Performance detection system for electro-pneumatic parts

Abstract

The utility model provides a performance detection system for an electric pneumatic part, which comprises a control module for controlling the action of the detection system and a sampling display module for collecting and displaying the action condition of the electric pneumatic part, and is characterized in that the control module is electrically connected with the electric pneumatic part through a pneumatic module so as to control the action of the electric pneumatic part; the control module comprises a control end, an electric control circuit and a pneumatic control circuit, the control end comprises a plurality of I / O pins for outputting pulse signals, and the electric control circuit comprises an optical coupler B3 electrically connected with a tested electric pneumatic part; the pneumatic control circuit comprises an optical coupler B1 and an optical coupler B2 which are electrically connected with the pneumatic module. According to the utility model, any pneumatic or electric control part can be controlled to act, and the operation control of the electric pneumatic part is realized so as to detect the performance.

Description

Technical Field

[0001] This utility model relates to the field of performance testing technology for electric and hydraulic components, and specifically to a performance testing system for electric and hydraulic components. Background Technology

[0002] In the field of modern semiconductor manufacturing, large-scale wafer fabrication equipment plays a crucial role. This type of equipment integrates complex mechanical, electrical, and pneumatic systems, containing several electric components, electro-pneumatic parts, and electrical control components that perform specific actions. These components work together to complete the process of wafer fabrication from its initial state to the final product in an assembly line manner.

[0003] Wafer fabrication processes are extremely precise; even the slightest deviation can lead to product quality issues or even scrap. The accuracy and speed of moving parts directly impact the success or failure of wafer fabrication. For example, in the photolithography stage, insufficient precision in the movement of the motorized platform supporting the wafer, even at the micrometer level, can cause the photolithographic pattern to deviate from the design, making subsequent etching and doping processes difficult to execute accurately, ultimately resulting in wafer breakage. Similarly, in the thin film deposition stage, unstable operating speeds and fluctuations in gas flow and pressure from the pneumatically driven gas nozzles can lead to uneven film thickness, affecting the chip's electrical performance.

[0004] To ensure stable equipment operation, performance testing of key components is crucial before each operation of large-scale wafer processing equipment. This is especially true for components driven by both electric and pneumatic systems, whose performance is affected by various factors such as mechanical wear, air pressure variations, and electrical parameter drift, making performance stability even more difficult to guarantee. Currently, the industry standard is to remove components from the equipment for individual performance testing. However, existing testing methods have significant shortcomings. On the one hand, there is a lack of a system capable of flexibly and accurately controlling the operation of electric and electro-pneumatic components according to the testing requirements of different components, resulting in a cumbersome and inefficient testing process. On the other hand, conventional testing systems struggle to simulate the complex operating conditions of components in actual processing equipment, leading to significant discrepancies between test results and actual operating conditions, thus failing to provide reliable data for the safe and stable operation of the equipment.

[0005] Given the current situation, it is imperative to develop a system capable of controlling the operation of electric and electro-hydraulic components according to demand. This system must not only be able to precisely control the operating parameters of various components, but also possess the ability to simulate actual working conditions, thereby efficiently and accurately testing the performance of various components. This will lay a solid foundation for the reliable operation of large-scale wafer processing equipment and improve the yield and production efficiency of semiconductor manufacturing. Utility Model Content

[0006] In view of this, the problem to be solved by this utility model is to provide a performance testing system for electric and hydraulic components, which can control the movement of any pneumatic or electronic control component to realize the operation control of electric and hydraulic components so as to test their performance.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a performance testing system for electric and electric components, including a control module for controlling the operation of the testing system, wherein the control module is electrically connected to the electric and electric components through a pneumatic module to control the operation of the electric and electric components, and a sampling and display module collects and displays the operation status of the electric and electric components;

[0008] The control module includes a control terminal, optocoupler B1, and optocoupler B3. The I / O pins of the control terminal are connected to the LED terminals of optocouplers B1 and B3 to control the operation of optocouplers B1 and B3. The three pins of optocouplers B1 and B3 are respectively connected to the control terminals of the pneumatic module and the electro-pneumatic component to control their operation respectively.

[0009] Furthermore, pin 1 of both optocoupler B1 and optocoupler B3 is electrically connected to the first pull-up power supply VCC1. Resistors R1, R2, R3, R4 and R5 are connected in series between pin 1 and the first pull-up power supply VCC1, respectively. Resistor R7 is connected in series between pin 2 of optocoupler B1 and the I / O pin of the control terminal. The I / O pin outputs a pulse signal.

[0010] Furthermore, the control terminal may be model DFRduino UNO r3.

[0011] Furthermore, the pneumatic module includes a pneumatic pump that provides pressure energy. The pneumatic pump is connected to the pipeline of the electric and electric components via an electromagnetic reversing valve and is used to drive the electric and electric components.

[0012] Furthermore, a pilot-operated pneumatic pressure reducing valve is provided between the electromagnetic reversing valve and the pneumatic pump to improve the stability of the pneumatic pump's air supply pressure.

[0013] Furthermore, the sampling module includes a distance sensor for acquiring the operating distance of the electric actuator components. The distance sensor is connected to an oscilloscope, which is used to display the operating distance or operating wave of the electric actuator components.

[0014] Furthermore, the power module includes a mobile power supply that provides electrical energy. The mobile power supply is electrically connected to a power transformer, which supplies power to the control module, electric and electric components, and sampling and display module.

[0015] Furthermore, a switch or fuse R6 is connected in series between the power transformer and the electric actuators to prevent damage to the electric actuators during testing.

[0016] The advantages and positive effects of this utility model are:

[0017] 1. Precise control: Through the cooperation between the control terminal and the optocoupler in the control module, the I / O port of the control terminal outputs a pulse signal with a set pulse width to control the optocoupler to conduct, so as to precisely control the action of any pneumatic or electronic control component and realize the operation control of electric and pneumatic components.

[0018] 2. Stable air supply: Both the air pump and the pilot-operated pneumatic pressure reducing valve are small components. The pilot-operated pneumatic pressure reducing valve effectively improves the stability of the air supply pressure of the air pump, which can accurately control the smooth operation of the electric and pneumatic components and improve the accuracy of detection.

[0019] 3. Real-time monitoring: The sampling and display module can collect and intuitively display the movement of electric and pneumatic components in real time, making it convenient for operators to understand the equipment's operating status in a timely manner.

[0020] 4. Safety protection: The switch or fuse R6 in the power module can protect the electrical and electric components during the test and prevent damage to the tested electrical and electric components due to abnormal conditions. Attached Figure Description

[0021] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0022] Figure 1 This is an overall structural diagram of a performance testing system for electric and hydraulic components according to this utility model;

[0023] Figure 2 This is a circuit diagram of the control terminal and several optocouplers in a performance testing system for electric and hydraulic components according to this utility model. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0026] This utility model provides a performance testing system for electric and hydraulic components, such as... Figure 1 As shown, the system includes a control module that controls the operation of the testing system. This control module is electrically connected to the tested electro-hydraulic component via a pneumatic module, providing pneumatic energy to the component and controlling the movement of its pneumatic components. The sampling and display module includes a sensor and an oscilloscope. The oscilloscope is electrically connected to the sensor; the sensor collects the movement parameters of the moving parts during operation, and the oscilloscope displays these parameters. Testing personnel determine whether the operating status of the tested electro-hydraulic component meets the requirements by observing the movement parameters displayed on the oscilloscope.

[0027] like Figure 2 As shown, the control module includes a control terminal, an electronic control circuit, and a pneumatic control circuit. The control terminal includes several I / O pins for outputting pulse signals. The electronic control circuit includes an optocoupler B3. The cathode of the diode in optocoupler B3 is connected to the first pull-up power supply VCC1, and the anode of the diode in optocoupler B3 is connected to the I / O pins of the control terminal. By controlling the pulse width of the output pulses from the I / O pins, the electronic control part of the electric actuator can be activated, or power can be supplied to the electric actuator. In one embodiment of this application, since the output voltage of the I / O pins is fixed, several resistors are connected in series between the first pull-up power supply VCC1 and the optocoupler B3 to adjust the voltage at the LED cathode of the optocoupler B3, preventing the LED cathode voltage from being too high and affecting the normal conduction of the optocoupler B3.

[0028] The collector of the transistor in optocoupler B3 is connected to the second pull-up power supply VCC2, and the emitter of the transistor in optocoupler B3 is electrically connected to the electrical and electric components under test to supply power or control their operation.

[0029] One embodiment of this application involves connecting a switch or fuse R6 in series between the second pull-up power supply VCC2 and the optocoupler B3. When the output power of the second pull-up power supply VCC2 is unstable or excessively high, the switch disconnects or the fuse R6 blows, stopping the power supply to the electronic control module and preventing damage to the module. To avoid frequent replacement of the fuse R6, a switch is typically used.

[0030] The pneumatic control circuit includes an electromagnetic reversing valve, optocoupler B1, and optocoupler B2. The circuit structure of the diode terminals (cathode and anode of the diodes) of optocouplers B1 and B2 is the same as that of optocoupler B3. The collectors of the transistors of optocouplers B1 and B2 are connected to the third pull-up power supply VDD. The emitters of the transistors of optocouplers B1 and B2 are connected to the electromagnetic reversing valve to control the commutation of the electromagnetic reversing valve.

[0031] One embodiment of this application is: a development board with the control terminal model DFRduino UNO r3 can import control programs into the control terminal according to the actual control process of the tested electric and pneumatic components to realize test control.

[0032] The pneumatic module includes a pneumatic pump that provides pressure energy. The pneumatic pump is connected to the pneumatic module's piping via a solenoid directional valve and is used to drive the pneumatic components of the tested electro-pneumatic parts. A pilot-operated pneumatic pressure reducing valve is installed between the solenoid directional valve and the pneumatic pump. The valve's operation is controlled by the output pressure of the pneumatic pump, ensuring the stability of the air pressure supplied to the solenoid directional valve and enabling accurate and stable control of the pneumatic module's operation. Both the pilot-operated pneumatic pressure reducing valve and the pneumatic pump are small devices, facilitating system transport and installation.

[0033] The sampling module includes a distance sensor for collecting the operating distance of the electric actuators and an oscilloscope for displaying the parameters. The distance sensor collects the operating distance parameters of the electric actuators under test, and the operating distance parameters are transmitted to the oscilloscope. The oscilloscope displays the operating distance parameters and the rate of change of the parameters. Based on the above data, the staff judges whether the working performance of the electric actuators under test meets the requirements.

[0034] During testing, the electro-hydraulic components under test are temporarily removed from the waterline operation equipment and tested. If the test data meets the requirements, they are reinstalled on the waterline operation equipment. If the test data does not meet the requirements, the electro-hydraulic components under test are adjusted and their performance is retested until they meet the working requirements.

[0035] The power module includes a portable power source that provides electrical energy. The portable power source is electrically connected to a power transformer, which adjusts the output voltage and current of the portable power source to power the control module, pneumatic module, and sampling display module. One embodiment of this application involves connecting several voltage regulating modules to the output of the power transformer to output electrical energy at different voltages, facilitating the matching and testing of different electro-hydraulic components under test.

[0036] The working principle and process of this utility model are as follows:

[0037] The operator writes a control program based on the test requirements and imports it into the control terminal. The control terminal, according to the program, outputs a pulse signal with a set pulse width to the corresponding I / O pin, controlling the corresponding optocoupler to conduct. The optocoupler then controls the operation of the solenoid valve, supplies power to the electro-hydraulic components under test, supplies power to the distance sensor, supplies power to the oscilloscope, and controls the operation of the motor module of the electro-hydraulic components under test. During the operation of the control program, the operator observes the oscilloscope and records the test data. Once the control program finishes running, the test is complete.

[0038] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made within the scope of this utility model should still fall within the scope of this patent.

Claims

1. A performance testing system for electric and hydraulic components, characterized in that, It includes a control module for controlling the operation of the detection system and a sampling display module for collecting and displaying the operation of the electric and pneumatic components. The control module is electrically connected to the electric and pneumatic components through a pneumatic module to control the operation of the electric and pneumatic components. The control module includes a control terminal, an electronic control circuit, and a pneumatic control circuit. The control terminal includes several I / O pins for outputting pulse signals. The electronic control circuit includes an optocoupler B3. The cathode of the diode in the optocoupler B3 is connected to a first pull-up power supply VCC1. The anode of the diode in the optocoupler B3 is connected to the I / O pins of the control terminal. The collector of the transistor in the optocoupler B3 is connected to a second pull-up power supply VCC2. The emitter of the transistor in the optocoupler B3 is electrically connected to the electro-hydraulic component under test. The pneumatic control circuit includes optocoupler B1 and optocoupler B2. The diode terminal circuit structure of optocoupler B1 and optocoupler B2 is the same as that of optocoupler B3. The collectors of the transistors of optocoupler B1 and optocoupler B2 are connected to the third pull-up power supply VDD. The emitters of the transistors of optocoupler B1 and optocoupler B2 are electrically connected to the pneumatic module.

2. The performance testing system for electric and hydraulic components according to claim 1, characterized in that, Each I / O pin is connected in series with an optocoupler B1, optocoupler B2, or optocoupler B3, and the I / O pin outputs a pulse signal.

3. The performance testing system for electric and hydraulic components according to claim 1, characterized in that, The model of the control terminal is DFRduino UNO r3.

4. The performance testing system for electric and hydraulic components according to claim 1, characterized in that, The pneumatic module includes a pneumatic pump that provides pressure energy. The pneumatic pump is connected to the pipeline of the electric and electric components via an electromagnetic reversing valve and is used to drive the electric and electric components.

5. The performance testing system for electric and hydraulic components according to claim 4, characterized in that, A pilot-operated pneumatic pressure reducing valve is installed between the electromagnetic reversing valve and the pneumatic pump to improve the stability of the pneumatic pump's air supply pressure.

6. The performance testing system for electric and hydraulic components according to claim 1, characterized in that, The sampling module includes a distance sensor for collecting the movement distance of electric and electrically driven components, and the distance sensor is electrically connected to an oscilloscope.

7. The performance testing system for electric and hydraulic components according to claim 1, characterized in that, The power module includes a mobile power supply that provides electrical energy. The mobile power supply is electrically connected to a power transformer, which supplies power to the control module, electric and electric components, and sampling and display module.

8. The performance testing system for electric and hydraulic components according to claim 1, characterized in that, A switch or fuse R6 is connected in series between the power transformer and the electric actuators.

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