on the flange body 1. The first baffle plate is connected between two adjacent reinforcing ribs 9, forming not only a first water-cooled chamber with an opening together with the inner convex ring 7, but also a second water-cooled chamber with an opening together with the outer convex ring 8. The reinforcing ribs 9 have through holes connecting the two adjacent first water-cooled chambers and through holes connecting the two adjacent second water-cooled chambers, thereby forming a first cooling water channel and a second cooling water channel. In addition, when the first cooling water channel is connected to the second cooling water channel, the flange body 1 may only have an inlet and an outlet connected to either the first or second cooling water channel. When the first cooling water channel and the second cooling water channel are not connected, the flange body 1 has a first inlet and a first outlet connected to the first cooling water channel, and a second inlet and a second outlet connected to the second cooling water channel. This embodiment is mainly for cooling the entire furnace door flange structure.

[0060] In the fourth optional embodiment, the flange body 1 is provided with a double-layered water baffle 11, namely a first water baffle and a second water baffle. The first water baffle belongs to the first layer, and the second water baffle belongs to the second layer. The number of second water baffles can be less than the number of first water baffles. The first water baffle is connected between two adjacent reinforcing ribs 9 and together with the inner convex ring 7, it forms an open water-cooled chamber. The reinforcing ribs 9 have through holes that connect the two adjacent water-cooled chambers. At the same time, the second water baffle is connected between two adjacent reinforcing ribs 9 and divides the water-cooled chamber it is in into a first sub-chamber and a second sub-chamber. This forms a meandering cooling water flow channel, increasing the contact area and contact time between the cooling water and the furnace door flange structure, thereby significantly improving the cooling efficiency and better ensuring the service life of the furnace door flange structure.

[0061] The vertical furnace provided by this utility model includes a furnace body with a reaction chamber and a furnace door flange structure, which is disposed at the opening end of the reaction chamber. It should be understood that the specific structure of the furnace door flange structure has been described in detail above and will not be repeated here.

[0062] The furnace door flange structure and vertical furnace proposed in this utility model are equipped with a raised flange at the furnace opening and a fixed flange with an outward protrusion, keeping the corresponding sealing elements away from the heat source, thereby extending the service life of the sealing elements. Furthermore, a single-layer or multi-layer water-cooling structure is provided to ensure the performance of the furnace door flange structure at high temperatures and reduce deformation. In addition, a heat-insulating structure is provided on the raised flange at the furnace opening to ensure temperature uniformity at the furnace opening and to guarantee the performance of the movable furnace door.

[0063] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A furnace door flange structure, located at the opening end of the reaction chamber inside the furnace, characterized in that, include: The flange body has multiple furnace openings that communicate with the reaction chamber, and the furnace openings are correspondingly arranged with the movable furnace door; Multiple furnace opening protruding flanges are disposed on the side of the flange body away from the reaction chamber and arranged around the corresponding furnace openings. The end of the furnace opening protruding flange away from the flange body abuts against the first sealing element in the movable furnace door.

2. The furnace door flange structure as described in claim 1, characterized in that, It also includes multiple fixed flanges, each fixed flange having an external protrusion that protrudes from the flange body on the side away from the reaction chamber, and the end of the external protrusion away from the flange body abuts against a second seal in a removable ferrule.

3. The furnace door flange structure as described in claim 1, characterized in that, The flange body has a central hole for the rotating connection end of the boat bracket located in the reaction chamber to pass through. The flange body has an inner convex ring around the central hole on the side away from the reaction chamber, and an outer convex ring on the side edge of the flange body.

4. The furnace door flange structure as described in claim 3, characterized in that, It also includes multiple reinforcing ribs, which are spaced apart on the side of the flange body away from the reaction chamber, and the opposite ends of the reinforcing ribs are connected to the inner convex ring and the outer convex ring.

5. The furnace door flange structure as described in claim 4, characterized in that, It also includes a cover and a plurality of first baffles. The first baffles are connected between two adjacent reinforcing ribs and together with the inner convex ring or the outer convex ring, they form a water-cooled chamber with an opening. The reinforcing ribs have through holes that connect two adjacent water-cooled chambers. The cover is placed on the flange body and seals the opening.

6. The furnace door flange structure as described in claim 5, characterized in that, It also includes multiple second water baffles, which are connected between two adjacent reinforcing ribs and divide the water-cooled chamber into multiple sub-chambers.

7. The furnace door flange structure as described in claim 5, characterized in that, The sidewall of the cover is fitted to the outer convex ring by a third sealing element.

8. The furnace door flange structure as described in any one of claims 1-7, characterized in that, The side edge of the flange body is provided with multiple fixing lugs for fixing the furnace door flange structure.

9. The furnace door flange structure as described in any one of claims 1-7, characterized in that, The furnace opening flange is provided with an insulation layer and a heat insulation layer that isolates the insulation layer from the movable furnace door.

10. A vertical furnace, characterized in that, It includes a furnace body having a reaction chamber, and a furnace door flange structure as described in any one of claims 1-9, wherein the furnace door flange structure is disposed at the open end of the reaction chamber.

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