Rotating stand conveying and reversing mechanism in vacuum chamber

Abstract

The utility model discloses a rotating stand transmission and reversing mechanism in a vacuum chamber, which comprises a fixed seat, a rotating plate, a rotating motor, a conveying motor and two sets of transmission wheel sets, the rotating plate is rotatably arranged on the fixed seat, preformed holes for mounting a lifting component are arranged between the fixed seat and the rotating plate, the rotating motor is positioned below the rotating plate, and the conveying motor is positioned below the rotating plate. The rotating motor drives the rotating plate to rotate, the two transmission wheel sets are arranged on the two sides of the upper face of the rotating plate, each transmission wheel set comprises at least two transmission wheels located on the same conveying path, the transmission wheels of the transmission wheel sets are connected through a chain wheel assembly, the conveying motor is installed on the upper face of the rotating plate, and the transmission wheels are driven by the conveying motor to rotate. The conveying device can be mounted in a cavity of the multi-cavity vacuum coating machine in a matched manner, and can be used for conveying the rotating stand and reversing the conveying direction at the same time.

Description

Technical Field

[0001] This utility model relates to the field of multi-chamber vacuum coating technology, specifically to a rotating frame transmission and reversing mechanism inside a vacuum chamber. Background Technology

[0002] A multi-chamber vacuum coating machine refers to a coating machine consisting of two or more vacuum chambers connected in series. The workpiece is mounted on a rotating frame, which needs to automatically move between different chambers. When it moves to the chamber for the coating process, the rotating head on the lifting assembly is positioned below the rotating frame to lift it up, so that the top of the rotating frame is connected to the rotating assembly at the top of the chamber. Then, the rotating assembly drives the rotating frame to rotate, so as to achieve uniform coating.

[0003] In the layout of the chambers of a multi-chamber vacuum coating machine, multiple consecutive chambers may not be on the same straight line but need to turn. At this time, the mechanism in the chamber located at the turning point needs to be responsible for conveying the rotating frame while also changing the conveying direction. This requires further improvement of the mechanism in the chamber. Therefore, this utility model is designed as a rotating frame transmission and reversing mechanism in a vacuum chamber. Utility Model Content

[0004] The purpose of this invention is to provide a rotating frame transmission and reversing mechanism within a vacuum chamber.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] A rotating frame transmission and reversing mechanism for a vacuum chamber, characterized in that it includes a fixed base, a rotating plate, a rotary motor, a conveying motor, and two sets of transmission wheel sets. The rotating plate is rotatably mounted on top of the fixed base. A reserved hole for installing a lifting component is provided between the fixed base and the rotating plate. The rotary motor is located below the rotating plate and drives the rotating plate to rotate. The two sets of transmission wheel sets are arranged on both sides above the rotating plate. Each transmission wheel set includes at least two transmission wheels located on the same conveying path. The transmission wheels of each transmission wheel set are connected to each other through a sprocket assembly. The conveying motor is mounted on top of the rotating plate, and the transmission wheels are driven to rotate by the conveying motor.

[0007] A further technical solution of this utility model is: a sealed box is provided on the rotating plate, and the conveying motor is located inside the sealed box.

[0008] A further technical solution of this utility model is as follows: a driven gear is provided below the rotating plate, the center of the driven gear coincides with the center of the rotating plate, a rotating motor is installed vertically upward, and a driving gear is connected to the output shaft of the rotating motor, and the driving gear meshes with the driven gear.

[0009] A further technical solution of this utility model is: the rotary motor is installed outside the chamber via a motor mounting bracket.

[0010] A further technical solution of this utility model is as follows: each transmission wheel of the transmission wheel set is provided with a wheel seat, the wheel seat is fixedly installed on the top of the rotating plate, and the transmission wheel is rotatably installed on the wheel seat through the driven shaft.

[0011] A further technical solution of this utility model is as follows: the sprocket assembly includes a sprocket mounted on the driven shaft and a chain connecting the sprocket. The driven shaft at one end of the two sets of transmission wheel sets is connected through a drive shaft. The output shaft of the transmission motor is connected to the driven shaft at one end of the drive shaft.

[0012] A further technical solution of this utility model is as follows: a first sensor and a second sensor are provided on the top of the rotating plate, and the first sensor and the second sensor are respectively located at the input end and the output end of the conveying path of the rotating frame.

[0013] A further technical solution of this utility model is: the periphery of the transmission wheel is provided with a guide groove for cooperating with the guide rail at the bottom of the rotating frame.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The rotating frame transmission and reversing mechanism of this utility model can be installed in the chamber of a multi-chamber vacuum coating machine through the reserved hole in the middle. It can transport the rotating frame through the transmission wheel set, and at the same time, it can rotate and reverse the transmission wheel set and the rotating frame on it together through the rotation of the rotating plate.

[0016] 2. This utility model further places the conveying motor in a sealed box, thereby isolating the conveying motor from the vacuum environment inside the chamber and solving the problem of easy sparking when the motor is running in a vacuum environment. Attached Figure Description

[0017] Figure 1 This is a top view schematic diagram of the rotating frame transmission and reversing mechanism according to an embodiment of the present utility model;

[0018] Figure 2 This is a side view schematic diagram of the rotating frame transmission and reversing mechanism according to an embodiment of the present utility model;

[0019] Figure 3 This is a bottom view of the rotating frame transmission and reversing mechanism according to an embodiment of the present utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the transfer wheel and the rotating frame cooperating in the rotating frame transmission and reversing mechanism of this utility model embodiment;

[0021] Figure 5This is a schematic diagram of the structure of this utility model when it is applied in a four-chamber vacuum coating machine.

[0022] Meaning of the labels in the attached diagram:

[0023] 1-Rotating plate; 1.1-Pre-drilled hole; 2-Transmission wheel; 2.1-Guide groove; 3-Chain; 4-Driven shaft; 5-Wheel seat; 6-First sensor; 7-Driven gear; 8-Sealed housing; 9-Second sensor; 10-Drive shaft; 11-Sprocket; 12-Conveyor motor; 13-Fixed seat; 14-Rotating motor; 15-Motor mounting bracket; 16-Shaft connector; 17-Magnetic fluid sealing device; 18-Bottom of chamber; 19-Drive gear; 20-Bearing hub; 21-Rotating frame; 22-Guide rail; 23-Pre-treatment chamber; 24-First optical coating process chamber; 25-Second optical coating process chamber; 26-Post-treatment chamber; 27-Lifting assembly. Detailed Implementation

[0024] The present invention will be further described below with reference to embodiments.

[0025] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If "first" or "second" is used in the description, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0027] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0028] Example:

[0029] like Figures 1 to 3 The diagram shows the rotating frame transmission and reversing mechanism inside the vacuum chamber of this embodiment, which includes a fixed base 13, a rotating plate 1, a rotating motor 14, a conveying motor 12, and two sets of transmission wheel sets.

[0030] The fixed seat 13 is used to fix the bottom 18 of the chamber. The rotating plate 1 is in the shape of a disc and is rotatably mounted on the fixed seat 13 via a conventional bearing. The specific structure is as follows: the outer hub 20 of the bearing is fixedly connected to the bottom of the rotating plate 1, and the inner hub of the bearing is fixedly connected to the top of the fixed seat 13.

[0031] A reserved hole 1.1 for installing the lifting assembly 27 is provided between the fixed base 13 and the rotating plate 1, so that the rotating frame transmission and reversing mechanism can be installed in the chamber of the multi-chamber vacuum coating machine without affecting the lifting movement of the lifting assembly 27 in the chamber itself.

[0032] The rotary motor 14 is mounted outside the bottom 18 of the chamber via a motor mounting bracket 15, located below the rotating plate. This means the rotary motor 14 is positioned outside the chamber and will not be in a vacuum environment during operation. The upper end of the motor mounting bracket 15 is fixedly connected to the bottom 18 of the chamber with bolts, ensuring the rotary motor 14 is vertically mounted. A conventional magnetic fluid sealing device 17 is connected to the bottom 18 of the chamber. The output shaft of the rotary motor 14 is connected to the lower end of the intermediate shaft of the magnetic fluid sealing device 17 via a shaft connector 16. A drive gear 19 is connected to the upper end of the intermediate shaft of the magnetic fluid sealing device 17, thus connecting the drive gear 19 to the output shaft of the rotary motor 14. The rotary motor 14 drives the drive gear 19 to rotate, achieving a seal simultaneously.

[0033] A driven gear 7 is fixedly connected to the outer hub 20 of the bearing. The driven gear 7 is a quarter-turn gear. The center of the driven gear 7 coincides with the center of the rotating plate 1. The driving gear 7 meshes with the driven gear 7, so that the rotating plate 1 can be driven to rotate by the rotary motor 14.

[0034] Two sets of transmission wheel assemblies are arranged on both sides of the rotating plate. Each set includes three transmission wheels 2 located on the same conveying path. The conveying paths of the two sets are parallel, and the transmission wheels 2 of each set are connected by a sprocket assembly. Specifically, each transmission wheel 2 in the transmission wheel set has a wheel seat 5, which is fixedly installed on the rotating plate 1. The transmission wheel 2 is rotatably mounted on the wheel seat 5 via a driven shaft 4. The sprocket assembly includes a chain 3 and sprockets 11 mounted on the driven shaft 4. Sprockets 11 are located at both ends of the driven shaft 4 in the middle, and the chain 3 connects the sprockets 11 on adjacent driven shafts 4.

[0035] In this embodiment, a sealed housing 8 is provided on the rotating plate 1, and the conveying motor 12 is located inside the sealed housing 8, thereby isolating the conveying motor 12 from the vacuum environment inside the chamber and solving the problem that the motor is prone to sparking when running in a vacuum environment.

[0036] One end of each of the two sets of transmission wheel sets has a driven shaft 4 connected to a drive shaft 10. The conveyor motor 12 and the drive shaft 10 are located at the same end of the rotating plate 1. The conveyor motor 12 is connected to the driven shaft 4 at one end of the drive shaft 10, thus driving the transmission wheel 2 to rotate. The rotational sealing connection between the shaft and the sealing housing 8 can be achieved using a conventional magnetohydrodynamic sealing device or other conventional sealing structures.

[0037] In this embodiment, the transmission wheel 2 has a guide groove 2.1 around its periphery, which is used to cooperate with the guide rail 22 at the bottom of the rotating frame 21. Figure 4 As shown, when the conveyor frame 21 is being transported, the bottom of the guide rail 22 will be embedded in the guide groove 2.1.

[0038] In this embodiment, a first sensor 6 and a second sensor 9 are provided on the rotating plate 1. The first sensor 6 and the second sensor 9 are located at the input end and output end of the conveying path of the rotating frame, respectively. During use, when the rotating frame 21 is conveyed towards the rotating frame transmission and reversing mechanism, and the front end of the guide rail 22 of the rotating frame 21 triggers the first sensor 6, the conveying motor 12 will be started to connect the rotating frame 21. When the rotating frame 21 is fully inserted into the rotating frame transmission and reversing mechanism, the front end of the guide rail 22 of the rotating frame 21 will trigger the second sensor 9, at which point the conveying motor 12 will stop. When it is necessary to output the rotating frame 21, the conveying motor 12 will start. After the rotating frame 21 has been fully conveyed out, the guide rail 22 of the rotating frame 21 will disengage from the second sensor 9. At this time, the second sensor 9 will not detect a signal, indicating that the rotating frame 21 is no longer on the rotating frame transmission and reversing mechanism.

[0039] like Figure 5The diagram shows a schematic of the application of the rotating frame transfer and reversing mechanism of this embodiment in a four-chamber vacuum coating machine (the slide valves between the chambers are not shown in the diagram; slide valves are conventional devices used to isolate the internal space of a chamber from other chambers during operation, allowing for vacuuming of the working chamber). The four-chamber vacuum coating machine includes a pre-processing chamber 23, a first optical coating process chamber 24, a second optical coating process chamber 25, and a post-processing chamber 26 connected in sequence. The pre-processing chamber 23 and the post-processing chamber 26 are located on the same side and are generally U-shaped. The arrows in the diagram indicate the flow direction of the rotating frame 21. The rotating frame 21 needs to be rotated 90° within the first optical coating process chamber 24 and the second optical coating process chamber 25. The rotating frame transfer and reversing mechanism of this embodiment is installed at the bottom of the first optical coating process chamber 24 and the second optical coating process chamber 25. During operation, when the rotating frame 21 is conveyed to the first optical coating process cavity 24 to complete the first coating process, the rotary motor 14 of the rotating frame transmission and reversing mechanism in the first optical coating process cavity 24 will be started, driving the rotating plate 1 and the rotating frame 21 on it to rotate together by 90°. Then the conveying motor 12 is started to drive the transmission wheel 2 to rotate, so as to convey the rotating frame 21 to the second optical coating process cavity 25. After the second coating process is completed in the second optical coating process cavity 25, the rotating frame 21 also needs to be rotated by 90° through the rotating frame transmission and reversing mechanism of the second optical coating process cavity 25 before it can be conveyed to the post-processing cavity 26.

[0040] The above embodiments of this utility model are not intended to limit the scope of protection of this utility model. The implementation of this utility model is not limited thereto. All other modifications, substitutions or alterations made to the above structure of this utility model based on the above content of this utility model and in accordance with the common technical knowledge and conventional means in the field, without departing from the basic technical idea of ​​this utility model, shall fall within the scope of protection of this utility model.

Claims

1. A turret transfer and commutation mechanism within a vacuum chamber, characterized by: The device comprises a fixed base, a rotating plate, a rotating motor, a conveying motor and two sets of transmission wheel groups, the rotating plate is arranged on the upper surface of the fixed base, a reserved hole for installing a lifting assembly is arranged in the middle of the fixed base and the rotating plate, the rotating motor is arranged below the rotating plate and drives the rotating plate to rotate, two sets of the transmission wheel groups are arranged on both sides of the upper surface of the rotating plate, each of the transmission wheel groups comprises at least two transmission wheels arranged on the same conveying path, the transmission wheels of the transmission wheel groups are connected through a sprocket assembly, the conveying motor is arranged on the upper surface of the rotating plate, and the transmission wheels are driven to rotate by the conveying motor.

2. The turret translation and commutation mechanism within a vacuum chamber of claim 1, wherein: A sealed box is arranged on the rotating plate, and the conveying motor is arranged in the sealed box.

3. The turn-pod transport and commutation mechanism within a vacuum chamber of claim 1, wherein: A driven gear is arranged below the rotating plate, the center of the driven gear coincides with the center of the rotating plate, the rotating motor is vertically upwardly arranged, a driving gear is connected to the output shaft of the rotating motor, and the driving gear is engaged with the driven gear.

4. The turn-pod transport and commutation mechanism within a vacuum chamber of claim 3, wherein: The rotating motor is arranged outside the cavity through a motor mounting frame.

5. The swing transfer and indexing mechanism within a vacuum chamber of claim 1, wherein: Each of the transmission wheel groups is provided with a wheel seat corresponding to each transmission wheel, the wheel seat is fixedly arranged on the upper surface of the rotating plate, and the transmission wheel is rotatably arranged on the wheel seat through a driven shaft.

6. The turn-pod transport and commutation mechanism within a vacuum chamber of claim 5, wherein: The sprocket assembly comprises a sprocket arranged on the driven shaft and a chain connected to the sprocket, one end of the driven shaft of one of the two sets of transmission wheel groups is connected through a driving shaft, and the output shaft of the conveying motor is connected to the driven shaft at one end of the driving shaft.

7. The swing transfer and indexing mechanism within a vacuum chamber of claim 1, wherein: A first sensor and a second sensor are arranged on the upper surface of the rotating plate, and the first sensor and the second sensor are respectively arranged at the input end and the output end of the conveying path of the rotating frame.

8. The turn-pod transport and commutation mechanism within a vacuum chamber of claim 1, wherein: The periphery of the transmission wheel is provided with a guide groove for cooperating with the guide rail at the bottom of the rotating frame.

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