Equipment cooling structure

Abstract

The utility model discloses an equipment cooling structure, which relates to the technical field of cooling equipment, and comprises a cooling plate capable of being matched with target equipment, a cooling medium inlet and a cooling medium outlet are respectively communicated with a cooling groove, and a sealing part is annularly arranged in the cooling groove; when the cooling plate is assembled with target equipment, the sealing part abuts against the target equipment. The cooling medium inlet is connected to the E end of a three-way valve, the F end of the three-way valve is connected to an air cooling source, and the D end of the three-way valve is connected to a liquid cooling source. According to the equipment cooling structure provided by the utility model, a liquid cooling mode and an air cooling mode are intelligently switched through the three-way valve, liquid cooling direct contact heat dissipation is started in the operation stage of target equipment, and high temperature is efficiently absorbed; the air cooling mode is automatically switched in the shutdown stage, residual liquid in the cooling cavity is swept, blown and removed, waste heat is synchronously discharged, equipment pollution or corrosion caused by residual cooling liquid is avoided, heat dissipation is enhanced through airflow, and the service life of equipment is prolonged.

Description

Technical Field

[0001] This utility model relates to the field of cooling equipment technology, and specifically to a cooling structure for equipment. Background Technology

[0002] In the field of industrial equipment cooling, traditional cooling methods often employ a structure combining pressurized water pipes and cooling plates, indirectly transferring heat through multiple contact surfaces. Taking vacuum pumps as an example, their internal high-temperature regions typically utilize a design where copper pipes are embedded in the cooling plate, with cooling water flowing through the copper pipes to carry away heat. However, practical applications show that this indirect cooling method suffers from significant heat loss, primarily due to the contact thermal resistance between the water pipes and the cooling plate. Furthermore, thermally conductive silicone grease is commonly used to fill gaps between the cooling plate and the equipment to improve contact; however, once the grease hardens, it makes disassembly difficult, requiring time-consuming cleaning of residues during maintenance, severely impacting equipment repair efficiency. These technical bottlenecks significantly restrict the overall efficiency and ease of use of equipment cooling systems, urgently requiring breakthroughs through structural innovation. Utility Model Content

[0003] The purpose of this invention is to address the aforementioned problems by providing a device cooling structure that intelligently switches between liquid cooling and air cooling modes via a three-way valve. During the operation of the target device (such as a vacuum pump), liquid cooling is activated for direct contact heat dissipation, efficiently absorbing high temperatures. During shutdown, it automatically switches to air cooling mode, purging and removing residual liquid from the cooling chamber while simultaneously discharging residual heat. This avoids equipment contamination or corrosion caused by traditional coolant residue and extends the lifespan of the target device by enhancing heat dissipation through airflow. Furthermore, a self-sealing mechanism is achieved by replacing thermal grease with an elastic sealing ring, eliminating the need to clean solidified residue during disassembly. Combined with rigid mounting components, it effectively maintains the stable seal of the cooling plate even under vibration conditions, solving the problems of cumbersome disassembly and maintenance, easy detachment due to vibration, and significant heat transfer loss associated with traditional technologies.

[0004] The technical solution adopted in this utility model is as follows:

[0005] A device cooling structure includes a cooling plate that can be matched with a target device. The cooling plate is provided with a cooling medium inlet, a cooling medium outlet, a cooling tank, and a sealing part. The cooling medium inlet and the cooling medium outlet are respectively connected to the cooling tank, and the sealing part is arranged around the cooling tank. When the cooling plate is assembled with the target device, the sealing part abuts against the target device, and the sealing part, the cooling tank, and the target device cooperate to form a cooling chamber. The cooling medium inlet is connected to the E end of a three-way valve, the F end of the three-way valve is connected to an air cooling source, and the D end of the three-way valve is connected to a liquid cooling source.

[0006] By employing the aforementioned technical solution, a closed cooling chamber is formed through the assembly of the cooling plate and the target equipment. The cooling medium acts directly on the surface of the target equipment, completely eliminating the traditional forced-in heat transfer structure between cooling water pipes and cooling plates, and eliminating heat loss at the contact surface between the cooling water pipes and cooling plates. The three-way valve enables dual-mode switching between air cooling and liquid cooling sources. When the target equipment is operating, a liquid cooling source can be connected for liquid cooling heat dissipation. When the target equipment is shut down, the liquid cooling source can be turned off and an air cooling source can be connected. This serves two purposes: firstly, it removes residual coolant from the cooling chamber, preventing contamination or damage to the target equipment from residual liquid during cooling plate disassembly; secondly, it removes residual heat from the target equipment, extending its service life. In some low-power scenarios, air cooling can also be directly selected to cool the target equipment as needed.

[0007] Furthermore, the three-way valve is a solenoid valve, which is signal-connected to the control device and is controlled by the control device.

[0008] Thanks to the above technical solution, the signal connection between the solenoid valve and the control device has been automated, which can automatically switch the cooling mode according to the real-time operating conditions, reduce human operation errors, and improve the system response speed and operational stability.

[0009] Furthermore, the target device is a vacuum pump, which is signal-connected to a control device. The control device can control the three-way valve according to the working status of the vacuum pump. The air cooling source includes a nitrogen purging module configured inside the vacuum pump. When the vacuum pump performs gas compression, the E end and D end of the three-way valve are connected, and the F end is closed. When the vacuum pump stops air compression and performs purging, the E end and F end of the three-way valve are connected, and the D end is closed.

[0010] By adopting the above technical solution, the vacuum pump's operating status and cooling mode are intelligently linked. Liquid cooling is activated during the compression phase to ensure heat dissipation efficiency, while gas cooling is switched during the purging phase to avoid coolant residue. Simultaneously, airflow purging further enhances the heat dissipation effect. The reuse of the vacuum pump's built-in nitrogen purging module simplifies the system structure and enables a self-cleaning function when the vacuum pump stops.

[0011] Furthermore, the F end of the three-way valve is connected to the C end of the three-way pipe, the A end of the three-way pipe is connected to the nitrogen purging module configured inside the vacuum pump, and the B end of the three-way pipe is connected to an external gas source.

[0012] Thanks to the above technical solution, the three-way pipe structure provides dual protection with both built-in and external gas sources. When the vacuum pump is not using the nitrogen purging module, it can automatically switch to the external gas source to ensure the purging process continues stably and improves the reliability of the system operation.

[0013] Furthermore, there are multiple cooling plates, which are connected in series. The cooling medium outlet of the upper cooling plate is connected to the cooling medium inlet of the lower cooling plate through a connecting pipe. The cooling medium inlet of the first cooling plate is connected to a three-way valve, and the cooling medium outlet of the end cooling plate is connected to a cooling medium processing device.

[0014] Thanks to the aforementioned technical solution, the multi-stage series cooling plates form a distributed heat dissipation system, significantly improving overall heat dissipation efficiency through tiered cooling. The modular design facilitates the expansion of cooling units according to equipment size, while the centralized discharge design simplifies the waste liquid recovery process.

[0015] Furthermore, the cooling plate is provided with a plurality of mounting holes, and mounting components are assembled in the mounting holes, which can restrict the cooling plate to the target device.

[0016] By adopting the above technical solution, rigid mounting components replace traditional press-fit assembly, eliminating installation stress caused by dimensional tolerances. The mechanical locking structure between the mounting hole and the mounting component maintains a stable connection even under vacuum pump vibration conditions, solving the problem of traditional cooling plates detaching from the pump body due to vibration.

[0017] Furthermore, the size of the cooling plate matches the target device, and the target device is provided with a positioning hole that matches the mounting hole on the cooling plate. The positioning hole is provided with an internal thread, and the mounting component is a screw. The screw shank can pass through the mounting hole and be threaded into the positioning hole.

[0018] Thanks to the above technical solutions, the size matching design and threaded connection structure ensure installation accuracy, the screw fixing method ensures connection strength while facilitating disassembly and maintenance, and the alignment design of the positioning hole and the mounting hole enables rapid positioning and installation.

[0019] Furthermore, the paired cooling plates are disposed opposite each other on both sides of the target equipment. Each cooling plate includes a cooling area that matches the target equipment and an assembly area that extends outward from the target equipment. The paired assembly areas are respectively disposed on both sides of the cooling area, and the mounting holes are disposed in the assembly areas. The mounting component is a tie rod, and the two ends of the tie rod can be respectively mounted on the mounting holes on the opposite cooling plates, thereby connecting the assembly areas of the opposite cooling plates to each other.

[0020] Thanks to the aforementioned technical solution, the double-sided cooling plates connected by the tie rod form a symmetrical clamping structure. This structure not only confines the cooling plates to the target equipment but also eliminates the need for secondary processing of the target equipment. The double-sided cooling plates can be flexibly installed in any area of ​​the target equipment that supports the clamping structure, depending on requirements. The extended assembly area design effectively disperses installation stress, ensuring the overall structural stability of the cooling plate installation.

[0021] Furthermore, an inlet pipe is provided at the inlet of the cooling medium, and an outlet pipe is provided at the outlet of the cooling medium. The two ends of the connecting pipe are respectively connected to the outlet pipe of the upper cooling plate and the inlet pipe of the lower cooling plate through pipe joints.

[0022] Thanks to the above technical solution, standardized pipe fittings and connecting pipes enable modular series connection between cooling plates. The modular design allows for flexible arrangement of cooling plates according to requirements and facilitates local maintenance and replacement.

[0023] Furthermore, the sealing part includes a sealing groove disposed on the cooling plate and a sealing ring that matches the sealing groove, wherein the sealing ring protrudes at least partially from the sealing groove.

[0024] Thanks to the aforementioned technical solution, the interference fit design of the sealing groove and the sealing ring ensures a tight seal at the contact surfaces. The convex sealing ring undergoes elastic deformation during assembly, forming a reliable seal and effectively preventing media leakage under vibration conditions. The contact surface between the cooling plate and the target equipment does not require filling gaps with thermally conductive silicone grease. Disassembly allows for direct removal of the mounting components to separate the cooling plate, completely solving the disassembly and assembly difficulties caused by the hardening of silicone grease in traditional structures.

[0025] In summary, due to the adoption of the above technical solutions, the beneficial effects of this utility model are as follows: A sealed cooling chamber is directly formed between the cooling plate and the target equipment, allowing the cooling medium to contact the equipment surface for heat transfer, eliminating the traditional pressurized cooling water pipe structure, removing multi-layer heat transfer losses, and improving heat dissipation efficiency; a three-way valve with dual-mode intelligent switching is used, enabling efficient liquid cooling during the target equipment's operation phase and switching to air cooling to remove residual liquid and purge residual heat during shutdown; a redundant air supply system is formed by utilizing the vacuum pump's reused nitrogen purging module and an external air source, ensuring a stable supply of cooling medium; an elastic sealing ring replaces thermally conductive silicone grease to achieve self-sealing, eliminating the need to clean solidified residues during disassembly, and, in conjunction with rigid mounting components, effectively maintains the stable seal of the cooling plate even under vibration conditions; the modular series cooling plate and standardized pipe joint design support rapid disassembly and expansion to meet the needs of different equipment sizes; the connection between the cooling plate and the target equipment can achieve rapid positioning and installation through the alignment design of the positioning holes and mounting holes, or it can be adapted to various equipment areas through the pull-out installation of the double-sided cooling plates, avoiding secondary processing of the target equipment and significantly reducing deployment costs and compatibility difficulties. Attached Figure Description

[0026] Figure 1 This is a cross-sectional view of the cooling structure of the device of this utility model;

[0027] Figure 2 This is an assembly drawing of the cooling structure of the device and the target device of this utility model;

[0028] Figure 3 This is a schematic diagram of the cooling structure of the device of this utility model;

[0029] Figure 4 This is a schematic diagram of the structure of the cooling plate of this utility model;

[0030] Figure 5 This utility model relates to Figure 4 A cross-sectional view along the AA direction;

[0031] Figure 6 This is a schematic diagram of the structure of the mounting component of this utility model, which is a tie rod.

[0032] The markings in the diagram are: 1-Inlet pipe, 2-Three-way valve, 3-Outlet pipe, 4-Three-way pipe, 5-Connector, 6-Target equipment, 7-Installation component, 8-Pipe fitting, 9-Connecting pipe, 10-Sealing ring, 11-Cooling plate, 101-Cooling medium inlet, 102-Cooling medium outlet, 103-Cooling tank, 104-Sealing part. Detailed Implementation

[0033] The present invention will now be described in detail with reference to the accompanying drawings.

[0034] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0035] Example 1

[0036] A device cooling structure, such as Figures 1-5 As shown, the device includes a cooling plate 11 that can be matched with the target device 6. The cooling plate 11 is provided with a cooling medium inlet 101, a cooling medium outlet 102, a cooling tank 103, and a sealing part 104. The cooling medium inlet 101 and the cooling medium outlet 102 are respectively connected to the cooling tank 103, and the sealing part 104 is arranged around the cooling tank 103. When the cooling plate 11 is assembled with the target device 6, the sealing part 104 abuts against the target device 6, and the sealing part 104, the cooling tank 103, and the target device 6 cooperate with each other to form a cooling chamber. The cooling medium inlet 101 is connected to the E end of the three-way valve 2, the F end of the three-way valve 2 is connected to the air cooling source, and the D end of the three-way valve 2 is connected to the liquid cooling source. The cooling tank 103 has a long strip structure. The cooling medium inlet 101 and the cooling medium outlet 102 are respectively located on both sides of the length direction of the cooling tank 103. The cooling medium inlet 101 and the cooling medium outlet 102 are both connecting holes opened from the side wall of the cooling plate into the cooling tank 103.

[0037] Specifically, the assembly of cooling plate 11 with target device 6 forms a closed cooling chamber, allowing the cooling medium to act directly on the surface of target device 6. This completely eliminates the traditional pressurized heat transfer structure between cooling water pipes and cooling plate 11, thus eliminating heat loss at the contact surface. The three-way valve 2 enables dual-mode switching between air cooling and liquid cooling. When target device 6 is operating, it can be connected to a liquid cooling source for liquid cooling. When target device 6 is off, the liquid cooling source can be shut off, and an air cooling source can be connected. This removes residual coolant from the cooling chamber, preventing contamination or damage to target device 6 during cooling plate 11 disassembly, and also removes residual heat from target device 6, extending its lifespan. In some low-power scenarios, air cooling can also be used to directly cool target device 6 as needed.

[0038] The three-way valve 2 is a solenoid valve, which is connected to the control device via a signal and is controlled by the control device.

[0039] Specifically, the signal connection between the solenoid valve and the control device enables automated control, which can automatically switch the cooling mode according to real-time operating conditions, reducing human operation errors and improving system response speed and operational stability.

[0040] The target device 6 is a vacuum pump, which is signal-connected to a control device. The control device can control the three-way valve 2 according to the working status of the vacuum pump. The air cooling source includes a nitrogen purging module configured inside the vacuum pump. When the vacuum pump is performing gas compression, the E end and D end of the three-way valve 2 are connected and the F end is closed. When the vacuum pump stops air compression and performs purging, the E end and F end of the three-way valve 2 are connected and the D end is closed.

[0041] Specifically, the vacuum pump's operating status is intelligently linked to its cooling mode. Liquid cooling is activated during the compression phase to ensure efficient heat dissipation, while gas cooling is switched during the purging phase to prevent coolant residue. Simultaneously, airflow purging further enhances heat dissipation. The reuse of the vacuum pump's built-in nitrogen purging module simplifies the system structure and enables a self-cleaning function when the vacuum pump stops.

[0042] The F end of the three-way valve 2 is connected to the C end of the three-way pipe 4, the A end of the three-way pipe 4 is connected to the nitrogen purging module configured inside the vacuum pump through the connector 5, and the B end of the three-way pipe 4 is connected to an external gas source.

[0043] Specifically, the three-way pipe 4 structure provides dual protection with both built-in and external gas sources. When the vacuum pump is not using the nitrogen purging module, it can automatically switch to the external gas source to ensure the purging process continues stably and improves the reliability of system operation.

[0044] There are two cooling plates 11, which are connected in series. The two cooling plates 11 are respectively located on the top and bottom surfaces of the vacuum pump. The cooling medium outlet 102 of the upper cooling plate 11 is connected to the cooling medium inlet 101 of the lower cooling plate 11 through a connecting pipe 9. The cooling medium inlet 101 of the upper cooling plate 11 is connected to a three-way valve 2, and the cooling medium outlet 102 of the lower cooling plate 11 is connected to a cooling medium treatment device. The cooling medium treatment device can be a waste liquid tank or a purification and circulation device. The cooling medium treatment device is not shown in the figure.

[0045] Specifically, the multi-stage series cooling plates 11 form a distributed heat dissipation system, significantly improving overall heat dissipation efficiency through staged cooling. The modular design facilitates the expansion of cooling units according to equipment size, while the centralized discharge design simplifies the waste liquid recycling process.

[0046] The cooling plate 11 is provided with a plurality of mounting holes, and mounting parts 7 are assembled in the mounting holes. The mounting parts 7 can restrict the cooling plate 11 to the target device 6.

[0047] Specifically, the rigid mounting component 7 replaces the traditional press-fit assembly, eliminating installation stress caused by dimensional tolerances. The mechanical locking structure between the mounting hole and the mounting component 7 maintains a stable connection even under vacuum pump vibration conditions, solving the problem of the traditional cooling plate 11 detaching from the pump body due to vibration.

[0048] The size of the cooling plate 11 matches that of the target device 6. The target device 6 has a positioning hole that matches the mounting hole on the cooling plate 11. The positioning hole has an internal thread. The mounting component 7 is a screw, and the screw can pass through the mounting hole and be threaded into the positioning hole.

[0049] Specifically, the size matching design and threaded connection structure ensure installation accuracy, the screw fixing method ensures connection strength while facilitating disassembly and maintenance, and the alignment design of the positioning hole and the mounting hole enables rapid positioning and installation.

[0050] An inlet pipe 1 is provided at the cooling medium inlet 101, and an outlet pipe 3 is provided at the cooling medium outlet 102. The two ends of the connecting pipe 9 are connected to the outlet pipe 3 of the upper cooling plate 11 and the inlet pipe 1 of the lower cooling plate 11 respectively through pipe joints 8. One end of the inlet pipe 1 extends into the cooling medium inlet 101 and is welded to the cooling medium inlet 101, while the other end of the inlet pipe 1 extends out of the cooling medium inlet 101. One end of the outlet pipe 3 extends into the cooling medium outlet 102 and is welded to the cooling medium outlet 102, while the other end of the outlet pipe 3 extends out of the cooling medium outlet 102.

[0051] Specifically, the standardized pipe fitting 8, together with the connecting pipe 9, realizes the modular series connection between the cooling plates 11. The modular design allows for flexible arrangement of the cooling plates 11 according to needs, and also facilitates local maintenance and replacement.

[0052] The sealing part 104 includes a sealing groove provided on the cooling plate 11 and a sealing ring 10 that matches the sealing groove, wherein the sealing ring 10 protrudes at least partially from the sealing groove.

[0053] Specifically, the interference fit design of the sealing groove and the sealing ring 10 ensures the tightness of the contact surface. The convex sealing ring 10 undergoes elastic deformation during assembly to form a reliable seal, effectively preventing media leakage under vibration conditions. The contact surface between the cooling plate 11 and the target device 6 does not require filling the gaps with thermally conductive silicone grease. During disassembly, the cooling plate 11 can be separated simply by removing the mounting part 7, completely solving the problem of difficult disassembly and assembly caused by the hardening of silicone grease in traditional structures.

[0054] During installation, first align the two cooling plates 11 with the positioning holes of the vacuum pump through the mounting holes and fix them with screws so that the sealing ring 10 contacts the vacuum pump to form a sealed cooling chamber; then use the connecting pipe 9 and the pipe joint 8 to connect the two cooling plates 11 in series. Connect the inlet pipe 1 of the upper cooling plate 11 to the E end of the three-way valve 2, connect the D end of the three-way valve 2 to the liquid cooling source, connect the F end of the three-way valve 2 to the C end of the three-way pipe 4, connect the A end of the three-way pipe 4 to the nitrogen purging module configured in the vacuum pump through the connector 5, and connect the B end of the three-way pipe 4 to the external gas source. That is, the gas cooling source includes the nitrogen purging module and the external gas source.

[0055] When the vacuum pump starts, the control device switches the three-way valve 2 to connect to the liquid cooling source, and the coolant directly absorbs the heat of the pump body through the cooling tank 103; after the vacuum pump stops, the control device switches the three-way valve 2 to connect to the gas cooling source, and the nitrogen purging module or external gas source delivers airflow to the cooling chamber to remove residual coolant and discharge residual heat.

[0056] When removal is required, the cooling plate 11 can be directly separated after removing the mounting part 7. The sealing ring 10 will automatically reset and detach from the contact surface, without the need to clean the cured silicone grease.

[0057] Example 2

[0058] Example 2 replaces the arrangement of the mounting holes and mounting parts 7 in Example 1, and is a replacement for Example 1; further explanation is needed, identical components will not be described again here, such as... Figure 6As shown, the paired cooling plates 11 are disposed opposite each other on both sides of the target device 6. Each cooling plate 11 includes a cooling area that matches the target device 6 and an assembly area that extends outward from the target device 6. The paired assembly areas are respectively disposed on both sides of the cooling area. The mounting holes are disposed in the assembly areas, and each assembly area is provided with two mounting holes. The number of mounting holes is set as needed and is not limited here. The mounting component 7 is a tie rod. The two ends of the tie rod can be respectively mounted to the mounting holes on the opposite cooling plates 11, and the assembly areas of the opposite cooling plates 11 are connected to each other. That is, the two opposite assembly areas are connected by two tie rods. A total of four tie rods cooperate with each other to restrict the two opposite cooling plates 11 to both sides of the target device.

[0059] Specifically, the double-sided cooling plates 11 connected by the tie rod form a symmetrical clamping structure, which can not only restrict the cooling plates 11 to the target equipment 6, but also eliminate the need for secondary processing of the target equipment 6. The double-sided cooling plates 11 can be flexibly installed in any area of ​​the target equipment 6 that can support the clamping structure, as needed. Figure 6 The diagram only shows the paired cooling plates 11 located at the top and bottom of the target device 6. In addition, the paired cooling plates 11 can also be located at the left and right ends, front and rear ends, etc., of the target device 6. The extended assembly area design effectively disperses installation stress, ensuring the overall structural stability of the cooling plate 11 installation.

[0060] This document uses specific embodiments to illustrate the principles and implementation methods of this utility model. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principles of this utility model, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

[0061] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0062] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

Claims

1. An apparatus cooling structure, characterized by, The cooling plate comprises a cooling medium inlet, a cooling medium outlet, a cooling groove and a sealing part, the cooling medium inlet and the cooling medium outlet are communicated with the cooling groove respectively, and the sealing part is annularly arranged on the cooling groove; when the cooling plate is assembled with the target device, the sealing part abuts against the target device, and the sealing part, the cooling groove and the target device cooperatively form a cooling cavity; the cooling medium inlet is connected with the E end of a three-way valve, the F end of the three-way valve is connected with a gas cooling source, and the D end of the three-way valve is connected with a liquid cooling source.

2. The device cooling structure of claim 1, wherein, The three-way valve is an electromagnetic valve, the electromagnetic valve is signal-connected with a control device, and the electromagnetic valve is controlled by the control device.

3. The device cooling structure of claim 2, wherein, The target device is a vacuum pump, the vacuum pump is signal-connected with the control device, and the control device can control the three-way valve according to the working state of the vacuum pump; the gas cooling source comprises a nitrogen sweeping module arranged in the vacuum pump; when the vacuum pump performs a gas compression operation, the E end and the D end of the three-way valve are communicated, and the F end is closed; when the vacuum pump stops the air compression and performs the sweeping, the E end and the F end of the three-way valve are communicated, and the D end is closed.

4. The device cooling structure of claim 3, wherein, The F end of the three-way valve is connected with the C end of a three-way pipe, the A end of the three-way pipe is connected with the nitrogen sweeping module arranged in the vacuum pump, and the B end of the three-way pipe is connected with an external gas source.

5. The equipment cooling structure of any of claims 1-4, wherein, A plurality of cooling plates are arranged in series, the cooling medium outlet of a preceding cooling plate is connected with the cooling medium inlet of a following cooling plate through a connecting pipe, the cooling medium inlet of a first cooling plate is connected with the three-way valve, and the cooling medium outlet of a last cooling plate is connected with a cooling medium treatment device.

6. The device cooling structure of claim 5, wherein, A plurality of mounting holes are arranged on the cooling plate, mounting members are arranged in the mounting holes, and the mounting members can limit the cooling plate to the target device.

7. The device cooling structure of claim 6, wherein, The size of the cooling plate is matched with the target device, a positioning hole matched with the mounting hole of the cooling plate is arranged on the target device, an internal thread is arranged in the positioning hole, and the mounting member is a screw, the screw rod of the screw can be threadedly connected with the positioning hole through the mounting hole.

8. The device cooling structure of claim 6, wherein, The cooling plates are oppositely arranged on two sides of the target device, the cooling plate comprises a cooling area matched with the target device and an assembly area extending outwardly from the target device, the assembly areas of the cooling plates are arranged on two sides of the cooling area respectively, and the mounting holes are arranged in the assembly areas; the mounting member is a pair of pull screws, the two ends of the pair of pull screws are arranged in the mounting holes of the opposite cooling plates respectively, and the assembly areas of the opposite cooling plates are connected with each other.

9. The device cooling structure of claim 5, wherein, An inlet pipe is arranged at the cooling medium inlet, an outlet pipe is arranged at the cooling medium outlet, and the two ends of the connecting pipe are connected with the outlet pipe of a preceding cooling plate and the inlet pipe of a following cooling plate through pipe joints respectively.

10. The device cooling structure of claim 1, wherein, The sealing part comprises a sealing groove arranged on the cooling plate and a sealing ring matched with the sealing groove, and the sealing ring is at least partially convex outwardly from the sealing groove.

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