Palladium alloy radio frequency probe
By using a palladium alloy tip elastic component and a dielectric-filled coaxial structure, the versatility and compatibility issues of RF probes are solved, improving test accuracy and power capacity, extending service life, and reducing costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-01
- Publication Date
- 2026-04-03
AI Technical Summary
Existing RF probes suffer from problems such as poor consistency of tip elastomers, poor compatibility with different metal types of pads, high usage costs, and poor maintainability when facing the measurement requirements of new types of chips, resulting in complex testing systems and reduced accuracy.
A palladium alloy RF probe with a coaxial structure is formed by using a palladium alloy tip elastic component, optimizing the tip shape with electromagnetic simulation software, filling a dielectric layer between the signal tip elastic component and the ground tip elastic component, and adding an absorbing layer and a heat dissipation component.
It improves testing accuracy and power capacity, extends service life, solves versatility and compatibility issues, reduces costs, and improves electromagnetic field resonance problems.
Smart Images
Figure CN224081698U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of radio frequency probe technology, and in particular to a palladium alloy radio frequency probe. Background Technology
[0002] With the rapid development of semiconductor technology and the continuous emergence of new types of chips, current RF probes are insufficient to meet various measurement requirements. Frequent replacement of RF probes leads to frequent calibration of the test system, complicating system operation and degrading measurement accuracy. On-chip RF testing requires specialized RF probes to measure the true characteristics of RF devices at the wafer level. However, current RF probe tip elastomers suffer from problems such as poor consistency, poor compatibility with different metal types of pads, high cost, and poor maintainability. Utility Model Content
[0003] To address one or more technical problems existing in the prior art, this utility model provides a palladium alloy radio frequency probe, which offers high precision, strong versatility, low cost, and easy maintenance.
[0004] In a first aspect, the present invention provides a palladium alloy radio frequency probe, comprising: a probe body and a tip elastic component; the tip elastic component is disposed at one end of the probe body; the probe body contains a coaxial first conductor core and a second conductor core, and the first conductor core is located inside the second conductor core; the tip elastic component is made of palladium alloy.
[0005] The needle tip elastic component includes a signal needle tip elastic component and a grounding needle tip elastic component arranged in parallel; the signal needle tip elastic component is connected to the first conductor core, and the grounding needle tip elastic component is connected to the second conductor core; a gap band is provided between the signal needle tip elastic component and the grounding needle tip elastic component;
[0006] The non-tip portion of the signal tip elastic component is covered by a shielding layer; the shielding layer is connected to the grounding tip elastic component, and a dielectric layer is filled between the signal tip elastic component and the shielding layer.
[0007] Preferably, the leading edge angle of the needle tip portion of the needle tip elastic component is 60°±1°, and the trailing edge angle is 30°±1°.
[0008] Preferably, the width of the needle tip of the needle tip elastic component is 15μm to 50μm.
[0009] Preferably, the needle tip elastic component includes GSG type, GS / SG type, GSSG type and GGSSG type.
[0010] Preferably, the gap band gives a characteristic impedance of 50Ω.
[0011] Preferably, the dielectric constant of the dielectric layer is 3.4 to 3.5.
[0012] Preferably, it further includes: a probe holder, an RF connector, and an absorbing layer;
[0013] The probe holder includes a front end portion and a rear end portion with an angled through hole;
[0014] The radio frequency connector is placed in the angled through hole, and the radio frequency connector is connected to the other end of the probe body;
[0015] The lower end of the probe holder is made of ferrite absorbing ceramic;
[0016] The absorbing layer covers the outer surface of the probe body.
[0017] Preferably, it further includes: a heat dissipation component; a first side of the heat dissipation component is connected to the absorbing layer, and a second side adjacent to the first side is connected to the probe bracket.
[0018] Preferably, the heat dissipation component is a flat plate type or a corrugated plate type; the heat dissipation component is triangular, fan-shaped, parallelogram-shaped or trapezoidal.
[0019] Preferably, the heat dissipation component is made of aluminum alloy or gold-plated aluminum alloy.
[0020] Preferably, the thickness of the heat dissipation component is less than the diameter of the probe body, and the highest point of the heat dissipation component is lower than the highest point of the front end of the probe bracket.
[0021] Compared with the prior art, the present invention has at least the following advantages:
[0022] This invention provides a palladium alloy RF probe with a palladium alloy tip elastic component. This significantly reduces the resistivity, increases hardness and strength, and provides good surface lubrication, oxidation resistance, and corrosion resistance. It solves the problem of poor versatility of commonly used beryllium copper, (rhenium) tungsten, and nickel alloys as RF probe tip elastomers, exhibiting excellent universal compatibility with different pads such as gold, aluminum, copper, and nickel-palladium-gold. Furthermore, due to the high hardness, high conductivity, high wear resistance, and high corrosion resistance of the palladium alloy RF probe, optimizing the tip shape with electromagnetic simulation software can effectively improve testing accuracy, increase power capacity, and extend service life. In addition, this invention uses a coaxial cable to wrap the non-tip portion of the signal tip elastic component and fills the space between them with a dielectric layer, further effectively solving the resonance problem caused by insufficient electromagnetic field confinement due to excessively long exposed signal lines in traditional air coplanar probes.
[0023] The palladium alloy RF probe provided by this invention improves the probe's RF performance by coating the probe body with an absorbing layer and using ferrite absorbing ceramic at the lower end of the probe holder. Furthermore, for high-power, high-current probes, a heat dissipation component is added to the micro-coaxial cable and connected to the probe holder and absorbing layer to enhance heat dissipation and further increase power capacity. Attached Figure Description
[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0025] Figure 1 This is a schematic diagram of the structure of a palladium alloy radio frequency probe provided by this utility model;
[0026] Figure 2 This is a schematic diagram of the structure of a needle tip elastic component provided by this utility model;
[0027] Figure 3 This is a side cross-sectional view of the needle tip portion of a needle tip elastic component provided by this utility model;
[0028] Figure 4 This is a schematic diagram of another palladium alloy radio frequency probe provided by this utility model;
[0029] Reference numerals: 10-Probe body; 20-Tip elastic component; 201-Signal tip elastic component; 202-Ground tip elastic component; 203-Shielding layer; 30-Probe bracket; 40-RF connector; 50-Absorbing layer; 60-Heat dissipation component; 70-Limiting bolt. Detailed Implementation
[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.
[0031] like Figure 1 and Figure 2As shown, this utility model provides a palladium alloy radio frequency probe, which includes: a probe body 10 and a tip elastic component 20; the tip elastic component 20 is disposed at one end of the probe body 10; the probe body 10 has a coaxial first conductor core and a second conductor core, and the first conductor core is located inside the second conductor core; the tip elastic component 20 is made of palladium alloy.
[0032] The needle tip elastic component 20 includes a signal needle tip elastic component 201 and a grounding needle tip elastic component 202 arranged in parallel; the signal needle tip elastic component 201 is connected to a first conductor core, and the grounding needle tip elastic component 202 is connected to a second conductor core; a gap band is provided between the signal needle tip elastic component 201 and the grounding needle tip elastic component 202.
[0033] The non-tip portion of the signal tip elastic component 201 is covered by a shielding layer 203; the shielding layer 203 is connected to the grounding tip elastic component 202, and a dielectric layer is filled between the signal tip elastic component 201 and the shielding layer 203.
[0034] The palladium alloy RF probe provided by this invention uses a palladium alloy to create the tip elastic component, resulting in a significantly reduced resistivity, significantly increased hardness and strength, good surface lubricity, and resistance to oxidation and corrosion. This solves the problem of poor versatility of commonly used beryllium copper, (rhenium) tungsten, and nickel alloys as RF probe tip elastomers, and exhibits excellent universal compatibility with different pads such as gold, aluminum, copper, and nickel-palladium-gold. Furthermore, due to the high hardness, high conductivity, high wear resistance, and high corrosion resistance of the palladium alloy RF probe, optimizing the tip shape with electromagnetic simulation software can effectively improve testing accuracy, increase power capacity, and extend service life.
[0035] It should be noted that the tip elastic component can be fixedly installed at one end of the probe body through welding or other methods, or it can be installed at one end of the probe body through detachable connections. The signal tip elastic component includes both the non-tip portion and the tip portion.
[0036] In some preferred embodiments, the needle tip elastic component 20 includes GSG type, GS / SG type, GSSG type and GGSSG type.
[0037] It should be noted that the palladium alloy is preferably a palladium-copper-silver ternary alloy. The probe body is a radio frequency semi-rigid cable, which consists of a first conductor core, an insulation layer, a second conductor core, and a sheath from the inside out. The first conductor core is used to transmit signals; the second conductor core is used to shield external interference signals. Figure 1 The palladium alloy radio frequency probe shown is of the GSG type.
[0038] like Figure 2The tip elastic components shown, taking the GSG type RF probe as an example, have the signal tip elastic component 201 and the ground tip elastic component 202 arranged in parallel. The distance d1 between the central axes of adjacent tips is mainly controlled for different pad spacings.
[0039] In some preferred embodiments, the gap band makes the characteristic impedance 50Ω. Specifically, as shown... Figure 2 As shown, the distance d3 between the signal needle tip elastic component 201 and the grounding needle tip elastic component 202 is obtained through simulation, that is, the width of the gap band, so as to ensure that the characteristic impedance is close to 50Ω by precisely controlling d3.
[0040] In some preferred embodiments, such as Figure 3 As shown, the leading edge angle φ of the needle tip portion of the needle tip elastic component 20 is 60°±1° (e.g., it can be 59°, 60° or 61°), and the trailing edge angle θ is 30°±1° (e.g., it can be 29°, 30° or 31°).
[0041] In this invention, since all chip pads are windowed for contact testing, but the pad edges have passivation layer steps, the leading edge angle of the needle tip is designed to be 60°±1° and the trailing edge angle is 30°±1° to avoid the passivation layer steps.
[0042] In some preferred embodiments, the width of the needle tip of the needle tip elastic component is 15μm to 50μm (e.g., it can be 15μm, 16μm, 18μm, 20μm, 22μm, 25μm, 28μm, 30μm, 32μm, 35μm, 36μm, 38μm, 40μm, 42μm, 45μm, 48μm or 50μm).
[0043] In this invention, in order to further avoid the passivation layer step, the planar topography of the tip is designed to be 15μm×15μm for small pad applications, that is, the width d2 of the tip is 15μm; while for high power and high current applications, the planar topography of the tip is designed to be 50μm×20μm, that is, the width d2 of the tip is 50μm.
[0044] In some preferred embodiments, the dielectric constant of the dielectric layer is 3.4 to 3.5 (e.g., it can be 3.4 or 3.5).
[0045] This invention employs a coaxial cable with a shielding layer to wrap the non-tip portion of the signal tip elastic component, and fills the space between the two with a dielectric layer having a low dielectric constant. This effectively solves the resonance problem caused by insufficient electromagnetic field confinement due to excessively long exposed signal lines in traditional air coplanar probes.
[0046] In some preferred embodiments, such as Figure 4As shown, the palladium alloy RF probe also includes: a probe holder 30, an RF connector 40, and an absorbing layer 50;
[0047] The probe holder 30 includes a front end portion and a rear end portion having an angled through hole;
[0048] The RF connector 40 is placed in the angled through hole, and the RF connector 40 is connected to the other end of the probe body 10.
[0049] The lower end of the probe holder 30 is made of ferrite absorbing ceramic;
[0050] The absorbing layer 50 covers the outer surface of the probe body 10.
[0051] It should be noted that the absorbing layer 50 may also cover only the part of the probe body that exposes the second conductor core.
[0052] In this invention, by covering the probe body with an absorbing layer and using ferrite absorbing ceramic at the lower end of the probe support, the radio frequency performance of the probe is improved.
[0053] In some preferred embodiments, such as Figure 4 As shown, the palladium alloy radio frequency probe also includes a heat dissipation component 60; the first side of the heat dissipation component 60 is connected to the absorbing layer 50, and the second side adjacent to the first side is connected to the probe holder 30.
[0054] In this invention, for high-power, high-current probes, a heat dissipation component can be added to the micro coaxial line, and the heat dissipation component can be connected to the probe bracket and the absorbing layer to improve heat dissipation capacity and further increase power capacity.
[0055] In some preferred embodiments, the heat dissipation component 60 is a flat plate type or a corrugated plate type; the heat dissipation component is triangular, fan-shaped, parallelogram-shaped or trapezoidal.
[0056] In some preferred embodiments, the heat dissipation component 60 is made of aluminum alloy or gold-plated aluminum alloy.
[0057] In some preferred embodiments, the thickness of the heat dissipation component is less than the diameter of the probe body, and the highest point of the heat dissipation component is lower than the highest point of the front end portion of the probe holder.
[0058] It should be noted that the size of the heat dissipation components should be such that they do not obstruct the line of sight; no specific limit is set here.
[0059] In some preferred embodiments, such as Figure 4 As shown, the probe holder 30 is also provided with a limiting bolt 70 for further fixing the RF connector.
[0060] It should be noted that in this article, relational terms such as first and second are used only to distinguish one entity from another, and do not necessarily require or imply any such actual relationship or order between these entities.
[0061] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.
Claims
1. A palladium alloy radio frequency probe, characterized by, The probe comprises: a probe body and a needle tip elastic assembly; the needle tip elastic assembly is arranged at one end of the probe body; a first conductor core and a second conductor core are coaxially arranged in the probe body, and the first conductor core is located in the second conductor core; the needle tip elastic assembly is made of palladium alloy; the needle tip elastic assembly comprises a signal needle tip elastic assembly and a ground needle tip elastic assembly arranged in parallel; the signal needle tip elastic assembly is connected with the first conductor core, and the ground needle tip elastic assembly is connected with the second conductor core; a gap band is arranged between the signal needle tip elastic assembly and the ground needle tip elastic assembly; a non-needle tip part of the signal needle tip elastic assembly is covered by a shielding layer; the shielding layer is connected with the ground needle tip elastic assembly, and a dielectric layer is filled between the signal needle tip elastic assembly and the shielding layer.
2. The palladium alloy RF probe of claim 1, wherein: a front edge angle of a needle tip part of the needle tip elastic assembly is 60°±1°, and a back edge angle is 30°±1°; and / or a width of the needle tip of the needle tip elastic assembly is 15μm-50μm.
3. The palladium alloy RF probe of claim 1, wherein: the needle tip elastic assembly comprises GSG type, GS / SG type, GSSG type and GSGSG type.
4. The palladium alloy RF probe of claim 1, wherein: the gap band makes the characteristic impedance 50Ω.
5. The palladium alloy RF probe of claim 1, wherein: a dielectric constant of the dielectric layer is 3.4-3.
5.
6. The palladium alloy RF probe according to any one of claims 1 to 5, characterized in that, The probe further comprises: a probe support, a radio frequency connector and an absorbing layer; the probe support comprises a front end part and a rear end part provided with an oblique insertion through hole; the radio frequency connector is arranged in the oblique insertion through hole, and the radio frequency connector is connected with the other end of the probe body; a lower end of the probe support is made of ferrite absorbing ceramic; the absorbing layer is wrapped on an outer surface of the probe body.
7. The palladium alloy RF probe of claim 6, wherein, The probe further comprises: a heat dissipation assembly; a first side of the heat dissipation assembly is connected on the absorbing layer, and a second side adjacent to the first side is connected on the probe support.
8. The palladium alloy RF probe of claim 7, wherein, the heat dissipation assembly is in a flat sheet type or a wave-shaped sheet type; the heat dissipation assembly is in a triangular shape, a fan shape, a parallelogram or a trapezoidal shape.
9. The palladium alloy RF probe of claim 7, wherein, the heat dissipation assembly is made of aluminum alloy or gold-plated aluminum alloy.
10. The palladium alloy RF probe of claim 7, wherein, a thickness of the heat dissipation assembly is smaller than a diameter of the probe body, and a highest point position of the heat dissipation assembly is lower than a highest point position of the front end part of the probe support.