Continuous high-temperature cast ingot smelting equipment
By designing a continuous high-temperature ingot smelting equipment and optimizing the process flow using crucible translation and lifting mechanisms, the problems of high energy consumption and long production cycle of existing equipment have been solved, achieving efficient high-temperature smelting and cooling separation, and meeting the needs of large-scale production.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-19
- Publication Date
- 2026-03-27
AI Technical Summary
Existing high-temperature ingot smelting equipment suffers from high energy consumption and long production cycles due to repeated heating and cooling, making it unsuitable for large-scale, batch production needs.
Design a continuous high-temperature ingot melting equipment, including a feeding chamber, a processing chamber and a discharging chamber, and set up a crucible translation mechanism and a high-temperature melting chamber. The separation of high-temperature melting and low-temperature cooling is achieved through a guide pipe, and the process flow is optimized by using a crucible translation and lifting mechanism.
It significantly reduces energy loss, saves production costs, shortens the production time of a single furnace, and significantly improves production efficiency, making it suitable for large-scale batch production.
Smart Images
Figure CN224051011U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a semiconductor technical field especially relates to a continuous high temperature ingot casting smelting equipment. BACKGROUND
[0002] With the rapid development of semiconductor industry, the demand of crystal material is more and more flourishing, and the production efficiency and cost of high temperature heat treatment are paid more and more attention by the industry. The existing high temperature ingot casting smelting equipment usually includes a furnace body, a heat preservation assembly arranged on the inner side wall of the furnace body, a heater arranged in the heat preservation assembly and a crucible for smelting crystal material. When working, the crystal raw material is put into the crucible, and then the crucible is sent into the furnace body. The crucible is heated in stages according to the process requirements, and the crystal raw material is smelted until the crystal raw material is smelted. Then the crucible is cooled in stages according to the process requirements, and then the furnace body is opened to take out the crucible, and the next batch of crystal smelting is prepared. In the whole process, the high temperature ingot casting smelting equipment is an intermittent equipment, which needs repeated heating and cooling. A large amount of heat is directly wasted without being used for the immersion of the workpiece, resulting in high energy consumption and high production cost. And the repeated heating, cooling and vacuumizing processes take a lot of time, resulting in long production cycle, low yield and inability to meet the demand of large-scale and batch production. SUMMARY
[0003] The technical problem to be solved by the utility model is that the existing continuous high temperature ingot casting smelting equipment has the problems of high energy consumption and long production cycle caused by repeated heating and cooling. The utility model provides a continuous high temperature ingot casting smelting equipment.
[0004] The technical solution of the utility model is that a continuous high temperature ingot casting smelting equipment is constructed, which includes a continuous high temperature ingot casting smelting equipment, including a feeding chamber, a processing chamber and a discharging chamber arranged in sequence, the processing chamber includes a cooling section and at least one transfer section, a feeding chamber is arranged corresponding to each transfer section, and a feeding isolation door mechanism is arranged between the transfer section and the feeding chamber. A discharging isolation door mechanism is arranged between the cooling section and the discharging chamber, and a partition isolation door is arranged between the cooling section and each transfer section. At least one high temperature smelting chamber is connected to the top of each transfer section.
[0005] A crucible translation mechanism is arranged in the processing chamber, the crucible translation mechanism controls the crucible translation car to translate from each transfer section to the cooling section according to the preset track, and the crucible translation car carries an ingot crucible.
[0006] Each of the high-temperature melting chambers comprises a furnace body fixed at the top of the transfer section, a heat preservation assembly arranged in the furnace body, a melting crucible arranged at the center of the heat preservation assembly, a heater arranged between the melting crucible and the heat preservation assembly, and a feeding device arranged outside the furnace body to add crystal raw materials into the melting crucible; the bottom of the melting crucible is provided with a discharge port, the top of the furnace body is provided with a plunger rod penetrating through the furnace body and the heat preservation assembly and matched with the discharge port, and the bottom of the melting crucible is provided with a flow guide pipe extending the discharge port into the transfer section.
[0007] Further, the high-temperature melting chamber further comprises a hydraulic lifting mechanism for controlling the lifting of the plunger rod.
[0008] Further, the crucible translation mechanism is arranged at the inner bottom of the processing chamber, and comprises a translation guide rail arranged according to a preset trajectory, a plurality of rollers rotatably arranged on the translation guide rail, a chain for driving the plurality of rollers to rotate synchronously, a translation motor for driving the chain to rotate through a sprocket shaft, and a crucible translation carriage arranged on the rollers.
[0009] Further, the crucible translation carriage comprises a heat preservation support plate made of heat preservation material, and a heat preservation plate frame arranged at the bottom of the heat preservation support plate; the ingot casting crucible is arranged on the upper surface of the heat preservation support plate, the heat preservation plate frame is arranged on the rollers of the crucible translation mechanism, and the heat preservation support plate is embedded in the heat preservation plate frame.
[0010] Further, the inner bottom of the transfer section is provided with a crucible lifting mechanism corresponding to each of the high-temperature melting chambers, and the crucible lifting mechanism lifts the ingot casting crucible on the crucible translation carriage to below the flow guide pipe corresponding to the high-temperature melting chamber or lowers the ingot casting crucible from below the flow guide pipe to the crucible translation carriage according to a preset procedure.
[0011] Further, the crucible lifting mechanism comprises a lifting hydraulic cylinder arranged at the outer bottom of the processing chamber, and a lifting guide rod driven by the lifting hydraulic cylinder and penetrating through the bottom sidewall of the processing chamber, and the lifting guide rod is arranged opposite to the flow guide pipe.
[0012] Further, the heat preservation isolation door mechanism comprises a heat preservation guide rail horizontally arranged at the top of the transfer section, a heat preservation isolation door sealably covering the opening of the high-temperature chamber furnace shell, a guide roller fixedly arranged at the end surface of the heat preservation isolation door and slidingly arranged in the heat preservation guide rail, and a first driving mechanism for driving the heat preservation isolation door to reciprocally slide.
[0013] Further, the inner sidewall of the transfer section is provided with a processing heat preservation layer, and the partition isolation door is located above the crucible translation mechanism.
[0014] Further, the feeding chamber comprises a feeding chamber furnace shell and a feeding chamber furnace door; the feeding isolation door mechanism comprises an isolation door shell arranged between the feeding chamber furnace shell and the transfer section, two heat insulation isolation doors vertically arranged in the isolation door shell and capable of sliding up and down, and an isolation door lifting mechanism arranged outside the feeding chamber furnace shell.
[0015] The continuous high-temperature ingot casting and smelting equipment has the following beneficial effects: the processing chamber is provided with at least one transfer section, and at least one high-temperature smelting chamber is connected to the top of each transfer section; the high-temperature smelting chamber is connected to the transfer section crucible translation mechanism through a flow guide pipe to deliver the molten raw material to the ingot crucible, thereby separating the high-temperature smelting and low-temperature cooling processes, continuously smelting the raw material in the high-temperature smelting chamber, greatly reducing the energy loss caused by repeated heating and cooling, saving production costs, and shortening the single-furnace production time; meanwhile, multiple high-temperature smelting chambers can be arranged on one transfer section, multiple transfer sections can be arranged in the equipment, and multiple furnaces can be processed synchronously, thereby doubling the production efficiency. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 Fig. 1 is a front view of a preferred embodiment of the continuous high-temperature ingot casting and smelting equipment;
[0017] Figure 2 Fig. 2 is an enlarged view of I in Fig. 1; Figure 1
[0018] Figure 3 Fig. 3 is a structure schematic view of a feeding isolation door mechanism in the preferred embodiment of the continuous high-temperature ingot casting and smelting equipment;
[0019] Figure 4a Fig. 4 is a structure schematic view of a crucible translation mechanism in the preferred embodiment of the continuous high-temperature ingot casting and smelting equipment;
[0020] Figure 4b Fig. 5 is a structure schematic view of the crucible translation mechanism from another perspective in the preferred embodiment of the continuous high-temperature ingot casting and smelting equipment;
[0021] Figure 5a Fig. 6 is a structure schematic view of a crucible lifting mechanism after the ingot crucible is lowered in the preferred embodiment of the continuous high-temperature ingot casting and smelting equipment;
[0022] Figure 5b Fig. 7 is a structure schematic view of the crucible lifting mechanism after the ingot crucible is lifted to a preset position in the preferred embodiment of the continuous high-temperature ingot casting and smelting equipment;
[0023] Figure 5c Fig. 8 is a structure schematic view of the continuous high-temperature ingot casting and smelting equipment in another preferred embodiment of the present application; and Figure 5a Enlarged view of section II. DETAILED DESCRIPTION
[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.
[0025] It should be further noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.
[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application.
[0027] As shown in Figure 1 , 2 , 3, 4a, 4b, 5a, 5b, 5c, in the preferred embodiment of the continuous high-temperature ingot casting smelting equipment, the main part includes a feeding chamber 1, a processing chamber 10 and a discharging chamber 2 which are sequentially and continuously arranged together, the processing chamber 10 includes a cooling section 12 and at least one transfer section 11, at least one high-temperature smelting chamber 20 is connected at the top of each transfer section 11, and in the preferred embodiment, two high-temperature smelting chambers are preferably arranged at the top of the transfer section. Among them, a feeding isolation door mechanism 30 is arranged between the transfer section 11 and the feeding chamber 1, a discharging isolation door mechanism 40 is arranged between the cooling section 12 and the discharging chamber 2, and a partition isolation door 50 is arranged between the transfer section 11 and the cooling section 12. A crucible translation mechanism 60 is arranged in the processing chamber 10, an ingot crucible 4 is placed on a crucible translation vehicle 3, and the crucible translation vehicle 3 is controlled by the crucible translation mechanism 60 and translated according to a preset trajectory.
[0028] As shown in Figure 1 , 2As shown in Figure 3, in this preferred embodiment, the feeding chamber 1 may include a feeding chamber shell 1a and a feeding chamber door 1b, wherein the feeding chamber door 1b may be located on the top or side of the feeding chamber shell 1a. Opening the feeding chamber door 1b allows the ingot crucible 4 to be placed in the corresponding crucible transfer carriage 3. In this preferred embodiment, the feeding chamber 1 may also include a feeding transfer mechanism 1c to deliver the crucible transfer carriage 3 carrying the ingot crucible 4 into the processing chamber 10. Specifically, the feeding transfer mechanism 1c may include a feeding guide rail located inside the feeding chamber shell 1a, multiple rollers located on the feeding guide rail, a chain driving all rollers to rotate synchronously, a sprocket driving the chain to rotate, a sprocket shaft fixing the sprocket outside the feeding chamber shell 1a, and a feeding drive motor driving the sprocket shaft to rotate. The drive motor drives the sprocket to rotate via the sprocket shaft, thereby causing the rollers on the chain to roll on the feeding guide rail. When the crucible translation carriage 3 is placed on the rollers of the feeding translation mechanism 1c, the crucible translation carriage 3 is fed into the processing chamber 10 along the guide rail direction.
[0029] like Figure 1 , 2 As shown, in this preferred embodiment, the processing chamber 10 preferably includes a processing chamber shell 13 and a partition door 50 disposed within the processing chamber shell 13. The partition door 50 divides the processing chamber into a transfer section 11 and a cooling section 12. In this preferred embodiment, each transfer section is provided with a partition door 50. The inner side of the processing chamber shell 13 in the transfer section is provided with a heat insulation layer 14. Each high-temperature melting chamber within the transfer section 11 is provided with a crucible lifting mechanism 80, which is located below the crucible translation mechanism 60.
[0030] like Figure 1 , 2As shown, in the preferred embodiment, the high-temperature smelting chamber 20 comprises a furnace body 21 fixed on the top of the transfer section 11, a heat-insulating assembly 22 arranged in the furnace body 21, a smelting crucible 24 arranged in the heat-insulating assembly 22, a heating body 23 arranged between the smelting crucible 24 and the heat-insulating assembly 22, and a feeding device 25 arranged outside the furnace body 21 and configured to supplement the crystal raw material into the smelting crucible 24. The heating body 23 is configured to heat the smelting crucible 24 according to the process requirements. Specifically, a discharge port 24a is arranged at the bottom of the smelting crucible, a plunger rod 26 is arranged at the top of the furnace body, and a flow guide pipe 27 is arranged at the bottom of the smelting crucible and extends from the discharge port 24a to the inside of the transfer section. The bottom end of the plunger rod 26 matches the discharge port 24a and can exactly block the discharge port; the top end of the plunger rod 26 extends to the outside of the furnace body 21 through the furnace body 21 and the heat-insulating assembly 22. A hydraulic lifting mechanism 28 is preferably arranged at the top of the furnace body of the high-temperature smelting chamber, and the hydraulic lifting mechanism 28 is connected to the top end of the plunger rod 26 and can control the lifting of the plunger rod 26. When the hydraulic lifting mechanism 28 controls the plunger rod to be lifted, the plunger rod is separated from the discharge port, the discharge port is opened, and the raw material liquid in the smelting crucible can flow out of the discharge port of the smelting crucible, be transported to the ingot casting crucible located directly below the flow guide pipe in the transfer section of the processing chamber through the flow guide pipe 27, and be poured into the ingot casting crucible. When the hydraulic lifting mechanism 28 controls the plunger rod to be lowered, the plunger rod is lowered to the discharge port and blocks the discharge port, so that the discharge port is closed; at this time, the raw material can be supplemented into the smelting crucible through the feeding device.
[0031] As Figure 1 , 2As shown in 5a, 5b, and 5c, in this preferred embodiment, a crucible lifting mechanism 80 is preferably provided at the bottom of the transfer section 11 corresponding to each guide pipe 27, so as to lift the ingot crucible from the crucible translation mechanism 60 to the guide pipe 27 at the bottom of the high-temperature melting chamber 20, preventing the raw material liquid from splashing everywhere when it is discharged from the guide pipe. The crucible lifting mechanism 80 preferably includes a lifting hydraulic cylinder 81 and a lifting guide rod 82. The lifting hydraulic cylinder 81 is located at the bottom of the outer side of the processing chamber furnace shell 13, and the lifting guide rod 82 is driven by the lifting hydraulic cylinder 81 and extends through the bottom side wall of the processing chamber furnace shell 13 to below the crucible translation mechanism 60. When the crucible translation carriage slides to directly below the corresponding guide pipe, the lifting hydraulic cylinder 81 drives the lifting guide rod 82 to lift. The lifting guide rod passes through the crucible translation carriage 3 and lifts the ingot crucible 4 located on the crucible translation carriage 3 upward, so that the ingot crucible 4 is close to the guide pipe 27 at the bottom of the corresponding high-temperature melting chamber. Specifically, the crucible translation cart 3 may include an insulated tray 3a made of insulating material and an insulated frame 3b disposed at the bottom of the insulated tray 3a; wherein the ingot crucible 4 is disposed on the upper surface of the insulated tray 3a, the insulated frame 3b is mounted on the rollers 62 of the crucible translation mechanism, and the insulated tray 3a is embedded in the insulated frame 3b and can be freely removed. When the lifting guide rod 82 of the crucible lifting mechanism passes through the insulated frame 3b of the crucible translation cart, the lifting guide rod 82 can drive the insulated tray and the ingot crucible 4 to detach from the insulated frame 3b and move upward toward the guide pipe 27.
[0032] In this preferred embodiment, the crucible translation mechanism 60 moves the crucible translation cart 3 from the transfer section 11 to the cooling section 12 according to a preset trajectory. Specifically, as shown... Figure 4a , 4b As shown, the crucible translation mechanism 60 preferably includes a translation guide rail 61, multiple rollers 62 rotatably mounted on the translation guide rail 61, a chain 63 driving the multiple rollers 62 to rotate synchronously, a sprocket shaft 65 driven by a translation motor 64, and a sprocket 66 mounted on the sprocket shaft 65. The crucible translation carriage 4 is slidably mounted on the rollers 62 along the translation guide rail 61, and the sprocket 66 cooperates with the chain 63. The translation guide rail 61 extends from each transfer section 11 to the cooling section 12. The translation motor 64 drives the sprocket shaft 65 to rotate the sprocket 66, which in turn drives the rollers 62 to rotate via the chain 63, thereby moving the crucible translation carriage 4 located on the rollers along the translation guide rail 61. Preferably, the sprocket shaft 65 and the translation motor 64 are located outside the processing chamber furnace shell 13, and the chain 63 extends to the inside of the processing chamber furnace shell 13. This way, the translation motor 64 is not exposed to a high-temperature environment, thus extending the service life of the entire crucible translation mechanism 60.
[0033] Multiple transfer sections 11 can also be installed inside the furnace shell 13 of the processing chamber as needed. Each transfer section 11 corresponds to the aforementioned feed chamber 1, and all transfer sections 11 are connected to the cooling section 12. This allows for the simultaneous casting of multiple furnaces of high-temperature ingots, further improving production efficiency.
[0034] like Figure 1 , 2 As shown in Figure 3, in this preferred embodiment, the feed isolation door mechanism 30 preferably includes a feed isolation door housing 31 disposed between the feed chamber furnace shell 1a and the processing chamber furnace shell 13, two feed isolation doors 32 vertically slidably disposed within the feed isolation door housing, and a first hydraulic cylinder 33 for driving the feed isolation doors 32 to move up and down. When it is necessary to open the feed isolation door 32, the first hydraulic cylinder 33 is controlled to drive the two feed isolation doors 32 to slide in opposite directions, thereby opening the channel between the feed chamber 1 and the processing chamber 10 so that the crucible transfer cart 3 can be sent from the feed chamber 1 into the processing chamber 10; when it is necessary to close the feed isolation door 32, the first hydraulic cylinder 33 is controlled to drive the two feed isolation doors 32 to slide towards each other until the gap between the two feed isolation doors 32 is closed, thereby closing the channel between the feed chamber 1 and the processing chamber 10.
[0035] In the above embodiment, the discharge chamber 2 may include a discharge chamber shell 2a and a discharge chamber door 2b, with the door 2b located at the top or side of the shell 2a. Preferably, the discharge chamber 2 also includes a discharge translation mechanism 2c to transport the crucible translation cart 3 containing the ingot crucible 4 from the cooling section 12 into the discharge chamber 2. The discharge translation mechanism 2c can be configured with reference to the feeding translation mechanism 1c described above.
[0036] In the above embodiments, the discharge isolation door mechanism 40 can also be set with reference to the above-mentioned feeding isolation door mechanism, that is, the discharge isolation door mechanism 40 includes a discharge isolation door shell set between the discharge chamber furnace shell and the processing chamber furnace shell 13, two discharge isolation doors vertically slidably set in the discharge isolation door shell, and a second hydraulic cylinder for driving the discharge isolation doors to move up and down.
[0037] The following processing method can be used in the above-mentioned continuous high-temperature ingot smelting equipment, including the following steps:
[0038] S10. Install the continuous high-temperature ingot smelting equipment as described above;
[0039] S20. For all high-temperature melting chambers on the same transfer section, simultaneously control the plunger rod to insert into the discharge port at the bottom of the melting crucible to block the discharge port; put raw materials into the melting crucible in the corresponding high-temperature melting chamber through the feeding device, evacuate the high-temperature melting chamber and gradually heat it to the working temperature so that the raw materials melt.
[0040] S31. Put the ingot casting crucible on the crucible translation vehicle in the feeding chamber;
[0041] S32. Open the feeding isolation door mechanism, and control the crucible translation mechanism to translate the crucible translation vehicle carrying the ingot casting crucible to directly below the corresponding high-temperature smelting chamber's flow guide pipe on the transfer section;
[0042] S33. Repeat the steps S31 and S32 according to the number of high-temperature smelting chambers on the corresponding transfer section, until there is one ingot casting crucible below the flow guide pipe of each high-temperature smelting chamber;
[0043] S40. After the raw materials in the high-temperature smelting chamber are completely melted, control the plunger rod of the corresponding high-temperature smelting chamber to lift and separate from the discharge port of the smelting crucible, so that the raw material liquid in the smelting crucible flows into the corresponding ingot casting crucible through the flow guide pipe;
[0044] S50. Open the partition isolation door of the corresponding transfer section, and control all the crucible translation vehicles to move to the cooling section through the crucible translation mechanism, and then close the partition isolation door;
[0045] S60. Repeat the steps S20 to S50
[0046] S70. Synchronously repeat the steps S20 to S60 in other transfer sections;
[0047] S80. After the workpieces in the cooling section reach a preset number, open the discharge isolation door mechanism, control the crucible translation mechanism to transfer the cooled workpieces to the discharge chamber, and close the discharge isolation door mechanism.
[0048] In the step S10, the device can also be provided with a crucible lifting mechanism, and between the step S33 and the step S40, the step S34 of controlling the crucible lifting mechanism to lift the ingot casting crucible to directly below the corresponding flow guide pipe is further included; and between the step S40 and the step S50, the step S41 of controlling the crucible lifting mechanism to lower the ingot casting crucible to the corresponding crucible translation vehicle is further included.
[0049] Based on the embodiments in the utility model, all other embodiments obtained by those of ordinary skill in the art without creative labor, any modification, equivalent replacement, improvement, etc. should be included in the protection scope of the utility model.
Claims
1. A continuous high-temperature ingot smelting equipment, characterized in that, The application relates to a continuous casting and rolling production line. The processing chamber is internally provided with a crucible translation mechanism, the crucible translation mechanism controls a crucible translation vehicle to translate from each transfer section to the cooling section according to a preset track, and the crucible translation vehicle is loaded with an ingot casting crucible. Each high-temperature smelting chamber comprises a furnace body fixed to the top of the transfer section, a heat preservation assembly arranged in the furnace body, a smelting crucible arranged at the center of the heat preservation assembly, a heater arranged between the smelting crucible and the heat preservation assembly, and a material supplementing device arranged outside the furnace body and used for adding crystal raw materials into the smelting crucible.
2. The continuous high-temperature ingot casting melting apparatus according to claim 1, wherein The high-temperature smelting chamber further comprises a hydraulic lifting mechanism for controlling the lifting of the plunger rod.
3. The continuous high-temperature ingot casting melting apparatus according to claim 1, wherein The crucible translation mechanism is arranged at the inner bottom of the processing chamber, and comprises a translation guide rail arranged according to a preset track, a plurality of rollers rotatably arranged on the translation guide rail, a chain for driving the synchronous rotation of the plurality of rollers, a translation motor for driving the rotation of the chain through a chain wheel shaft, and a crucible translation vehicle frame arranged on the rollers.
4. The continuous high-temperature ingot casting melting apparatus according to claim 1, wherein The crucible translation vehicle comprises a heat preservation supporting plate made of heat preservation material, and a heat preservation plate frame arranged at the bottom of the heat preservation supporting plate.
5. The continuous high-temperature ingot-casting melting apparatus according to claim 4, wherein The transfer section is internally provided with a crucible lifting mechanism corresponding to each high-temperature smelting chamber, the crucible lifting mechanism lifts the ingot casting crucible on the crucible translation vehicle to below the corresponding high-temperature smelting chamber or lowers the ingot casting crucible from below the corresponding high-temperature smelting chamber to the crucible translation vehicle according to a preset process.
6. The continuous high-temperature ingot-casting melting apparatus according to claim 5, wherein The crucible lifting mechanism comprises a lifting hydraulic cylinder arranged at the bottom outside of the processing chamber, and a lifting guide rod driven by the lifting hydraulic cylinder and penetrating through the bottom sidewall of the processing chamber, wherein the lifting guide rod is arranged opposite to the flow guide pipe.
7. The continuous high-temperature ingot casting melting apparatus according to claim 1, wherein The inner sidewall of the transfer section is provided with a processing heat preservation layer, and the partition isolation door is located above the crucible translation mechanism.
8. The continuous high-temperature ingot-casting melting apparatus according to claim 7, wherein The feeding chamber comprises a feeding chamber furnace shell and a feeding chamber furnace door; the feeding isolation door mechanism comprises an isolation door shell arranged between the feeding chamber furnace shell and the transfer section, two heat preservation isolation doors vertically arranged in the isolation door shell and capable of sliding up and down, and an isolation door lifting mechanism arranged outside the feeding chamber furnace shell.