High-performance boron expanded filament furnace body structure

Abstract

The utility model belongs to the technical field of boron expanding filament furnace body equipment, and particularly relates to a high-performance boron expanding filament furnace body structure which comprises an outer protective sleeve, a cotton ring arranged in the outer protective sleeve, heat preservation cotton arranged in the cotton ring, a heat preservation inner container arranged in the heat preservation cotton, and two first electric heating bodies fixedly connected in the heat preservation inner container. Two second electric heating bodies are fixedly connected between the two first electric heating bodies, two mounting grooves are formed in the outer surface of the outer protective sleeve, inner grooves are formed in the other ends of the two mounting grooves, telescopic rods are fixedly connected to the interiors of the inner grooves, sliding plates are fixedly connected to the output ends of the telescopic rods, and springs are fixedly connected to the outer surfaces of the sliding plates; the other end of the spring is fixedly connected with a supporting plate, and the outer surface of the supporting plate is fixedly connected with an inserting rod. The multi-layer heat preservation cotton and the heat preservation inner container are arranged, so that the heat preservation effect of the furnace body is improved, the heating performance is higher, and use is more convenient and faster.

Description

Technical Field

[0001] This utility model relates to the technical field of boron filament expanding furnace body equipment, specifically a high-performance boron filament expanding furnace body structure. Background Technology

[0002] Boron filament diffuser furnaces are commonly used in semiconductor manufacturing processes, primarily for diffusion treatment of silicon wafers to achieve doping. This process is a crucial step in semiconductor device production and is widely applied in integrated circuit manufacturing.

[0003] The existing furnace body structure does not have better heat preservation effect or higher performance, and the installation of the end face sealing plate is generally done with screws, which is relatively laborious. Therefore, a high-performance boron-derived fine wire furnace body structure is proposed to address the above shortcomings.

[0004] It should be noted that the above content falls within the inventor's technical knowledge and does not necessarily constitute prior art. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides a high-performance boron-derived fine filament furnace structure, which solves the current problems.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a high-performance boron-expanded filament furnace body structure, including an outer protective sleeve, a cotton ring inside the outer protective sleeve, heat-insulating cotton inside the cotton ring, a heat-insulating inner liner inside the heat-insulating cotton, two first heating elements fixedly connected inside the heat-insulating inner liner, and two second heating elements fixedly connected between the two first heating elements.

[0007] As a preferred embodiment of this utility model, the outer surface of the outer protective sleeve has two mounting grooves, and the other end of the two mounting grooves has an inner groove. A telescopic rod is fixedly connected inside the inner groove, and a sliding plate is fixedly connected to the output end of the telescopic rod. A spring is fixedly connected to the outer surface of the sliding plate, and a support plate is fixedly connected to the other end of the spring. An insert rod is fixedly connected to the outer surface of the support plate.

[0008] As a preferred technical solution of this utility model, the upper surface of the outer protective sleeve is provided with an end face sealing plate, the two sides of the end face sealing plate are fixedly connected with connecting plates, the lower surface of the connecting plates is fixedly connected with an installation rod, the installation rod has a slot inside, the slot is engaged with the insertion rod, and the top of the end face sealing plate has multiple heat dissipation holes.

[0009] As a preferred embodiment of this utility model, the upper surface of the outer protective sleeve is fixedly connected with multiple terminal plates, and the outer surface of the outer protective sleeve is provided with multiple pull rings.

[0010] As a preferred embodiment of this utility model, the outer surface of the mounting rod is slidably connected to the inside of the mounting groove.

[0011] As a preferred embodiment of this utility model, the outer surface of the slide plate is slidably connected to the inside of the inner groove, and the inside of the inner groove is slidably connected to the support plate.

[0012] As a preferred embodiment of this utility model, both the first heating element and the second heating element are provided with multiple heating wires inside.

[0013] Compared with the prior art, this utility model provides a high-performance boron filament furnace structure, which has the following beneficial effects:

[0014] I. This high-performance boron-deformed filament furnace body structure, by setting multiple layers of insulation cotton and insulation liner, improves the insulation effect of the furnace body and the heating performance, making it more convenient and quick to use;

[0015] Second, this high-performance boron filament furnace body structure, by setting an installation rod, enables rapid installation through the cooperation of the installation rod with the slide and the insertion rod, thereby saving manpower and material resources to quickly install the end face sealing plate on the outside of the outer protective sleeve, improving convenience. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This utility model Figure 1 Enlarged view of point A in the middle;

[0018] Figure 3 This is a schematic diagram of the heating element structure of this utility model;

[0019] Figure 4 This is a schematic diagram of the end face sealing plate structure of this utility model;

[0020] Figure 5 This utility model Figure 4 Enlarged view at point B in the middle;

[0021] Figure 6 This is a schematic diagram of the overall rear view structure of this utility model.

[0022] In the diagram: 1. Outer protective sleeve; 2. Cotton ring; 3. Insulation cotton; 4. Insulation inner liner; 5. First heating element; 6. Second heating element; 7. Mounting groove; 8. Inner groove; 9. Telescopic rod; 10. Slide plate; 11. Spring; 12. Support plate; 13. Insert rod; 14. End face sealing plate; 15. Connecting plate; 16. Mounting rod; 17. Slot; 18. Heat dissipation hole; 19. Terminal block; 20. Pull ring. Detailed Implementation

[0023] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example

[0025] like Figures 1-6 As shown, this utility model provides a technical solution: a high-performance boron-expanded fine filament furnace body structure, including an outer protective sleeve 1, a cotton ring 2 inside the outer protective sleeve 1, heat insulation cotton 3 inside the cotton ring 2, a heat insulation inner liner 4 inside the heat insulation cotton 3, two first electric heating elements 5 fixedly connected inside the heat insulation inner liner 4, two second electric heating elements 6 fixedly connected between the two first electric heating elements 5, and multiple heating wires are provided inside both the first electric heating elements 5 and the second electric heating elements 6.

[0026] In this embodiment, the outer protective sleeve 1 provides overall protection for the interior, and the cotton ring 2 and the insulation cotton 3 work together to enhance the insulation effect of the first heating element 5 and the second heating element 6 inside. The insulation liner 4 further insulates the interior. When the terminal block 19 is wired and the switch is turned on, the first heating element 5 and the second heating element 6 inside can be heated quickly, thereby achieving better insulation effect and higher heating performance. Example

[0027] like Figures 1-6As shown, the outer surface of the outer protective sleeve 1 has two mounting grooves 7, and the other end of the two mounting grooves 7 has an inner groove 8. A telescopic rod 9 is fixedly connected inside the inner groove 8. A slide plate 10 is fixedly connected to the output end of the telescopic rod 9. A spring 11 is fixedly connected to the outer surface of the slide plate 10. A support plate 12 is fixedly connected to the other end of the spring 11. An insertion rod 13 is fixedly connected to the outer surface of the support plate 12. An end face sealing plate 14 is provided on the upper surface of the outer protective sleeve 1. Connecting plates 15 are fixedly connected to both sides of the end face sealing plate 14. An installation rod 16 is fixedly connected to the lower surface of the connecting plate 15. A slot 17 is provided inside the installation rod 16. The inside of the slot 17 is engaged with the insertion rod 13. Multiple heat dissipation holes 18 are provided on the top of the end face sealing plate 14. Multiple terminal plates 19 are fixedly connected to the upper surface of the outer protective sleeve 1. Multiple pull rings 20 are provided on the outer surface of the outer protective sleeve 1. The outer surface of the installation rod 16 is slidably connected to the inside of the mounting groove 7. The outer surface of the slide plate 10 is slidably connected to the inside of the inner groove 8. The inside of the inner groove 8 is slidably connected to the support plate 12.

[0028] In this embodiment, the mounting rods 16 on both sides are slid into the mounting groove 7. When the mounting rod 16 abuts against the insertion rod 13, the spring 11 inside the inner groove 8 contracts, pushing the insertion rod 13 into the inner groove 8. Then, it quickly resets and enters the slot 17, thus fixing the mounting rod 16 to the upper surface of the outer protective sleeve 1. At the same time, the end face sealing plate 14 is also fixed. When disassembling, it is only necessary to activate the telescopic rod 9 inside the inner groove 8. The telescopic rod 9 drives the slide plate 10 and the spring 11 to retract together. Then, the spring 11 drives the support plate 12 and the insertion rod 13 to retract from the slot 17. The mounting rod 16 can be manually pulled out from the inside of the mounting groove 7. The mounting rod 16 is fixed to both sides of the end face sealing plate 14 by the connecting plate 15. The heat dissipation hole 18 can provide heat dissipation for the entire outer protective sleeve 1 when the terminal board 19 is energized. The pull ring 20 makes it easy to manually pull the entire device.

[0029] The working principle of this embodiment is as follows: The outer protective sleeve 1 provides overall protection for the interior. The cotton ring 2 and the insulation cotton 3 work together to enhance the insulation effect of the first heating element 5 and the second heating element 6. The insulation liner 4 further enhances the insulation. After the wiring terminal plate 19 is connected and the switch is turned on, the first heating element 5 and the second heating element 6 can be heated quickly, thereby achieving better insulation and higher heating performance. When installing the end face sealing plate 14, the mounting rods 16 on both sides can be slid into the interior of the mounting groove 7. When the mounting rod 16 abuts against the insertion rod 13, the spring 11 inside the inner groove 8 contracts, pushing the insertion rod 13 into the inner groove 8. The quick reset mechanism inserts the mounting rod 16 into the slot 17, which secures it to the upper surface of the outer protective sleeve 1. Simultaneously, the end face sealing plate 14 is also secured. For disassembly, simply activate the telescopic rod 9 inside the inner slot 8. The telescopic rod 9 then retracts the slide plate 10 and spring 11 together. The spring 11 then retracts the support plate 12 and the insertion rod 13 from the slot 17. The mounting rod 16 can then be manually pulled out from inside the mounting slot 7. The mounting rod 16 is secured to both sides of the end face sealing plate 14 via the connecting plate 15. The heat dissipation holes 18 provide overall heat dissipation for the outer protective sleeve 1 when the terminal block 19 is energized. The pull ring 20 facilitates manual pulling of the entire device.

[0030] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A high performance boron filamentary draw furnace structure characterized by: Including outer protective sleeve (1), the inside of outer protective sleeve (1) is provided with cotton ball (2), the inside of cotton ball (2) is provided with thermal cotton (3), the inside of thermal cotton (3) is provided with thermal inner bag (4), two first electric heating body (5) are fixedly connected in the inside of thermal inner bag (4), two second electric heating body (6) are fixedly connected between two first electric heating body (5).

2. A high performance boron filamentary structure as defined in claim 1, wherein: The outer surface of outer protective sleeve (1) is provided with two installation grooves (7), the other end of two installation grooves (7) is provided with inner groove (8), the inside of inner groove (8) is fixedly connected with telescopic rod (9), the output end of telescopic rod (9) is fixedly connected with sliding plate (10), the outer surface of sliding plate (10) is fixedly connected with spring (11), the other end of spring (11) is fixedly connected with support plate (12), the outer surface of support plate (12) is fixedly connected with plug rod (13).

3. A high performance boron filamentary structure as defined in claim 1, wherein: The upper surface of outer protective sleeve (1) is provided with end face sealing plate (14), the both sides of end face sealing plate (14) are fixedly connected with connecting plate (15), the lower surface of connecting plate (15) is fixedly connected with installation rod (16), the inside of installation rod (16) is provided with plug slot (17), the inside of plug slot (17) is mutually clamped with plug rod (13), the top of end face sealing plate (14) is provided with multiple heat dissipation holes (18).

4. A high performance boron filamentary structure as defined in claim 1, wherein: The upper surface of outer protective sleeve (1) is fixedly connected with multiple wiring terminal plates (19), the outer surface of outer protective sleeve (1) is provided with multiple pull rings (20).

5. A high performance boron filamentary structure as defined in claim 3, wherein: The outer surface of installation rod (16) is slidably connected in the inside of installation groove (7).

6. A high performance boron filamentary structure as defined in claim 2, wherein: The outer surface of sliding plate (10) is slidably connected in the inside of inner groove (8), the inside of inner groove (8) is slidably connected with support plate (12).

7. A high performance boron filamentary structure as defined in claim 1, wherein: The inside of first electric heating body (5) and second electric heating body (6) is provided with multiple electric heating wires.

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