Evaporation boat for evaporation coating of non-melting sublimation material

Abstract

The utility model provides an evaporation boat for evaporation coating of a non-melting sublimation material, and relates to the technical field of evaporation coating. The evaporation boat comprises a sealing assembly, a heating piece and an adapter piece, the adapter piece is arranged on the peripheral side of the heating piece in a sleeving mode, one end of the adapter piece is fixedly connected with the shell, and the bottom of the adapter piece and the end, away from the cover body, of the heating piece are arranged at intervals; the top of the adapter and the bottom of the cover body are arranged in a spaced mode, the space between the outer wall of the adapter and the inner wall of the shell is filled with to-be-evaporated matter, a second steam channel is formed between the inner wall of the adapter and the side wall of the heating piece, and the adapter further comprises a steam inlet hole formed in the side facing the cover body; therefore, material steam generated by the to-be-evaporated substance flows out to the surface of the to-be-plated base material through the steam inlet hole, the second steam channel, the first steam channel and the steam opening hole in sequence. The evaporation boat disclosed by the utility model can reduce particle splashing in material steam and improve the appearance quality and the optical performance of a coated product.

Description

Technical Field

[0001] This utility model relates to the field of evaporation coating technology, specifically to an evaporation boat for evaporation coating of non-molten sublimation materials. Background Technology

[0002] In evaporation coating technology, the evaporation boat, as a key component for holding the material to be evaporated and vaporizing it through heating, is widely used in the fabrication of thin-film devices, optical components, and functional coatings. However, for non-melting sublimable materials and sublimable materials such as SiO, the inability of the material to melt and flow during evaporation leads to significant temperature differences between different parts of the material particles. Furthermore, these materials are chemically unstable and readily react with oxygen and water vapor in the air, generating other substances with different melting points, thus causing significant splattering problems.

[0003] In existing technologies, to reduce material splashing, evaporation boats with baffles and lids are often used. After heating, the material cannot directly enter the outside; it must bypass the baffles and pass through holes in the lid. Even so, particles will still jump out of the evaporation boat after multiple collisions and bounces, forming splashes. The film will still have a large number of splash points, which seriously affects the appearance and optical properties. Utility Model Content

[0004] One objective of this invention is to provide an evaporation boat for evaporation coating, thereby solving the technical problem that sputtering easily occurs and damages the appearance of the coating when preparing non-molten sublimation material coatings using evaporation coating in the prior art.

[0005] Another objective of this invention is to improve the uniformity of temperature distribution in the evaporation boat.

[0006] According to the purpose of this utility model, this utility model provides an evaporation boat for evaporation coating of non-molten sublimation materials, comprising:

[0007] A closed assembly includes a cover and a housing having an internal cavity, the cover being fitted over the housing and having a steam opening communicating with the cavity and an external space.

[0008] A heating element is located in the receiving cavity, the top end of the heating element is configured to be connected to the cover, and the heating element includes a first steam channel communicating with the steam opening and a steam outlet at one end away from the cover;

[0009] An adapter is fitted around the periphery of the heating element, with one end fixedly connected to the housing. The bottom of the adapter is spaced apart from the end of the heating element away from the cover. The top of the adapter is spaced apart from the bottom of the cover, and the space between the outer wall of the adapter and the inner wall of the housing is filled with the substance to be evaporated. A second steam channel is formed between the inner wall of the adapter and the side wall of the heating element. The adapter also includes a steam inlet hole facing the cover, so that the material steam generated by the substance to be evaporated flows out sequentially through the steam inlet hole, the second steam channel, the first steam channel, and the steam inlet hole to the surface of the substrate to be plated.

[0010] Optionally, the height ratio of the adapter to the housing is any value between 0.8 and 0.9.

[0011] Optionally, the diameter ratio of the adapter to the housing is any value between 0.4 and 0.6.

[0012] Optionally, the enclosure component further includes:

[0013] A heat-reflective layer is attached to the inner wall of the housing;

[0014] A heat insulation layer is located between the heat reflective layer and the housing.

[0015] Optionally, the heat reflective layer is made of molybdenum, and the heat insulation layer is made of carbon felt.

[0016] Optionally, the diameter ratio of the heating element to the housing is any value between 0.1 and 0.2.

[0017] Optionally, the height ratio of the heating element to the housing is any value between 0.6 and 0.8.

[0018] Optionally, the diameter ratio of the steam opening to the first steam channel is any value between 0.7 and 1.25.

[0019] Optionally, the evaporation boat further includes:

[0020] The heating element is made of any one of molybdenum wire, tungsten wire, or graphite.

[0021] Optionally, the height ratio of the substance to be evaporated to the height of the shell is any value between 0.8 and 0.9.

[0022] This invention features a heating element connected to a cover and a connecting element fitted around the heating element within the evaporation boat's containment cavity. The top of the connecting element is spaced apart from the cover, and the inner wall of the connecting element is spaced apart from the outer wall of the heating element. This creates a second steam channel between the connecting element and the heating element, which communicates with the first steam channel. By utilizing the heating element in the containment cavity, the material to be evaporated is uniformly heated. The material steam is then sequentially released onto the surface of the substrate through the steam inlet, the second steam channel, the first steam channel, and the steam opening. The mixture of heated material steam and small particles travels along multiple curved steam channels, trapping the small particles inside the channels after multiple turns. This reduces particle splashing during the coating process, thereby reducing splash points on the coating surface and improving the appearance quality and optical performance of the coating.

[0023] Furthermore, by setting the diameter ratio of the heating element to the shell to any value between 0.1 and 0.2, this invention improves the uniformity of temperature distribution within the cavity, which helps to form a concentrated and stable heat source area and a reasonable surrounding steam channel structure inside the shell. This improves the efficiency of thermal energy utilization and the controllability of steam flow, while enhancing the separation effect of material steam and particulate matter, ensuring the purity of the coating and extending the service life of the evaporation boat.

[0024] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0025] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0026] Figure 1 This is a schematic structural diagram of an evaporation boat according to an embodiment of the present invention;

[0027] Figure 2 This is a schematic top view of a portion of the structure of an evaporation boat according to an embodiment of the present invention;

[0028] Figure 3 This is a schematic diagram of the steam flow in an evaporation boat according to an embodiment of the present invention.

[0029] Figure label:

[0030] 100-Evaporation boat, 10-Sealing component, 11-Lid, 121-Receiving cavity, 12-Shell, 111-Steam opening, 20-Heating element, 21-First steam channel, 22-Steam outlet, 30-Transfer element, 200-Substance to be evaporated, 31-Second steam channel, 32-Steam inlet, 13-Heat reflective layer, 14-Insulation layer. Detailed Implementation

[0031] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0032] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0033] The terms “comprising” and “having”, and any variations thereof, used in this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0034] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0035] Figure 1 This is a schematic structural diagram of an evaporation boat according to an embodiment of the present invention. Figure 2 This is a schematic top view of a portion of the structure of an evaporation boat according to an embodiment of the present invention. Figure 3 This is a schematic diagram of the steam flow in an evaporation boat according to an embodiment of the present invention.

[0036] like Figure 1As shown, this utility model provides an evaporation boat 100 for evaporation coating of non-molten sublimation materials. The evaporation boat 100 includes a sealing assembly 10, a heating element 20, and a connecting element 30. The sealing assembly 10 includes a cover 11 and a shell 12 with an internal cavity 121. The cover 11 is fitted over the shell 12 and has a steam opening 111 communicating with the cavity 121 and the external space. The heating element 20 is located in the cavity 121, and its top end is connected to the cover 11. The heating element 20 includes a first steam channel 21 communicating with the steam opening 111 and a steam outlet 22 at the end away from the cover 11. The connecting element 30 is fitted around the periphery of the heating element 20 and one end is fixedly connected to the shell 12 (see reference). Figure 2 The bottom of the adapter 30 is spaced apart from the end of the heating element 20 away from the cover 11. The top of the adapter 30 is spaced apart from the bottom of the cover 11, and the space between the outer wall of the adapter 30 and the inner wall of the housing 12 is filled with the substance to be evaporated 200. A second steam channel 31 is formed between the inner wall of the adapter 30 and the side wall of the heating element 20. The adapter 30 also includes a steam inlet 32 ​​facing the cover 11, so that the material steam generated by the substance to be evaporated 200 flows out sequentially through the steam inlet 32, the second steam channel 31, the first steam channel 21, and the steam opening 111 to the surface of the substrate to be plated (see reference). Figure 3 Here, the non-molten sublimation material can be zinc sulfide or silicon oxide, and the arrow indicates the direction of material vapor flow.

[0037] In this embodiment, a heating element 20 connected to the cover 11 and a connecting element 30 sleeved around the heating element 20 are provided in the receiving cavity 121 of the evaporation boat 100. The top of the connecting element 30 is spaced apart from the cover 11, and the inner wall of the connecting element 30 is spaced apart from the outer wall of the heating element 20. This forms a second steam channel 31 that communicates with the first steam channel 21 between the connecting element 30 and the heating element 20. That is, the heating element 20 in the receiving cavity 121 is used to uniformly heat the material to be evaporated 200. The material steam is released sequentially through the steam inlet 32, the second steam channel 31, the first steam channel 21, and the steam opening 111 to the surface of the substrate to be coated. The mixture of material steam and small particles formed after heating moves along multiple curved steam channels, so that the small particles are retained inside the channels after multiple turns, reducing particle splashing during the coating process, thereby reducing the splash points formed on the coating surface and improving the appearance quality and optical performance of the coating.

[0038] In a further embodiment, the height ratio of the adapter 30 to the housing 12 is any value between 0.8 and 0.9, that is, the height ratio of the adapter 30 to the housing 12 can be 0.8, 0.82, 0.84, 0.86, 0.88, or 0.9, or any value between 0.8 and 0.9. In this embodiment, the height ratio of the adapter 30 to the housing 12 is within the above-mentioned range, and the adapter 30 is configured such that its top end is spaced apart from the bottom end of the cover 11 to retain a gap between the adapter 30 and the cover 11, thereby forming a channel for material vapor to enter the steam inlet 32. That is, setting the height ratio of the adapter 30 to the housing 12 within the above-mentioned range not only retains the entrance for material vapor to enter the second steam channel 31, but also extends the flow path of material vapor, so that the material vapor and particulate matter are completely separated, thereby improving the purity of material vapor and coating purity.

[0039] In a further embodiment, the diameter ratio of the adapter 30 to the housing 12 is any value between 0.4 and 0.6, that is, the diameter ratio of the adapter 30 to the housing 12 can be 0.4, 0.45, 0.5, 0.55, or 0.6, or any value between 0.4 and 0.6. In this embodiment, the diameter ratio of the adapter 30 to the housing 12 is set within the above range to form a reasonable filling space between the outer wall of the adapter 30 and the inner wall of the housing 12, ensuring a balance between material storage and evaporation efficiency. At the same time, it optimizes the width of the second steam channel 31, achieving effective separation of particulate matter and material vapor, improving the purity of material vapor and the particle separation effect, and ensuring the stability of the evaporation process and the controllability of the coating quality.

[0040] In a further embodiment, the enclosed assembly 10 further includes a heat-reflecting layer 13 and a heat-insulating layer 14. The heat-reflecting layer 13 is attached to the inner wall of the housing 12, and the heat-insulating layer 14 is located between the heat-reflecting layer 13 and the housing 12. In this embodiment, by sequentially providing the heat-reflecting layer 13 and the heat-insulating layer 14 on the inner wall of the housing 12, efficient heat recovery and isolation are achieved, effectively improving the thermal energy utilization rate and heating uniformity of the evaporation system. At the same time, it reduces the temperature rise of the housing 12, improves the structural stability and service life of the evaporation boat 100, and thus ensures the stability of the evaporation process of the non-molten sublimation material and the consistency of the film quality.

[0041] In a further embodiment, the heat reflective layer 13 is made of molybdenum, and the heat insulation layer 14 is made of carbon felt. In this embodiment, the heat reflective layer 13 is made of molybdenum, which has excellent infrared reflection performance and high-temperature stability, and can effectively reflect the heat generated by heating back into the cavity 121, improving the efficiency of heat utilization. The heat insulation layer 14 is made of carbon felt, which has excellent heat insulation performance and thermal stability, and can effectively prevent heat from being conducted to the outside of the shell 12, reducing the temperature rise of the shell 12. At the same time, its flexible structure can buffer thermal stress, improving the reliability and service life of the overall structure.

[0042] In a further embodiment, the diameter ratio of the heating element 20 to the shell 12 is any value between 0.1 and 0.2. That is, the diameter ratio of the heating element 20 to the shell 12 can be 0.1, 0.12, 0.14, 0.16, 0.18, or 0.2, or any value between 0.1 and 0.2. In this embodiment, setting the diameter ratio of the heating element 20 to the shell 12 to any value between 0.1 and 0.2 improves the uniformity of temperature distribution within the receiving cavity 121, which helps to form a concentrated and stable heat source area and a reasonable surrounding steam channel structure inside the shell 12. This improves the thermal energy utilization efficiency and steam flow controllability, while enhancing the separation effect of material steam and particulate matter, ensuring the purity of the coating, and extending the service life of the evaporation boat 100.

[0043] In a further embodiment, the height ratio of the heating element 20 to the shell 12 is any value between 0.6 and 0.8, that is, the height ratio of the heating element 20 to the shell 12 can be 0.6, 0.65, 0.7, 0.75, or 0.8, or any value between 0.6 and 0.8. In this embodiment, setting the height ratio of the heating element 20 to the shell 12 between 0.6 and 0.8 can achieve sufficient heating of the material to be evaporated 200, improve the thermal field coverage and heating uniformity, while forming a reasonable steam path length, enhancing the separation effect of material steam and particulate matter, and taking into account the structural compactness and device stability of the evaporation boat 100, thereby improving the overall efficiency and film quality of the non-molten sublimation material evaporation process.

[0044] In a further embodiment, the diameter ratio of the steam opening 111 to the first steam channel 21 is any value between 0.7 and 1.25. That is, the diameter ratio of the steam opening 111 to the first steam channel 21 can be 0.7, 0.8, 0.9, 1.0, 1.1, 1.2, or 1.25, or any value between 0.7 and 1.25. In this embodiment, setting the diameter ratio of the steam opening 111 to the first steam channel 21 to be between 0.7 and 1.25 can adjust the steam flow rate and flow diffusion effect while ensuring the smooth discharge of material steam, thereby achieving synergistic optimization of steam output uniformity and particle isolation performance, and thus improving the deposition efficiency, coating purity, and overall process stability of the evaporation process.

[0045] In a further embodiment, the heating element 20 is made of any one of molybdenum wire, tungsten wire, or graphite. In this embodiment, the heating element 20 can be selected from any one of molybdenum wire, tungsten wire, or graphite material. All three have excellent high-temperature stability and electrical conductivity, and can be flexibly selected according to the evaporation requirements of different non-molten sublimation materials to achieve optimized effects such as rapid heating, high-temperature durability, or structural adaptation, thereby improving the applicability, stability, and film quality of the evaporation boat 100.

[0046] In a further embodiment, the height ratio of the substance to be evaporated 200 to the shell 12 is any value between 0.8 and 0.9, that is, the height ratio of the substance to be evaporated 200 to the shell 12 can be 0.8, 0.82, 0.84, 0.86, 0.88, or 0.9, or any value between 0.8 and 0.9. In this embodiment, by setting the height ratio of the substance to be evaporated 200 to the shell 12 to between 0.8 and 0.9, it helps to optimize heating efficiency, increase evaporation area and improve evaporation rate, while forming a stable steam flow channel, reducing particulate entrainment contamination, and ensuring high purity of the evaporation process and stability of the device.

[0047] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0048] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. An evaporation boat for evaporating a non-melting sublimation material, characterized in that, The application relates to an evaporation boat. The evaporation boat comprises a closed assembly, a heating element, and an adapter. The closed assembly comprises a cover and a shell with a containing cavity formed inside, the cover is sleeved on the shell, and the cover is provided with a steam opening hole communicating with the containing cavity and an external space. The heating element is located in the containing cavity, a top end of the heating element is arranged to be connected with the cover, and the heating element comprises a first steam passage communicating with the steam opening hole and a steam outlet away from the cover. The adapter is sleeved on a circumferential side of the heating element and is fixedly connected with the shell at one end. The bottom of the adapter is arranged to be spaced from the end of the heating element away from the cover, the top of the adapter is arranged to be spaced from the bottom of the cover, and the outer wall of the adapter and the inner wall of the shell are filled with a material to be evaporated. The inner wall of the adapter and the side wall of the heating element form a second steam passage. The adapter is further provided with a steam inlet hole formed towards the side of the cover, so that material steam generated by the material to be evaporated flows out to the surface of a plating substrate in sequence through the steam inlet hole, the second steam passage, the first steam passage and the steam opening hole.

4. The evaporation boat according to claim 3, characterized in that 2. The evaporation boat according to claim 1, wherein a height ratio of the adapter to the shell is any one of 0.8-0.

9.

3. The evaporation boat according to claim 2, wherein a diameter ratio of the adapter to the shell is any one of 0.4-0.

6. The closed assembly further comprises a heat-reflecting layer attached to the inner wall of the shell and a heat-insulating layer located between the heat-reflecting layer and the shell.

5. The evaporation boat according to claim 4, wherein the heat-reflecting layer is made of molybdenum, and the heat-insulating layer is made of carbon felt.

6. The evaporation boat according to claim 5, wherein a diameter ratio of the heating element to the shell is any one of 0.1-0.

2.

7. The evaporation boat according to claim 6, wherein a height ratio of the heating element to the shell is any one of 0.6-0.

8.

8. The evaporation boat according to claim 7, wherein a diameter ratio of the steam opening hole to the first steam passage is any one of 0.7-1.

25. The heating element is made of any one of molybdenum wire, tungsten wire or graphite.

10. The evaporation boat according to claim 9, wherein a height ratio of the material to be evaporated to the shell is any one of 0.8-0.

9. ​ ​ 9. The vaporization boat according to any one of claims 1 to 8, characterized in that ​ ​ ​ ​

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