Protective device for wafer inspection

Abstract

The utility model relates to the technical field of wafer inspection, in particular to a protection device for wafer inspection, which comprises a monolithic box and a protection auxiliary assembly, the single-chip box comprises a chip box upper cover and a chip box bottom; one end of the wafer box upper cover is connected with the wafer box bottom, a wafer is arranged in the wafer box bottom, and protection auxiliary assemblies are arranged in the wafer box upper cover and the wafer box bottom; the wafer is inspected and protected through the designed single-chip box, the wafer is protected by the upper cover and the lower cover, the upper cover of the box is provided with a pattern, the surface abnormity of the wafer can be inspected or operated, the wafer can be used when the front and back sides of the wafer are abnormal, and the actual use requirement is met.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer inspection technical field, concretely is a wafer inspection protection device. BACKGROUND

[0002] The Chinese patent file with the announcement number CN212392221U discloses a wafer protection device, which proposes that in the manufacturing process of semiconductor products, a photoetching machine is a key equipment in the field of semiconductor manufacturing, and when a wafer is processed in the photoetching machine, a protection device is usually used to protect the edge of the wafer, and then the protection device is positioned with the equipment, so as to realize the protection and positioning of the wafer. However, the protection device is used frequently during use, which can easily cause wear of the positioning part, and the positioning accuracy of the protection device will decrease. When the positioning accuracy deviation exceeds a certain value, the protection device cannot be used. The protection device has high manufacturing cost, thereby causing high use cost and a large amount of waste. The solution is that the wafer is arranged in the hollow part, and the edge position of the wafer abuts against the inner ring surface to form protection and positioning of the wafer edge.

[0003] The above-mentioned scheme and the prior art need to check the abnormality of the wafer back and wafer edge of the wafer. When there is no special protection device for protecting the wafer, the wafer without the protection device will be damaged during use due to the very thin thickness of the wafer, which will affect the normal use of the wafer and cannot meet the actual use requirement. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a wafer inspection protection device to solve the problems in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a wafer inspection protection device, comprising a single piece box and a protection auxiliary assembly.

[0006] The single piece box comprises a piece box upper cover and a piece box bottom.

[0007] One end of the piece box upper cover is connected with the piece box bottom, and the wafer is arranged in the piece box bottom. The piece box upper cover and the piece box bottom are provided with the protection auxiliary assembly.

[0008] Preferably, the protection auxiliary assembly comprises a fixing hole, a limiting hole and an inspection port. The fixing hole is fixedly arranged at the center position of one end of the piece box upper cover, and the fixing hole penetrates through the piece box upper cover. The limiting hole is fixedly arranged at equal intervals on the outside of the fixing hole, and the limiting hole is connected with the fixing hole. The inspection port is fixedly arranged at equal intervals on the outside wall of the piece box upper cover.

[0009] Preferably, the other end of the upper cover of the wafer box is connected with a limiting block at equal intervals, an outer thread is arranged on the outer side of the limiting block, a connecting block is arranged on the side of the limiting block away from the fixing hole, and the connecting block is connected with the upper cover of the wafer box.

[0010] Preferably, the other end of the upper cover of the wafer box is provided with a rubber gasket, the rubber gasket is arranged on the outer side of the wafer, the rubber gasket is connected with the wafer in a matched mode, and the rubber gasket is arranged on the side of the limiting block close to the fixing hole.

[0011] Preferably, the protection auxiliary assembly comprises a limiting groove, a connecting ring groove, an inner thread and an inspection hole; the limiting groove is arranged at one end of the bottom of the wafer box, an inner thread is fixedly arranged on the inner side wall of the limiting groove, a connecting ring groove is connected and arranged on the outer side of the limiting groove, and an inspection hole is fixedly arranged around the limiting groove.

[0012] Preferably, a wafer is connected in the limiting groove, the inner thread arranged on the inner side wall of the limiting groove is threadedly connected with the outer thread arranged on the limiting block at the bottom end of the upper cover of the wafer box in a matched mode, and the connecting ring groove arranged in the bottom of the wafer box is connected with the connecting block at the bottom end of the upper cover of the wafer box in a matched mode.

[0013] Preferably, a fixing hole is fixedly arranged at the center position of the limiting groove of the bottom of the wafer box, limiting holes are fixedly arranged at equal intervals on the outer side of the fixing hole, the limiting holes are connected with the fixing hole, and the fixing hole and the limiting holes penetrate through the bottom of the wafer box.

[0014] Compared with the prior art, the wafer protection device has the advantages that:

[0015] The wafer protection device provided by the utility model can protect the wafer during inspection, and the wafer is protected by the upper and lower covers; the upper cover of the wafer box is provided with patterns, so that the wafer surface can be inspected, and the wafer can be operated; the wafer can be used on both sides, and the actual use requirement is met. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a structure schematic diagram of the wafer box of the utility model;

[0017] Figure 2 It is a structure schematic diagram of the left side of the wafer box of the utility model;

[0018] Figure 3 It is a structure schematic diagram of the right side of the wafer box of the utility model; Figure 2 It is an enlarged schematic diagram of the structure at A of the utility model;

[0019] Figure 4 It is a structure schematic diagram of the right side of the wafer box of the utility model.

[0020] In the figure: the wafer inspection protective device includes a single wafer box and a protective auxiliary assembly. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme of the utility model clearly, completely describe, and the advantage is more clear and obvious, the following combining the drawings to the utility model embodiment carries out further detailed explanation. It should be understood that the specific embodiments described here are part of the embodiments of the utility model, not all embodiments, only to explain the embodiments of the utility model, and not for limiting the embodiments of the utility model, all other embodiments obtained by the ordinary skill in the art without making creative labor are within the scope of the utility model protection.

[0022] Please refer to Figures 1 to 4 The utility model provides three technical schemes:

[0023] Embodiment one: a wafer inspection protective device, including single wafer box and protective auxiliary assembly;

[0024] Single wafer box includes wafer box top 1, wafer box bottom 2;

[0025] One end of wafer box top 1 is connected with wafer box bottom 2, wafer box bottom 2 is provided with wafer 3, and wafer box top 1 and wafer box bottom 2 are provided with protective auxiliary assembly.

[0026] When using, wafer 3 is placed in wafer box bottom 2, and wafer box top 1 and wafer box bottom 2 are provided with protective auxiliary assembly, the protective auxiliary assembly is used to protect wafer 3, and is convenient for checking without being damaged.

[0027] Embodiment two: on the basis of embodiment one, the protective auxiliary assembly includes fixed hole 101, limit hole 102, inspection port 103;Fixed hole 101 is fixedly arranged at the center position of one end of wafer box top 1, and the fixed hole 101 is arranged through wafer box top 1, and the outer side of fixed hole 101 is equidistantly fixed with limit hole 102, and the limit hole 102 is connected with fixed hole 101, and the outer side wall of wafer box top 1 is equidistantly fixed with inspection port 103.

[0028] The fixed hole 101 and the limit hole 102, wafer 3 are used to check whether the wafer 3 placed below wafer box top 1 is abnormal.

[0029] The other end of the upper cover 1 of the wafer box is equidistantly connected with a limiting block 104, an outer thread 105 is arranged on the outer side of the limiting block 104, a connecting block 106 is arranged on the side of the limiting block 104 away from the fixing hole 101, and the connecting block 106 is connected with the upper cover 1 of the wafer box.

[0030] The limiting block 104 is arranged to be threadedly connected with the wafer box bottom 2, and the connecting block 106 is arranged to be positioned and connected with the connecting ring groove 202 arranged in the wafer box bottom 2.

[0031] The other end of the upper cover 1 of the wafer box is provided with a rubber gasket 107, the rubber gasket 107 is arranged on the outer side of the wafer 3, the rubber gasket 107 is connected with the wafer 3 in a matched mode, and the rubber gasket 107 is arranged on the side of the limiting block 104 close to the fixing hole 101.

[0032] The rubber gasket 107 is arranged to protect the wafer 3.

[0033] In the embodiment two, the protection auxiliary assembly comprises a limiting groove 201, a connecting ring groove 202, an inner thread 203 and an inspection hole 204, the limiting groove 201 is arranged at one end of the wafer box bottom 2, the inner thread 203 is fixedly arranged on the inner side wall of the limiting groove 201, the connecting ring groove 202 is arranged on the outer side of the limiting groove 201, the inspection hole 204 is fixedly arranged around the limiting groove 201, and the inspection hole 204 arranged in the limiting groove 201 corresponds to the inspection hole 103 arranged on the upper cover 1 of the wafer box.

[0034] The wafer 3 is arranged in the limiting groove 201, the inner thread 203 arranged on the inner side wall of the limiting groove 201 is threadedly connected with the outer thread 105 arranged on the limiting block 104 at the bottom end of the upper cover 1 of the wafer box, and the connecting ring groove 202 arranged in the wafer box bottom 2 is connected with the connecting block 106 at the bottom end of the upper cover 1 of the wafer box.

[0035] The fixing hole 101 is fixedly arranged at the center position of the limiting groove 201 of the wafer box bottom 2, the limiting hole 102 is equidistantly fixedly arranged on the outer side of the fixing hole 101, the limiting hole 102 is connected with the fixing hole 101, and the fixing hole 101 and the limiting hole 102 penetrate through the wafer box bottom 2.

[0036] The fixing hole 101, the limiting hole 102 and the inspection hole 204 arranged at the bottom of the wafer box bottom 2 facilitate the inspection of the back surface of the wafer 3.

[0037] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A protective device for wafer inspection, characterized in that: Includes single-chip cassette and protective auxiliary components; The single-piece box includes a box top cover (1) and a box bottom (2); One end of the wafer cassette top cover (1) is connected to the wafer cassette bottom (2), and a wafer (3) is disposed in the wafer cassette bottom (2). Protective auxiliary components are disposed in the wafer cassette top cover (1) and the wafer cassette bottom (2). The protective auxiliary component includes a fixing hole (101), a limiting hole (102), and an inspection port (103). The fixing hole (101) is fixedly disposed at the center of one end of the film cassette cover (1), and the fixing hole (101) penetrates through the film cassette cover (1). The limiting holes (102) are fixedly disposed at equal intervals on the outer side of the fixing hole (101), and the limiting holes (102) are connected to the fixing hole (101). The inspection ports (103) are fixedly disposed at equal intervals on the outer side wall of the film cassette cover (1). The other end of the film box cover (1) is provided with a limiting block (104) at equal intervals, and the outer side of the limiting block (104) is provided with an external thread (105), and a connecting block (106) is provided on the side of the limiting block (104) away from the fixing hole (101), and the connecting block (106) is connected to the film box cover (1).

2. The wafer inspection protection device according to claim 1, characterized in that: A rubber gasket (107) is provided at the other end of the wafer cassette cover (1), and the rubber gasket (107) is located on the outside of the wafer (3), and the rubber gasket (107) is adapted to and connected to the wafer (3), and the rubber gasket (107) is located on the side of the limiting block (104) near the fixing hole (101).

3. The wafer inspection protection device according to claim 1, characterized in that: The protective auxiliary component includes a limiting groove (201), a connecting ring groove (202), an internal thread (203), and an inspection hole (204). The limiting groove (201) is located at one end of the bottom (2) of the film box, and the inner sidewall of the limiting groove (201) is fixedly provided with an internal thread (203). The outer side of the limiting groove (201) is connected with a connecting ring groove (202). The limiting groove (201) is fixedly provided with inspection holes (204) around its perimeter. The inspection holes (204) in the limiting groove (201) correspond to the inspection ports (103) on the top cover (1) of the film box.

4. A protective device for wafer inspection according to claim 3, characterized in that: The limiting groove (201) is connected to a wafer (3), and the internal thread (203) on the inner sidewall of the limiting groove (201) is adapted to the external thread (105) on the limiting block (104) at the bottom of the wafer box cover (1) for thread connection. The connecting ring groove (202) in the bottom (2) of the wafer box is adapted to the connecting block (106) at the bottom of the wafer box cover (1) for thread connection.

5. A protective device for wafer inspection according to claim 1, characterized in that: A fixing hole (101) is fixedly provided at the center of the limiting groove (201) at the bottom (2) of the tablet box, and a limiting hole (102) is fixedly provided at equal intervals on the outside of the fixing hole (101), and the limiting hole (102) is connected to the fixing hole (101), and the fixing hole (101) and the limiting hole (102) penetrate the bottom (2) of the tablet box.

Images