Silicon carbide electrostatic chuck machining mold convenient to demold

Abstract

The utility model belongs to the field of machining dies, and particularly relates to a silicon carbide electrostatic chuck machining die convenient to demould, which comprises a bottom plate, an adjusting mechanism is arranged on the bottom plate, a support frame is arranged on the adjusting mechanism, a lower die is fixedly connected to the upper end of the support frame, and a discharging mechanism is arranged on the lower die. A sleeve is fixedly connected to the upper end of the bottom plate and rotationally connected with the supporting frame, a support is fixedly connected to the upper end of the bottom plate, an air cylinder is fixedly installed in the middle of the upper end of the support, and an air cylinder rod of the air cylinder penetrates through the support and is slidably connected with the support. According to the utility model, the motor drives the support frame to rotate, so that the lower mold can switch stations, and the spring acts on the sliding barrel, so that the latches are inserted into the bottom plate to limit the support frame, the lower mold can automatically switch stations, and the injection molding of the silicon carbide electrostatic chuck by the device is more efficient.

Description

Technical Field

[0001] This utility model relates to the field of processing mold technology, specifically a silicon carbide electrostatic chuck processing mold that is easy to demold. Background Technology

[0002] Silicon carbide electrostatic chucks require injection molding during processing. Utility model patent CN213648483U discloses a mold for processing suction cup cushioning pads, comprising: a base, a molding component, and a lifting component. The base has an injection molding area and a demolding area on its top surface, and a cavity inside the base. The molding component includes a mold body and a shaping plate; the mold body is slidably mounted on the top surface of the base, and the shaping plate is disposed inside the mold body. The lifting component is disposed inside the cavity and includes an actuator rod that lifts the shaping plate. This utility model's mold for processing suction cup cushioning pads reduces the demolding difficulty of the cushioning pads and improves the processing efficiency.

[0003] However, when using this device, the processing efficiency of silicon carbide electrostatic chucks is low, and the demolding of silicon carbide electrostatic chucks is not convenient after molding. Utility Model Content

[0004] The purpose of this invention is to provide a silicon carbide electrostatic chuck processing mold that is easy to demold, which solves the problems of low processing efficiency of the device for silicon carbide electrostatic chucks and inconvenient demolding after the silicon carbide electrostatic chucks are formed.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a silicon carbide electrostatic chuck processing mold for easy demolding, comprising a base plate, an adjustment mechanism on the base plate, a support frame on the adjustment mechanism, a lower mold fixedly connected to the upper end of the support frame, a discharge mechanism on the lower mold, a sleeve fixedly connected to the upper end of the base plate, the sleeve and the support frame being rotatably connected, a bracket fixedly connected to the upper end of the base plate, a cylinder fixedly mounted in the middle of the upper end of the bracket, the cylinder rod of the cylinder passing through the bracket and slidably connected to the bracket, an upper mold fixedly connected to the lower end of the cylinder rod, and a feed pipe fixedly connected inside the upper mold.

[0006] Preferably, a guide block is fixedly connected inside the sleeve, and the guide block is slidably connected to the support frame. The guide block provides auxiliary support to the support frame.

[0007] Preferably, a guide pin is fixedly connected to the lower end of the upper mold, and an annular groove is formed at the upper end of the lower mold. By setting the guide pin and the annular groove to cooperate, misalignment between the upper and lower molds is prevented.

[0008] Preferably, the adjustment mechanism includes a motor, which is fixedly mounted to the base plate. The motor's shaft passes through the base plate and is rotatably connected to it. The motor's shaft is fixedly connected to a support frame. A guide rod is fixedly connected to the lower end of the support frame. A slide cylinder is slidably connected to the outer side of the guide rod. A spring is provided on the outer side of the guide rod. A locking tooth is fixedly connected to the lower end of the slide cylinder, and the locking tooth is slidably connected to the base plate. By driving the support frame to rotate with the motor, the lower mold can change positions. The spring acts on the slide cylinder, causing the locking tooth to engage with the base plate, limiting the support frame. This allows the lower mold to automatically change positions, making the device more efficient for silicon carbide electrostatic chuck injection molding.

[0009] Preferably, one end of the spring is fixedly connected to the support frame, and the other end of the spring is fixedly connected to the slide cylinder. By setting the spring, the slide cylinder is elastically pressed down.

[0010] Preferably, the discharge mechanism includes a push rod, which is slidably connected inside the lower mold. A support ring is fixedly connected to the upper end of the push rod, and the support ring is slidably connected to the lower mold. A top plate is fixedly connected to the lower end of the push rod, and a wedge is fixedly connected to the lower end of the top plate. A square rod is fixedly connected to the upper end of the bottom plate, and a baffle is slidably connected to the outer side of the square rod. The baffle is slidably connected to the wedge, and a compression spring is provided on the outer side of the square rod. By moving the top plate and contacting the baffle, the top plate moves upward, causing the push rod to move the support ring upward, thereby automatically lifting the formed silicon carbide electrostatic chuck and making demolding of the silicon carbide electrostatic chuck easier.

[0011] Preferably, one end of the compression spring is fixedly connected to the base plate, and the other end of the compression spring is fixedly connected to the baffle. By setting the compression spring, the baffle is elastically pushed upward.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0013] 1. This utility model uses a motor to drive the support frame to rotate, which allows the lower mold to change positions. Furthermore, the spring acts on the slide cylinder, causing the locking teeth to engage with the base plate and limit the support frame. This allows the lower mold to automatically change positions, making the device more efficient for silicon carbide electrostatic chuck injection molding.

[0014] 2. This utility model moves the top plate and contacts the baffle, causing the top plate to move upward, which in turn causes the top rod to move the support ring upward, thereby automatically lifting the molded silicon carbide electrostatic chuck, making it easier to demold the silicon carbide electrostatic chuck. Attached Figure Description

[0015] Figure 1 This is a perspective view of the overall structure of this utility model;

[0016] Figure 2 This utility model Figure 1 A bottom view;

[0017] Figure 3 This utility model Figure 2 Enlarged view of point A;

[0018] Figure 4 This utility model Figure 2 The lower mold section view.

[0019] In the diagram: 1. Base plate; 2. Adjustment mechanism; 3. Support frame; 4. Lower mold; 5. Discharge mechanism; 6. Sleeve; 7. Guide block; 8. Bracket; 9. Cylinder; 10. Upper mold; 11. Guide pin; 12. Feed pipe; 13. Annular groove; 21. Motor; 22. Guide rod; 23. Slide cylinder; 24. Spring; 25. Clamping tooth; 51. Top rod; 52. Support ring; 53. Top plate; 54. Inclined block; 55. Square rod; 56. Baffle; 57. Compression spring. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figures 1-2 A silicon carbide electrostatic chuck processing mold for easy demolding includes a base plate 1, an adjustment mechanism 2 on the base plate 1, a support frame 3 on the adjustment mechanism 2, a lower mold 4 fixedly connected to the upper end of the support frame 3, a discharge mechanism 5 on the lower mold 4, a sleeve 6 fixedly connected to the upper end of the base plate 1, the sleeve 6 and the support frame 3 being rotatably connected, and a guide block 7 fixedly connected inside the sleeve 6, the guide block 7 and the support frame 3 being slidably connected. By setting the guide block 7, the support frame 3 is provided with auxiliary support. The base plate 1 is fixedly connected to the upper end of the support, and a cylinder 9 is fixedly installed in the middle of the upper end of the support 8. The cylinder rod of the cylinder 9 passes through the support 8 and is slidably connected to the support 8. The lower end of the cylinder rod of the cylinder 9 is fixedly connected to the upper mold 10. The lower end of the upper mold 10 is fixedly connected to the guide pin 11. The upper end of the lower mold 4 is provided with an annular groove 13. By setting the guide pin 11 and the annular groove 13 to cooperate, misalignment between the upper mold 10 and the lower mold 4 is prevented. The upper mold 10 is fixedly connected to the inside of the feed pipe 12.

[0022] Please see Figure 2The adjustment mechanism 2 includes a motor 21, which is fixedly installed on the base plate 1. The rotating shaft of the motor 21 passes through the base plate 1 and is rotatably connected to the base plate 1. The rotating shaft of the motor 21 is fixedly connected to the support frame 3. A guide rod 22 is fixedly connected to the lower end of the support frame 3. A slide cylinder 23 is slidably connected to the outer side of the guide rod 22. A spring 24 is provided on the outer side of the guide rod 22. One end of the spring 24 is fixedly connected to the support frame 3, and the other end of the spring 24 is fixedly connected to the slide cylinder 23. By setting the spring 24, the slide cylinder 23 is elastically pressed down. A locking tooth 25 is fixedly connected to the lower end of the slide cylinder 23. The locking tooth 25 is slidably connected to the base plate 1. By driving the support frame 3 to rotate through the motor 21, the lower mold 4 can change positions. And by the spring 24 acting on the slide cylinder 23, the locking tooth 25 is inserted into the base plate 1, limiting the support frame 3. This allows the lower mold 4 to automatically change positions, making the device more efficient for silicon carbide electrostatic chuck injection molding.

[0023] Please see Figure 2 The ejection mechanism 5 includes a push rod 51. The push rod 51 is slidably connected inside the lower mold 4. A support ring 52 is fixedly connected to the upper end of the push rod 51. The support ring 52 is slidably connected to the lower mold 4. A top plate 53 is fixedly connected to the lower end of the push rod 51. An inclined block 54 is fixedly connected to the lower end of the top plate 53. A square rod 55 is fixedly connected to the upper end of the bottom plate 1. A baffle 56 is slidably connected to the outer side of the square rod 55. The baffle 56 is slidably connected to the inclined block 54. A compression spring 57 is provided on the outer side of the square rod 55. One end of the compression spring 57 is fixedly connected to the bottom plate 1, and the other end of the compression spring 57 is fixedly connected to the baffle 56. By setting the compression spring 57, the baffle 56 is elastically pushed upward. By moving the top plate 53 and contacting the baffle 56, the top plate 53 moves upward, which in turn causes the push rod 51 to drive the support ring 52 to move upward, thereby automatically lifting the formed silicon carbide electrostatic chuck, making it easier to demold the silicon carbide electrostatic chuck.

[0024] The specific implementation process of this utility model is as follows: In use, the motor 21 is started, driving the support frame 3 to rotate. The support frame 3 drives the guide rod 22 to move, the guide rod 22 drives the slide cylinder 23 to rotate, and the slide cylinder 23 drives the locking tooth 25 to move and misalign with the slot on the base plate 1, thereby causing the slide cylinder 23 to move upwards. This causes the spring 24 to be compressed. The rotation of the support frame 3 causes the lower mold 4 to change position. After the lower mold 4 completes its position change, the motor 21 stops rotating, and the support frame 3 stops rotating. At this time, the locking tooth 25 corresponds to the slot position of the current corresponding position. The spring 24 resets, causing the slide cylinder 23 to move downwards, thereby causing the locking tooth 25 to enter the slot, limiting the slide cylinder 23 and thus limiting the support frame 3. By driving the support frame 3 to rotate through the motor 21, the lower mold 4 can change its position, and through the action of the spring 24 on the slide cylinder 23, the locking tooth 25... Inserted into the base plate 1, it limits the support frame 3, thereby allowing the lower mold 4 to automatically switch positions, making the injection molding of silicon carbide electrostatic chucks more efficient. The cylinder 9 is activated, driving the cylinder rod to extend, which in turn moves the upper mold 10 downwards, causing the upper mold 10 and lower mold 4 to close. Then, material is fed into the mold cavity through the feed pipe 12 for injection molding. The movement of the support frame 3 moves the ejector rod 51, which in turn moves the top plate 53, which in turn moves the inclined block 54, causing it to contact the baffle 56. This causes the inclined block 54 to move upwards, which in turn moves the top plate 53 upwards, which in turn moves the ejector rod 51 upwards, which in turn moves the support ring 52 upwards, ejecting the molded silicon carbide electrostatic chuck from the lower mold 4, making demolding of the silicon carbide electrostatic chuck easier.

[0025] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide electrostatic chuck processing mold facilitating demolding, comprising a bottom plate (1), characterized in that: The bottom plate (1) is provided with an adjusting mechanism (2), the adjusting mechanism (2) is provided with a support frame (3), the upper end of the support frame (3) is fixedly connected with a lower mold (4), the lower mold (4) is provided with a discharge mechanism (5), the upper end of the bottom plate (1) is fixedly connected with a sleeve (6), the sleeve (6) and the support frame (3) are rotatably connected, the upper end of the bottom plate (1) is fixedly connected with a support (8), the upper end of the support (8) is fixedly installed with a cylinder (9), the cylinder rod of the cylinder (9) penetrates the support (8) and is slidably connected with the support (8), the lower end of the cylinder rod of the cylinder (9) is fixedly connected with an upper mold (10), the inside of the upper mold (10) is fixedly connected with a feeding pipe (12).

2. A silicon carbide electrostatic chucking mold tool for facilitating mold release according to claim 1, wherein: The inside of the sleeve (6) is fixedly connected with a guide block (7), and the guide block (7) and the support frame (3) are slidably connected.

3. The silicon carbide electrostatic chucking mold tool for easy mold release of claim 1, wherein: The lower end of the upper mold (10) is fixedly connected with a guide pin (11), and the upper end of the lower mold (4) is provided with a ring groove (13).

4. The silicon carbide electrostatic chucking mold tool for easy mold release of claim 1, wherein: The adjusting mechanism (2) comprises a motor (21), the motor (21) and the bottom plate (1) are fixedly installed, the rotating shaft of the motor (21) penetrates the bottom plate (1) and is rotatably connected with the bottom plate (1), the rotating shaft of the motor (21) is fixedly connected with the support frame (3), the lower end of the support frame (3) is fixedly connected with a guide rod (22), the outer side of the guide rod (22) is slidably connected with a sliding cylinder (23), the outer side of the guide rod (22) is provided with a spring (24), the lower end of the sliding cylinder (23) is fixedly connected with a pawl (25), and the pawl (25) and the bottom plate (1) are slidably connected.

5. A silicon carbide electrostatic chucking mold tool for facilitating mold release according to claim 4, wherein: One end of the spring (24) is fixedly connected with the support frame (3), and the other end of the spring (24) is fixedly connected with the sliding cylinder (23).

6. A silicon carbide electrostatic chucking mold tool facilitating mold release according to claim 1, wherein: The discharge mechanism (5) comprises a ejector rod (51), the inside of the lower mold (4) is slidably connected with the ejector rod (51), the upper end of the ejector rod (51) is fixedly connected with a support ring (52), the support ring (52) and the lower mold (4) are slidably connected, the lower end of the ejector rod (51) is fixedly connected with a top plate (53), the lower end of the top plate (53) is fixedly connected with an inclined block (54), the upper end of the bottom plate (1) is fixedly connected with a square rod (55), the outer side of the square rod (55) is slidably connected with a baffle (56), the baffle (56) and the inclined block (54) are slidably connected, and the outer side of the square rod (55) is provided with a compression spring (57).

7. A silicon carbide electrostatic chucking mold tool for facilitating mold release according to claim 6, wherein: One end of the compression spring (57) is fixedly connected with the bottom plate (1), and the other end of the compression spring (57) is fixedly connected with the baffle (56).

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