High-stability rotary cathode end

Abstract

The utility model discloses a high-stability rotating cathode end which comprises a machine base, a main shaft is connected to the machine base, a hollow shaft is rotationally connected to the machine base, the hollow shaft is arranged on the outer side of the main shaft in a sleeving mode and can rotate relative to the main shaft, and an upper sealing assembly surrounding the hollow shaft is arranged between the upper portion of the hollow shaft and the machine base. A lower sealing assembly surrounding the hollow shaft is arranged between the lower portion of the hollow shaft and the machine base, the upper sealing assembly comprises an upper sealing base, a first sealing ring and a second sealing ring, the first sealing ring and the second sealing ring are arranged on the upper sealing base and distributed up and down, and a first sealing gap is reserved between the first sealing ring and the second sealing ring. The upper sealing seat is provided with a first connecting channel communicated with the first sealing gap, the machine base is provided with a vacuum detection channel communicated with the first connecting channel and used for detecting air pressure, and the high-stability rotating cathode end aims at overcoming the defects in the prior art and is compact in structure, stable, durable and convenient to replace.

Description

Technical Field

[0001] This utility model specifically relates to a highly stable rotating female end cap. Background Technology

[0002] Vacuum magnetron sputtering coating equipment is an advanced coating technology, mainly used to coat a thin film on the surface of various materials to achieve specific functions. For example, it can be used for functional thin film coating to prepare various thin films with specific functions, such as thin films with reflection, refraction, polarization, and absorption. These functional thin films can be applied to fields such as solar cells and optical devices to improve product performance. It can also be used in decorative applications, producing thin films with high gloss, high hardness, and good weather resistance. For example, a beautiful and durable thin film can be deposited on products such as mobile phone casings, computer keyboards, and window glass to improve product quality and added value. It can be used in the microelectronics industry, mainly for preparing thin films for electronic devices, such as semiconductor thin films and metal thin films. These thin films have wide applications in fields such as integrated circuits, sensors, and solar cells. It can also be used in the mechanical processing industry to prepare surface functional films with high hardness, high wear resistance, and high corrosion resistance, such as superhard films and corrosion-resistant films. These films can be applied to various mechanical equipment. For specific structures, please refer to the patent scheme of patent number CN202410149413.X, entitled "A Co-sputtering Cathode Coating Equipment for Forming Composite Materials".

[0003] As a key component in vacuum magnetron sputtering equipment, the rotary cathode end head is mainly used to improve the uniformity and efficiency of the coating. Its main function is to ensure that the target material can be sputtered uniformly with atoms or molecules through rotation, thereby forming a thin film of uniform thickness on the substrate. This design reduces the problem of uneven coating caused by uneven surface wear of traditional planar targets during use. The rotary cathode increases the usable area of ​​the target material, which can be utilized more effectively than traditional planar cathodes, reducing material waste and lowering production costs. Its structure can be referenced from the patent scheme of patent number CN202420223188.5, entitled "An External End Head of a Rotary Cathode for Vacuum Magnetron Sputtering". Since vacuum magnetron sputtering equipment requires the creation of a vacuum environment, and the rotary cathode end head is generally equipped with a rotatable hollow shaft with a main shaft inside, a closed loop of cooling water circulation is formed between the hollow shaft and the main shaft and inside the main shaft. Therefore, a typical cathode end head must have functions such as dynamic power transmission, dynamic sealing of cooling water, and dynamic sealing of vacuum.

[0004] However, although traditional rotary female end caps have sealing components between rotating parts, the high temperature and high speed working environment over a long period of time will cause certain wear to the sealing components. Once the wear exceeds the allowable value, it will cause problems such as vacuum leakage. Traditional sealing components have a complex structure and are troublesome to replace. Moreover, once a leakage problem occurs, the entire structure of the sealing component must be disassembled and replaced. This is not only difficult to operate, but also wastes scrapped parts and greatly increases maintenance costs.

[0005] This utility model was developed precisely because of the aforementioned shortcomings. Utility Model Content

[0006] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a highly stable rotating female end cap that is compact, durable, and easy to replace.

[0007] This utility model is achieved through the following technical solution:

[0008] This utility model provides a highly stable rotating cathode end head, including a base, a main shaft connected to the base, and a hollow shaft rotatably connected to the base. The hollow shaft is sleeved on the outside of the main shaft and can rotate relative to the main shaft. An upper sealing assembly is provided between the upper part of the hollow shaft and the base, and a lower sealing assembly is provided between the lower part of the hollow shaft and the base. The upper sealing assembly includes an upper sealing seat, a first sealing ring and a second sealing ring arranged on the upper sealing seat and distributed vertically, with a first sealing gap between the first sealing ring and the second sealing ring. The upper sealing seat is provided with a first connecting channel communicating with the first sealing gap, and the base is provided with a vacuum detection channel communicating with the first connecting channel and used for detecting air pressure.

[0009] As described above, the high-stability rotating female end head includes a lower sealing assembly comprising a lower sealing seat, a third sealing ring and a fourth sealing ring arranged below the lower sealing seat and distributed vertically, a second sealing gap between the third sealing ring and the fourth sealing ring, a second connecting channel communicating with the second sealing gap on the lower sealing seat, and a leakage detection channel communicating with the second connecting channel and used for detecting leakage on the base.

[0010] As described above, the high-stability rotating female end head includes a base comprising a main body and a bearing ring seat. The main body has a sealed cavity for accommodating the hollow shaft and the main shaft. The bearing ring seat is located in the sealed cavity and is disposed against the main body. A bearing is disposed between the middle of the bearing ring seat and the hollow shaft. The upper sealing assembly is disposed between the upper part of the bearing ring seat and the hollow shaft. The vacuum detection channel is opened on the main body. The upper part of the bearing ring seat has a third connecting channel for connecting the first connecting channel and the vacuum detection channel.

[0011] As described above, in the high-stability rotating female end head, a first O-ring and a second O-ring are provided between the upper sealing seat and the bearing ring seat, and the first connecting channel is located between the first O-ring and the second O-ring.

[0012] As described above, in the high-stability rotating female end head, a third O-ring and a fourth O-ring are provided between the bearing ring seat and the main seat body, and the third connecting channel is located between the third O-ring and the fourth O-ring.

[0013] As described above, the high-stability rotating female end head has a fifth O-ring and a sixth O-ring between the lower sealing seat and the main seat body, and the second connecting channel is located between the fifth O-ring and the sixth O-ring.

[0014] As described above, the high-stability rotating female end head has a support ring portion at the lower part of the upper sealing seat that supports the bottom of the second sealing ring. A first support ring is also provided between the first sealing ring and the second sealing ring. The first support ring has a fourth connecting channel that connects the third connecting channel and the first sealing gap.

[0015] As described above, in the high-stability rotating negative end head, a ceramic replacement sleeve is fitted on the hollow shaft, and the first sealing ring and the second sealing ring abut against the ceramic replacement sleeve.

[0016] As described above, the high-stability rotating female end cap includes a first sealing ring, a second sealing ring, a third sealing ring, and a fourth sealing ring, each comprising an annular support and an elastic enclosure that wraps around the annular support. The elastic enclosure is provided with a first sealing part that protrudes toward the hollow shaft and abuts against the hollow shaft.

[0017] As described above, the highly stable rotating female end cap also has a second sealing part that protrudes toward the hollow shaft and is used to abut against the hollow shaft. The elastic wrapping body has a skeleton ring groove at the position corresponding to the second sealing part, and a ring skeleton is embedded in the skeleton ring groove to press the second sealing part toward the hollow shaft.

[0018] Compared with the prior art, the present invention has the following advantages:

[0019] 1. High stability and safety: Both the upper and lower sealing components adopt a double sealing ring design (first sealing ring and second sealing ring, third sealing ring and fourth sealing ring), forming multiple sealing barriers, which greatly improves the stability and safety of the sealing structure; only when the first sealing ring fails will the second sealing ring bear the pressure or leakage risk, extending the service life of the overall sealing component and reducing the possibility of vacuum leakage or cooling water leakage.

[0020] 2. Real-time monitoring and early warning function: The upper sealing assembly monitors the air pressure changes in the first sealing gap in real time through the vacuum detection channel, which can promptly detect the wear of the first sealing ring and remind it to be replaced; the lower sealing assembly monitors the water stains or water pressure changes in the second sealing gap in real time through the water leakage detection channel, which can promptly detect the wear of the fourth sealing ring and remind it to be replaced; this real-time monitoring mechanism effectively avoids sudden failures caused by seal failure and improves the reliability of equipment operation.

[0021] 3. Convenience and cost optimization in maintenance: The sealing ring adopts an independent design, so only a single sealing ring needs to be replaced, without replacing the entire sealing assembly, which significantly reduces maintenance costs; the disassembly and installation process is simple and convenient, reducing downtime and further optimizing the operating efficiency of the equipment.

[0022] 4. High-efficiency sealing performance: O-rings are added to several key parts (such as the upper sealing seat, bearing ring seat, main body, etc.) to further enhance the sealing performance and ensure the stability of the equipment under high pressure and high speed operating conditions.

[0023] 5. The rationality and durability of the structural design: The support ring and the first support ring design in the upper sealing assembly ensure the stability of the gap between the sealing rings. At the same time, the connection of the vacuum detection channel is realized through the fourth connecting channel, which improves the reliability and stability of the structure. The sealing ring adopts the design of elastic wrapping body and ring skeleton, which enhances the elasticity and fit of the sealing ring, enabling it to better adapt to the changes of the hollow shaft surface and extend the service life of the sealing ring. Attached Figure Description

[0024] Figure 1 This is a cross-sectional schematic diagram of the rotating female end head of this utility model;

[0025] Figure 2 yes Figure 1 A magnified view of a portion at point A;

[0026] Figure 3 yes Figure 1 A magnified view of a portion at point B;

[0027] Figure 4 This is a cross-sectional schematic diagram of the sealing ring of this utility model. Detailed Implementation

[0028] The utility model will be further described below with reference to the accompanying drawings:

[0029] The orientations described in this utility model specification, such as "up," "down," "left," "right," "front," and "back," are based on the orientations in the accompanying drawings and are intended to facilitate the description of the relationships between the various components. They do not indicate the unique or absolute positional relationships between the various components, but are merely one embodiment of the utility model and are not a limitation on its implementation.

[0030] This utility model introduces a highly stable rotating female end cap, such as Figure 1 As shown, this type of rotating female end cap includes a base 1, on which a main shaft 11 is connected. A hollow shaft 12 is rotatably connected to the base 1. The hollow shaft 12 is sleeved on the outside of the main shaft 11 and can rotate relative to the main shaft 11. An upper sealing assembly 2 is provided between the upper part of the hollow shaft 12 and the base 1, and a lower sealing assembly 3 is provided between the lower part of the hollow shaft 12 and the base 1, such as... Figure 2 As shown, the upper sealing assembly 2 includes an upper sealing seat 21, a first sealing ring 22 and a second sealing ring 23 arranged on the upper sealing seat 21 and distributed vertically. A first sealing gap 200 is left between the first sealing ring 22 and the second sealing ring 23. The upper sealing seat 21 is provided with a first connecting channel 210 communicating with the first sealing gap 200. The base 1 is provided with a vacuum detection channel 101 communicating with the first connecting channel 210 and used for detecting air pressure. In this embodiment, the upper sealing assembly 2 adopts two independent vacuum sealing rings, the first sealing ring 22 and the second sealing ring 23. The air pressure outside the true end is first directed at the first sealing ring 22, and the air pressure between the two sealing rings can be detected through the vacuum detection channel 101. If the wear of the first sealing ring 22 exceeds the allowable value, the air pressure value of the vacuum detection channel 101 can be detected to exceed the preset threshold, thereby reminding the staff to replace it. In addition, a pressure difference will only be generated on the upper side of the second sealing ring 23 when the first sealing ring 22 leaks, making the second sealing ring 23 more durable. Vacuum leakage will only occur when the wear of the second sealing ring 23 exceeds the allowable value. This makes the stability and safety of this sealing structure extremely high. Moreover, only a single sealing ring needs to be replaced, making disassembly and installation convenient. Furthermore, the entire upper sealing assembly 2 does not need to be scrapped, which greatly optimizes the maintenance cost.

[0031] As a preferred implementation method, such as Figure 1 As shown, the three lower sealing assemblies are mainly designed to achieve water sealing performance at the lower part of the hollow shaft 12, such as... Figure 3As shown, the lower sealing assembly 3 adopts a structure similar to the upper sealing assembly 2. The lower sealing assembly 3 includes a lower sealing seat 31, a third sealing ring 32 and a fourth sealing ring 33 arranged below the lower sealing seat 31 and distributed vertically. A second sealing gap 300 is left between the third sealing ring 32 and the fourth sealing ring 33. The lower sealing seat 31 is provided with a second connecting channel 310 communicating with the second sealing gap 300. The base 1 is provided with a leakage detection channel 102 communicating with the second connecting channel 310 and used for detecting leakage. After the hollow shaft 12 has been working for a long time, the fourth sealing ring 33 is closer to the water inlet side. Whether water can enter the gap between the two sealing rings can be detected by the leakage detection channel 102. If the wear of the fourth sealing ring 33 exceeds the allowable value, water traces or water pressure can be detected in the leakage detection channel 102, thereby reminding the staff to replace it. In addition, a water pressure difference will only be generated on the upper side of the third sealing ring 32 when the fourth sealing ring 33 leaks, making the third sealing ring 32 more durable. Cooling water leakage will only occur when the wear of the third sealing ring 32 exceeds the allowable value. This makes the stability and safety of this sealing structure extremely high. Moreover, only a single sealing ring needs to be replaced, making disassembly and installation convenient. Furthermore, the entire lower sealing assembly 3 does not need to be scrapped, which greatly optimizes maintenance costs.

[0032] In detail, such as Figure 1 and Figure 2 As shown, the base 1 includes a main body 13 and a bearing ring seat 14. The main body 13 has a sealed cavity 130 for accommodating the hollow shaft 12 and the main shaft 11. The bearing ring seat 14 is located in the sealed cavity 130 and is disposed against the main body 13. A bearing is provided between the middle of the bearing ring seat 14 and the hollow shaft 12. In this embodiment, the bearing is a double-row angular contact bearing to achieve smooth rotation of the hollow shaft 12. The upper sealing assembly 2 is disposed between the upper part of the bearing ring seat 14 and the hollow shaft 12. The vacuum detection channel 101 is opened on the main body 13. The upper part of the bearing ring seat 14 has a third connecting channel 103 for connecting the first connecting channel 210 and the vacuum detection channel 101.

[0033] As a further optimization, such as Figure 2 As shown, a first O-ring 151 and a second O-ring 152 are provided between the upper sealing seat 21 and the bearing ring seat 14. The first connecting channel 210 is located between the first O-ring 151 and the second O-ring 152, further improving the sealing performance.

[0034] As a further optimization, such as Figure 2As shown, a third O-ring seal 153 and a fourth O-ring seal 154 are provided between the bearing ring seat 14 and the main seat body 13. The third connecting channel 103 is located between the third O-ring seal 153 and the fourth O-ring seal 154, further improving the sealing performance.

[0035] As a further optimization, such as Figure 3 As shown, a fifth O-ring 155 and a sixth O-ring 156 are provided between the lower sealing seat 31 and the main seat body 13. The second connecting channel 310 is located between the fifth O-ring 155 and the sixth O-ring 156, further improving the sealing performance.

[0036] As a better implementation method, such as Figure 2 As shown, the lower part of the upper sealing seat 21 is provided with a support ring part 211 supporting the bottom of the second sealing ring 23. A first support ring 24 is also provided between the first sealing ring 22 and the second sealing ring 23. The first support ring 24 is provided with a fourth connecting channel 240 connecting the third connecting channel 103 and the first sealing gap 200. The first support ring 24 is made between the two sealing rings to form a gap, and the vacuum detection channel is connected through the fourth connecting channel 240, thereby improving the stability and reliability of the structure.

[0037] As a preferred option, such as Figure 2 As shown, a ceramic sleeve 16 is fitted onto the hollow shaft 12. The first sealing ring 22 and the second sealing ring 23 abut against the ceramic sleeve 16. The ceramic sleeve 16 improves the smoothness of rotation, and its dimensions allow it to be matched with hollow shafts 12 of different specifications. Further design optimizations are possible, such as... Figure 2 As shown, a seventh O-ring 157 and an eighth O-ring 158 are provided between the ceramic sleeve 16 and the hollow shaft 12 to further improve the sealing performance.

[0038] Preferably, the four sealing rings—the first sealing ring 22, the second sealing ring 23, the third sealing ring 32, and the fourth sealing ring 33—can adopt the same structure, such as... Figure 4 As shown, each includes an annular support a1 and an elastic enclosure a2 that surrounds the annular support a1. The elastic enclosure a2 has a first sealing part a3 that protrudes toward the hollow shaft 12 and abuts against the hollow shaft 12. More specifically, the elastic enclosure a2 also has a second sealing part a4 that protrudes toward the hollow shaft 12 and abuts against the hollow shaft 12. The elastic enclosure a2 has a skeleton annular groove at a position corresponding to the second sealing part a4, and an annular skeleton a5 is embedded in the skeleton annular groove to press the second sealing part a4 against the hollow shaft 12.

[0039] The above descriptions are merely embodiments of this utility model, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of this utility model, and these should also be considered within the scope of protection of this utility model. These modifications will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application shall be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. A high-stability rotary cathode tip, comprising an organic base (1), a main shaft (11) connected to the base (1), a hollow shaft (12) rotatably connected to the base (1), the hollow shaft (12) being sleeved outside the main shaft (11) and being able to rotate relative to the main shaft (11), an upper sealing assembly (2) surrounding the hollow shaft (12) being arranged between the upper part of the hollow shaft (12) and the base (1), and a lower sealing assembly (3) surrounding the hollow shaft (12) being arranged between the lower part of the hollow shaft (12) and the base (1), characterized in that: The upper sealing assembly (2) comprises an upper sealing seat (21), a first sealing ring (22) and a second sealing ring (23) arranged on the upper sealing seat (21) and distributed along the up and down direction, a first sealing gap (200) is left between the first sealing ring (22) and the second sealing ring (23), a first connecting channel (210) is arranged on the upper sealing seat (21) and communicates with the first sealing gap (200), and a vacuum detection channel (101) is arranged on the base (1) and communicates with the first connecting channel (210) and is used for detecting the air pressure. ​ 2. The high-stability rotary cathode tip of claim 1, wherein: The lower sealing assembly (3) comprises a lower sealing seat (31), a third sealing ring (32) and a fourth sealing ring (33) arranged on the lower sealing seat (31) and distributed along the up and down direction, a second sealing gap (300) is left between the third sealing ring (32) and the fourth sealing ring (33), a second connecting channel (310) is arranged on the lower sealing seat (31) and communicates with the second sealing gap (300), and a water leakage detection channel (102) is arranged on the base (1) and communicates with the second connecting channel (310) and is used for detecting the water leakage.

3. A high-stability rotary cathode tip according to any one of claims 1 or 2, characterized in that: The base (1) comprises a main seat body (13) and a bearing ring seat (14), the main seat body (13) is provided with a sealed cavity (130) for accommodating a hollow shaft (12) and a main shaft (11), the bearing ring seat (14) is located in the sealed cavity (130) and abuts against the main seat body (13), a bearing is arranged between the middle part of the bearing ring seat (14) and the hollow shaft (12), the upper sealing assembly (2) is arranged between the upper part of the bearing ring seat (14) and the hollow shaft (12), the vacuum detection channel (101) is arranged on the main seat body (13), and a third connecting channel (103) is arranged on the upper part of the bearing ring seat (14) and is used for connecting the first connecting channel (210) and the vacuum detection channel (101).

4. The high-stability rotary cathode tip of claim 3, wherein: The first O-shaped sealing ring (151) and the second O-shaped sealing ring (152) are arranged between the upper sealing seat (21) and the bearing ring seat (14).

5. The high-stability rotary cathode tip of claim 3, wherein: The third O-shaped sealing ring (153) and the fourth O-shaped sealing ring (154) are arranged between the bearing ring seat (14) and the main seat body (13), and the third connecting channel (103) is located between the third O-shaped sealing ring (153) and the fourth O-shaped sealing ring (154).

6. The high-stability rotary cathode tip of claim 2, wherein: The fifth O-shaped sealing ring (155) and the sixth O-shaped sealing ring (156) are arranged between the lower sealing seat (31) and the main seat body (13), and the second connecting channel (310) is located between the fifth O-shaped sealing ring (155) and the sixth O-shaped sealing ring (156).

7. The high-stability rotary cathode tip of claim 3, wherein: The upper sealing seat (21) is provided with a support ring part (211) supported at the bottom of the second sealing ring (23), the first sealing ring (22) and the second sealing ring (23) are further provided with a first support ring (24), and the first support ring (24) is provided with a fourth connecting channel (240) connecting the third connecting channel (103) and the first sealing gap (200).

8. The high-stability rotary cathode tip of claim 3, wherein: The hollow shaft (12) is sleeved with a ceramic sleeve (16), and the first sealing ring (22) and the second sealing ring (23) abut against the ceramic sleeve (16).

9. The high-stability rotary cathode tip of any one of claims 1 or 2, wherein: The first sealing ring (22), the second sealing ring (23), the third sealing ring (32) and the fourth sealing ring (33) each comprise an annular support (a1) and an elastic wrapping body (a2) wrapping the annular support (a1), and the elastic wrapping body (a2) is provided with a first sealing part (a3) protruding towards the hollow shaft (12) and abutting against the hollow shaft (12).

10. The high-stability rotary cathode tip of claim 9, wherein: The elastic wrapping body (a2) is further provided with a second sealing part (a4) protruding towards the hollow shaft (12) and abutting against the hollow shaft (12), the elastic wrapping body (a2) is provided with a skeleton ring groove at a position corresponding to the second sealing part (a4), and the skeleton ring groove is embedded with an annular skeleton (a5) for pressing the second sealing part (a4) towards the hollow shaft (12). The elastic wrapping body (a2) is further provided with a second sealing part (a4) protruding towards the hollow shaft (12) and abutting against the hollow shaft (12), the elastic wrapping body (a2) is provided with a skeleton ring groove at a position corresponding to the second sealing part (a4), and the skeleton ring groove is embedded with an annular skeleton (a5) for pressing the second sealing part (a4) towards the hollow shaft (12).

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