Locking mechanism for aligning mask of double-sided exposure machine
By designing a locking mechanism for a double-sided exposure machine, parallel positioning and clamping of the upper and lower photomasks are achieved, solving the substrate misalignment problem, improving the accuracy of circuit transfer, and reducing equipment costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-09
- Publication Date
- 2026-03-24
AI Technical Summary
Existing double-sided exposure machines are prone to substrate misalignment when the upper and lower pressure plates press against the substrate synchronously, which affects the accuracy of circuit transfer and is also costly.
A locking mechanism is adopted, including a lower frame, an upper frame, a C-shaped frame and a driving mechanism. The upper and lower photomasks are parallelly positioned and clamped through lifting and flipping mechanisms, which can adapt to substrates of different thicknesses.
It effectively avoids substrate displacement, improves the accuracy of circuit transfer, and reduces equipment costs.
Smart Images
Figure CN224035764U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to double -sided exposure machine technical field, specifically a kind of for double -sided exposure machine mask plate to flat locking mechanism. BACKGROUND
[0002] Double -sided exposure machine is one of the core equipment in circuit board production, by two mask plate (also known as photomask, light mask, film plate etc.) clamping substrate and the pattern on mask plate is exposed and is transferred to substrate, conventional double -sided exposure machine mostly uses substrate, and the working form of upper and lower pressing plate is moved to press substrate;But application found that it must be ensured that upper and lower pressing plate is simultaneously synchronous and is pressed on substrate, otherwise substrate is easily deviated, directly influence the precision of circuit transfer, but ensure that upper and lower pressing plate is synchronous motion, the precision and structure layout of mechanism itself have higher requirement, and equipment cost is higher.
[0003] Therefore, we propose a kind of for double -sided exposure machine mask plate to flat locking mechanism. INVENTION CONTENTS
[0004] The utility model is directed to provide a kind of for double -sided exposure machine mask plate to flat locking mechanism, to solve the problem raised in the above background.
[0005] To achieve the above object, the utility model provides the following technical scheme:
[0006] A kind of for double -sided exposure machine mask plate to flat locking mechanism, including lower frame, the bottom of the lower frame is equipped with multiple sliders, the upper surface of the lower frame is detachably installed with lower mask plate, the lower frame is connected with the frame of the character by lifting mechanism, the inner side of the frame of the character is hinged with upper frame by first hinged seat, the lower surface of the upper frame is detachably installed with upper mask plate, the upper mask plate is located directly above lower mask plate, drive mechanism for driving upper frame to be reversed relative to the frame of the character is provided on the frame of the character.
[0007] As a further scheme of the utility model: the drive mechanism includes two symmetrical fixed mounting connection seat on the both sides of lower frame, the bottom of the connection seat is fixedly installed with first air cylinder, the push rod end of the first air cylinder is fixedly connected with the bottom of the frame of the character after passing through connection seat.
[0008] As a further scheme of the utility model: the drive mechanism includes two symmetrical second air cylinders arranged at the top of the frame of the character, the cylinder body end of the second air cylinder is hinged with the top of the frame of the character through second hinged seat, the push rod end of the second air cylinder is hinged with the top of upper frame through third hinged seat.
[0009] As a further scheme of the utility model: the lower mask and the upper mask are provided with positioning frames, and the positioning frames are provided with notches.
[0010] As a further scheme of the utility model: the top of the lower frame body is fixedly provided with a plurality of first positioning pins, the top of the upper frame body and the positioning frame is provided with a first positioning hole corresponding to each first positioning pin, and the diameter of the first positioning hole is matched with the outer diameter of the first positioning pin.
[0011] As a further scheme of the utility model: the top end of the first positioning pin is integrally provided with a guide cone.
[0012] As a further scheme of the utility model: the top surface of the lower frame body and the bottom surface of the upper frame body are provided with mounting grooves, the lower mask and the upper mask are located in the corresponding mounting grooves, a plurality of screws are arranged in the mounting grooves through the stepped holes, the mounting grooves are provided with screw holes matched with the screws, a plurality of second positioning pins are fixedly arranged in the mounting grooves, and the lower mask and the upper mask are provided with second positioning holes matched with the second positioning pins.
[0013] Compared with the prior art, the utility model has the advantages that:
[0014] In use, the utility model drives the upper frame body to move upward by a distance through the lifting mechanism, drives the upper frame body to overturn by a certain angle relative to the frame through the driving mechanism, then positions and places the circuit board substrate on the lower mask, resets the upper frame body through the driving mechanism, makes the upper mask and the lower mask parallel, drives the frame to move downward through the lifting mechanism, and positions and clamps the circuit board substrate through the upper mask and the lower mask, thereby avoiding displacement of the circuit board substrate and adapting to circuit board substrates with different thicknesses. BRIEF DESCRIPTION OF DRAWINGS
[0015] Fig. 1 It is a structural schematic view of a locking mechanism for mask flatness of a double-sided exposure machine.
[0016] Fig. 2 It is a structural schematic view of a sliding block in a locking mechanism for mask flatness of a double-sided exposure machine.
[0017] Fig. 3 It is a structural schematic view of a second positioning pin in a locking mechanism for mask flatness of a double-sided exposure machine.
[0018] Wherein, the lower frame body 1, the lower mask 2, the upper frame body 3, the upper mask 4, the positioning frame 5, the notch 6, the first positioning pin 7, the guide cone 8, the first positioning hole 9, the mounting groove 10, the second positioning pin 11, the second positioning hole 12, the stepped hole 13, the screw 14, the threaded hole 15, the connecting seat 16, the first air cylinder 17, the U-shaped frame 18, the first hinged seat 19, the second air cylinder 20, the second hinged seat 21, the third hinged seat 22, the sliding block 23. DETAILED DESCRIPTION
[0019] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.
[0020] Please refer to Figs. 1-3 In the embodiments of the utility model, a mask flatness locking mechanism for a double-sided exposure machine comprises a lower frame body 1, the bottom of the lower frame body 1 is provided with a plurality of sliding blocks 23, and the lower frame body 1 is slidably installed on the guide rail of the double-sided exposure machine through the sliding blocks 23, the upper surface of the lower frame body 1 is detachably provided with a lower mask 2, the lower frame body 1 is connected with a U-shaped frame 18 through a lifting mechanism, the inner side of the U-shaped frame 18 is hingedly provided with an upper frame body 3 through a first hinged seat 19, the lower surface of the upper frame body 3 is detachably provided with an upper mask 4, the upper mask 4 is located directly above the lower mask 2, and the U-shaped frame 18 is provided with a driving mechanism for driving the upper frame body 3 to rotate relative to the U-shaped frame 18.
[0021] The utility model discloses a scheme above, when using, through lifting mechanism drive U-shaped frame 18 drive upper frame body 3 to move one end distance with, through driving mechanism drive upper frame body 3 relative to U-shaped frame 18 rotates a certain angle, after can be positioned on the lower mask 2 with the line board substrate, then through driving mechanism reset upper frame body 3, make upper mask 4 and lower mask 2 mutually parallel, start lifting mechanism drive U-shaped frame 18 to move down, can use upper mask 4 and lower mask 2 to the line board substrate positioning clamping, not only can avoid the line board substrate to produce displacement, still can adapt to the line board substrate of different thickness, and the use effect is good.
[0022] Specifically combined Fig. 1 In an embodiment of the utility model, the driving mechanism comprises two connecting seats 16 symmetrically and fixedly installed on the two sides of the lower frame body 1, the bottom of each connecting seat 16 is fixedly provided with a first air cylinder 17, and the push rod end of the first air cylinder 17 is fixedly connected with the bottom of the U-shaped frame 18 after penetrating out of the connecting seat 16.
[0023] By starting the first cylinder 17, the frame 18 can be driven to move up and down relative to the lower frame body 1, which is simple and stable.
[0024] In combination with the above Fig. 1 In an embodiment of the present application, the driving mechanism comprises two second cylinders 20 symmetrically arranged on the top of the frame 18, the cylinder body end of the second cylinder 20 is hinged to the top of the frame 18 through a second hinge seat 21, and the push rod end of the second cylinder 20 is hinged to the top of the upper frame body 3 through a third hinge seat 22. By starting the second cylinder 20, the upper frame body 3 can be driven to move in reverse relative to the frame 18.
[0025] In combination with the above Fig. 2 And 3 In an embodiment of the present application, a positioning frame 5 is arranged between the lower mask plate 2 and the upper mask plate 4, and a notch 6 is formed in the positioning frame 5. The positioning frame 5 facilitates positioning and placing the circuit board substrate on the lower mask plate 2.
[0026] In combination with the above Figs. 1-3 In an embodiment of the present application, a plurality of first positioning pins 7 are fixedly installed on the top of the lower frame body 1, a first positioning hole 9 is arranged through the corresponding position of each first positioning pin 7 on the top of the upper frame body 3 and the positioning frame 5, the diameter of the first positioning hole 9 is matched with the outer diameter of the first positioning pin 7, and a guide cone 8 is integrally formed at the top end of the first positioning pin 7.
[0027] The first positioning pin 7 and the guide cone 8 facilitate accurate positioning of the upper frame body 3 and the positioning frame 5 on the lower frame body 1.
[0028] In combination with the above Fig. 3 In an embodiment of the present application, mounting grooves 10 are formed in the top surface of the lower frame body 1 and the bottom surface of the upper frame body 3, the lower mask plate 2 and the upper mask plate 4 are located in the corresponding mounting grooves 10, a plurality of screws 14 are arranged through the stepped holes 13 on the lower mask plate 2 and the upper mask plate 4, threaded holes 15 matched with the screws 14 are formed in the mounting grooves 10, a plurality of second positioning pins 11 are fixedly installed in the mounting grooves 10, and second positioning holes 12 matched with the second positioning pins 11 are formed in the lower mask plate 2 and the upper mask plate 4. The cooperation of the mounting grooves 10, the stepped holes 13, the screws 14, the threaded holes 15, the second positioning pins 11 and the second positioning holes 12 facilitates positioning and installation of the lower mask plate 2 and the upper mask plate 4 in the mounting grooves 10.
[0029] Although the utility model has been explained in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or make equivalent replacement to part of the technical features, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A mask plate alignment locking mechanism for a double-side exposure machine, characterized by: The utility model provides a mask plate automatic lifting device, including lower frame (1), the bottom of lower frame (1) is installed with a plurality of sliders (23), the upper surface of lower frame (1) is detachably installed with lower mask plate (2), and lower frame (1) is connected with the frame (18) through the lifting mechanism, the inner side of frame (18) is hinged with upper frame (3) through first hinging seat (19), and the lower surface of upper frame (3) is detachably installed with upper mask plate (4), and upper mask plate (4) is located directly above lower mask plate (2), and drive mechanism for driving upper frame (3) to overturn relative to frame (18) is arranged on frame (18).
2. The mask plate aligning and locking mechanism for a double side exposure machine according to claim 1, wherein: The drive mechanism includes two symmetrical connecting seats (16) fixedly installed on both sides of the lower frame (1), and the bottom of the connecting seat (16) is fixedly installed with a first air cylinder (17), and the push rod end of the first air cylinder (17) is fixedly connected with the bottom of the frame (18) after penetrating out of the connecting seat (16).
3. The mask plate aligning and locking mechanism for a double side exposure machine according to claim 1, wherein: The drive mechanism includes two symmetrical second air cylinders (20) arranged on the top of the frame (18), and the cylinder body end of the second air cylinder (20) is hinged with the top of the frame (18) through a second hinging seat (21), and the push rod end of the second air cylinder (20) is hinged with the top of the upper frame (3) through a third hinging seat (22).
4. The mask plate aligning and locking mechanism for a double side exposure machine according to claim 1, wherein: A positioning frame (5) is arranged between the lower mask plate (2) and the upper mask plate (4), and a notch (6) is formed in the positioning frame (5).
5. The mask plate aligning and locking mechanism for a double side exposure machine according to claim 4, wherein: A plurality of first positioning pins (7) are fixedly installed on the top of the lower frame (1), and a first positioning hole (9) is penetratingly arranged at the corresponding position of each first positioning pin (7) on the top of the upper frame (3) and the positioning frame (5), and the hole diameter of the first positioning hole (9) is matched with the outer diameter of the first positioning pin (7).
6. The mask plate aligning and locking mechanism for a double side exposure machine according to claim 5, wherein: A guide cone (8) is integrally formed at the top end of the first positioning pin (7).
7. The mask plate aligning and locking mechanism for a double side exposure machine according to claim 1, wherein: A mounting groove (10) is formed in the top surface of the lower frame (1) and the bottom surface of the upper frame (3), and the lower mask plate (2) and the upper mask plate (4) are located in the corresponding mounting groove (10), a plurality of screws (14) are penetratingly arranged in the lower mask plate (2) and the upper mask plate (4) through a stepped hole (13), a threaded hole (15) matched with the screw (14) is formed in the mounting groove (10), a plurality of second positioning pins (11) are fixedly installed in the mounting groove (10), and a second positioning hole (12) matched with the second positioning pin (11) is formed in the lower mask plate (2) and the upper mask plate (4).