Cooling device in vacuum chamber

Abstract

The utility model relates to the technical field of vacuum coating equipment, and discloses a cooling device in a vacuum chamber, which comprises a vacuum box and a filter box, the front side and the rear side of the top of the vacuum box are communicated with air inlets, and the bottom ends of the two air inlets penetrate through the top of the vacuum box and are communicated with a plurality of air inlet pipes; air outlet holes are formed in the outer walls of the multiple air inlet pipes, the other ends of the two air inlets penetrate through the inner side of the vacuum box and communicate with an exhaust pipe, one end of the exhaust pipe communicates with a vacuum pump, the front side of the vacuum box communicates with a water outlet pipe, and the rear end of the water outlet pipe penetrates through the front side of the vacuum box and communicates with a metal water pipe. According to the utility model, through the air inlet pipe and the air outlet hole, inert gas uniformly covers the vacuum box and is matched with the starting of the vacuum pump to extract original gas and carry out rapid replacement, the metal water pipes are distributed on the periphery of the inner wall of the vacuum box and matched with the arc-shaped cooling fins to rapidly transfer internal heat, and the cooling time is greatly shortened.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a vacuum chamber cooling device. Background Technology

[0002] In modern industrial production, vacuum chambers are key pieces of equipment. Their internal environment must be kept in a high vacuum state to meet specific process requirements and avoid interference from external impurities. During these production processes, a large amount of heat is often generated, causing the temperature inside the vacuum chamber to rise sharply. If effective cooling is not carried out in time, the excessively high temperature will not only affect product quality, but also make vacuum chamber cooling devices a crucial link in ensuring smooth production and improving product quality.

[0003] A search revealed Chinese Patent Publication No. CN220355884U, which discloses a vacuum coating cooling device. The device includes a cooling chamber with a hinged door at its front end. A vacuum coating machine is mounted inside the cooling chamber via a bracket. A cooling unit is added to the cooling chamber to rapidly cool the vacuum coating machine through heat exchange. This invention provides continuous, cyclical cooling of the vacuum coating machine within the cooling chamber. With the assistance of an air blowing unit, the device can spray air into the cooling chamber, and the blowing position can be flexibly moved. This allows the gas to flow within the cooling chamber and repeatedly contact the annular cooling pipes and the vacuum coating machine, achieving a combined air-cooling and water-cooling method. This reduces uneven heating within the cooling chamber and enables air-cooling operations in areas not covered by the annular cooling pipes, further ensuring uniform heating and cooling within the chamber. This provides a stable cooling environment for the vacuum coating machine, facilitating processing. However, existing air-cooling devices have a slow cooling rate, which means that natural cooling in the vacuum chamber takes a lot of time. This means that cooling time accounts for a significant proportion of the entire production process. The excessively long cooling time seriously affects the production speed and greatly limits the improvement of production efficiency. Therefore, a vacuum chamber cooling device is proposed to solve the above problems. Utility Model Content

[0004] To overcome the above deficiencies, this utility model provides a vacuum chamber cooling device, which aims to improve the problem that some products in the prior art require low-temperature furnace exit for coating and prevent surface oxidation due to high-temperature contact with air.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a vacuum chamber cooling device, comprising a vacuum chamber and a filter chamber. The top and front sides of the vacuum chamber are connected to air inlets. The bottom ends of the two air inlets penetrate the top of the vacuum chamber and are connected to multiple air inlet pipes. The outer walls of the multiple air inlet pipes are provided with air outlets. The other ends of the two air inlets penetrate the inner side of the vacuum chamber and are connected to exhaust pipes. One end of the exhaust pipe is connected to a vacuum pump. The front side of the vacuum chamber is connected to a water outlet pipe. The rear end of the water outlet pipe penetrates the front side of the vacuum chamber and is connected to a metal water pipe. The other end of the metal water pipe penetrates the inner side of the vacuum chamber and is connected to a water inlet pipe. One end of the water inlet pipe is connected to a connecting pipe. One end of the connecting pipe is connected to an electromagnetic valve. The left side of the electromagnetic valve is connected to the right side of the filter chamber. Multiple arc-shaped heat sinks are fixedly connected to the front and rear sides of the interior of the vacuum chamber. A cleaning mechanism is provided inside the filter chamber.

[0006] The above technical solution involves filling the vacuum chamber with inert gas at room temperature through the air inlet, followed by extraction by a vacuum pump. The inner walls of the vacuum chamber are surrounded by metal water pipes to increase the heat dissipation area. Circulating water continuously enters and exits the chamber. Arc-shaped heat sinks are distributed between the metal water pipes and the air inlet pipe. The air outlet design on the air inlet pipe enables air circulation, drawing in external cold gas into the vacuum chamber and absorbing and expelling the heat absorbed by the arc-shaped heat sinks. This overall circulation structure greatly improves heat exchange and significantly increases cooling efficiency.

[0007] As a further description of the above technical solution:

[0008] The cleaning mechanism includes a servo motor, which is fixedly connected to the left side of the filter box. The output end of the servo motor passes through the left side of the filter box and is fixedly connected to a rotating rod. A partition is fixedly connected to the inside of the filter box, and a filter plate is rotatably connected to the inside of the partition. Sealing rings are fixedly connected to the left and right sides of the outer wall of the filter plate. The right end of the rotating rod is fixedly connected to the left side of the filter plate. A connector is connected to the front end of the water outlet pipe, and a high-pressure nozzle is connected to the right side of the connector. The right end of the high-pressure nozzle is connected to the top of the filter box.

[0009] The above technical solution aims to prevent impurities in the cooling water from adhering to and clogging the pipes. A filter plate in the filter box filters out these impurities. To ensure the long-term use of the filter plate, a servo motor drives a rotating rod to rotate the filter plate. Simultaneously, sealing rings on both sides of the filter plate prevent liquid leakage. When the circulating water passes through the connector, it is compressed and released through a high-pressure nozzle, spraying onto the filter plate to clean surface impurities. Furthermore, the larger the contact area of ​​the sprayed cooling water, the higher the heat dissipation efficiency.

[0010] As a further description of the above technical solution:

[0011] The cleaning mechanism also includes a slag discharge pipe, which is connected to the bottom of the filter box, and the bottom end of the slag discharge pipe is connected to a storage box.

[0012] The above technical solution involves periodically discharging impurities and wastewater from inside the filter box through a slag discharge pipe, collecting them through a storage box, and then cleaning them centrally.

[0013] As a further description of the above technical solution:

[0014] The front of the filter box is connected to a liquid injection valve, and the bottom of the vacuum box is fixedly connected to a base.

[0015] The above technical solution involves injecting cooling water into the metal water pipe through an injection valve, which facilitates subsequent heat dissipation.

[0016] As a further description of the above technical solution:

[0017] A limiting plate is slidably connected to the outer wall of the connecting pipe, and the rear side of the limiting plate is fixedly connected to the front side of the vacuum chamber.

[0018] The above technical solution uses a limiting plate to support the connecting pipe, preventing it from breaking due to collision or tilting.

[0019] As a further description of the above technical solution:

[0020] The vacuum chamber is fixedly connected to both the left and right sides with reinforcing plates, and the bottom of the multiple reinforcing plates is fixedly connected to the top of the base.

[0021] The above technical solution connects the vacuum chamber and the base with a reinforcing plate to ensure their stability.

[0022] As a further description of the above technical solution:

[0023] The top of the reinforcing plate has a screw hole, and a bolt is threaded into the inner side of the screw hole.

[0024] The above technical solution achieves the fixation of the reinforcing plate by connecting bolts into the bolt holes.

[0025] As a further description of the above technical solution:

[0026] A support frame is fixedly connected to the front side of the vacuum chamber, and a controller is fixedly connected to the top of the support frame.

[0027] The above technical solution allows the controller to be supported by a support frame, making it easy to perform simple operation and control on the operating equipment of the entire device.

[0028] This utility model has the following beneficial effects:

[0029] 1. In this utility model, inert gas is injected into the vacuum chamber through the air inlet, and through the air inlet pipe and air outlet, the inert gas evenly and quickly covers the vacuum chamber. With the start of the vacuum pump, the original gas is extracted and quickly replaced. Metal water pipes are distributed around the inner wall of the vacuum chamber. When cooling begins, the solenoid valve is controlled to inject coolant into the metal water pipes to achieve circulation. With the help of the arc-shaped heat sink, the internal heat is quickly transferred, which greatly reduces the cooling time.

[0030] 2. In this utility model, the filter plate is driven to rotate by starting the servo motor. At the same time, the cooling water that circulates once will enter the connecting part for compression and finally be sprayed out through the high-pressure nozzle. The high-pressure nozzle is directed towards the filter plate to remove surface impurities and reduce manual intervention. Attached Figure Description

[0031] Figure 1 This is a perspective view of a vacuum chamber cooling device proposed in this utility model;

[0032] Figure 2 This is a front view of a vacuum chamber cooling device proposed in this utility model;

[0033] Figure 3 This is a schematic diagram of the structure of the metal water pipe of a vacuum chamber cooling device proposed in this utility model;

[0034] Figure 4 This is a partial structural diagram of the air inlet pipe of a vacuum chamber cooling device proposed in this utility model.

[0035] Figure 5 This is an exploded view of the cleaning mechanism of a vacuum chamber cooling device proposed in this utility model.

[0036] Legend:

[0037] 1. Vacuum chamber; 2. Cleaning mechanism; 201. Servo motor; 202. Partition plate; 203. Filter plate; 204. Rotating rod; 205. Sealing ring; 206. Connecting parts; 207. High-pressure nozzle; 208. Slag discharge pipe; 209. Storage box; 3. Air inlet; 4. Air inlet pipe; 5. Air outlet; 6. Exhaust pipe; 7. Vacuum pump; 8. Arc-shaped heat sink; 9. Water outlet pipe; 10. Metal water pipe; 11. Water inlet pipe; 12. Connecting pipe; 13. Solenoid valve; 14. Filter box; 15. Liquid injection valve; 16. Limiting plate; 17. Base; 18. Reinforcing plate; 19. Screw hole; 20. Bolt; 21. Support frame; 22. Controller. Detailed Implementation

[0038] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0039] Reference Figure 1 , Figure 3 and Figure 4 This utility model provides an embodiment of a vacuum chamber cooling device, comprising a vacuum chamber 1 and a filter chamber 14. The top and front sides of the vacuum chamber 1 are connected to air inlets 3. Inert gas is injected into the vacuum chamber 1 through the air inlets 3. To ensure uniform and rapid coverage of the vacuum chamber 1 by the inert gas, the bottom ends of the two air inlets 3 penetrate the top of the vacuum chamber 1 and are connected to multiple air inlet pipes 4. The outer walls of the multiple air inlet pipes 4 are provided with air outlets 5. Air inlet pipes 4 are installed on both sides of the inner wall of the vacuum chamber 1, and multiple air outlets 5 are evenly distributed on the surface of the air inlet pipes 4. The other ends of the two air inlets 3 penetrate the inner side of the vacuum chamber 1 and are connected to exhaust pipes 6. One end of the exhaust pipes 6 is connected to a vacuum pump 7. With the activation of the vacuum pump 7, the gas inside the vacuum chamber 1 is extracted, completing rapid replacement. A water outlet pipe 9 is connected to the front side. The rear end of the water outlet pipe 9 passes through the front side of the vacuum box 1 and is connected to a metal water pipe 10. The U-shaped metal water pipe 10 is distributed around the inner wall of the vacuum box 1, which can quickly transfer the internal heat. The other end of the metal water pipe 10 passes through the inner side of the vacuum box 1 and is connected to a water inlet pipe 11. One end of the water inlet pipe 11 is connected to a connecting pipe 12. One end of the connecting pipe 12 is connected to a solenoid valve 13. The left side of the solenoid valve 13 is connected to the right side of the filter box 14. Multiple arc-shaped heat sinks 8 are fixedly connected to the front and rear sides of the vacuum box 1. The arc-shaped heat sinks 8 are installed close to the inner wall of the vacuum box 1 and do not affect the internal production space of the equipment. A cleaning mechanism 2 is provided on the inner side of the filter box 14. A liquid injection valve 15 is connected to the front side of the filter box 14. A base 17 is fixedly connected to the bottom of the vacuum box 1.

[0040] Specifically, to achieve a more efficient cooling effect, air inlets 3 are designed on the front and rear sides of the top of the vacuum chamber 1. These air inlets 3 allow inert gas to be injected into the vacuum chamber 1. To ensure that the inert gas can evenly and quickly cover the entire vacuum chamber 1, the bottom end of each air inlet 3 penetrates through the top of the vacuum chamber 1 and is connected to multiple air inlet pipes 4. The outer walls of these air inlet pipes 4 are evenly provided with air outlet holes 5 to promote the uniform distribution of gas. Air inlet pipes 4 are installed on both sides of the inner wall of the vacuum chamber 1. The surface of the air inlet pipes 4 is also evenly distributed with multiple air outlet holes 5 to ensure that the gas can fully diffuse into the entire chamber. In addition, the other ends of the two air inlets 3 penetrate through the inner side of the vacuum chamber 1 and are connected to the exhaust pipe 6. One end of the exhaust pipe 6 is connected to a vacuum pump 7. When the vacuum pump 7 is started, it can effectively remove the original gas inside the vacuum chamber 1, thereby achieving rapid gas replacement. In order to further improve the cooling efficiency, the front side of the vacuum chamber 1 is also connected to a water outlet pipe 9. The rear end of the water outlet pipe 9 passes through the front side of the vacuum chamber 1 and is connected to a metal water pipe 10. The U-shaped metal water pipe 10 is distributed around the inner wall of the vacuum chamber 1, which can quickly transfer the internal heat out. The other end of the metal water pipe 10 passes through the inner side of the vacuum chamber 1 and is connected to a water inlet pipe 11. One end of the water inlet pipe 11 is connected to a connecting pipe 12, and one end of the connecting pipe 12 is connected to a solenoid valve 13. The left side of the solenoid valve 13 is connected to the right side of the filter box 14 to ensure that the filter box 14 can effectively filter out the impurities generated during the cooling process. In order to further optimize the cooling effect, multiple arc-shaped heat sinks 8 are fixedly connected to the front and rear sides of the interior of the vacuum chamber 1. These arc-shaped heat sinks 8 are installed close to the inner wall of the vacuum chamber 1, which will not occupy too much internal production space and can effectively dissipate heat.

[0041] Reference Figure 1 , Figure 2 and Figure 5The cleaning mechanism 2 includes a servo motor 201, which is fixedly connected to the left side of the filter box 14. The output end of the servo motor 201 passes through the left side of the filter box 14 and is fixedly connected to a rotating rod 204. A partition 202 is fixedly connected to the inner side of the filter box 14, and a filter plate 203 is rotatably connected to the inner side of the partition 202. The filter box 14 is divided into two parts by the partition 202. Sealing rings 205 are fixedly connected to the left and right sides of the outer wall of the filter plate 203. The filter plate 203 is installed in the middle of the partition 202, and the gaps are filled by the sealing rings 205 to prevent water leakage. The right end of the rotating rod 204 is fixedly connected to the left side of the filter plate 203. The servo motor 201 and the filter plate 203 are connected to each other. The filter plate 203 is connected to the filter plate 203 by a rotating rod 204. The filter plate 203 can be driven to rotate by starting the servo motor 201. The front end of the water outlet pipe 9 is connected to the connector 206. The right side of the connector 206 is connected to the high-pressure nozzle 207. The right end of the high-pressure nozzle 207 is connected to the top of the filter box 14. The cooling water that circulates once will enter the connector 206 for compression and finally be sprayed out through the high-pressure nozzle 207. The high-pressure nozzle 207 faces the filter plate 203 to remove surface impurities and reduce manual intervention. The cleaning mechanism 2 also includes a slag discharge pipe 208. The slag discharge pipe 208 is connected to the bottom of the filter box 14. The bottom end of the slag discharge pipe 208 is connected to the storage box 209.

[0042] Specifically, the servo motor 201 is installed on the left side of the filter box 14. The output shaft of the servo motor 201 passes through the left side wall of the filter box 14 and is tightly connected to the rotating rod 204. A partition 202 is specially designed into the internal structure of the filter box 14. This partition 202 is fixed inside the filter box 14, dividing the internal space of the filter box 14 into two independent areas. Inside the partition 202, there is a filter plate 203 that can rotate around the partition 202. Sealing rings 205 are installed on both sides of the outer wall of the filter plate 203. These sealing rings 205 ensure that the gap between the filter plate 203 and the partition 202 is tightly filled, effectively preventing leakage. The right end of the rotating rod 204 is connected to the left side of the filter plate 203, forming a stable connection structure. The servo motor 201... When the machine 201 is started, it drives the rotating rod 204, which in turn causes the filter plate 203 to rotate effectively. The front end of the water outlet pipe 9 is connected to the filter box 14 through the connector 206, and the right side of the connector 206 is connected to the high-pressure nozzle 207. The high-pressure nozzle 207 is installed at the top of the filter box 14. It is responsible for compressing the circulating cooling water and spraying it out through the high-pressure nozzle 207. The spray direction of the high-pressure nozzle 207 is directly facing the filter plate 203. Its purpose is to remove impurities from the surface of the filter plate 203, thereby reducing the need for manual intervention. In addition, the cleaning mechanism 2 is also equipped with a slag discharge pipe 208. The upper end of the slag discharge pipe 208 is connected to the bottom of the filter box 14, and the lower end of the slag discharge pipe 208 is connected to the storage box 209. This allows for convenient collection and storage of the filtered impurities.

[0043] Reference Figure 1 and Figure 2 A limiting plate 16 is slidably connected to the outer wall of the connecting pipe 12. The rear side of the limiting plate 16 is fixedly connected to the front side of the vacuum box 1. Reinforcing plates 18 are fixedly connected to both the left and right sides of the vacuum box 1. The bottom of multiple reinforcing plates 18 is fixedly connected to the top of the base 17. A screw hole 19 is opened on the top of the reinforcing plate 18. A bolt 20 is threaded on the inner side of the screw hole 19. A support frame 21 is fixedly connected to the front side of the vacuum box 1. A controller 22 is fixedly connected to the top of the support frame 21.

[0044] Specifically, a limiting plate 16 is slidably connected to the outer wall of the connecting pipe 12. The rear side of the limiting plate 16 is fixedly connected to the front side of the vacuum chamber 1, ensuring the stability and accuracy of the connection. Reinforcing plates 18 are fixedly connected to both the left and right sides of the vacuum chamber 1. These reinforcing plates 18 not only enhance the structural strength of the vacuum chamber 1, but also provide additional support points. The bottom of multiple reinforcing plates 18 is fixedly connected to the top of the base 17. This design further improves the stability of the entire device. For easy installation and maintenance, screw holes 19 are provided on the top of the reinforcing plates 18. Bolts 20 are threaded into the inner side of the screw holes 19, which can easily fix the reinforcing plates 18 in the appropriate position. In addition, a support frame 21 is fixedly connected to the front side of the vacuum chamber 1. The support frame 21 not only provides additional support for the vacuum chamber 1, but also facilitates the installation of other components. A controller 22 is fixedly connected to the top of the support frame 21. The controller 22 is responsible for the operation and monitoring of the entire system, ensuring the convenience of operation and the reliability of the system.

[0045] Working principle: First, inert gas is injected into the vacuum chamber 1 through the air inlet 3. The air inlet pipes 4 are installed on both sides of the inner wall of the vacuum chamber 1. Multiple air outlets 5 are evenly distributed on the surface of the air inlet pipes 4 to ensure that the inert gas covers the vacuum chamber 1 evenly and quickly. With the start of the vacuum pump 7, the gas inside the vacuum chamber 1 is removed to complete the rapid replacement. U-shaped metal water pipes 10 are distributed around the inner wall of the vacuum chamber 1. When cooling begins, the computer controls the solenoid valve 13 to inject coolant into the metal water pipes 10 for circulation. At the same time, the arc-shaped heat sink 8 is installed against the inner wall of the vacuum chamber 1 to quickly transfer the internal heat.

[0046] Furthermore, the filter box 14 is divided into two parts by the partition 202. The filter plate 203 is installed in the middle of the partition 202 and the gap is filled by the sealing ring 205. The filter plate 203 can be driven to rotate by starting the servo motor 201. At the same time, the cooling water that circulates once will enter the connector 206 for compression and finally be sprayed out through the high-pressure nozzle 207. The high-pressure nozzle 207 is directed towards the filter plate 203 to remove surface impurities, reduce manual intervention, and periodically discharge the wastewater into the storage box 209 for centralized treatment through the slag discharge pipe 208.

[0047] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A cooling device for cooling down inside a vacuum chamber, comprising a vacuum box (1) and a filter box (14), characterized in that: The top of the vacuum box (1) is communicated with air inlet (3) on both sides, the bottom of the two air inlets (3) penetrates the top of the vacuum box (1) and is communicated with a plurality of air inlet pipes (4), a plurality of air inlet pipes (4) are provided with air outlet holes (5) on the outer wall, the other end of the two air inlets (3) penetrates the inner side of the vacuum box (1) and is communicated with the exhaust pipe (6), one end of the exhaust pipe (6) is communicated with the vacuum pump (7), the front side of the vacuum box (1) is communicated with the water outlet pipe (9), the rear end of the water outlet pipe (9) penetrates the front side of the vacuum box (1) and is communicated with the metal water pipe (10), the other end of the metal water pipe (10) penetrates the inner side of the vacuum box (1) and is communicated with the water inlet pipe (11), one end of the water inlet pipe (11) is communicated with the connecting pipe (12), one end of the connecting pipe (12) is communicated with the electromagnetic valve (13), the left side of the electromagnetic valve (13) is communicated with the right side of the filter box (14), the inner side of the filter box (14) is provided with the cleaning mechanism (2).

2. A cooling device for cooling down the inside of a vacuum chamber according to claim 1, characterized in that: The cleaning mechanism (2) comprises a servo motor (201), the servo motor (201) is fixedly connected to the left side of the filter box (14), the output end of the servo motor (201) penetrates the left side of the filter box (14) and is fixedly connected with the rotating rod (204), the inner side of the filter box (14) is fixedly connected with the partition plate (202), the inner side of the partition plate (202) is rotatably connected with the filter plate (203), the outer wall of the filter plate (203) is fixedly connected with the sealing ring (205) on the left and right sides, the right end of the rotating rod (204) is fixedly connected to the left side of the filter plate (203), the front end of the water outlet pipe (9) is communicated with the connecting piece (206), the right side of the connecting piece (206) is communicated with the high-pressure nozzle (207), the right end of the high-pressure nozzle (207) is communicated with the top of the filter box (14).

3. A cooling device for cooling down the inside of a vacuum chamber according to claim 2, characterized in that: The cleaning mechanism (2) further comprises a slag discharge pipe (208), the slag discharge pipe (208) is communicated with the bottom of the filter box (14), the bottom end of the slag discharge pipe (208) is communicated with the storage box (209).

4. The cooling device according to claim 1, wherein: The front side of the filter box (14) is communicated with the liquid injection valve (15), the bottom of the vacuum box (1) is fixedly connected with the base (17).

5. The cooling device according to claim 1, wherein: The outer wall of the connecting pipe (12) is slidably connected with the limiting plate (16), the rear side of the limiting plate (16) is fixedly connected to the front side of the vacuum box (1).

6. The cooling device according to claim 1, wherein: The left and right sides of the vacuum box (1) are fixedly connected with the reinforcing plates (18), the bottoms of the plurality of reinforcing plates (18) are fixedly connected to the top of the base (17).

7. A cooling device for cooling down the inside of a vacuum chamber according to claim 6, characterized in that: The top of the reinforcing plate (18) is provided with a threaded hole (19), and the inner side of the threaded hole (19) is threadedly connected with a bolt (20).

8. The cooling device according to claim 1, wherein: The front side of the vacuum box (1) is fixedly connected with the support frame (21), and the top of the support frame (21) is fixedly connected with the controller (22).

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