Test device

Abstract

The utility model relates to the field of testing, in particular to testing equipment which comprises a circulating conveying assembly, at least one testing seat, a dust removal device, a cleaning device, a carrying device, a testing device and a control device, and the testing seat is controlled to move along the circulating conveying assembly; the test seat bears the to-be-tested element, the test device is electrically connected with the test seat to detect the to-be-tested element to form test result information, and the control device controls at least one of the dust removal device, the cleaning device and the carrying device to operate based on the test result information. And the test seat is automatically maintained, tested and replaced, so that the working efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the test field, concretely, it relates to a test equipment. BACKGROUND

[0002] In the test flow of semiconductor and electronic components, the test seat is the core component of the test equipment, and its state is crucial to ensure the accuracy and efficiency of the test. However, during the operation of the test equipment, the test seat may have various problems, which may cause test errors. For example, the damage of the tested component may contaminate / damage the test seat, at which time the test equipment must be paused / closed, the damaged tested component on the test seat is removed by manual means, and the test seat and its probe are checked and cleaned to evaluate the feasibility of continuing to use the test seat. If the test seat cannot be used, it needs to be replaced.

[0003] The traditional manual cleaning of the test seat, polishing of the probe and replacement of the new test seat have significant defects. The first problem is that the manual operation is time-consuming and long, which restricts the overall efficiency and is difficult to adapt to large-scale fast-paced needs. Secondly, frequent manual contact with the test equipment also poses a safety risk, and improper operation may cause mechanical injury or electrical accidents, posing a threat to personnel safety. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a test equipment capable of improving work efficiency.

[0005] To achieve the above purpose, the utility model provides the following technical scheme: a test equipment, comprising a circulating conveying assembly, at least one test seat, a dust removal device, a cleaning device, a carrying device, a test device and a control device.

[0006] The test seat is arranged to move along the circulating conveying assembly under control; the test seat carries the tested component;

[0007] The dust removal device, the cleaning device and the carrying device are arranged on one side of the circulating conveying assembly; the dust removal device removes the tested component in the test seat; the cleaning device cleans the test seat; the carrying device carries the test seat between the circulating conveying assembly and a predetermined position;

[0008] The test device is electrically connected with the test seat, and the test device detects the tested component to form test result information and sends it to the control device;

[0009] The control device is signal connected with the test device, the dust removal device, the cleaning device and the conveying device respectively; the control device can control at least one of the dust removal device, the cleaning device and the conveying device to operate based on the obtained test result information.

[0010] Further, the circulating conveying assembly comprises a plurality of functional areas, the plurality of functional areas comprise a test area, a dust removal area, a cleaning area and a replacement area, the test area is arranged corresponding to the test device, the dust removal area is arranged corresponding to the dust removal device, the cleaning area is arranged corresponding to the cleaning device, and the replacement area is arranged corresponding to the conveying device, the test area is arranged on a straight line segment of the circulating conveying assembly, and the dust removal area, the cleaning area and the replacement area are arranged on an arc line segment of the circulating conveying assembly.

[0011] Further, the plurality of functional areas further comprise a feeding area and a discharging area, the feeding area is used to place the to-be-tested element on the test seat, and the discharging area is used to take out the to-be-tested element on the test seat; the feeding area is arranged on a straight line segment of the circulating conveying assembly, and the discharging area is arranged on an arc line segment of the circulating conveying assembly.

[0012] Further, the test equipment further comprises a cover shell for protecting the test equipment, one side of the replacement area is provided with a temporary storage area, the preset position is arranged in the temporary storage area, and the cover shell is provided with a taking and placing window on one side of the temporary storage area.

[0013] Further, the dust removal device comprises a double-shaft linear module, a lifting mechanism, a dust removal mechanism and a circumferential adjustment assembly.

[0014] The dust removal mechanism is mounted on the lifting mechanism.

[0015] The circumferential adjustment assembly is arranged between the double-shaft linear module and the lifting mechanism to adjust the circumferential position of the dust removal mechanism.

[0016] Further, the circumferential adjustment assembly comprises a fixing plate, a positioning plate and a locking piece.

[0017] The fixing plate is arranged on the double-shaft linear module.

[0018] The positioning plate is mounted below the fixing plate, the positioning plate rotates relative to the fixing plate with the locking piece as a rotating shaft, and the lifting mechanism is fixed below the fixing plate.

[0019] The locking piece locks the positioning plate and the fixing plate.

[0020] Further, the cleaning device comprises a cleaning assembly and a dust suction plate arranged below the cleaning assembly, the dust suction plate having a dust suction port and a dust suction channel, the dust suction port facing the cleaning assembly, and the dust suction channel being formed in the dust suction plate and communicating with the dust suction port.

[0021] Further, the cleaning assembly comprises a polishing head, a clamping mechanism and a lifting cylinder.

[0022] The clamping mechanism clamps or releases the polishing head.

[0023] The lifting cylinder drives the clamping mechanism to move in the height direction.

[0024] The cleaning device further comprises a horizontal driving member, which drives the dust suction plate to move in the horizontal direction to switch between a first horizontal position and a second horizontal position.

[0025] In the first horizontal position, the dust suction plate is located in the polishing head.

[0026] In the second horizontal position, the dust suction plate is located outside the polishing head.

[0027] Further, the cleaning assembly further comprises a brush head and a horizontal cylinder.

[0028] The brush head is arranged side by side with the polishing head in the horizontal direction, and the brush head is mounted on the horizontal cylinder.

[0029] The horizontal cylinder can drive the brush head to move relative to the polishing head in the horizontal direction to protrude out of the polishing head.

[0030] Further, the conveying device comprises a rotating driving assembly, a clamping assembly, a rotating sensing assembly and a limiting assembly.

[0031] The clamping assembly is mounted on the rotating assembly and is driven by the rotating driving assembly to switch between a first rotating position and a second rotating position.

[0032] The rotating sensing assembly is located on one side of the clamping assembly, the rotating sensing assembly is signal connected with the control device, the rotating sensing assembly generates an induction signal when the clamping assembly reaches the first rotating position or the second rotating position, and the control device controls the rotating driving assembly to operate reversely based on the induction signal.

[0033] The limiting assembly is located on one side of the clamping assembly, and the clamping assembly is limited to continue to rotate when the clamping assembly passes the first rotating position / second rotating position.

[0034] The beneficial effects of this utility model are as follows: The testing equipment of this application is electrically connected to the test socket through the testing device to detect the component under test and generate test result information. The control device controls at least one of the dust removal device, cleaning device and handling device to operate based on the test result information, thereby realizing the automated maintenance, testing and replacement of the test socket in case of test abnormality, and improving work efficiency.

[0035] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the structure of a test device according to an embodiment of this application;

[0037] Figure 2 This is a schematic diagram of the structure of a circulating conveying assembly according to an embodiment of this application;

[0038] Figure 3 This is a schematic diagram of the structure of a dust removal device according to an embodiment of this application;

[0039] Figure 4 for Figure 3 A partial structural schematic diagram of the dust removal device shown;

[0040] Figure 5 This is a schematic diagram of the cleaning device according to an embodiment of this application;

[0041] Figure 6 for Figure 5 A schematic diagram of a portion of the cleaning device shown;

[0042] Figure 7 for Figure 5 A schematic diagram of the dust collection plate in the diagram;

[0043] Figure 8 for Figure 6 A cross-sectional view of the dust collection plate shown;

[0044] Figure 9 This is a schematic diagram of the structure of a conveying device according to an embodiment of this application;

[0045] Figure 10 for Figure 9 A partial structural schematic diagram of the conveying device shown;

[0046] Figure 11 for Figure 9 A schematic diagram of a portion of the conveying device shown in another direction;

[0047] Figure 12 A flowchart of a test method shown in an embodiment of the present application.

[0048] Reference signs:

[0049] 10-circulating conveying assembly; 11-straight section; 12-arc section;

[0050] 20-dust removal device; 21-first double-shaft linear module; 211-first X-axis linear module; 212-first Y-axis linear module; 22-first lifting mechanism; 221-first air cylinder; 222-second air cylinder; 23-dust removal mechanism; 231-suction head; 232-blowing head; 24-circumferential adjustment assembly; 241-fixed plate; 242-positioning plate; 243-locking piece;

[0051] 30-cleaning device; 31-second double-shaft linear module; 311-second X-axis linear module; 312-second Y-axis linear module; 32-second lifting mechanism; 33-dust collection plate; 341-polishing head; 342-brush head; 343-horizontal air cylinder; 344-clamping piece; 345-clamping air cylinder; 346-lifting air cylinder; 35-horizontal driving piece; 331-dust collection port; 332-dust collection channel; 333-docking port;

[0052] 40-transporting device; 41-third double-shaft linear module; 411-third bracket; 412-third X-axis linear module; 413-third Y-axis linear module; 42 third lifting mechanism; 43-rotary driving assembly; 431-rotary motor; 432-rotary seat; 44-clamping assembly; 45-bracket plate; 46-rotation detection assembly; 461-inductor; 462-induction plate; 47-limiting assembly; 471-limiting baffle; 472-limiting abutting plate;

[0053] 50-test seat; 60-pre-set position. DETAILED DESCRIPTION

[0054] The technical solutions of the present application will be described clearly and completely in connection with the drawings. Obviously, the described embodiments are some of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present application. In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance. In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as there is no conflict.

[0055] The test device shown in an embodiment of the present application is used for performance detection of a semiconductor or an electronic component, wherein the semiconductor can be a chip (a single unit containing a circuit cut from a wafer, or a final product after packaging), and the electronic component can be a transistor or other electronic element with specific functions. In the present embodiment, the semiconductor or electronic component is referred to as a to-be-tested element.

[0056] Please refer to Figure 1 and Figure 2The test equipment comprises a circulating conveying assembly 10, at least one test seat 50, a dust removal device 20, a cleaning device 30, a carrying device 40, a test device (not shown) and a control device (not shown). The circulating conveying assembly 10 can be any one of a circle, an ellipse or a quadrilateral in the orthographic projection direction, which is not limited herein. The test seat 50 is arranged to move along the circulating conveying assembly 10 in a controlled manner. The movement of the test seat 50 on the circulating conveying assembly 10 can be that the test seat 50 is driven by a moving assembly below the test seat 50 to move on the circulating conveying assembly 10 in a self-moving manner, or the test seat 50 is moved along the circulating conveying assembly 10 by the circulating conveying assembly 10. The test seat 50 carries a component to be tested. Specifically, the test seat 50 has a probe for electrically contacting the component to be tested in the test seat 50. The structure of the test seat 50 can adopt the prior art, which is not described in detail herein.

[0057] The dust removal device 20, the cleaning device 30 and the carrying device 40 are arranged on one side of the circulating conveying assembly 10. The dust removal device 20 removes the component to be tested in the test seat 50. The cleaning device 30 cleans the test seat 50. The carrying device 40 carries the test seat 50 between the circulating conveying assembly 10 and a preset position 60, so as to realize replacement of the test seat 50 on the circulating conveying assembly 10 and the test seat 50 on the preset position 60.

[0058] The test device is electrically connected with the test seat 50, and the test device detects the component to be tested to form test result information and sends the test result information to the control device.

[0059] The control device is signal-connected with the test device, the dust removal device 20, the cleaning device 30 and the carrying device 40 respectively. The control device can control at least one of the dust removal device 20, the cleaning device 30 and the carrying device 40 to operate based on the obtained test result information.

[0060] The test equipment is electrically connected with the test seat 50 by the test device to detect the component to be tested to form test result information, and the control device controls at least one of the dust removal device 20, the cleaning device 30 and the carrying device 40 to operate based on the test result information, so that automatic maintenance, testing and replacement of the test seat are realized in the case of test abnormality, and the work efficiency is improved.

[0061] It should be noted that the detection signal includes a voltage signal, a current signal, a frequency signal, a digital signal and other signals indicating various properties of the element to be tested. The test device is built-in with test software, which pre-processes the collected detection signal, such as filtering, amplification, denoising, etc., and then uses algorithms to analyze the pre-processed data in detail to extract key performance indicators (i.e. test result information). The control device is built-in with analysis software, which compares the obtained performance indicators with the preset qualified standard to form an analysis result, and then controls at least one of the dust removal device, the cleaning device and the carrying device based on the analysis result. The above processing method of the test software can use the prior art, which will not be described in detail.

[0062] In order to intuitively understand the circulating conveying assembly 10, the dust removal device 20, the cleaning device 30 and the carrying device 40, the application provides an implementable example of the circulating conveying assembly 10, the dust removal device 20, the cleaning device 30 and the carrying device 40, respectively.

[0063] Please refer to Figure 2 In an implementable example, the orthographic projection of the circulating conveying assembly 10 is an oval shape, and the circulating conveying assembly 10 can adopt the existing conventional structure, for example, including a rack (not shown), a conveying structure (not shown) arranged on the rack, and a driving device (not shown) for driving the conveying structure to move circularly. The conveying structure can be a conveying belt or a conveying rack, etc. conventional structure. In this embodiment, the circulating conveying assembly includes a plurality of functional areas, and the plurality of functional areas include a test area, a dust removal area, a cleaning area and a replacement area. The test area is arranged corresponding to the test device, the dust removal area is arranged corresponding to the dust removal device 20, the cleaning area is arranged corresponding to the cleaning device 30, and the replacement area is arranged corresponding to the carrying device 40. The test area is arranged on the straight line segment 11 of the circulating conveying assembly 10, and the dust removal area, the cleaning area and the replacement area are arranged on the arc segment 12 of the circulating conveying assembly 10.

[0064] Since the test needs to ensure the positioning accuracy and ensure the test space, it is arranged on the straight line segment 11 to ensure the smoothness of the test, and the dust removal area, the cleaning area and the replacement area are arranged on the arc segment 12 of the circulating conveying assembly 10, which effectively utilizes the space. Through this arrangement, the whole local part is more reasonable and effective.

[0065] In an embodiment, the several functional areas further include a feeding area for placing the components to be tested on the test seats 50 and a discharging area for taking the components to be tested on the test seats 50. The feeding area is arranged on the linear segment 11 of the circulating conveying assembly, and the discharging area is arranged on the arc segment 12 of the circulating conveying assembly. Such arrangement takes into account the space required for feeding and the accuracy required in the feeding process, so that the feeding area is arranged on the linear segment 11 and the discharging area is arranged on the arc segment 12, which not only effectively relieves the space pressure of the feeding area, but also helps to avoid the confusion problem that may be caused by the feeding and discharging processes, and ensures the smoothness and efficiency of the overall operation process. In the embodiment, the linear segment 11 of the circulating conveying assembly is divided into two relatively arranged segments, the feeding area is arranged on one of the linear segments 11, and the testing area is arranged on the other linear segment 11.

[0066] In the embodiment, the testing device further includes a housing for protecting the testing device, wherein the circulating conveying assembly 10, the dust removal device 20, the cleaning device 30, the carrying device 40 and the testing device are all arranged in the housing to ensure the safety of the operation site and protect the testing device.

[0067] In order to facilitate the replacement and maintenance of the test seats 50 on the circulating conveying assembly 10 while ensuring the continuous operation of the testing device, in an embodiment, a temporary storage area is arranged on one side of the replacement area, a preset position 60 is arranged in the temporary storage area, and a taking and placing window is arranged on one side of the housing in the temporary storage area. The temporary storage area specifically includes a first area and a second area, the first area is used to stack a plurality of "qualified test seats 50", and the second area is used to stack a plurality of "replaced test seats 50". The "qualified test seats 50" are the test seats 50 carried by the carrying device 40 onto the circulating conveying assembly 10. The "replaced test seats 50" are the test seats 50 carried by the carrying device 40 from the circulating conveying assembly 10, which are temporarily considered to be damaged and need to be maintained or destroyed.

[0068] Please refer to Figure 3 and Figure 4 In an implementable example, the dust removal device 20 includes a first double-axis linear module 21, a first lifting mechanism 22, a dust removal mechanism 23 and a circumferential adjustment assembly 24. The first double-axis linear module 21 includes a first bracket (not shown), a first X-axis linear module 211 arranged on the first bracket and a first Y-axis linear module 212 arranged on the first X-axis linear module 211. The first X-axis linear module 211, the first Y-axis linear module 212 and the first lifting mechanism 22 realize the movement of the dust removal mechanism 23 on the XYZ axis.

[0069] The dust removing mechanism 23 is installed on the first lifting mechanism 22. The first lifting mechanism 22 comprises a first cylinder 221 and a second cylinder 222 arranged vertically and side by side, and the dust removing mechanism 23 comprises a suction head 231 installed below the first cylinder 221 and a blowing head 232 installed below the second cylinder 222. The first cylinder 221 and the second cylinder 222 can drive the suction head 231 and the blowing head 232 to move in the height direction respectively, so that the suction head 231 and the blowing head 232 are staggered in the height direction when working, facilitating the suction head 231 to adsorb the to-be-tested element to take out the to-be-tested element from the test seat 50, and facilitating the blowing head 232 to blow the test seat 50 to remove dust.

[0070] The circumferential adjusting assembly 24 is arranged between the first Y-axis linear module 212 and the lifting mechanism 22 to adjust the circumferential position of the dust removing mechanism 23. Specifically, the circumferential adjusting assembly 24 comprises a fixed plate 241, a positioning plate 242 and a locking piece 243. The fixed plate 241 is fixed below the first Y-axis linear module 212, the positioning plate 242 is installed below the fixed plate 241, the positioning plate 242 is arranged parallel to the fixed plate 241, and the locking piece 243 connects the positioning plate 242 and the fixed plate 241. The positioning plate 242 rotates relative to the fixed plate 241 with the locking piece 243 as the rotation axis. The locking piece 243 can lock the positioning plate 242 and the fixed plate 241. When adjusting the positioning plate 242, the locking piece 243 is loosened, and the positioning plate 242 is pushed in the circumferential direction with the locking piece 243 as the axis. When the adjustment is completed, the locking piece 243 is tightened again. The first lifting mechanism 22 is fixed below the positioning plate 242.

[0071] As described above, since the dust removing device 20 is arranged on the arc-shaped section 12 of the circulating conveying assembly 10, the assembly error of the test device may cause the suction head 231 and the blowing head 232 in the dust removing mechanism 23 to be staggered with the test seat 50 on the circulating conveying assembly 10. By arranging the circumferential adjusting assembly 24, the positioning plate 242 is adjusted in the circumferential direction after the test device is assembled, so that the suction head 231 and the blowing head 232 can be aligned with the test seat 50, thereby compensating for any error that may occur during the assembly process and improving the overall operation efficiency and accuracy.

[0072] Please refer to Figure 5 and Figure 6In an embodiment, the cleaning device 30 comprises a second double-axis linear module 31, a second lifting mechanism 32 arranged on the second double-axis linear module 31, a cleaning assembly arranged on the second lifting mechanism 32, and a dust collection plate 33 arranged below the cleaning assembly. The second double-axis linear module 31 comprises a second bracket (not shown), a second X-axis linear module 311 arranged on the second bracket, and a second Y-axis linear module 312 arranged on the second X-axis linear module 311. The second X-axis linear module 311, the second Y-axis linear module 312, and the second lifting mechanism 32 enable the cleaning assembly to move in the XYZ axes.

[0073] The cleaning assembly comprises a polishing head 341 and a brush head 342 arranged side by side in the horizontal direction. The polishing head 341 and the brush head 342 are respectively used for polishing and cleaning the probe. When the polishing head 341 / brush head 342 is pushed to contact the probe by the second double-axis linear module 31 and the second lifting mechanism 32, the polishing head 341 / brush head 342 is slightly moved by the second lifting mechanism 32 to polish / clean the probe.

[0074] In order to avoid the interference problem of one of the polishing head 341 and the brush head 342 during work, the cleaning assembly further comprises a horizontal cylinder 343 for mounting the brush head 342. The horizontal cylinder 343 is fixed on the second lifting mechanism 32, and the horizontal cylinder 343 can drive the brush head 342 to move relative to the polishing head 341 in the horizontal direction to protrude out of the polishing head 341, so as to realize the contact between the brush head 342 and the probe. At this time, the polishing head 341 has a certain distance from the probe to avoid interference. When the polishing head 341 is used, the horizontal cylinder 343 drives the brush head 342 to move reversely, so that the brush head 342 is away from the probe. At this time, when the polishing head 341 contacts the probe, the brush head 342 has a certain distance from the probe, thereby avoiding interference.

[0075] As aforementioned, the polishing head 341 is polished by micro motion, and in the long-term use, the polishing head 341 will be worn, so the polishing head 341 needs to be replaced. In the embodiment, the polishing head 341 is roughly in square structure. In order to improve the work efficiency and ensure the continuous operation of the equipment when the polishing head 341 is replaced, the automatic replacement of the polishing head 341 is realized in the embodiment. Specifically, the cleaning assembly further comprises a clamping mechanism and a lifting cylinder 346. The clamping mechanism clamps or releases the polishing head 341. Specifically, the clamping mechanism comprises two oppositely arranged clamping pieces 344 and a clamping cylinder 345. The two clamping pieces 344 are used to clamp or release the polishing head 341, and the clamping cylinder 345 drives the two clamping pieces 344 to move relatively to clamp or release the polishing head 341. The lifting cylinder 346 drives the clamping mechanism to move in the height direction. The cleaning device 30 further comprises a horizontal driving piece 35, which drives the dust collection plate 33 to move in the horizontal direction to switch between the first horizontal position and the second horizontal position. The dust collection plate 33 is in the first horizontal position, and the orthogonal projection of the polishing head 341 is located in the dust collection plate 33. The dust collection plate 33 is in the second horizontal position, and the orthogonal projection of the polishing head 341 is located outside the dust collection plate 33. By arranging the horizontal driving piece 35 to enable the dust collection plate 33 to switch between the first horizontal position and the second horizontal position, when the polishing head 341 needs to be replaced, the dust collection plate 33 can avoid interfering with the polishing head 341, and when the polishing head 341 is working, the dust collection port 331 (described later) of the dust collection plate 33 can be as close to the polishing head 341 as possible to improve the dust collection capacity.

[0076] In detail, when the polishing head 341 is replaced, the cleaning assembly is first pushed by the second double-axis linear module 31 and the second lifting mechanism 32 to move to the specified unloading position of the polishing head 341 to be replaced, and then the dust collection plate 33 is driven by the cleaning device 30 to move between the first position and the second position to avoid the position below the polishing head 341 when the polishing head 341 needs to be replaced. Then, the clamping cylinder 345, the clamping piece 344 and the polishing head 341 are pushed downward by the lifting cylinder 346 until a specified height is reached, and the clamping cylinder 345 is started to drive the two clamping pieces 344 to move in the opposite direction to release the polishing head 341. At this time, the removal of the polishing head 341 is completed. Then, the cleaning assembly is moved to the specified mounting position of the polishing head 341 to be replaced by the second double-axis linear module 31 and the second lifting mechanism 32, and then the clamping cylinder 345, the clamping piece 344 and the polishing head 341 are pushed downward by the lifting cylinder 346 until a specified height is reached. The clamping cylinder 345 is started to drive the two clamping pieces 344 to move relatively to clamp the new polishing head 341. At this time, the installation of the new polishing head is completed.

[0077] Please refer to Figure 7 and Figure 8The dust collection plate 33 has a dust collection port 331 and a dust collection channel 332. The dust collection port 331 faces the cleaning assembly. The dust collection channel 332 is formed in the dust collection plate 33. The dust collection port 331 is in communication with the internal dust collection channel 332 for guiding the debris generated by the polishing / cleaning to the outside. The dust collection channel 332 penetrates the rear surface of the dust collection plate 33 to form a docking port 333 for connecting with a dust collection pipe. In the embodiment, the number of the dust collection plates 33 is two. The two dust collection plates 33 are respectively arranged below the polishing head 341 and the brush head 342. The dust collection plate 33 below the brush head 342 is fixed below the brush head 342 plate for fixing the brush head 342.

[0078] Please refer to Figures 9 to 11 In an embodiment, the conveying device 40 includes a third double-axis linear module 41, a third lifting mechanism 42, a rotating driving assembly 43, a clamping assembly 44, a rotating detection assembly 46, and a limiting assembly 47. The third lifting mechanism 42 is arranged on the third double-axis linear module 41. The third double-axis linear module 41 includes a third bracket 411, a third X-axis linear module 412 arranged on the third bracket 411, and a third Y-axis linear module 413 arranged on the third X-axis linear module 412. The third X-axis linear module 412, the third Y-axis linear module 413, and the third lifting mechanism 42 realize the movement of the rotating driving assembly 43 and other components on the XYZ axis.

[0079] The rotating driving assembly 43 is arranged on the third lifting mechanism 42. The clamping assembly 44 is arranged below the rotating driving assembly 43. The rotating driving assembly 43 drives the clamping assembly 44 to switch between the first rotating position and the second rotating position. The rotating detection assembly 46 and the limiting assembly 47 are arranged on one side of the rotating driving assembly 43. The rotating detection assembly 46 and the limiting assembly 47 are signal connected with the control device. The rotating detection assembly 46 generates a sensing signal when the clamping assembly 44 reaches the first rotating position or the second rotating position. The control device controls the rotating driving assembly 43 to operate reversely based on the sensing signal. The limiting assembly 44 limits the clamping assembly 44 from continuing to rotate when the clamping assembly 44 passes the first rotating position / second rotating position.

[0080] In the embodiment, the carrying device 40 further comprises a support plate 45, the rotating driving assembly 43 comprises a rotating motor 431 fixed on the third lifting mechanism 42 and a rotating seat 432 provided on the rotating motor 431 and driven by a driving shaft of the rotating motor 431. The clamping assembly 44 and the support plate 45 are installed on the rotating seat 432. The limiting abutting plates 472 are two plates arranged at an angle, and the two limiting abutting plates 472 are fixed on the rotating seat 432. The rotating detection assembly 46 comprises two inductors 461 installed on the rotating seat 432 and an inductive plate 462 provided on the support plate 45, and the two inductors 461 are arranged at an angle. In the first position, one of the inductors 461 is located inside the inductive plate 462, and in the second position, the other inductor 461 is located inside the inductive plate 462. The limiting assembly 47 comprises a limiting baffle 471 provided on the support plate 45 and a limiting abutting plate 472 provided on the rotating seat 432. When the rotating driving assembly 43 passes the first rotating position / second rotating position, the limiting abutting plate 472 abuts against the limiting baffle 471, so that the rotating seat 432 continues to rotate in the same direction.

[0081] Please refer to Figure 1 and Figure 12 , an embodiment of the present application further provides a test method, which can be applied to the control device of the test equipment shown in any of the foregoing embodiments. The test method comprises the following steps:

[0082] S10, obtaining test result information, which is information formed by the test device detecting the to-be-tested element on the target test seat 50;

[0083] S20, analyzing the test result information to form an analysis result, the analysis result comprising an abnormal category and a normal category; if the analysis result is the abnormal category, controlling at least one of the dust removal device 20, the cleaning device 30 and the carrying device 40 to perform a corresponding operation based on the analysis result.

[0084] It should be noted that, generally, a plurality of test seats 50 are arranged on the circulating conveying assembly 10. In order to facilitate the implementation of the test method, the target test seat 50 needs to be confirmed.

[0085] By applying the test method of the present application to the control device of the test equipment, by obtaining the test result information of the to-be-tested element on the target test seat 50, after analyzing the test result information, when the analysis result is the abnormal category, at least one of the dust removal device 20, the cleaning device 30 and the carrying device 40 is controlled to perform a corresponding operation, thereby realizing automatic processing when the abnormality occurs and improving work efficiency.

[0086] The abnormality category includes a breakage category and a non-breakage category, the breakage category indicating that the tested element explodes during the test, and the non-breakage category indicating that the tested element does not explode during the test, the tested element being possibly a qualified element or a non-qualified element.

[0087] In step S20, if the analysis result is the breakage category, the test method further comprises:

[0088] S101, controlling the dust removal device 20 to remove the tested element in the target test seat 50.

[0089] In step S101, the tested element in the target test seat 50 is removed, in which case, the target test seat 50 can be damaged due to the explosion of the tested element, or the target test seat 50 can be only contaminated by the probe. For this, the test method of the present application can continue with the following multiple processes after step S101.

[0090] The first process: the test method further comprises:

[0091] S102, the handling device 40 handles the target test seat 50 from which the tested element is removed and the empty test seat 50 on the preset position 60 to replace the target test seat 50 with the empty test seat 50.

[0092] In this process, it is assumed that the target test seat 50 is damaged, so when the analysis result is the breakage category, the target test seat 50 is directly replaced.

[0093] The second process: the test method further comprises:

[0094] S102', controlling the cleaning device 30 to clean the target test seat 50 from which the tested element is removed.

[0095] In this process, it is assumed that the target test seat 50 is not damaged, but the probe is contaminated, so when the analysis result is the breakage category, the target test seat 50 is cleaned after the tested element on the target test seat 50 is removed. The cleaning operation is to control the polishing head 341 to polish the probe and control the brush head 342 to sweep the probe to remove the contaminants on the probe, and after the cleaning is completed, the target test seat 50 can be used again, and a new tested element is placed on the target test seat 50; then the test method further comprises:

[0096] S103', obtaining new test result information, the new test result information being information formed by the test device detecting the new tested element on the target test seat 50;

[0097] S104', analyzing the new test result information to form a new analysis result;

[0098] After step S103, if the new analysis result is the abnormal category, the control device controls at least one of the cleaning device 30 and the carrying device 40 to perform a corresponding operation.

[0099] In detail, if the new analysis result is the abnormal category, the carrying device 40 can be controlled to replace the target test seat 50 with a new test seat 50 on the preset position 60 according to actual needs, in which case, it is determined that the target test seat 50 is damaged; or the DUT on the target test seat 50 is replaced, and then the steps S103' and S104' are repeated, in which case, it is temporarily determined that the target test seat 50 is not damaged.

[0100] The third procedure, the test method further comprises:

[0101] S102'', obtaining new test result information, the new test result information being information formed by the test device detecting a new DUT on the target test seat 50;

[0102] S103'', analyzing the new test result information to form a new analysis result;

[0103] After step S103'', if the new analysis result is the abnormal category, the control device controls at least one of the cleaning device 30 and the carrying device 40 to perform a corresponding operation.

[0104] In this procedure, it is initially determined that the target test seat 50 is not damaged and the probe is not contaminated, so when the new analysis result is the damage category, the DUT on the target test seat 50 is removed, and a new DUT will be placed on the target test seat 50.

[0105] After the new analysis result is determined to be the abnormal category, the carrying device 40 can be controlled to replace the target test seat 50 with a new test seat 50 on the preset position 60 according to actual needs, in which case, it is determined that the target test seat 50 is damaged; or the DUT on the target test seat 50 is replaced, and then the steps S102'' to S103'' are repeated.

[0106] As mentioned above, the abnormal category further includes the non-damage category. If the analysis result is determined to be the non-damage category, the test method comprises:

[0107] S201, controlling the dust removal device 20 to perform an operation of removing the DUT in the target test seat 50;

[0108] S202, controlling the cleaning device 30 to perform a cleaning operation on the target test seat 50 from which the DUT is removed;

[0109] S203, obtaining new test result information, the new test result information being information formed by the testing device detecting a new to-be-tested element on the target test seat 50;

[0110] S204, analyzing the new test result information to form a new analysis result;

[0111] If the new analysis result is a non-damaged category, repeating steps S201, S202 and S203 for the target test seat 50, wherein steps S201, S202 and S203 are set as a cycle period.

[0112] In the above steps, in step S204, it is determined that the target test seat 50 is not damaged in the cycle period. In other embodiments, if the new test result information is determined to be a non-damaged category, the control device 40 directly replaces the target test seat 50 by performing a corresponding operation. In this embodiment, it is determined that the target test seat 50 is damaged.

[0113] It should be noted that the cycle period of step S204 can be one time or multiple times, and the test method further comprises:

[0114] setting the number of repetitions of the cycle period;

[0115] within the set number of repetitions of the cycle period, when the test result information of one of the times is normal, stopping the test method corresponding to the cycle period for the target test seat 50;

[0116] when the set number of repetitions of the cycle period is reached and all analysis results are abnormal, controlling the handling device 40 to perform a handling operation on the target test seat 50 from which the to-be-tested element has been removed and the empty test seat 50 in the preset position 60, so that the empty test seat 50 replaces the target test seat 50.

[0117] The technical features of the above embodiments can be combined in any way. In order to make the description simple, all possible combinations of the technical features in the above embodiments are not described, but as long as the combination of the technical features does not exist contradictory, it should be considered as the scope of the description.

[0118] The above embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the scope of the patent. It should be noted that for those skilled in the art, without departing from the concept of the present application, some modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A test apparatus, characterized by, The test device comprises a circulating conveying assembly, at least one test seat, a dust removal device, a cleaning device, a carrying device, a test device and a control device. The test seat is arranged to move along the circulating conveying assembly under control; the test seat carries a component to be tested; The dust removal device, the cleaning device and the carrying device are arranged on one side of the circulating conveying assembly; the dust removal device removes the component to be tested in the test seat; the cleaning device cleans the test seat; the carrying device carries the test seat between the circulating conveying assembly and a preset position; The test device is electrically connected with the test seat, and the test device detects the component to be tested to form test result information and sends the test result information to the control device; The control device is signal connected with the test device, the dust removal device, the cleaning device and the carrying device respectively; the control device can control at least one of the dust removal device, the cleaning device and the carrying device to operate based on the obtained test result information.

2. The test apparatus of claim 1, wherein, The circulating conveying assembly comprises a plurality of functional areas, and the plurality of functional areas comprise a test area, a dust removal area, a cleaning area and a replacement area; the test area is arranged corresponding to the test device, the dust removal area is arranged corresponding to the dust removal device, the cleaning area is arranged corresponding to the cleaning device, and the replacement area is arranged corresponding to the carrying device; the test area is arranged on a straight line segment of the circulating conveying assembly, and the dust removal area, the cleaning area and the replacement area are arranged on an arc line segment of the circulating conveying assembly.

3. The test apparatus of claim 2, wherein, The plurality of functional areas further comprise a feeding area and a discharging area; the feeding area is used to place the component to be tested on the test seat, and the discharging area is used to take out the component to be tested on the test seat; the feeding area is arranged on a straight line segment of the circulating conveying assembly, and the discharging area is arranged on an arc line segment of the circulating conveying assembly.

4. The test apparatus of claim 2, wherein, The test device further comprises a housing for protecting the test device; one side of the replacement area is provided with a temporary storage area, and the preset position is arranged in the temporary storage area; and one side of the housing located in the temporary storage area is provided with a taking and placing window.

5. The test apparatus of claim 1, wherein, The dust removal device comprises a double-shaft linear module, a lifting mechanism, a dust removal mechanism and a circumferential adjustment assembly; The dust removal mechanism is installed on the lifting mechanism; The circumferential adjustment assembly is arranged between the double-shaft linear module and the lifting mechanism to adjust the circumferential position of the dust removal mechanism.

6. The test apparatus of claim 5, wherein, The circumferential adjustment assembly comprises a fixing plate, a positioning plate and a locking piece; The fixing plate is arranged on the double-shaft linear module; The positioning plate is installed below the fixing plate; the positioning plate rotates relative to the fixing plate with the locking piece as the rotation axis; and the lifting mechanism is fixed below the fixing plate; The locking piece locks the positioning plate and the fixing plate.

7. The test apparatus of claim 1, wherein The cleaning device comprises a cleaning assembly and a dust suction plate arranged below the cleaning assembly; the dust suction plate has a dust suction port and a dust suction channel; the dust suction port faces the cleaning assembly; and the dust suction channel is formed in the dust suction plate and communicates with the dust suction port.

8. The test apparatus of claim 7, wherein, The cleaning assembly comprises a polishing head, a clamping mechanism and a lifting cylinder; The clamping mechanism clamps or releases the polishing head; The lifting cylinder drives the clamping mechanism to move in the height direction; The cleaning device further comprises a horizontal driving member, which drives the dust absorption plate to move in the horizontal direction to switch between a first horizontal position and a second horizontal position; In the first horizontal position, the orthographic projection of the polishing head is located inside the dust absorption plate; In the second horizontal position, the orthographic projection of the polishing head is located outside the dust absorption plate.

9. The test apparatus of claim 8, wherein, The cleaning assembly further comprises a brush head and a horizontal cylinder; The brush head is arranged horizontally and side by side with the polishing head, and is installed on the horizontal cylinder; The horizontal cylinder can drive the brush head to move relative to the polishing head in the horizontal direction to protrude out of the polishing head.

10. The test apparatus of claim 1, wherein, The conveying device comprises a rotating driving assembly, a clamping assembly, a rotating sensing assembly and a limiting assembly; The clamping assembly is installed on the rotating assembly and is driven by the rotating driving assembly to switch between a first rotating position and a second rotating position; The rotating sensing assembly is located on one side of the clamping assembly, and the rotating sensing assembly is signal-connected with the control device, and generates an induction signal when the clamping assembly reaches the first rotating position or the second rotating position, and the control device controls the rotating driving assembly to operate reversely based on the induction signal; The limiting assembly is located on one side of the clamping assembly, and when the clamping assembly passes the first rotating position / second rotating position, the clamping assembly is limited to continue rotating.

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