Carrier transmission system for sputter coating machine

Abstract

The utility model discloses a sputter coating machine carrier transmission system which comprises a first rotating stand assembly, a second rotating stand assembly, a carrier and a transfer assembly, the transfer assembly is arranged between the first rotating stand assembly and the second rotating stand assembly, and the transfer assembly comprises a mechanical arm and a piece taking arm arranged on the mechanical arm; a plurality of first carrier containing assemblies used for containing carriers are arranged in the circumferential direction of the first rotating frame assembly. A plurality of second carrier containing assemblies used for containing carriers are arranged in the circumferential direction of the second rotating frame assembly. The manipulator can drive the pick-up arm to move between the first rotating stand assembly and the second rotating stand assembly, the pick-up arm can pick / place the carriers from the first rotating stand assembly and the second rotating stand assembly, and the manipulator cooperates with the pick-up arm to exchange the carriers of the first rotating stand assembly and the second rotating stand assembly, so that continuous coating processing operation is realized, the production efficiency is improved, and the production cost is reduced. Manual operation is reduced or a certain distance is formed between a manual operation area and the coating cavity, so that high safety is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to sputtering coating equipment technical field, especially in sputtering coating machine carrier transmission system. BACKGROUND

[0002] In the traditional sputtering coating equipment, generally by production personnel directly in the coating cavity swivel carrier directly replace the product with product carrier and coating cavity in the carrier manual replacement, product installation to carrier, carrier in coating cavity completes coating.

[0003] If it is only to replace the product, the equipment in coating work, according to different equipment different coating process, a product in the equipment processing time is generally in 30 minutes to 60 minutes, in this process, production personnel product preparation work cannot be saturated, production personnel need to wait for coating to replace the product, the process of product replacement also needs a lot of time. In this way, the equipment utilization rate is greatly reduced, time cost cannot be well controlled, it is difficult to reasonably arrange production personnel, and it is easy to cause waste of human resources.

[0004] If it is manual replacement carrier, the equipment during operation can indeed install the required product in advance on the carrier, and replace the carrier after the coating machine runs. This method can reduce the product replacement time, but due to the hardness, quality and volume of the carrier, the carrier will rotate at high speed during operation in the coating cavity swivel, so it is generally heavy, and in order to ensure production efficiency, the carrier will be relatively large, so the manual carrying method first increases the physical labor of production personnel, and most importantly, it is unsafe. Manual handling of heavy objects is inherently unsafe, and it is easy to cause the carrier to be not installed properly. If the carrier that is not installed properly enters the coating cavity, the carrier will be thrown off the swivel during high-speed rotation, causing serious damage to the equipment.

[0005] Currently, there are also robots on the market to replace the carrier, but the replacement method of the carrier is controversial, and the effect of the robot cannot be well played. Improper transportation method design only increases cost and does not achieve results. UTILITY MODEL CONTENTS

[0006] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a sputtering coating machine carrier transmission system, which can improve production efficiency and has high safety.

[0007] According to the sputtering coating machine carrier transmission system provided by the first aspect of the utility model, the first trolley assembly is arranged outside the coating cavity, the second trolley assembly is arranged inside the coating cavity, the carrier is used for loading workpieces, the transfer assembly is arranged between the first trolley assembly and the second trolley assembly, the transfer assembly comprises a mechanical arm and a pick-up arm arranged on the mechanical arm, the first trolley assembly is circumferentially provided with a plurality of first carrier placing assemblies for placing the carrier, the second trolley assembly is circumferentially provided with a plurality of second carrier placing assemblies for placing the carrier, and the mechanical arm can drive the pick-up arm to move between the first trolley assembly and the second trolley assembly.

[0008] According to the sputtering coating machine carrier transmission system provided by the first aspect of the utility model, the first trolley assembly is arranged outside the coating cavity, the second trolley assembly is arranged inside the coating cavity, the carrier is used for loading workpieces, the transfer assembly is arranged between the first trolley assembly and the second trolley assembly, the transfer assembly comprises a mechanical arm and a pick-up arm arranged on the mechanical arm, the first trolley assembly is circumferentially provided with a plurality of first carrier placing assemblies for placing the carrier, the second trolley assembly is circumferentially provided with a plurality of second carrier placing assemblies for placing the carrier, and the mechanical arm can drive the pick-up arm to move between the first trolley assembly and the second trolley assembly.

[0009] According to some embodiments of the utility model, the first trolley assembly comprises a first trolley and a first rotation driving mechanism capable of driving the first trolley to rotate, the first trolley comprises a first upper turntable, a first lower turntable arranged below the first upper turntable and a first support rod group connecting the first upper turntable and the first lower turntable.

[0010] According to some embodiments of the utility model, the first carrier placing assembly comprises a first hanging piece arranged on the first upper turntable or arranged on the first upper turntable and the first lower turntable, and the carrier is provided with a first hanging hole corresponding to the first hanging piece.

[0011] According to some embodiments of the utility model, the second trolley assembly comprises a second trolley and a second rotation driving mechanism capable of driving the second trolley to rotate, the second trolley comprises a second upper turntable, a second lower turntable arranged below the second upper turntable and a second support rod group connecting the second upper turntable and the second lower turntable.

[0012] According to some embodiments of the utility model, the second carrier placing assembly comprises a second hanging piece arranged on the second upper turntable or arranged on the second upper turntable and the second lower turntable, and the carrier is provided with a first hanging hole corresponding to the second hanging piece.

[0013] According to some embodiments of the present application, the second carrier placing assembly further comprises a carrier support connecting the second upper turntable and the second lower turntable, the carrier support is provided with at least one third hanging component, and the carrier is provided with a second hanging hole corresponding to the third hanging component.

[0014] According to some embodiments of the present application, the taking arm comprises at least one set of third carrier placing assembly, the third carrier placing assembly comprises a fourth hanging component arranged on the upper part of the taking arm or arranged on the upper part and the lower part of the taking arm, and the carrier is provided with a third hanging hole corresponding to the fourth hanging component.

[0015] According to some embodiments of the present application, the third carrier placing assembly is configured as two sets and is oppositely distributed on both sides of the taking arm, and the mechanical hand comprises a rotating arm capable of driving the taking arm to rotate.

[0016] According to some embodiments of the present application, the fourth hanging component extends a certain distance towards the outside of the taking arm.

[0017] According to some embodiments of the present application, the first carrier placing assembly and the second carrier placing assembly are both hanging mechanisms. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above and / or additional aspects and advantages of the present application will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

[0019] Figure 1 It is a structure schematic view of the sputtering coating machine carrier transmission system of the embodiment of the present application;

[0020] Figure 2 It is a top view of the sputtering coating machine carrier transmission system of the embodiment of the present application;

[0021] Figure 3 It is a structure schematic view of the first rotating frame of the embodiment of the present application;

[0022] Figure 4 It is a structure schematic view of the first rotating frame of the embodiment of the present application (horizontal section);

[0023] Figure 5 It is a structure schematic view of the second rotating frame of the embodiment of the present application;

[0024] Figure 6 It is a structure schematic view of the second carrier placing assembly of the embodiment of the present application;

[0025] Figure 7 It is a structure schematic view of the taking arm after hanging the carrier of the embodiment of the present application;

[0026] Figure 8 For Figure 7 The exploded view of the structure in FIG.

[0027] Reference signs:

[0028] The first rotating frame assembly 100, the coating cavity 101, the first rotating frame 110, the first upper rotating disc 111, the first lower rotating disc 112, the first support rod group 113, the first rotating driving mechanism 120, the first carrier placing assembly 130, the first hanging piece 131;

[0029] The second rotating frame assembly 200, the second rotating frame 210, the second upper rotating disc 211, the second lower rotating disc 212, the second support rod group 213, the second rotating driving mechanism 220, the second carrier placing assembly 230, the second hanging piece 231, the carrier support 232, the third hanging piece 233;

[0030] The mechanical arm 300, the rotating arm 310;

[0031] The taking arm 400, the third carrier placing assembly 410, the fourth hanging piece 411;

[0032] The carrier 900, the first hanging hole 901, the second hanging hole 902, the third hanging hole 903. DETAILED DESCRIPTION

[0033] The embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, only for explaining the present application, and cannot be understood as a limitation of the present application.

[0034] In the description of the present application, it is understood that, if there is a description of orientation, for example, the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as a limitation of the present application.

[0035] In the description of the present application, if there is a description of first, second, only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the sequence of indicated technical features.

[0036] In the description of the utility model, unless otherwise explicitly limited, the words such as setting, installing, connecting should be understood broadly, and the specific meaning of the above words in the utility model can be determined by the person skilled in the art in combination with the specific content of the technical scheme.

[0037] Reference will be made below Figures 1 to 8 The sputtering coating machine carrier conveying system according to the embodiment of the utility model is described.

[0038] As Figure 1 And Figure 2 The sputtering coating machine carrier conveying system according to the embodiment of the utility model, as shown in the figure, comprises a first rotary frame assembly 100, a second rotary frame assembly 200, a carrier 900 and a transfer assembly, the first rotary frame assembly 100 is arranged outside the coating cavity 101; the second rotary frame assembly 200 is arranged inside the coating cavity 101; the carrier 900 is used for loading workpieces; the transfer assembly is arranged between the first rotary frame assembly 100 and the second rotary frame assembly 200, and the transfer assembly comprises a mechanical hand 300 and a pick-up arm 400 arranged on the mechanical hand 300; the first rotary frame assembly 100 is circumferentially provided with a plurality of first carrier placing assemblies 130 for placing the carrier 900; the second rotary frame assembly 200 is circumferentially provided with a plurality of second carrier placing assemblies 230 for placing the carrier 900; the mechanical hand 300 can drive the pick-up arm 400 to move between the first rotary frame assembly 100 and the second rotary frame assembly 200, and the pick-up arm 400 can take / place the carrier 900 from / to the first rotary frame assembly 100 and the second rotary frame assembly 200.

[0039] When working, the first rotary frame assembly 100 is arranged outside the coating cavity 101, workers or the mechanical hand take down finished products at the carrier 900 of the first rotary frame assembly 100 and place processed products or take down the carrier 900 of the first rotary frame assembly 100 for placing finished products and place the carrier 900 for placing processed products (i.e. the whole carrier 900 is replaced), the second rotary frame assembly 200 makes the workpieces on the carrier 900 of the second rotary frame assembly 200 perform coating processing inside the coating cavity 101, and the mechanical hand 300 cooperates with the pick-up arm 400 to exchange the carriers 900 of the first rotary frame assembly 100 and the second rotary frame assembly 200, so that continuous coating processing operation is realized, the production efficiency is improved, and the safety is higher because the manual operation or the manual operation area is away from the coating cavity 101 by a certain distance.

[0040] As Figure 1 、 Figure 3 、 Figure 4As shown in some embodiments of the utility model, the first rotating drive mechanism 120 comprises a driving motor, a speed reducer, a shaft coupling and the like, and drives the first rotating frame 110, of course, in the specific implementation process, the first rotating drive mechanism 120 can also be a pneumatic motor and the like, which is not described in detail here.

[0041] As shown in some embodiments of the utility model, the first rotating drive mechanism 120 comprises a driving motor, a speed reducer, a shaft coupling and the like, and drives the first rotating frame 110, of course, in the specific implementation process, the first rotating drive mechanism 120 can also be a pneumatic motor and the like, which is not described in detail here.

[0042] As shown in some embodiments of the utility model, the first rotating drive mechanism 120 comprises a driving motor, a speed reducer, a shaft coupling and the like, and drives the first rotating frame 110, of course, in the specific implementation process, the first rotating drive mechanism 120 can also be a pneumatic motor and the like, which is not described in detail here. Figure 4 As shown in some embodiments of the utility model, the first rotating drive mechanism 120 comprises a driving motor, a speed reducer, a shaft coupling and the like, and drives the first rotating frame 110, of course, in the specific implementation process, the first rotating drive mechanism 120 can also be a pneumatic motor and the like, which is not described in detail here.

[0043] As shown in some embodiments of the utility model, the first rotating drive mechanism 120 comprises a driving motor, a speed reducer, a shaft coupling and the like, and drives the first rotating frame 110, of course, in the specific implementation process, the first rotating drive mechanism 120 can also be a pneumatic motor and the like, which is not described in detail here. Figure 3 、 Figure 4 、 Figure 7 、 Figure 8 As shown in some embodiments of the utility model, the first rotating drive mechanism 120 comprises a driving motor, a speed reducer, a shaft coupling and the like, and drives the first rotating frame 110, of course, in the specific implementation process, the first rotating drive mechanism 120 can also be a pneumatic motor and the like, which is not described in detail here.

[0044] As shown in some embodiments of the utility model, the first rotating drive mechanism 120 comprises a driving motor, a speed reducer, a shaft coupling and the like, and drives the first rotating frame 110, of course, in the specific implementation process, the first rotating drive mechanism 120 can also be a pneumatic motor and the like, which is not described in detail here.

[0045] As shown in some embodiments of the utility model, the first rotating drive mechanism 120 comprises a driving motor, a speed reducer, a shaft coupling and the like, and drives the first rotating frame 110, of course, in the specific implementation process, the first rotating drive mechanism 120 can also be a pneumatic motor and the like, which is not described in detail here. Figure 5 As shown in some embodiments of the utility model, the first rotating drive mechanism 120 comprises a driving motor, a speed reducer, a shaft coupling and the like, and drives the first rotating frame 110, of course, in the specific implementation process, the first rotating drive mechanism 120 can also be a pneumatic motor and the like, which is not described in detail here.

[0046] In some embodiments of the utility model, second rotation drive mechanism 220 includes drive motor, speed reducer, shaft coupling etc., realize the drive to second rotary frame 210, of course, in the specific implementation process, second rotation drive mechanism 220 can still be pneumatic motor etc., do not make detailed description here.

[0047] In some embodiments of the utility model, the cross section of the second support rod group 213 is T-shaped structure, so as to improve the structural strength of the connection between the second upper turntable 211 and the second lower turntable 212.

[0048] As shown in Figure 5 , Figure 6 In some embodiments of the utility model, the second carrier placing assembly 230 includes a second hanging piece 231 arranged on the second upper turntable 211 or arranged on the second upper turntable 211 and the second lower turntable 212, and the carrier 900 is provided with a first hanging hole 901 corresponding to the second hanging piece 231, so that the carrier 900 can be taken and placed on the second rotary frame 210 through the hanging mechanism, which is convenient and fast.

[0049] As shown in Figure 5 , Figure 6 In some embodiments of the utility model, the second carrier placing assembly 230 further includes a carrier support 232 connecting the second upper turntable 211 and the second lower turntable 212, and the carrier support 232 is provided with at least one third hanging piece 233, and the carrier 900 is provided with a second hanging hole 902 corresponding to the third hanging piece 233, so as to improve the hanging stability of the carrier 900.

[0050] Specifically, the third hanging piece 233 is arranged at the middle part of the carrier support 232, so as to hang and support the middle part of the carrier 900. Since the second rotary frame 210 is arranged in the coating cavity 101, it needs to rotate at high speed during coating operation. By configuring the carrier support 232 and the third hanging piece 233, the hanging stability of the carrier 900 is improved, so as to improve the safety.

[0051] Of course, in the specific implementation process, the third hanging piece 233 can also be configured as multiple, and is distributed in the carrier support 232 along the up-down direction, so as to achieve higher hanging stability.

[0052] It can be understood that, in some embodiments of the utility model, the second carrier placing assembly 230 can also be a plug-in fixing mechanism, a clamping fixing mechanism, a magnetic attraction fixing mechanism, etc., which can also meet the taking and placing requirements of the carrier 900 on the second rotary frame 210.

[0053] As shown in Figure 7 , Figure 8As shown in some embodiments of the utility model, the taking arm 400 includes at least one set of third carrier placing assembly 410, the third carrier placing assembly 410 includes the fourth hanging piece 411 arranged on the upper part of the taking arm 400 or arranged on the upper part and lower part of the taking arm 400, the carrier 900 is provided with the third hanging hole 903 corresponding to the fourth hanging piece 411, and the taking and placing of the carrier 900 on the taking arm 400 are realized through the hanging mechanism, which is convenient and fast.

[0054] It can be understood that, in some embodiments of the utility model, the third carrier placing assembly 410 can also be a plug-in fixing mechanism, a clamping fixing mechanism, a magnetic attraction fixing mechanism, etc., which can also meet the taking and placing requirements of the carrier 900 on the taking arm 400.

[0055] As shown in some embodiments of the utility model, the third carrier placing assembly 410 is configured as two sets and is oppositely distributed on both sides of the taking arm 400, the mechanical hand 300 includes a rotating arm 310 capable of driving the taking arm 400 to rotate, so that the taking arm 400 has two carrier placing stations, and the taking down and placing of the carrier can be realized by rotating the taking arm 400, two carriers can be operated at a time, and the working efficiency is improved. Figure 7 Figure 8 As shown in some embodiments of the utility model, the third carrier placing assembly 410 is configured as two sets and is oppositely distributed on both sides of the taking arm 400, the mechanical hand 300 includes a rotating arm 310 capable of driving the taking arm 400 to rotate, so that the taking arm 400 has two carrier placing stations, and the taking down and placing of the carrier can be realized by rotating the taking arm 400, two carriers can be operated at a time, and the working efficiency is improved.

[0056] In some embodiments of the utility model, the mechanical hand 300 is a multi-axis mechanical hand, the rotating arm 310 is arranged at the driven end thereof, and the rotating arm 310 is provided with a mounting mechanism connected with the taking arm 400, such as a screw connection mechanism, a clamping mechanism, a magnetic attraction mechanism, etc.

[0057] It can be understood that, in some embodiments of the utility model, the taking arm 400 can also be configured with three sets, four sets or more third carrier placing assemblies 410 to meet different taking and placing efficiency requirements.

[0058] In some embodiments of the utility model, the fourth hanging piece 411 extends towards the outside of the taking arm 400 by a set distance, so that the carrier 900 hung on the taking arm 400 has a set distance from the taking arm 400 to avoid the workpiece placed on the carrier 900.

[0059] Specifically, when the carrier 900 is on the first rotating frame 110 and the second rotating frame 210, the outer side of the carrier 900 is used for placing the workpiece, when the carrier 900 is transferred to the taking arm 400, the face of the carrier 900 on which the workpiece is placed faces the taking arm 400, the fourth hanging piece 411 is extended, so that the taking arm 400 and the carrier 900 leave a distance corresponding to the workpiece, and the scratching of the workpiece is reduced.

[0060] As shown in some embodiments of the utility model, the third carrier placing assembly 410 is configured as two sets and is oppositely distributed on both sides of the taking arm 400, the mechanical hand 300 includes a rotating arm 310 capable of driving the taking arm 400 to rotate, so that the taking arm 400 has two carrier placing stations, and the taking down and placing of the carrier can be realized by rotating the taking arm 400, two carriers can be operated at a time, and the working efficiency is improved. Figure 8 ​As shown, in some embodiments of the present application, the third hanging hole 903 and the first hanging hole 901 are distributed in a staggered manner, so that the first carrier placing assembly 130 and the third carrier placing assembly 410 do not interfere with each other, and the second carrier placing assembly 230 and the third carrier placing assembly 410 do not interfere with each other.

[0061] In some embodiments of the present application, the first carrier placing assembly 130 and the second carrier placing assembly 230 are both hanging mechanisms, and the first carrier placing assembly 130 and the second carrier placing assembly 230 take and place the carrier 900 through the hanging manner, which is convenient and fast

[0062] In some embodiments of the present application, the first carrier placing assembly 130 and the second carrier placing assembly 230 share the same position of the first hanging hole 901, so as to simplify the structure on the carrier 900 and increase the workpiece placing space on the carrier 900.

[0063] It can be understood that, in some embodiments of the present application, the first carrier placing assembly 130 and the second carrier placing assembly 230 can also be clamping mechanisms, magnetic attraction mechanisms, etc., which are not described in detail here.

[0064] Of course, the present application is not limited to the above-mentioned embodiments, and those skilled in the art can make equivalent modifications or replacements without departing from the spirit of the present application, and these equivalent modifications or replacements are all included in the scope defined by the claims of the present application.

Claims

1. A carrier transport system for a sputtering coating machine, characterized in that, include: The first rotating frame assembly (100) is located outside the coating cavity (101); The second rotating frame assembly (200) is disposed inside the coating cavity (101); A carrier (900) for loading workpieces; A transfer assembly is disposed between the first rotating frame assembly (100) and the second rotating frame assembly (200), and the transfer assembly includes a robotic arm (300) and a picking arm (400) disposed on the robotic arm (300); The first rotating frame assembly (100) is provided with a plurality of first vehicle placement assemblies (130) for placing the vehicle (900) in the circumferential direction; The second frame assembly (200) is circumferentially provided with a plurality of second vehicle placement assemblies (230) for placing the vehicle (900); The robotic arm (300) can drive the picking arm (400) to move between the first rotating frame assembly (100) and the second rotating frame assembly (200), and the picking arm (400) can pick up / place the carrier (900) from the first rotating frame assembly (100) and the second rotating frame assembly (200).

2. The sputtering coating machine carrier transport system according to claim 1, characterized in that, The first rotating frame assembly (100) includes a first rotating frame (110) and a first rotation drive mechanism (120) capable of driving the first rotating frame (110) to rotate. The first rotating frame (110) includes a first upper rotating disk (111), a first lower rotating disk (112) disposed below the first upper rotating disk (111), and a first support rod group (113) connecting the first upper rotating disk (111) and the first lower rotating disk (112).

3. The sputtering coating machine carrier transport system according to claim 2, characterized in that, The first vehicle placement assembly (130) includes a first mounting member (131) disposed on the first upper turntable (111) or disposed on the first upper turntable (111) and the first lower turntable (112), and the vehicle (900) is provided with a first hanging hole (901) corresponding to the first mounting member (131).

4. The sputtering coating machine carrier transport system according to claim 1, characterized in that, The second rotating frame assembly (200) includes a second rotating frame (210) and a second rotation drive mechanism (220) capable of driving the second rotating frame (210) to rotate. The second rotating frame (210) includes a second upper rotating disk (211), a second lower rotating disk (212) disposed below the second upper rotating disk (211), and a second support rod assembly (213) connecting the second upper rotating disk (211) and the second lower rotating disk (212).

5. The sputtering coating machine carrier transport system according to claim 4, characterized in that, The second vehicle placement assembly (230) includes a second mounting member (231) disposed on the second upper turntable (211) or disposed on the second upper turntable (211) and the second lower turntable (212), and the vehicle (900) is provided with a first hanging hole (901) corresponding to the second mounting member (231).

6. The sputtering coating machine carrier transport system according to claim 5, characterized in that, The second vehicle placement assembly (230) further includes a vehicle support (232) connecting the second upper turntable (211) and the second lower turntable (212). The vehicle support (232) is provided with at least one third mounting piece (233), and the vehicle (900) is provided with a second mounting hole (902) corresponding to the third mounting piece (233).

7. The sputtering coating machine carrier transport system according to claim 1, characterized in that, The picking arm (400) includes at least one set of third carrier placement assemblies (410), the third carrier placement assembly (410) includes a fourth mounting member (411) disposed on the upper part of the picking arm (400) or disposed on the upper and lower parts of the picking arm (400), and the carrier (900) is provided with a third hanging hole (903) corresponding to the fourth mounting member (411).

8. The sputtering coating machine carrier transport system according to claim 7, characterized in that, The third carrier placement assembly (410) is configured in two groups and is distributed opposite to each other on both sides of the picking arm (400), and the manipulator (300) includes a rotating arm (310) capable of driving the picking arm (400) to rotate.

9. The sputtering coating machine carrier transport system according to claim 7, characterized in that, The fourth mounting component (411) extends a set distance outward toward the outside of the picking arm (400).

10. The sputtering coating machine carrier transport system according to claim 1, characterized in that, Both the first vehicle placement assembly (130) and the second vehicle placement assembly (230) are mounting mechanisms.

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