Limiting tool for processing sub-parts of guard plate assembly of ion implanter

Abstract

The utility model belongs to the technical field of limiting tools, and particularly relates to a limiting tool for processing sub-parts of a guard plate assembly of an ion implanter, which comprises a mounting plate, the bottom of the mounting plate is fixed on a processing device, and the top of the mounting plate is connected with a supporting seat through an adjusting mechanism. The adjusting mechanism comprises fixing plates fixed to the two ends of the top of the mounting plate, two first lead screws are rotationally connected between the two fixing plates, the two sides of the bottom of the supporting base are in threaded connection with the first lead screws through strip-shaped connecting plates, and a box is mounted on the side face of one fixing plate. The first driving motor can drive the first lead screw to rotate synchronously through the first synchronous wheel and the second synchronous wheel, then the supporting base and the workbench can be moved out of the lower portion of the machining equipment for feeding and discharging, in this way, the hands of a user cannot be injured when the machining equipment breaks down, and the using effect is improved.

Description

Technical Field

[0001] This solution belongs to the field of limiting tooling, specifically involving a limiting tooling for processing sub-parts of the protective plate assembly of an ion implanter. Background Technology

[0002] An ion implanter is a key device that uses a high-voltage electric field to accelerate an ion beam and precisely inject it into the surface of semiconductor materials or metals to change the electrical properties or surface characteristics of the materials. The ion implanter and its protective plate assembly are composed of multiple sub-parts connected together. When the sub-parts are being processed, they need to be limited and fixed by limiting fixtures.

[0003] A search revealed a utility model patent application with publication number CN212444166U, which discloses a limiting fixture for processing thin-walled box-shaped titanium alloy parts to prevent deformation. The fixture includes a base, a bottom plate, a receiving screw, a first limiting plate, and a second slider. A fixing sleeve is mounted on the base, and a shock-absorbing spring is mounted on the fixing sleeve. The shock-absorbing spring is connected to a support rod. The bottom plate is mounted on the support rod, and an adjusting screw is mounted on the bottom plate. A first bevel gear is mounted on the adjusting screw. The receiving screw is connected to a second bevel gear and is mounted on the bottom plate.

[0004] In existing technologies, limiting fixtures are generally fixed to processing equipment with bolts. When workers install or remove sub-parts, their hands are below the processing mechanism on the processing equipment. When the equipment malfunctions, workers' hands are easily injured by the processing equipment, resulting in poor usability. Furthermore, existing limiting fixtures can generally only fix sub-parts, and after fixing, the position of the processing mechanism on the processing equipment needs to be adjusted for positioning, which is cumbersome and results in poor usability. Utility Model Content

[0005] The purpose of this solution is to provide a limiting fixture for processing sub-parts of the protective plate assembly of an ion implanter, in order to solve the problem that in the existing technology, the limiting fixture is fixed to the processing equipment and its position cannot be adjusted, which makes it easy for workers' hands to be injured by the processing equipment when loading and unloading sub-parts. In addition, the limiting fixture can only fix the sub-parts and cannot simultaneously position them, resulting in poor performance.

[0006] To achieve the above objectives, this solution provides a limiting fixture for processing sub-parts of a protective plate assembly in an ion implanter, including a mounting plate. The bottom of the mounting plate is fixed to a processing device, and the top of the mounting plate is connected to a support base via an adjustment mechanism. The adjustment mechanism includes fixed plates fixed to both ends of the top of the mounting plate. Two first lead screws are rotatably connected between the two fixed plates. The bottom sides of the support base are threadedly connected to the first lead screws via strip-shaped connecting plates. A housing is mounted on the side of one of the fixed plates. One end of each first lead screw extends into the housing, and a second synchronous pulley is connected to the end of each first lead screw. A rotating shaft is rotatably connected inside the housing. A first synchronous pulley is mounted on the side of the rotating shaft. The first synchronous pulley is connected to two second synchronous pulleys via a synchronous belt, and a first drive motor is connected to one end of the rotating shaft. The drive motor is fixed to the side of the housing. Two support plates are vertically installed on the top of the support base. A workbench is connected to the top of the two support plates. A clamping mechanism is provided on the top of the workbench. The clamping mechanism includes two first through slots symmetrically opened on the top of the workbench. Each first through slot has a first connecting block inside. Both ends of each first connecting block extend to the outside of the first through slot. A clamping plate is installed on the top of each first connecting block. An opening slot is opened at the bottom of each first connecting block. A connecting rod is rotatably connected inside each opening slot. A third lead screw is rotatably connected between the workbench and the support base. A threaded sleeve is fitted on the side of the third lead screw. A fixing plate is installed at the bottom of the threaded sleeve. Grooves are opened on both sides of the fixing plate. The other end of each connecting rod extends into the corresponding groove and is rotatably connected to the groove.

[0007] The principle of this solution is as follows: The operator rotates the second lead screw, which drives the second connecting block to move along the second guide rod, thus adjusting the limiting plate to a preset position. Then, the sub-part is placed on the worktable, so that one side of the sub-part contacts the side of the limiting plate. Next, the operator controls the second drive motor to work, which drives the third lead screw to rotate. The threaded sleeve moves along the third lead screw, which in turn drives the connecting rod to rotate. The two connecting rods synchronously drive the two first connecting blocks to move relative to each other, so that the clamping plate clamps and positions the sub-part, completing the limiting and fixing of the sub-part. Then, the operator controls the first drive motor to work, which synchronously drives the two first lead screws to rotate in cooperation with the first and second synchronous pulleys. The support base drives the worktable to move horizontally along the first lead screw, so that the sub-part on the worktable moves to a preset position under the processing equipment for processing. After processing, the operator controls the first drive motor to reverse, and under the action of the first lead screw, the sub-part can be moved out from under the processing equipment. Then, the operator removes the processed sub-part safely.

[0008] The technical advantages of this solution are as follows: the first drive motor can drive the first lead screw to rotate synchronously through the first and second synchronous pulleys, thereby moving the support base and worktable out from under the processing equipment for loading and unloading. This prevents the user's hands from being injured in the event of equipment failure, improving usability. Furthermore, by rotating the second lead screw, the limiting plate can initially limit the mechanical energy of the sub-parts on the worktable. Then, the second drive motor, under the action of the third lead screw, threaded sleeve, connecting rod, and first connecting block, can synchronously drive the two clamping plates to move relative to each other, performing secondary limiting and fixing of the sub-parts. While limiting, the sub-parts can also be positioned, improving usability.

[0009] Furthermore, guide rails are symmetrically arranged between the two fixing plates, with the bottom of each guide rail fixed to the top of the mounting plate, and the bottom of each strip connecting plate slidably connected to the guide rail via a sliding block. The guide rails guide the strip connecting plates, ensuring the stability of the support base.

[0010] Furthermore, each of the first through slots is equipped with a first guide rod, and each first guide rod slides through the corresponding first connecting block. The first guide rods can limit and guide the first connecting block, making the movement of the first connecting block stable.

[0011] Furthermore, a second through slot is provided on the top of the workbench, and a second connecting block is provided inside the second through slot. A second lead screw is rotatably connected to the side of one of the support plates. The other end of the second lead screw is connected to the bottom of the workbench via a fixing block. The bottom of the second connecting block is fitted onto the second lead screw and threadedly connected to it. The top of the second connecting block extends above the workbench, and a limiting plate is connected to the top of the second connecting block. The position of the limiting plate can be adjusted by rotating the second lead screw, thereby allowing the limiting plate to be adjusted to a preset position according to the size of the sub-part.

[0012] Furthermore, a second guide rod is connected inside the second through groove, and the second guide rod slides through the second connecting block. The second guide rod can guide and limit the second connecting block, so that the second connecting block remains stable.

[0013] Furthermore, the width of the limiting plate is smaller than the size of the sub-part. When the sub-part is fixed in place, the limiting plate will not collide with the clamping plate.

[0014] Furthermore, the bottoms of both the limiting plate and the clamping plate are clearance-fitted with the top of the worktable. This allows for the limiting and fixing of thin-walled sub-parts, and the worktable also limits the limiting plate and clamping plate, ensuring their stability. Attached Figure Description

[0015] Figure 1This is a schematic diagram of the overall structure of an embodiment of the present utility model.

[0016] Figure 2 This is a schematic diagram of the clamping mechanism according to an embodiment of the present utility model;

[0017] Figure 3 This is a side view of the connection structure between the present invention and the processing equipment according to an embodiment;

[0018] Figure 4 This is a schematic diagram of the internal structure of the box in an embodiment of the present utility model.

[0019] The following detailed explanation illustrates the specific implementation methods:

[0020] The reference numerals in the accompanying drawings include: mounting plate 1, fixing plate 2, first lead screw 3, guide rail 4, worktable 5, clamping plate 6, support plate 7, limiting plate 8, second lead screw 9, first through groove 10, first guide rod 11, third lead screw 12, strip connecting plate 13, second guide rod 14, housing 15, first drive motor 16, connecting rod 17, opening slot 18, threaded sleeve 19, fixing plate 20, first connecting block 21, second drive motor 22, support base 23, rotating shaft 24, first synchronous pulley 25, second synchronous pulley 26, second connecting block 27, second through groove 28, clamping mechanism 29, adjusting mechanism 30, and groove 31. Detailed Implementation

[0021] The basic implementation examples are as follows: Figures 1-4 As shown: A limiting fixture for processing sub-parts of a protective plate assembly of an ion implanter includes a mounting plate 1. The bottom of the mounting plate 1 is fixed to a processing device, and the top of the mounting plate 1 is connected to a support base 23 via an adjustment mechanism 30. The adjustment mechanism 30 includes fixing plates 2 fixed to both ends of the top of the mounting plate 1. Two first lead screws 3 are rotatably connected between the two fixing plates 2. The bottom sides of the support base 23 are threadedly connected to the first lead screws 3 via strip connecting plates 13. A housing 15 is installed on the side of one of the fixing plates 2. One end of each first lead screw 3 extends into the housing 15, and the end of each first lead screw 3 is connected to a second synchronous pulley 26. A rotating shaft 24 is rotatably connected inside the housing 15. A first synchronous pulley 25 is installed on the side of the rotating shaft 24. The first synchronous pulley 25 is connected to two second synchronous pulleys 26 via a synchronous belt. One end of the rotating shaft 24 is connected to a first drive motor 16, which is fixed to the side of the housing 15. Figure 4 As shown, the first drive motor 16 can synchronously drive the two first lead screws 3 to rotate with the cooperation of the first synchronous pulley 25 and the second synchronous pulley 26, thereby adjusting the position of the support base 23. Figure 3As shown, the support base 23 can be moved out from under the processing equipment during loading and unloading, which makes loading and unloading safe. Guide rails 4 are symmetrically arranged between the two fixed plates 2. The bottom of each guide rail 4 is fixed to the top of the mounting plate 1, and the bottom of each strip connecting plate 13 is slidably connected to the guide rail 4 through a sliding block. The guide rail 4 can guide the strip connecting plate 13, thereby making the support base 23 stable when moving.

[0022] like Figure 1 and Figure 2 As shown, two support plates 7 are vertically installed on the top of the support base 23. A worktable 5 is connected to the top of the two support plates 7. The operator can place the sub-part on the worktable 5 and then process the sub-part by moving the support base 23 under the processing equipment. The top of the worktable 5 is provided with a clamping mechanism 29. The clamping mechanism 29 includes two first through slots 10 symmetrically opened on the top of the worktable 5. Each first through slot 10 has a first connecting block 21 inside and a first guide rod 11 installed inside each first through slot 10. Each first guide rod 11 slides through the corresponding first connecting block 21. The first guide rod 11 can limit the first connecting block 21, so that the first connecting block 21 remains stable. Both ends of each first connecting block 21 extend to the outside of the first through slot 10. A clamping mechanism 29 is installed on the top of each first connecting block 21. The workpiece is equipped with a clamping plate 6, and each first connecting block 21 has an opening slot 18 at its bottom. A connecting rod 17 is rotatably connected inside each opening slot 18. A third lead screw 12 is rotatably connected between the worktable 5 and the support base 23. A threaded sleeve 19 is fitted on the side of the third lead screw 12, and a fixing plate 20 is installed at the bottom of the threaded sleeve 19. Grooves 31 are opened on both sides of the fixing plate 20. The other end of each connecting rod 17 extends into the corresponding groove 31 and is rotatably connected to the groove 31. When the workpiece is placed on the worktable 5, the operator controls the second drive motor 22 to work. The second drive motor 22 drives the third lead screw 12 to rotate, so that the threaded sleeve 19 moves up and down along the third lead screw 12. This controls the tilt angle of the connecting rod 17, so that the clamping plate 6 moves along the first through slot 10 with the first connecting block 21, clamping and fixing the workpiece to complete the limiting.

[0023] like Figure 1 and Figure 3As shown, a second through groove 28 is also provided on the top of the workbench 5. A second connecting block 27 is provided inside the second through groove 28, and a second lead screw 9 is rotatably connected to the side of one of the support plates 7. The other end of the second lead screw 9 is connected to the bottom of the workbench 5 through a fixing block. The bottom of the second connecting block 27 is fitted onto the second lead screw 9 and threadedly connected to the second lead screw 9. The top of the second connecting block 27 extends above the workbench 5, and a limiting plate 8 is connected to the top of the second connecting block 27. By rotating the second lead screw 9, the limiting plate 8 can be moved along the second through groove 28 through the second connecting block 27. The limiting plate 8 can be moved to a preset position according to the size of the sub-part. Then, the sub-part is clamped by the clamping plate 6. The sub-parts are held in place, allowing for simultaneous fixation and positioning. The width of the limiting plate 8 is smaller than the size of the sub-part, ensuring that the clamping plate 6 is not blocked by the limiting plate 8 when the sub-part is positioned, thus preventing any obstruction to the sub-part's fixation. The second guide rod 14 is internally connected to the second through slot 28, sliding through the second connecting block 27. The second guide rod 14 guides and limits the second connecting block 27, ensuring its stability during movement. The bottoms of both the limiting plate 8 and the clamping plate 6 are clearance-fitted with the top of the worktable 5, allowing for the positioning and fixation of thin-walled sub-parts during processing.

[0024] The specific implementation process of this utility model is as follows: The operator rotates the second lead screw 9, which drives the second connecting block 27 to move along the second guide rod 14, thereby adjusting the limiting plate 8 to the preset position. Then, the sub-part is placed on the workbench 5 so that one side of the sub-part contacts the side of the limiting plate 8. After that, the operator controls the second drive motor 22 to work, which drives the third lead screw 12 to rotate. The threaded sleeve 19 moves along the third lead screw 12, thereby driving the connecting rod 17 to rotate. The two connecting rods 17 will synchronously drive the two first connecting blocks 21 to move relative to each other, so that the clamping plate 6 clamps the sub-part. The sub-parts are positioned and fixed. Then, the operator controls the first drive motor 16 to work. The first drive motor 16 drives the two first lead screws 3 to rotate synchronously with the first synchronous pulley 25 and the second synchronous pulley 26. The support base 23 drives the worktable 5 to move horizontally along the first lead screws 3, so that the sub-parts on the worktable 5 move to the preset position under the processing equipment for processing. After processing, the operator controls the first drive motor 16 to reverse. Under the action of the first lead screws 3, the sub-parts can be moved out from under the processing equipment. Then, the operator takes out the processed sub-parts safely.

[0025] This solution uses the first drive motor 16 to drive the first lead screw 3 to rotate synchronously with the first synchronous pulley 25 and the second synchronous pulley 26. This allows the support base 23 and the worktable 5 to be moved out from under the processing equipment for loading and unloading. This prevents the user's hands from being injured in the event of a processing equipment malfunction, improving the usability. Furthermore, by rotating the second lead screw 9, the limiting plate 8 can initially limit the sub-parts on the worktable 5. Then, the second drive motor 22, under the action of the third lead screw 12, threaded sleeve 19, connecting rod 17, and first connecting block 21, can synchronously drive the two clamping plates 6 to move relative to each other, providing secondary limiting and fixing of the sub-parts. While limiting, the sub-parts can also be positioned, improving the usability.

[0026] The above descriptions are merely embodiments of this utility model, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of this utility model, and these should also be considered within the scope of protection of this utility model. These modifications will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application shall be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. A limiting tool for processing a sub-component of a shield assembly of an ion implanter, comprising a mounting plate, characterized in that: The bottom of the mounting plate is fixed on the machining device, and the top of the mounting plate is connected with the support seat through the adjusting mechanism, the adjusting mechanism comprises two fixed plates fixed on the top of the mounting plate at both ends, two first lead screws are rotationally connected between the two fixed plates, the bottom of the support seat is threadedly connected with the first lead screws through the strip-shaped connecting plates, a box is installed on the side of one of the fixed plates, one end of each of the first lead screws extends into the box, and the end of each of the first lead screws is connected with a second synchronous wheel, a rotating shaft is rotationally connected in the box, a first synchronous wheel is installed on the side of the rotating shaft, the first synchronous wheel is connected with the two second synchronous wheels through a synchronous belt, and one end of the rotating shaft is connected with a first driving motor, the first driving motor is fixed on the side of the box, two support plates are vertically installed on the top of the support seat, a workbench is connected with the top of the two support plates, a clamping mechanism is arranged on the top of the workbench, the clamping mechanism comprises two first through grooves symmetrically formed in the top of the workbench, a first connecting block is arranged in the first through groove, the first connecting block extends out of the first through groove at both ends, a clamping plate is installed on the top of the first connecting block, and an open groove is formed in the bottom of the first connecting block, a connecting rod is rotationally connected in the open groove, a third lead screw is rotationally connected between the workbench and the support seat, a threaded sleeve is sleeved on the side of the third lead screw, a fixed disc is installed on the bottom of the threaded sleeve, recesses are formed in the two sides of the fixed disc, and the other end of each of the connecting rods extends into the corresponding recess and is rotationally connected with the recess.

2. The limiting jig for processing the sub-component of the shielding plate assembly of the ion implanter according to claim 1, wherein: Symmetrical guide rails are arranged between the two fixed plates, the bottom of each of the guide rails is fixed on the top of the mounting plate, and the bottom of each of the strip-shaped connecting plates is slidably connected with the guide rail through a sliding block.

3. The limiting jig for processing the sub-component of the shielding plate assembly of the ion implanter according to claim 1, wherein: A first guide rod is installed in each of the first through grooves, and each of the first guide rods slidably penetrates the corresponding first connecting block.

4. The limiting jig for processing the sub-component of the shielding plate assembly of the ion implanter according to claim 1, wherein: A second through groove is formed in the top of the workbench, a second connecting block is arranged in the second through groove, a second lead screw is rotationally connected on the side of one of the support plates, the other end of the second lead screw is connected with the bottom of the workbench through a fixed block, the bottom of the second connecting block is sleeved on the second lead screw and is threadedly connected with the second lead screw, the top of the second connecting block extends above the workbench, and the top of the second connecting block is connected with a limiting plate.

5. The limiting jig for processing the sub-component of the shielding plate assembly of the ion implanter according to claim 4, wherein: A second guide rod is connected in the second through groove and slidably penetrates the second connecting block.

6. The limiting jig for processing the sub-component of the shielding plate assembly of the ion implanter according to claim 4, wherein: The width of the limiting plate is smaller than the size of the sub-part.

7. The limiting jig for processing the sub-component of the shielding plate assembly of the ion implanter according to claim 4, wherein: The bottom of the limiting plate and the clamping plate are gap-fitted with the top of the workbench.

Images