Ceramic ring machining device

Abstract

The utility model discloses a ceramic ring processing device, and belongs to the field of semiconductor processing equipment. Each resisting assembly comprises a base and a resisting unit which are connected with each other, the bases are connected with the rotary table assembly in a sliding and locking mode, and the resisting units are used for abutting against the ceramic rings; the first driver and the cutter are located on the side face of the ceramic ring, a driving shaft of the first driver is connected with the cutter, and the cutter is used for abutting against the ceramic ring. The dovetail groove is formed in the rotary table assembly; one end of the dovetail joint is in sliding connection with the dovetail groove, the other end of the dovetail joint penetrates through the base and is in threaded connection with the nut, and the nut abuts against the base. The utility model has the technical effects of high processing efficiency and high processing precision.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor processing equipment especially relates to a ceramic ring processing device. BACKGROUND

[0002] The ceramic ring is a kind of semiconductor device for playing the physical support function, with good heat resistance, electrical insulation and other advantages.

[0003] The surface of relevant ceramic ring will have circular arc, and the size of circular arc is different and uneven, generally through vertical processing of machining center, specifically through cutter little and little grinding, it is easy to cause low processing efficiency, at the same time, the fixing performance of relevant ceramic ring is poor, and it is easy to deviate during processing, thereby leading to low processing precision. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of ceramic ring processing device, it not only has high processing efficiency, and high processing precision.

[0005] Technical scheme

[0006] A kind of ceramic ring processing device, comprising:

[0007] Rotary table assembly;

[0008] Several resistance components, the resistance component includes interconnection base and resistance unit, the base and the rotary table assembly sliding lock connection, the resistance unit is used to and the ceramic ring is in contact;

[0009] First driver and cutter for being located at the side of the ceramic ring, the driving shaft of the first driver is connected with the cutter, and the cutter is used to contact the ceramic ring.

[0010] Optionally, further comprising:

[0011] Dove tail groove arranged on the rotary table assembly;

[0012] Dove tail and nut, one end of the dove tail is connected with the dove tail groove in sliding mode, the other end of the dove tail passes through the base and is connected with the nut in screw mode, and the nut is in contact with the base.

[0013] Optionally, the resistance unit comprises:

[0014] Carrier block connected with the base;

[0015] Resistance column connected with the carrier block, and the resistance column is used to contact the ceramic ring.

[0016] Optionally, the resistance unit further comprises handle block connected with the carrier block, and rough parts are arranged on both sides of the handle block.

[0017] Optionally, the vertical sectional dimension of the resisting column is smaller than the vertical sectional dimension of the bearing block.

[0018] Optionally, the turntable assembly comprises a second driver and a turntable body, the driving shaft of the second driver is connected with the turntable body, and the base is in sliding locking connection with the turntable body.

[0019] Optionally, the resisting assemblies are uniformly arranged along the circumference of the turntable assembly.

[0020] Optionally, the cutter is provided with a plurality of cutting edges with different sizes, and the plurality of cutting edges are all used to abut against the ceramic ring.

[0021] Beneficial effects:

[0022] (1) The turntable assembly is started, the turntable assembly drives the ceramic blank to rotate, and the first driver is started at the same time, the driving shaft of the first driver drives the cutter to rotate, so that the cutter processes the ceramic blank into a ceramic ring at one time on the side surface, thereby facilitating high processing efficiency.

[0023] (2) The bases of the plurality of resisting assemblies are all moved by a certain distance towards the ceramic blank, until the resisting units of the plurality of resisting assemblies all abut against and lock the ceramic blank, thereby completing the multi-point fixing of the ceramic blank in the horizontal direction, thereby facilitating good fixing performance, preventing deviation during processing, and ensuring high processing precision. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a structure diagram of the ceramic ring processing device of the embodiment 1 of the utility model (containing a ceramic ring);

[0025] Figure 2 It is a structure diagram of the ceramic ring processing device of the embodiment 1 of the utility model;

[0026] Figure 3 It is Figure 2 A local view of the embodiment 1 of the utility model;

[0027] In the figure: 1, turntable assembly; 11, turntable body; 111, dovetail groove; 2, resisting assembly; 21, base; 22, resisting unit; 221, bearing block; 222, resisting column; 223, handle block; 224, rough part; 225, dovetail; 226, nut; 3, first driver; 4, cutter; 41, cutting edge; 5, ceramic ring. DETAILED DESCRIPTION

[0028] In order to make the technical scheme of the utility model clearer, the utility model is further described in detail in combination with the drawings and specific embodiments.

[0029] The application will be described in further detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related utility model, and not to limit the utility model. In addition, it should be noted that only parts related to the utility model are shown in the drawings for ease of description. The first, second, and the like in the utility model are set for the convenience of describing the technical solutions of the utility model, and have no specific limiting effect, and are all generic, which do not constitute a limiting effect on the technical solutions of the utility model. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. In the description of the utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second", "third" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance. Unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances. The technical solutions in the same embodiment and the technical solutions in different embodiments can be arranged and combined to form new technical solutions without contradiction or conflict, which are within the scope of the utility model.

[0030] Embodiment 1

[0031] As Figures 1-3 , the embodiment provides a ceramic ring processing device, comprising: a rotary table assembly 1; a plurality of resistance assemblies 2, the resistance assembly 2 comprises a base 21 and a resistance unit 22 connected to each other, the base 21 and the rotary table assembly 1 are slidingly locked and connected, and the resistance unit 22 is used to resist the ceramic ring 5; a first drive 3 and a cutter 4 used to be located on the side of the ceramic ring 5, the driving shaft of the first drive 3 is connected with the cutter 4, and the cutter 4 is used to resist the ceramic ring 5.

[0032] Specifically, during processing, first, the ceramic blank is placed on the turntable assembly 1; then, the bases 21 of the plurality of resistance assemblies 2 are each moved a certain distance towards the ceramic blank until the resistance units 22 of the plurality of resistance assemblies 2 each abut against the ceramic blank and are locked, thereby completing the multi-point fixing of the ceramic blank in the horizontal direction, facilitating good fixing performance, preventing deviation during processing, and ensuring high processing precision; finally, the turntable assembly 1 is started, the turntable assembly 1 drives the ceramic blank to rotate, and the first driver 3 is turned on at the same time, the driving shaft of the first driver 3 drives the cutter 4 to rotate, so that the cutter 4 processes the ceramic blank into a ceramic ring 5 on one side, facilitating high processing efficiency. In order to facilitate good processing performance, the abutting part of the cutter 4 and the ceramic ring 5 has opposite movement directions. The first driver 3 can be a servo motor, a stepper motor, etc.; the material of the cutter 4 can be diamond, cubic boron nitride, etc., and is preferably diamond.

[0033] Further, as shown in Figure 3 , the resistance unit 22 further comprises a handle block 223 connected with the bearing block 221, and rough parts 224 are arranged on both sides of the handle block 223.

[0034] Specifically, the dovetail groove 111 and the dovetail 225 cooperate to prevent the base 21 and the turntable assembly 1 from being separated from each other in the vertical direction, and the other end of the dovetail 225 is threadedly connected with the nut 226 to facilitate locking of the base 21 and the turntable assembly 1, wherein the number of the dovetail 225 and the nut 226 is preferably four, and two of them are located in the same dovetail groove 111, and the other two are located in the other dovetail groove 111.

[0035] Further, as shown in Figure 3 , the resistance unit 22 comprises a bearing block 221 connected with the base 21, and a resistance column 222 connected with the bearing block 221, the resistance column 222 being used to abut against the ceramic ring 5. Specifically, the bearing block 221 is used to bear the resistance column 222, and the resistance column 222 is used to abut against the ceramic ring 5, facilitating the fixation of the ceramic ring 5 in the horizontal direction.

[0036] Further, as shown in Figure 3 , the resistance unit 22 further comprises a handle block 223 connected with the bearing block 221, and rough parts 224 are arranged on both sides of the handle block 223.

[0037] Further, as shown in Figure 3The vertical sectional dimension of the resisting column 222 is smaller than the vertical sectional dimension of the bearing block 221. Specifically, the vertical sectional dimension of the resisting column 222 is smaller, so that the resisting column 222 and the inner arc surface of the ceramic ring 5 are well fitted, and the horizontal fixing performance of the ceramic ring 5 is further improved.

[0038] Further, the rotating table assembly 1 comprises a second driver and a rotating table body 11, the driving shaft of the second driver is connected with the rotating table body 11, and the base 21 is slidingly locked with the rotating table body 11. Figures 1-3 Specifically, the driving shaft of the second driver drives the rotating table body 11 to rotate, so as to drive the ceramic ring 5 to rotate, wherein the second driver can be a servo motor, a stepping motor or the like.

[0039] Further, the rotating table assembly 1 comprises a second driver and a rotating table body 11, the driving shaft of the second driver is connected with the rotating table body 11, and the base 21 is slidingly locked with the rotating table body 11. Figures 1-2 Specifically, the plurality of resisting assemblies 2 are evenly arranged along the circumference of the rotating table assembly 1, so that the plurality of resisting assemblies 2 can generate a circumferential multi-point uniform force on the ceramic ring 5, and the horizontal stress uniformity of the ceramic ring 5 is improved.

[0040] Further, the cutter 4 is provided with a plurality of cutting edges 41 with different sizes, and the plurality of cutting edges 41 are used to abut against the ceramic ring 5. Figures 1-2 Specifically, the plurality of cutting edges 41 with different sizes are used to process a plurality of arcs with different sizes and unevenness on the ceramic ring 5.

[0041] The above embodiments only express several embodiments of the present application, and the description is more specific and detailed, but it cannot be understood as the limitation of the patent scope of the present application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, some modifications and improvements can be made, which belong to the protection scope of the present application. Therefore, the protection scope of the present application patent should be subject to the appended claims.

Claims

1. A ceramic ring processing apparatus characterized by comprising: The utility model relates to a ceramic ring cutting device, which comprises: A rotating table assembly (1); A plurality of resisting assemblies (2) comprising a base (21) and a resisting unit (22) connected with each other, the base (21) is slidingly locked with the rotating table assembly (1), and the resisting unit (22) is used for resisting the ceramic ring (5); A first driver (3) and a cutter (4) used for the side of the ceramic ring (5), the driving shaft of the first driver (3) is connected with the cutter (4), and the cutter (4) is used for resisting the ceramic ring (5).

2. The apparatus of claim 1, wherein, Further comprising: A dovetail groove (111) arranged on the rotating table assembly (1); A dovetail (225) and a nut (226), one end of the dovetail (225) is slidingly connected with the dovetail groove (111), the other end of the dovetail (225) penetrates through the base (21) and is screwed with the nut (226), the nut (226) is in resistance with the base (21).

3. The apparatus of claim 1, wherein: The resisting unit (22) comprises: A bearing block (221) connected with the base (21); A resisting column (222) connected with the bearing block (221), the resisting column (222) is used for resisting the ceramic ring (5).

4. The apparatus of claim 3, wherein The resisting unit (22) further comprises a handle block (223) connected with the bearing block (221), and rough parts (224) are arranged on both sides of the handle block (223).

5. The apparatus of claim 3, wherein The vertical sectional dimension of the resisting column (222) is smaller than that of the bearing block (221).

6. A ceramic ring machining apparatus according to any one of claims 1-5, wherein The rotating table assembly (1) comprises a second driver and a rotating table body (11), the driving shaft of the second driver is connected with the rotating table body (11), and the base (21) is slidingly locked with the rotating table body (11).

7. A device for processing ceramic rings according to any one of claims 1-5, characterized in that A plurality of the resisting assemblies (2) are uniformly arranged along the circumference of the rotating table assembly (1).

8. A ceramic ring machining apparatus according to any one of claims 1-5, wherein The cutter (4) is provided with a plurality of cutting edges (41) with different sizes, and the cutting edges (41) are used for resisting the ceramic ring (5).

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