Gallium oxide single crystal grinding device

Abstract

The utility model relates to the technical field of single crystal grinding devices, and discloses a gallium oxide single crystal grinding device which comprises a housing, a roller and a damping base, the roller is rotationally arranged on the front side in the housing and filled with rolling balls, and the damping base is arranged at the bottom of the housing. A mixed feeding structure and a material taking port; the mixing and feeding structure is arranged on the front side of the housing and mixes and feeds gallium oxide single crystals and inert gas into the roller, and the material taking opening is formed in the rear side of the housing; the transmission structure is arranged on the front side of the housing, and the roller rotates through the transmission structure; the ground gallium oxide in the roller enters the housing through the screening structure; and the pulse back blowing structure is arranged on the rear side of the housing. Compared with the prior art, the device has the advantages that gallium oxide single crystals and inert gas are mixed through the mixing and feeding structure and then are fed into the roller for grinding, so that gallium oxide can be effectively prevented from reacting with air in the grinding process to generate impurities to influence the grinding effect, and the grinding effect is better.

Description

Technical Field

[0001] This utility model relates to the technical field of single crystal polishing devices, specifically a gallium oxide single crystal polishing device. Background Technology

[0002] Gallium oxide (Ga₂O₃) is an inorganic compound with the chemical formula Ga₂O₃, also known as gallium trioxide. It is a wide-bandgap semiconductor with a bandgap of 4.9 eV, making it promising for applications in optoelectronic devices. It is widely used as an insulating layer in Ga-based semiconductor materials and as an ultraviolet filter. Furthermore, gallium oxide can be used as an O₂ chemical detector, demonstrating its unique application value in specific fields. In industrial applications, gallium oxide is used in the preparation of high-purity analytical reagents and semiconductor materials for the electronics industry; however, before these applications, gallium oxide single crystals need to be polished.

[0003] Most existing gallium oxide single crystal grinding devices on the market can only crush and grind gallium oxide, which is a single function and cannot screen the ground gallium oxide single crystal powder. They are very troublesome and inconvenient to use. In addition, the gallium oxide powder reacts with air during the grinding process, producing impurities and affecting the grinding effect. Utility Model Content

[0004] The technical problem to be solved by this utility model is to overcome the above-mentioned technical difficulties and provide a gallium oxide single crystal grinding device, which is equipped with a ball milling drum. The gallium oxide single crystal and inert gas are mixed and fed into the drum for grinding through a mixing feeding structure to prevent gallium oxide from reacting and generating impurities. The qualified powder is screened out by the screen on the side wall of the drum and carried away from the drum.

[0005] To solve the above-mentioned technical problems, the technical solution provided by this utility model is as follows:

[0006] A gallium oxide single crystal grinding apparatus, comprising:

[0007] The casing, roller, and shock-absorbing base; the roller is rotatably located on the front side inside the casing and is filled with rolling balls, and the shock-absorbing base is located at the bottom of the casing;

[0008] Mixed feeding structure and feeding port; The mixed feeding structure is set on the front side of the cover and mixes gallium oxide single crystal and inert gas and feeds them into the drum, while the feeding port is set on the rear side of the cover;

[0009] The transmission structure is located on the front side of the cover, and the roller rotates through the transmission structure to grind the gallium oxide single crystal.

[0010] The gallium oxide, after being ground inside the drum, enters the casing through the screening structure.

[0011] A pulse backflush structure is installed on the rear side of the casing to prevent clogging of the screening structure.

[0012] As an improvement, the transmission structure includes a motor, a gearbox, a drive gear, and a transmission gear; a rotating shaft is formed on the front side of the drum, and the rotating shaft is rotatably mounted on the front side wall of the cover. The transmission gear is connected and fixed to the front end of the rotating shaft. The input shaft of the gearbox is connected to the motor drive shaft, and the output shaft is connected and fixed to the drive gear that meshes with the transmission gear. The drive gear is located below the transmission gear.

[0013] As an improvement, the mixing and feeding structure includes a mixing pipe, a feeding funnel, an air supply valve, and an air supply pipe; the rotating shaft is a hollow tube structure, the mixing pipe is a tube that gradually widens from front to back, and the rear end is rotatably set inside the rotating shaft, the front end is connected to the air supply pipe, and an air supply valve is provided on the air supply pipe; the top of the feeding funnel is threaded with a sealing cap, and the bottom is connected and fixed to the top of the mixing pipe.

[0014] As an improvement, the screening structure includes a screen, a ball-bearing screen, a filter box, and an exhaust pipe; multiple screens are embedded circumferentially on the rear side wall of the drum, and the ball-bearing screen is arranged in front of the screen and sleeved and fixed inside the drum; the filter box is fixed on the rear side of the top of the cover, with its bottom communicating with the inside of the cover and its top connected to the exhaust pipe; a dust filter is fixed inside the filter box to filter gallium oxide powder in the exhaust gas and retain it inside the cover.

[0015] As an improvement, the pulse backflush structure includes a backflush pipe and a pulse air valve; a connecting shaft is formed on the rear side wall of the drum, and the connecting shaft is rotatably mounted on the rear side wall of the cover. The connecting shaft is a hollow tube with a perforated side wall. The backflush pipe is rotatably mounted inside the connecting shaft, and the pulse air valve is mounted on the backflush pipe.

[0016] The advantages of this utility model compared with the prior art are as follows:

[0017] 1. This utility model is a ball mill grinding device, which produces powder particles with smaller diameters and better grinding effect after grinding.

[0018] 2. This utility model uses a mixed feeding structure to mix gallium oxide single crystals and inert gas before feeding them into the grinding drum. This effectively prevents gallium oxide from reacting with air during the grinding process to generate impurities, thus affecting the grinding effect and resulting in a better grinding effect.

[0019] 3. This utility model uses a screen on the side wall of the drum to screen out qualified powder and carry it away from the drum. The gallium oxide powder is then filtered and retained in the housing through a filter box, making it more convenient to use and more powerful in function.

[0020] 4. The roller 2 of this utility model is located inside and will not come into contact with people, making it safer to use. Attached Figure Description

[0021] Figure 1This is a schematic diagram of the structure of this utility model. Figure 1 .

[0022] Figure 2 This is a schematic diagram of the structure of this utility model. Figure 2 .

[0023] Figure 3 This is a cross-sectional schematic diagram of the present invention.

[0024] Figure 4 This is a schematic diagram of the transmission structure and the mixed feeding structure of this utility model.

[0025] Figure 5 This is a schematic diagram of the screening structure and pulse backflushing structure of this utility model.

[0026] As shown in the figure: 1. Cover; 2. Drum; 3. Feed hopper; 4. Sealing cap; 5. Mixing pipe; 6. Air valve; 7. Air pipe; 8. Motor; 9. Gearbox; 10. Drive gear; 11. Transmission gear; 12. Shaft; 13. Feed port; 14. Cover plate; 15. Backflush pipe; 16. Pulse air valve; 17. Screen; 18. Ball guard; 19. Connecting shaft; 20. Bearing; 21. Protective cover; 22. Filter box; 23. Air outlet pipe; 24. Dust filter; 25. Vibration damping base. Detailed Implementation

[0027] In the description of this utility model, it should be understood that the terms "center," "lateral," "upper," "lower," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. Additionally, the term "comprising" and any variations thereof are intended to cover non-exclusive inclusion.

[0028] The present invention will now be described in further detail with reference to the accompanying drawings.

[0029] A gallium oxide single crystal grinding device, such as Figure 1 , 2 As shown, it includes:

[0030] The casing 1, roller 2, and shock-absorbing base 25; the casing 1 is a circular cylindrical structure arranged horizontally front to back and closed at both ends, with a shock-absorbing base 25 at its bottom (the shock-absorbing base 25 is shown in the image). Figure 1 As shown, this is a commonly used equipment based on existing mature technology and machinery such as fans. A filter box 22 is fixed to the top rear side. The filter box 22 is a square box with an open bottom and is connected to the inside of the cover 1. A dust filter screen 24 is fixed inside the filter box 22, and the top is connected to the air outlet pipe 23. A square material inlet 13 is reserved at the bottom of the rear side wall of the cover 1, and a cover plate 14 (with a locking device) is hinged to the corresponding material inlet 13. The roller 2 is as follows: Figure 3 As shown, the interior is filled with a large number of rolling balls, which are arranged on the front side inside the casing 1. A rotating shaft 12 is formed on the front side, and the rotating shaft 12 is rotatably mounted on the front side wall of the casing 1 via a bearing 20. A connecting shaft 19 is formed on the rear side wall, and the connecting shaft 19 is rotatably mounted on the rear side wall of the casing 1 via a bearing 20. Both the rotating shaft 12 and the connecting shaft 19 are hollow tube structures, and three strip-shaped hollow grooves are provided circumferentially on the side wall of the connecting shaft 19. Four screens 17 are embedded circumferentially on the rear side wall of the roller 2 (e.g., Figure 5 As shown), a ball guard 18 is fitted and fixed inside the roller 2 on the front side of the screen 17 (to prevent the ball from falling on the screen 17 and damaging it). The inner surfaces of the cover 1 and the roller 2 are coated with organic polymer materials (such as polyurethane or polytetrafluoroethylene), and the ball is wrapped with polyurethane to prevent metal impurities from entering.

[0031] Transmission structure and mixed feeding structure, such as Figure 4 As shown, the transmission structure includes a motor 8, a reduction gearbox 9, a drive gear 10, and a transmission gear 11; the transmission gear 11 is fixed at the front end of the rotating shaft 12, the input shaft of the reduction gearbox 9 is connected to the drive shaft of the motor 8, and the output shaft is connected and fixed to the drive gear 10, and the drive gear 10 meshes with the transmission gear 11 (the number of teeth of the transmission gear 11 is greater than the number of teeth of the drive gear 10). A protective cover 21 adapted to it is installed and fixed at the gear of the transmission structure, and a gap is provided between the bottom of the reduction gearbox 9 and the motor 8; the mixing and feeding structure includes a mixing pipe 5 and a feeding funnel. 3. Air supply valve 6 and air supply pipe 7; The mixing pipe 5 is a pipe that gradually widens from front to back (to prevent the mixing pipe 5 from getting blocked during mixing), and the rear end is rotatably set in the rotating shaft 12 through the bearing 20. The front end is connected to the air supply pipe 7. The air supply valve 6 is set on the air supply pipe 7, and the other end of the air supply pipe 7 is connected to the nitrogen storage tank. The top of the feed funnel 3 is provided with an external thread, and the cap 4 is threadedly fitted on the top of the feed funnel 3. The bottom of the feed funnel 3 is connected to the top of the mixing pipe 5, and the gallium oxide single crystal in the feed funnel 3 can fall naturally into the mixing pipe 5.

[0032] Pulse backflush structure such as Figure 5As shown, it includes a backflush pipe 15 and a pulse gas valve 16. One end of the backflush pipe 15 is rotatably mounted in the connecting shaft 19 via a bearing 20, and the other end is connected to a nitrogen storage tank. The pulse gas valve 16 is mounted on the backflush pipe 15. By releasing nitrogen gas into the housing 1 in a pulse manner, the gallium oxide single crystal on the screen 17 is backflushed, causing it to fall back into the roller 2 and continue to be ground by the ball.

[0033] The methods of using the shock-absorbing base 25, gearbox 9, motor 8 and pulse air valve 16 described above are well-known and mature existing technologies.

[0034] In the specific implementation of this embodiment:

[0035] Close and lock the cover plate 14, open the cap 4 of the feed funnel 3, pour the gallium oxide single crystal into the feed funnel 3, replace the cap 4 and tighten it, open the air valve 6 to send nitrogen into the drum 2, and the nitrogen mixes with the gallium oxide single crystal in the mixing tube 5 and carries the gallium oxide single crystal into the drum 2. Start the motor 8, and through the transmission structure, the drum 2 begins to rotate, and the internal balls are continuously lifted and dropped to crush and grind the gallium oxide single crystal. Because the drum 2 is filled with nitrogen, the gallium oxide powder... It does not react with air, thus avoiding the generation of impurities. The ground gallium oxide powder floats to the rear under the action of nitrogen gas, and after being screened by screen 17, it enters the housing 1 and follows the nitrogen gas into the filter box 22. It is then screened by dust filter 24 and falls back to the bottom of housing 1. During this process, pulse air valve 16 is opened intermittently (when pulse air valve 16 is open, air supply valve 6 is closed) to backflush the gallium oxide single crystal on screen 17, causing it to fall back into roller 2 and continue to be ground by the ball.

[0036] After grinding, close the motor 8 and all air valves, open the cover plate 14 to ventilate (to prevent excessive nitrogen concentration from causing oxygen deficiency and suffocation). After ventilating, collect the gallium oxide powder from the feed port 13.

[0037] The gas discharged from the outlet pipe 23 can be collected, filtered and purified, and reused as nitrogen, reducing nitrogen source pressure.

[0038] The present invention and its embodiments have been described above. This description is not restrictive, and the accompanying drawings are only one embodiment of the present invention; the actual structure is not limited thereto. In conclusion, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A gallium oxide single crystal grinding apparatus, characterized in that, The utility model relates to a gallium oxide single crystal production device, including: The shell (1), the drum (2) and the shock absorbing base (25); the drum (2) is rotationally arranged in the front side of the shell (1) and is filled with the inside of the roll ball, and the shock absorbing base (25) is arranged at the bottom of the shell (1); The mixed feeding structure and the material taking port (13); the mixed feeding structure is arranged at the front side of the shell (1) and is mixed into the drum (2) with gallium oxide single crystal and inert gas, and the material taking port (13) is arranged at the rear side of the shell (1); The transmission structure is arranged at the front side of the shell (1), and the drum (2) is rotated through the transmission structure and grinds gallium oxide single crystal; The screening structure is screened into the shell (1) through the screening structure after being ground in the drum (2); The pulse back flushing structure is arranged at the rear side of the shell (1) to prevent the screening structure from being blocked.

2. The gallium oxide single crystal polishing apparatus according to claim 1, characterized by: The transmission structure includes a motor (8), a speed reducer (9), a drive gear (10) and a transmission gear (11); the drum (2) is formed with a rotating shaft (12) at the front side, the rotating shaft (12) is rotationally arranged on the front side wall of the shell (1), the transmission gear (11) is fixed at the front end of the rotating shaft (12), the input shaft of the speed reducer (9) is connected with the driving shaft of the motor (8), the output shaft is connected with the drive gear (10), and the drive gear (10) is engaged with the transmission gear (11).

3. The gallium oxide single crystal polishing apparatus according to claim 2, characterized by: The mixed feeding structure includes a mixing pipe (5), a feeding funnel (3), an air feeding valve (6) and an air feeding pipe (7); the rotating shaft (12) is a hollow pipe body structure, the mixing pipe (5) is a pipe body gradually widened from front to back, the rear end is rotationally arranged in the rotating shaft (12), the front end is connected with the air feeding pipe (7), the air feeding valve (6) is arranged on the air feeding pipe (7), the feeding funnel (3) is fixedly connected at the bottom of the mixing pipe (5), the top is provided with external threads, and the threads are matched with a cap (4).

4. The gallium oxide single crystal polishing apparatus according to claim 1, wherein: The screening structure includes a screen (17), a roll ball blocking net (18), a filter box (22) and an air outlet pipe (23); the screen (17) is embedded with multiple pieces on the rear side wall of the drum (2), the roll ball blocking net (18) is arranged at the front side of the screen (17) and is fixedly sleeved in the drum (2), the filter box (22) is fixed at the top rear side of the shell (1) and is communicated with the inside of the shell (1) at the bottom, is connected with the air outlet pipe (23) at the top, and the dustproof filter screen (24) is fixed in the filter box (22).

5. The gallium oxide single crystal polishing apparatus according to claim 4, characterized by: The pulse back flushing structure includes a back flushing pipe (15) and a pulse air valve (16); the rear side wall of the drum (2) is formed with a connecting shaft (19), and the connecting shaft (19) is rotationally arranged on the rear side wall of the shell (1); the connecting shaft (19) is a hollow pipe body with a hollow side wall, the back flushing pipe (15) is rotationally arranged in the connecting shaft (19), and the pulse air valve (16) is arranged on the back flushing pipe (15).

6. The gallium oxide single crystal polishing apparatus according to claim 1, wherein: The material taking port (13) is arranged at the bottom of the rear side wall of the shell (1) and is hingedly connected with a cover plate (14).

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