Multi-channel cooling device of silicon carbide growing furnace

Abstract

The utility model discloses a multi-channel cooling device of a silicon carbide growing furnace, which belongs to the field of multi-channel cooling devices and comprises a rack, a pump body is detachably mounted on the rack, a circulating pipe is detachably mounted on the pump body, and a refrigerator, a security filter, a first cooling cylinder and a second cooling cylinder are sequentially connected onto the rack. According to the multi-channel cooling device of the silicon carbide growing furnace, cooling liquid in the water circulation frame body and the multiple groups of channel pipes can be circulated by starting the pump body, the cooling liquid can be cooled for the first time when passing through the refrigerator, and filtering operation can be performed when the cooling liquid enters the security filter; when cooling liquid enters the first cooling cylinder and the second cooling cylinder, secondary cooling operation can be carried out, and then the growth furnace is covered with the water circulation frame body, so that rapid cooling operation on the growth furnace can be completed.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of multi -pass cooling device, concretely relates to a multi -pass cooling device of silicon carbide growth furnace. BACKGROUND

[0002] Most semiconductor integrated circuit crystal growth adopts physical gas phase transmission method PVT method, and its basic crystal growing principle is that raw materials are placed at the bottom of a graphite crucible, the crucible is heated by an induction coil using the skin effect, the raw materials are decomposed into gas after reaching a certain temperature, and the gas volatilizes to the seed crystal area at the top of the crucible, SiC is generated through a series of chemical reactions, and the SiC is crystallized on the surface of the seed crystal through certain axial and radial temperature gradients, so that monocrystalline silicon carbide with a certain structure is obtained.

[0003] When silicon carbide crystals grow in a growth furnace, a certain gas pressure needs to be introduced into the growth furnace and a certain temperature needs to be applied externally to promote the growth of silicon carbide crystals. After the growth of silicon carbide is completed, the silicon carbide crystals need to be taken out. However, the temperature of the growth furnace is still high at this time, and the grown silicon carbide can only be taken out after the growth furnace cools down naturally, which delays the taking-out time of the grown silicon carbide. Therefore, improvement is needed.

[0004] The utility model attempts to alleviate or at least mitigate such problems or deficiencies by providing a new or otherwise improved multi -pass cooling device. SUMMARY

[0005] In view of one or more of the above deficiencies or improvement needs of the prior art, the utility model provides a multi -pass cooling device of silicon carbide growth furnace, which has the advantages of being able to quickly cool the growth furnace and being able to cool different caliber growth furnaces.

[0006] To achieve the above purpose, the utility model provides a multi -pass cooling device of silicon carbide growth furnace, which comprises a rack, a pump body detachably mounted on the rack, a circulating pipe detachably mounted on the pump body, a refrigerator, a security filter, a first cooling cylinder and a second cooling cylinder connected in sequence on the rack, and the refrigerator, the security filter, the first cooling cylinder and the second cooling cylinder are in communication with the circulating pipe.

[0007] A water circulation frame is located on one side of the rack, and the water circulation frame is in communication with the first and last ends of the circulating pipe respectively.

[0008] A plurality of groups of channel pipes are detachably mounted on the water circulation frame, and the plurality of groups of channel pipes are in communication with the water circulation frame, and the plurality of groups of channel pipes and the water circulation frame form a cooling area for the growth furnace to pass through.

[0009] A binding member is removably arranged on the plurality of groups of the channel pipes, and the binding member is used for binding operation on the plurality of groups of the channel pipes so that the plurality of groups of the channel pipes can be mutually attached to the growth furnace to be cooled.

[0010] As a further improvement of the utility model, two groups of positioning rings are detachably installed on the rack, and the two groups of positioning rings can cover the first cooling cylinder and the second cooling cylinder in them respectively.

[0011] As a further improvement of the utility model, the binding member comprises

[0012] A first binding belt is rotatably installed with a first hanging ring and a second hanging ring at one end, and an installation gap is formed between the first hanging ring and the second hanging ring;

[0013] A second binding belt is connected between the other end of the first binding belt, and the second binding belt can pass through the installation gap.

[0014] As a further improvement of the utility model, a first magnetic sheet and a second magnetic sheet are detachably installed on one end of the second binding belt, and the magnetic properties of the first magnetic sheet and the second magnetic sheet are opposite.

[0015] As a further improvement of the utility model, a plurality of limiting nails are detachably installed on the tail end of the first binding belt, and the plurality of limiting nails can pass through the first binding belt.

[0016] As a further improvement of the utility model, the caliber size of the first hanging ring and the caliber size of the second hanging ring are mutually adapted, and the first hanging ring and the second hanging ring are in staggered contact.

[0017] As a further improvement of the utility model, a reinforcing rib is detachably installed on the refrigerator, and the reinforcing rib and the rack are connected with each other.

[0018] As a further improvement of the utility model, a water inlet and a water outlet are formed in the bottom of the water circulation frame, and in the initial state, the water circulation frame and the plurality of groups of the channel pipes are filled with cooling liquid.

[0019] Overall, the above technical solutions conceived by the utility model compared with the prior art have the beneficial effects including:

[0020] The utility model discloses a multi -passage cooling device of silicon carbide growth furnace can circulate the cooling liquid in water circulation frame body and multiple groups of channel pipe through opening pump body, can carry out first cooling when cooling liquid passes through refrigerator, can carry out filtering operation when cooling liquid enters to security filter, can carry out secondary cooling operation when cooling liquid enters to first cooling cylinder and second cooling cylinder, can complete the quick cooling operation of growth furnace to the water circulation frame body from the cover of growth furnace, through the binding component of arrangement, the staff passes through the second binding band of pulling, and the one end of second binding band is in order from the installation gap of first hanger ring and second hanger ring and passes, makes second binding band from the misregistration area of first hanger ring and second hanger ring and passes, finally second magnetic attraction piece and first magnetic attraction piece mutual adsorption, can make first binding band and second binding band in shrink to make multiple groups of channel pipe and growth furnace mutually adhere, can make multiple groups of channel pipe can adapt to the cooling operation of growth furnace of different caliber. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is the overall structure schematic view of multi -passage cooling device of silicon carbide growth furnace of the utility model;

[0022] Figure 2 It is the structure schematic view when looking at multi -passage cooling device of silicon carbide growth furnace from another angle of the utility model;

[0023] Figure 3 It is the structure schematic view when removing water circulation frame body and binding component of multi -passage cooling device of silicon carbide growth furnace of the utility model;

[0024] Figure 4 It is the structure schematic view when water circulation frame body and binding component mutually combine of the utility model;

[0025] Figure 5 It is the overall structure schematic view of binding component of the utility model.

[0026] In all drawings, same reference signs represent same technical features, and specifically: 1, rack;11, pump body;12, circulating pipe;13, refrigerator;14, security filter;15, first cooling cylinder;16, second cooling cylinder;17, positioning ring;2, water circulation frame body;3, channel pipe;4, binding component;41, first binding band;42, first hanger ring;43, second hanger ring;44, limiting peg;45, second binding band;46, first magnetic attraction piece;47, second magnetic attraction piece. DETAILED DESCRIPTION

[0027] Clearly, the described embodiments are merely a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0028] The terms used herein are merely used to describe specific embodiments, and are not intended to limit the present application. The terms "include", "contain" and the like used herein indicate the existence of the described features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0029] All the terms used herein (including technical and scientific terms) have the meanings generally understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein should be interpreted to have meanings consistent with the context of the present specification, and should not be interpreted in an idealized or overly formal manner.

[0030] In the embodiments, Figures 1-5 A multi-channel cooling device of a silicon carbide growth furnace is given, wherein, Figure 1 It is a structural schematic diagram of the whole multi-channel cooling device of the silicon carbide growth furnace of the present application; Figure 2 It is a structural schematic diagram when the multi-channel cooling device of the silicon carbide growth furnace of the present application is viewed from another angle; Figure 3 It is a structural schematic diagram when the multi-channel cooling device of the silicon carbide growth furnace of the present application removes the water circulation frame and the binding member; Figure 4 It is a structural schematic diagram when the water circulation frame and the binding member of the present application are combined with each other; Figure 5 It is a structural schematic diagram of the whole binding member of the present application, which comprises a rack 1, a pump body 11 detachably mounted on the rack 1, a circulation pipe 12 detachably mounted on the pump body 11, a refrigerating device 13, a security filter 14, a first cooling cylinder 15 and a second cooling cylinder 16 connected in sequence on the rack 1, and the refrigerating device 13, the security filter 14, the first cooling cylinder 15 and the second cooling cylinder 16 are all in communication with the circulation pipe 12; a water circulation frame 2 is located on one side of the rack 1, and the water circulation frame 2 is in communication with the first end and the second end of the circulation pipe 12 respectively; a plurality of groups of channel pipes 3 are detachably mounted on the water circulation frame 2, and the plurality of groups of channel pipes 3 are in communication with the water circulation frame 2, and the plurality of groups of channel pipes 3 and the water circulation frame 2 together enclose a cooling area for the growth furnace to pass through; a binding member 4 is removably arranged on the plurality of groups of channel pipes 3, and the binding member 4 is used for binding the plurality of groups of channel pipes 3 so that the plurality of groups of channel pipes 3 can be in close contact with the growth furnace to be cooled.

[0031] The utility model discloses a whole thought based on, through opening pump body 11, can the cooling liquid in water circulation frame body 2 and multiple group channel pipe 3 is circulated, can carry out first cooling when cooling liquid passes through refrigerating machine 13, can carry out filtering operation when cooling liquid enters to security filter 14, can carry out secondary cooling operation when cooling liquid enters to first cooling cylinder 15 and second cooling cylinder 16, the water circulation frame body 2 is covered from growth furnace, can complete the quick cooling operation of growth furnace, through the binding member 4 of layout, the staff pulls second binding band 45, and the one end of second binding band 45 is in order from the installation gap of first ring 42 and second ring 43, passes, makes second binding band 45 from the staggered region of first ring 42 and second ring 43 passes, finally second magnetic attraction sheet 47 and first magnetic attraction sheet 46 mutual adsorption, can make first binding band 41 and second binding band 45 shrink to make multiple group channel pipe 3 and growth furnace mutually adhere, can make multiple group channel pipe 3 can adapt to the cooling operation of different caliber growth furnace.

[0032] In some embodiments, in order to further improve the stability of the connection between the first cooling cylinder 15 and the second cooling cylinder 16 and the rack 1, two groups of positioning rings 17 are detachably installed on the rack 1, and the first cooling cylinder 15 and the second cooling cylinder 16 are covered in the two groups of positioning rings 17 respectively.

[0033] Next, the binding member 4 is endowed with a more specific structure and configuration for further explanation and description. The binding member 4 includes a first binding band 41, one end of which is rotatably installed with a first ring 42 and a second ring 43, and an installation gap is formed between the first ring 42 and the second ring 43. A second binding band 45 is connected between the other end of the first binding band 41, and the second binding band 45 can pass through the installation gap.

[0034] Next, the principle and effect of the use of the binding member 4 are further explained and described. The staff pulls the second binding band 45, and one end of the second binding band 45 passes through the installation gap formed by the first ring 42 and the second ring 43 in order, so that the second binding band 45 passes through the staggered region formed by the first ring 42 and the second ring 43, and finally the second magnetic attraction sheet 47 and the first magnetic attraction sheet 46 are mutually adsorbed, so that the first binding band 41 and the second binding band 45 are retracted to make the multiple group channel pipe 3 and the growth furnace mutually adhere, and the multiple group channel pipe 3 can adapt to the cooling operation of the growth furnace of different caliber.

[0035] In some embodiments, in order to enable the mutual attraction between the first magnetic sheet 46 and the second magnetic sheet 47, a first magnetic sheet 46 and a second magnetic sheet 47 are detachably mounted on one end of the second binding belt 45, and the magnetic properties of the first magnetic sheet 46 and the second magnetic sheet 47 are opposite.

[0036] In some embodiments, in order to enable the tail end of the first binding belt 41 to stably enclose the first hanging ring 42 and the second hanging ring 43, a plurality of limiting nails 44 are detachably mounted on the tail end of the first binding belt 41, and the plurality of limiting nails 44 can pass through the first binding belt 41.

[0037] In some embodiments, in order to enable the second binding belt 45 to quickly and smoothly pass through the first hanging ring 42 and the second hanging ring 43, the caliber size of the first hanging ring 42 and the caliber size of the second hanging ring 43 are adapted to each other, and the first hanging ring 42 and the second hanging ring 43 are in staggered contact.

[0038] In some embodiments, more specifically, in order to further strengthen the connection between the refrigerator 13 and the rack 1, a reinforcing rib is detachably mounted on the refrigerator 13, and the reinforcing rib is connected to the rack 1.

[0039] In some embodiments, in order to quickly inject and flow out the cooling liquid in the water circulation frame 2, a water inlet and a water outlet are formed in the bottom of the water circulation frame 2, and in the initial state, the water circulation frame 2 and the plurality of channel pipes 3 are filled with cooling liquid.

[0040] In summary, by opening the pump body 11, the cooling liquid in the water circulation frame 2 and the plurality of channel pipes 3 can be circulated, the cooling liquid can be cooled for the first time when passing through the refrigerator 13, the cooling liquid can be filtered when entering the security filter 14, and the cooling liquid can be cooled for the second time when entering the first cooling cylinder 15 and the second cooling cylinder 16. When the water circulation frame 2 is covered on the growth furnace, the rapid cooling of the growth furnace is completed. Through the arrangement of the binding member 4, the worker pulls the second binding belt 45, and the end of the second binding belt 45 passes through the mounting gap formed by the first hanging ring 42 and the second hanging ring 43 in sequence. The second binding belt 45 passes through the staggered area formed by the first hanging ring 42 and the second hanging ring 43, and finally the second magnetic sheet 47 and the first magnetic sheet 46 are attracted to each other. The first binding belt 41 and the second binding belt 45 are retracted to enable the plurality of channel pipes 3 to be in close contact with the growth furnace, and the plurality of channel pipes 3 can adapt to the cooling of growth furnaces of different calibers.

[0041] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A multi-pass cooling arrangement for a silicon carbide growth furnace, characterized by, It includes A rack (1), a pump body (11) is detachably mounted on the rack (1), a circulating pipe (12) is detachably mounted on the pump body (11), a refrigerator (13), a security filter (14), a first cooling cylinder (15) and a second cooling cylinder (16) are sequentially connected to the rack (1), and the refrigerator (13), the security filter (14), the first cooling cylinder (15) and the second cooling cylinder (16) are in communication with the circulating pipe (12); A water circulation frame (2) is located on one side of the rack (1), and the water circulation frame (2) is in communication with the first end and the second end of the circulating pipe (12); A plurality of groups of channel pipes (3) are detachably mounted on the water circulation frame (2), and the plurality of groups of channel pipes (3) are in communication with the water circulation frame (2), and the plurality of groups of channel pipes (3) and the water circulation frame (2) form a cooling area for the growth furnace to pass through; A binding member (4) is removably arranged on the plurality of groups of channel pipes (3), and the binding member (4) is used for binding the plurality of groups of channel pipes (3) to enable the plurality of groups of channel pipes (3) to be in close contact with the growth furnace to be cooled.

2. The multi-pass cooling arrangement of a silicon carbide growth furnace of claim 1, wherein, Two groups of positioning rings (17) are also detachably mounted on the rack (1), and the two groups of positioning rings (17) can cover the first cooling cylinder (15) and the second cooling cylinder (16) therein.

3. The multi-pass cooling arrangement of a silicon carbide growth furnace of claim 1, wherein, The binding member (4) includes A first binding belt (41) rotatably mounted with a first hanging ring (42) and a second hanging ring (43) at one end, and a mounting gap is formed between the first hanging ring (42) and the second hanging ring (43); A second binding belt (45) connected between the other end of the first binding belt (41), and the second binding belt (45) can pass through the mounting gap.

4. The multi-pass cooling arrangement of a silicon carbide growth furnace of claim 3, wherein, A first magnetic sheet (46) and a second magnetic sheet (47) are also detachably mounted on one end of the second binding belt (45), and the first magnetic sheet (46) and the second magnetic sheet (47) are opposite in magnetism.

5. The multi-pass cooling arrangement of a silicon carbide growth furnace of claim 3, wherein, A plurality of limiting nails (44) are also detachably mounted on the tail end of the first binding belt (41), and the plurality of limiting nails (44) can pass through the first binding belt (41).

6. The multi-pass cooling arrangement of a silicon carbide growth furnace of claim 3, wherein, The caliber of the first hanging ring (42) and the caliber of the second hanging ring (43) are adapted to each other, and the first hanging ring (42) and the second hanging ring (43) are in misaligned contact.

7. The multi-pass cooling arrangement of a silicon carbide growth furnace of claim 1 wherein, A reinforcing rib is also detachably mounted on the refrigerator (13), and the reinforcing rib is connected to the rack (1).

8. The multi-pass cooling arrangement of a silicon carbide growth furnace of claim 1 wherein, A water inlet and a water outlet are formed in the bottom of the water circulation frame (2), and in the initial state, the water circulation frame (2) and the plurality of groups of channel pipes (3) are filled with cooling liquid.

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