Wafer bearing flower basket convenient to lift

Abstract

The utility model belongs to the technical field of semiconductors, and particularly relates to a wafer bearing flower basket convenient to lift. According to the technical scheme of the utility model, by means of the arrangement of the first side plate, the second side plate, the bottom supporting rack assembly, the horizontal rack assembly, the lifting rod, the anti-falling groove and the movable stop lever assembly, the bottom supporting rack assembly can meet the bottom supporting requirements of wafers of different specifications. The horizontal rack assembly limits the wafer, so that the wafer can be properly prevented from being separated from the bearing basket, the bearing basket is suitable for placing wafers of different sizes, the structure is simple, and the practicability is high; the lifting rod can further reinforce the overall structure, meanwhile, the flower basket is grabbed through cooperation of the anti-disengaging groove and the mechanical arm lifting hook, the error-tolerant rate is high, grabbing is more stable and firmer through the anti-disengaging groove after grabbing of the mechanical arm lifting hook, and the flower basket is not prone to disengaging.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of semiconductor technology, especially to a wafer bearing basket convenient to lift. BACKGROUND

[0002] The wafer bearing basket is a container for bearing semiconductor wafer / silicon wafer, which is made of strong acid and strong base resistant material and is mainly used in acid and alkali process of semiconductor etching department to temporarily store or move the wafer to be processed to various processing workstations.

[0003] The traditional wafer bearing basket comprises two side plates, a middle support rod for supporting the wafer, and a hanging plate for suspending the mechanical arm gripper.

[0004] For example, the utility model discloses a hoisting device with the function of sensing wafer basket, which is disclosed in the Chinese utility model patent with the patent number CN202704807U and the publication date of January 30, 2013, and the structure comprises a mechanical hand lifting hook and a basket bearing basket. At least two hooks are arranged on both sides of the mechanical hand lifting hook, and a convex part matched with the hooks is arranged on the basket bearing basket. At least one sensor is fixed in the hook, and a sensing block matched with the sensor is fixed in the corresponding convex part.

[0005] The hoisting device with the function of sensing wafer basket in the utility model patent has the following general structure and principle: when the hook hooks the convex part, the sensor senses the sensing block and sends a signal to the control unit to confirm that the basket bearing basket is hooked, and then the control unit sends an instruction to the mechanical hand to lift the basket bearing basket, i.e. the basket bearing basket is lifted to complete the action. When the hook is separated from the convex part, the sensor cannot sense the sensing block, and the sensor sends a signal to the control unit to confirm that the mechanical hand lifting hook is empty and can be lifted, i.e. the basket bearing basket is successfully unhooked.

[0006] However, the basket bearing basket has at least the following two deficiencies in actual use, in other words, the technical problems to be solved by the utility model.

[0007] 1. The basket bearing basket can only meet the placement requirements of one / same size wafer, and has poor practicability.

[0008] 2. The basket is grabbed by setting the convex part on both sides of the basket and cooperating with the lifting hook, the convex part lacks a limiting structure and has high requirements for the grabbing precision of the lifting hook, and the basket is easily grabbed or unhooked.

[0009] Therefore, in view of the above, there is an urgent need for a new wafer bearing basket with high practicability and convenient grabbing. UTILITY MODEL CONTENTS

[0010] The utility model provides a kind of wafer bearing basket convenient to lift, it can be by the mode of setting first side plate, second side plate, bottom support rack component, horizontal rack component, lifting rod, anti-drop groove and movable baffle rod component, so that:1, bottom support rack component satisfies the wafer bottom support demand of different specifications, and horizontal rack component is positioned to wafer, can be appropriately prevented wafer from separating from bearing basket, adapt to different size wafer placement, simple structure and strong practicality;2, lifting rod can further reinforce overall structure, simultaneously, anti-drop groove is cooperated with manipulator lifting hook to grab basket, and fault tolerance is high, and after being grabbed by manipulator lifting hook, anti-drop groove makes that grabbing is more stable and firm, and basket is not easy to fall off.

[0011] The utility model discloses a kind of wafer bearing basket convenient to lift, it can be by the mode of setting first side plate and second side plate, two bottom support rack components for supporting the lower end of wafer are set on the first side plate and are connected the second side plate, and are used for the limiting horizontal rack component of wafer, the bottom support rack component is symmetrically set, and upper end extends to the center of wafer, the horizontal rack component for limiting wafer is set on the first side plate and is connected the second side plate, lifting rod for hanging on manipulator lifting hook is connected the first side plate and the second side plate and located the bottom support rack component above, and for lifting rod on the anti-drop groove for being used for the mechanical hand lifting hook of carding.

[0012] Further preferred technical solutions are that the bottom support rack component includes a support plate and a plurality of U-shaped grooves disposed on the support plate for inserting the wafer.

[0013] Further preferred technical solutions are that the horizontal rack component includes a first horizontal rack disposed at the middle section of the first side plate and the second side plate, and the first horizontal rack is disposed at one side of the wafer.

[0014] Further preferred technical solutions are that the horizontal rack component further includes a second horizontal rack disposed at the lower section of the first side plate and the second side plate, away from the position of the first horizontal rack.

[0015] Further preferred technical solutions are that the lifting rod is disposed at the upper section of the first side plate and the second side plate, and close to the central axis of the two bottom support rack components.

[0016] Further preferred technical solutions are that the movable baffle rod component is further included, which passes through the first side plate and the second side plate, and is adjusted movably to press the upper end of the wafer.

[0017] Further preferably, the movable stop rod assembly comprises two C-shaped grooves arranged on the first side plate and the second side plate respectively, a stop rod arranged in the two C-shaped grooves, and two adjusting plugs arranged outside the first side plate and the second side plate respectively and used for sleeving two ends of the stop rod.

[0018] Further preferably, the C-shaped groove comprises an upper end groove and a lower end groove, and an arc-shaped transition groove arranged on the upper end groove and used for connecting the lower end groove.

[0019] Further preferably, the arc-shaped transition groove has an inflection point higher than the upper end groove.

[0020] Further preferably, the inner diameters of the upper end groove and the lower end groove gradually decrease at the ends.

[0021] The utility model discloses the beneficial effect that:

[0022] 1, can adapt the placing demand of different size wafer, and the structure is simple and firm;

[0023] 2, mechanical hand lifting hook catches the lifting rod at the upper end of the basket, and the difficulty is low, and the mechanical hand lifting hook is limited by using the anti-drop groove, and the lifting process is safer and more stable, the fault tolerance of mechanical hand lifting hook is high, and the structural stability is better;

[0024] 3, movable stop rod assembly can position the upper end of the wafer inserted, prevent the wafer from separating from the upper end when lifting / entering liquid medicine, and the movable stop rod assembly can be adjusted to adapt to different size wafers, which is simple to operate and does not interfere with the normal use of the basket. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will be briefly introduced the drawings needed to be used in the embodiment description, obviously, the drawings in the following description only some embodiments of the utility model, for those skilled in the art, under the premise of not paying the creative labor, can also obtain other drawings according to these drawings.

[0026] Figure 1 It is the perspective view of the utility model.

[0027] Figure 2 It is the partial exploded view of the utility model.

[0028] Figure 3 It is the rear view of the utility model.

[0029] Figure 4The side view of the utility model.

[0030] Figure 5 The position structure diagram of the movable blocking rod assembly in the utility model.

[0031] Figure 6 The position diagram of the C-shaped groove under the side view angle in the utility model.

[0032] Figure 7 The position diagram of the inflection point in the C-shaped groove under the side view angle in the utility model.

[0033] In the drawings, the meanings of various marks are as follows:

[0034] Wafer a, mechanical hand lifting hook b, 12-inch wafer a-1, 8-inch wafer a-2;

[0035] First side plate 1, second side plate 2, bottom support rack assembly 3, horizontal rack assembly 4, lifting rod 5, anti-dropping groove 6, movable blocking rod assembly 7;

[0036] Support plate 31, U-shaped groove 32, first horizontal rack 41, second horizontal rack 42, C-shaped groove 71, blocking rod 72, adjusting plug 73;

[0037] Upper end groove 711, lower end groove 712, arc-shaped transition groove 713. DETAILED DESCRIPTION

[0038] The utility model embodiments are described in detail below in combination with the drawings, and the following description is only a preferred embodiment of the utility model, and does not limit the scope of the utility model.

[0039] In the present specification, the orientation terms such as up, down, left, right, front, back, front, back, top, bottom, etc. mentioned or possibly mentioned are defined relative to the structure shown in the drawings, and the words "inner" and "outer" respectively refer to the direction towards or away from the geometric center of a particular component. They are relative concepts, so they may change accordingly according to their different positions, different use states, therefore, these or other orientation terms should not be interpreted as restrictive terms.

[0040] As shown in the accompanying Figures 1-7As shown, a wafer carrying basket convenient to lift, comprising a first side plate 1 and a second side plate 2 arranged in parallel, two bottom support rack assemblies 3 arranged on the first side plate 1 and connected with the second side plate 2 and used for supporting the lower end of a wafer a, the bottom support rack assemblies 3 are symmetrically arranged and the upper end extends to the center of the wafer a, a horizontal rack assembly 4 arranged on the first side plate 1 and connected with the second side plate 2 and used for limiting the wafer a, a lifting rod 5 connected with the first side plate 1 and the second side plate 2 and located above the bottom support rack assembly 3 and used for hanging on a mechanical hand hook b, and an anti-falling groove 6 arranged on the lifting rod 5 and used for clamping the mechanical hand hook b.

[0041] In this embodiment, the size of the wafer a is usually 8 inches or 12 inches, and the wafer carrying basket is exemplified by the two sizes of wafers, i.e. the 12-inch wafer a-1 and the 8-inch wafer a-2, but the size is not limited in actual use and can be adjusted according to needs. The wafer carrying basket can place the same size wafer a in the same frame, or place different sizes of the wafer a in the same frame. The first side plate 1 and the second side plate 2 are parallel to each other, the bottom support rack assembly 3, the horizontal rack assembly 4 and the lifting rod 5 are connected with the first side plate 1 and the second side plate 2, and the bottom support rack assembly 3, the horizontal rack assembly 4 and the lifting rod 5 are perpendicular to the first side plate 1 and the second side plate 2.

[0042] In addition, the two bottom support rack assemblies 3 are arranged close to the lower end of the wafer a, which can support the bottom of the wafer a of different sizes, and the two bottom support rack assemblies 3 are symmetrically arranged and the rack opening direction extends to the center of the wafer a. The support effect of the two bottom support rack assemblies 3 is better than that of the vertically or horizontally arranged rack, and is more stable.

[0043] In addition, when the wafer carrying basket needs to place a larger size wafer a, if only the bottom support rack assembly 3 is used to support the wafer a, when a larger size wafer a is placed, the center of gravity of the wafer a moves upward, so that the wafer a is separated from both sides during the movement or entering of the liquid, causing damage or chain collision. Therefore, the horizontal rack assembly 4 can be used to limit the wafer a, reducing the influence of the movement of the center of gravity. As shown in Figure 6 or Figure 7As shown, when the wafer carrier basket needs to meet the placement requirements of the 12-inch wafer a-1 and the 8-inch wafer a-2, the horizontal rack assembly 4 can limit the 12-inch wafer a-1, while the 8-inch wafer a-2, due to its smaller size, can be placed by the bottom support rack assembly 3.

[0044] Finally, the lifting rod 5 is positioned above the bottom support rack assembly 3 and does not contact the wafer a. The lifting rod 5 not only lifts the wafer-carrying basket but also further reinforces its structure, increasing overall robustness and resistance to external forces. The anti-detachment groove 6 is located on the lifting rod 5 and cooperates with the robotic arm hook b, providing a high fault tolerance rate and preventing the robotic arm hook b from falling off or sliding, resulting in a smoother and more reliable lifting process.

[0045] The bottom support rack assembly 3 includes a support plate 31 and a plurality of U-shaped grooves 32 disposed on the support plate 31 and used for inserting the wafer a.

[0046] In this embodiment, the support plate 31 is used to support the wafer a, and the U-shaped groove 32 is used to insert the wafer a, so that wafers a of different sizes can be supported by the bottom support rack assembly 3.

[0047] The horizontal rack assembly 4 includes a first horizontal rack 41 disposed in the middle section of the first side plate 1 and the second side plate 2. The first horizontal rack 41 is disposed on one side of the wafer a, and the wafer a is inserted from the side away from the first horizontal rack 41.

[0048] In this embodiment, the first horizontal rack 41 is disposed on one side of the wafer a, near the middle section of the first side plate 1 and the second side plate 2. Its function is to limit the 12-inch wafer a-1 and prevent it from falling out. The first horizontal rack 41 is disposed only on one side of the wafer a, which facilitates the wafer a being inserted from the other side.

[0049] The horizontal rack assembly 4 further includes a second horizontal rack 42 disposed in the lower section of the first side plate 1 and the second side plate 2, and located away from the first horizontal rack 41.

[0050] In this embodiment, the second horizontal rack 42 is located on the side away from the first horizontal rack 41 and close to the lower section of the first side plate 1 and the second side plate 2. Without affecting the placement of the 12-inch wafer a-1, it can provide auxiliary positioning for the 12-inch wafer a-1.

[0051] The lifting rod 5 is arranged at the upper section of the first side plate 1 and the second side plate 2 and close to the central axis of the two bottom support rack assemblies 3.

[0052] In the embodiment, the lifting rod 5 is arranged at the upper section of the first side plate 1 and the second side plate 2 and close to the central axis of the two bottom support rack assemblies 3, which can not only ensure the lifting stability, but also reduce the errors caused by the limited space, avoid the interference with the wafer a, reduce the difficulty of putting the wafer a, and make the use more convenient.

[0053] Further comprising a movable blocking rod assembly 7 passing through the first side plate 1 and the second side plate 2 and being movably adjusted to block the upper end of the wafer a.

[0054] In the embodiment, the movable blocking rod assembly 7 blocks the upper end of the wafer a of different sizes, and the wafer carrier basket needs to be transported to different chemical solution tanks. When the wafer a is in contact with the chemical solution or completely immersed in the chemical solution, it is easy to separate from the bottom support rack assembly 3 due to the influence of the liquid. In order to reduce the knocking or partial separation of the wafer a from the support rack assembly 3, the movable blocking rod assembly 7 is arranged at the upper end of the wafer a to block the wafer a.

[0055] The movable blocking rod assembly 7 comprises two C-shaped grooves 71 arranged on the first side plate 1 and the second side plate 2 respectively, a blocking rod 72 inserted into the two C-shaped grooves 71, and two adjusting plugs 73 arranged outside the first side plate 1 and the second side plate 2 respectively and used for sleeving both ends of the blocking rod 72; the first horizontal rack 41 is moved to the upper and lower ends of the C-shaped groove 71 to block the wafer a of different sizes.

[0056] In the embodiment, the C-shaped groove 71 is used for inserting the blocking rod 72, the blocking rod 72 can move in the C-shaped groove 71, the adjusting plug 73 is arranged at both ends of the blocking rod 72 to prevent the blocking rod 72 from falling off, and the blocking rod 72 can be moved in the C-shaped groove 71 by moving the adjusting plug 73. The blocking rod 72 and the adjusting plug 73 can also be arranged in a detachable manner to be applied to different scene requirements. In order to reduce the interference of the blocking rod 72 with the wafer a when the wafer a is put in, the opening direction of the C-shaped groove 71 can be opened to the side end of the wafer a.

[0057] The C-shaped groove 71 comprises an upper end groove 711 and a lower end groove 712, and an arc transition groove 713 arranged on the upper end groove 711 and used for connecting the lower end groove 712.

[0058] In the embodiment, the upper end groove 711, the lower end groove 712 and the arc transition groove 713 form a continuous C-shaped groove 71, and the stop lever 72 can move in the groove, when the stop lever 72 moves to the upper end groove 711, the upper end of the 12-inch wafer a-1 can be pressed, when the stop lever 72 moves to the lower end groove 712, the upper end of the 8-inch wafer a-2 can be pressed. The arc transition groove 713 can make the stop lever 72 move more continuously and labor-saving.

[0059] The arc transition groove 713 has an inflection point higher than the upper end groove 711.

[0060] In the embodiment, as shown in the accompanying drawings, Figure 7 When the arc transition groove 713 has an inflection point higher than the upper end groove 711, the stop lever 72 is not easy to slide out under external force, the knocking of the wafer a caused by the movement of the stop lever 72 is reduced, and the temporary reliability of the pressing is increased.

[0061] The inner diameter of the upper end groove 711 and the lower end groove 712 gradually decreases at the end.

[0062] In the embodiment, the inner diameter of the upper end groove 711 and the lower end groove 712 gradually decreases at the end, the risk of deviation of the stop lever 72 at the end is smaller, and the temporary reliability of the stop lever 72 is also increased. Similarly, the friction at the end of the upper end groove 711 and the lower end groove 712 can also be increased.

[0063] The embodiments of the utility model are described in detail above in combination with the drawings, but the utility model is not limited to the above-mentioned embodiments, and various modifications can be made within the knowledge range of ordinary skilled in the art without departing from the purpose of the utility model. These are not creative modifications, and as long as they are within the scope of the claims of the utility model, they are protected by the patent law.

Claims

1. A wafer-carrying flower basket that is easy to lift, characterized in that: The device includes a first side plate (1) and a second side plate (2) arranged in parallel, two bottom support rack assemblies (3) arranged on the first side plate (1) and connected to the second side plate (2) for supporting the lower end of the wafer (a), the bottom support rack assemblies (3) being symmetrically arranged and extending upward toward the center of the wafer (a), a horizontal rack assembly (4) arranged on the first side plate (1) and connected to the second side plate (2) for limiting the wafer (a), a lifting rod (5) connecting the first side plate (1) and the second side plate (2) and located above the bottom support rack assemblies (3) for hanging on the robot hook (b), and an anti-detachment groove (6) arranged on the lifting rod (5) for locking the robot hook (b).

2. The wafer carrier basket for easy lifting according to claim 1, characterized in that: The bottom support rack assembly (3) includes a support plate (31) and a plurality of U-shaped grooves (32) disposed on the support plate (31) and used for inserting the wafer (a).

3. The wafer carrier basket for easy lifting according to claim 2, characterized in that: The horizontal rack assembly (4) includes a first horizontal rack (41) disposed in the middle section of the first side plate (1) and the second side plate (2), the first horizontal rack (41) being disposed on one side of the wafer (a).

4. The wafer carrier basket for easy lifting according to claim 3, characterized in that: The horizontal rack assembly (4) further includes a second horizontal rack (42) disposed in the lower section of the first side plate (1) and the second side plate (2) and located away from the first horizontal rack (41).

5. A wafer carrier basket for easy lifting according to claim 1, characterized in that: The lifting rod (5) is located on the upper section of the first side plate (1) and the second side plate (2), and close to the central axis of the two bottom support rack assemblies (3).

6. A wafer carrier basket for easy lifting according to claim 3, characterized in that: It also includes a movable stop assembly (7) that passes through the first side plate (1) and the second side plate (2) and is movable and adjustable to press against the upper end of the wafer (a).

7. A wafer carrier basket for easy lifting according to claim 6, characterized in that: The movable stop assembly (7) includes two C-shaped grooves (71) respectively disposed on the first side plate (1) and the second side plate (2), a stop rod (72) inserted into the two C-shaped grooves (71), and two adjusting plugs (73) respectively disposed on the outside of the first side plate (1) and the second side plate (2) and used to fit the two ends of the stop rod (72); the first horizontal rack (41) moves to the upper and lower ends of the C-shaped groove (71) to press against the wafers (a) of different sizes.

8. A wafer carrier basket for easy lifting according to claim 7, characterized in that: The C-shaped groove (71) includes an upper groove (711) and a lower groove (712), as well as an arc-shaped transition groove (713) disposed on the upper groove (711) and used to connect the lower groove (712).

9. A wafer carrier basket for easy lifting according to claim 8, characterized in that: The arc-shaped transition groove (713) has an inflection point that is higher than that of the upper groove (711).

10. A wafer carrier basket for easy lifting according to claim 8, characterized in that: The inner diameters of the upper end groove (711) and the lower end groove (712) gradually decrease at their ends.

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