Acid dripping head and acid dripping device

Abstract

The utility model relates to an acid dripping head and an acid dripping device, the acid dripping head is used for dripping acid drops to etch a metal film layer on a glass substrate, and the acid drops etch the metal layer to form a lower metal protruding corner and upper protruding corner metal located above the lower metal protruding corner. And a film layer hole is formed between the upper metal protruding corner and the lower protruding corner. The acid dripping head comprises an acid dripping pipe and a breaking assembly used for breaking the upper metal protruding corner, the acid dripping pipe is used for dripping out the acid drops, and the breaking assembly is annular and is connected with the outlet end of the acid dripping pipe. According to the acid dripping head and the acid dripping device disclosed by the utility model, the outlet end of the acid dripping pipe is connected with the annular breaking component, so that the upper metal protruding corner is broken in the acid dripping operation process of the metal film layer, and the formation of film layer holes is prevented.

Description

Technical Field

[0001] This utility model relates to the field of etching technology, and in particular to an acid dripping head and an acid dripping device. Background Technology

[0002] Currently, thin-film transistor liquid crystal displays typically require an acid-dropping process during production.

[0003] The acid-dropping process generally involves the following steps: acid drops are dispensed using an acid-dropping device and land on a metal film layer on a glass substrate, etching the metal film layer. After etching is complete, the acid drops are washed away. Subsequently, photoresist is coated onto the acid-dropped etched area.

[0004] However, during the etching process, the acid droplets are elliptical, resulting in a ">" shaped cross-section in the etched metal film. When photoresist is applied to the etched area, the ">" shaped cross-section makes it difficult for the photoresist to completely fill the recessed area. This creates voids between the metal film and the photoresist. During the photolithography process in a thin-film transistor liquid crystal display (TFT-LCD), the rapid drying stage in the vacuum drying unit can easily cause bubbling and bursting within these voids, leading to a "ring-shaped photoresist residue" defect around the acid droplet site.

[0005] Figure 1 This is a schematic diagram of an acid dispensing head in the prior art. Figure 2 This is a schematic diagram of the holes formed in the film layer after photoresist coating in the prior art, such as... Figure 1 and Figure 2 As shown, in the prior art, during use, an acid droplet 1 is dispensed from the acid droplet 1 to etch the metal film layer 3 on the glass substrate 2. However, as... Figure 1 As shown, after the acid droplet 1 is dropped onto the metal film layer 3, the cross-sectional shape of the acid droplet 1 is elliptical. Therefore, after etching is completed and the acid droplet 1 on the surface of the glass substrate 2 is washed away, the cross-section of the etched metal film layer 3 is in the shape of "<" and ">". Specifically, the metal film layer 3 has an annular lower metal protrusion 3b formed by the etching of the acid droplet 1 and an annular upper metal protrusion 3a located above the lower metal protrusion 3b. A film layer cavity 4 is formed between the upper metal protrusion 3a and the lower metal protrusion 3b. After the acid dropping process is completed, photoresist 9 is coated on the etched area of ​​the acid droplet 1. Due to the formation of the film layer cavity 4, the photoresist 9 is difficult to completely fill the film layer cavity 4 during the coating process. Therefore, when the thin film transistor liquid crystal display is subjected to photolithography, during the fast-drawing stage of the vacuum drying unit, bubbling and bursting in the film layer cavity 4 can easily occur, resulting in a defect of "annular photoresist residue" around the acid dropping point. Utility Model Content

[0006] To address the problems existing in the prior art, the present invention aims to provide an acid-dropping head and device that are less likely to form cavities in the metal film layer during acid etching.

[0007] The objective of this utility model is achieved through the following technical solution:

[0008] An acid dispensing head is used to dispense acid drops to etch a metal layer on a glass substrate. The acid drops etch the metal layer to form a lower metal protrusion and an upper metal protrusion above the lower metal protrusion, forming a film cavity between the upper and lower metal protrusions. The head includes an acid dispensing tube and a breaking component for breaking the upper metal protrusion. The acid dispensing tube supplies the acid drops, and the breaking component is annular and connected to the outlet end of the acid dispensing tube.

[0009] Furthermore, it also includes a drive mechanism for moving the breaking component toward the lower metal protrusion.

[0010] Furthermore, the breaking component is wedge-shaped, with the wedge-shaped tip positioned on the side of the breaking component away from the acid drip tube.

[0011] Furthermore, the outlet channel of the acid dripping tube is a first channel, and the inner wall of the breaking component forms a second channel. The first channel and the second channel have the same cross-sectional size and are both cylindrical. At the same time, the first channel and the second channel are arranged coaxially.

[0012] Furthermore, both the outer wall of the acid dripping tube and the outer wall of the breaking component are provided with conical surfaces of the same taper, and the outer walls of the acid dripping tube and the breaking component are connected to each other to form a continuous conical surface.

[0013] Furthermore, the acid drip tube is integrally formed with or detachably connected to the breaking component.

[0014] Furthermore, the ablation component is an ablation mechanism that uses radioactive thermal energy to ablate the upper metal protrusion.

[0015] Furthermore, the ablation mechanism is a laser ring, and the laser ring irradiates perpendicularly to the glass substrate.

[0016] Furthermore, at least two breaking components are provided, and each breaking component is nested inside the other and coaxially arranged.

[0017] An acid dripping device includes an acid supply device and any of the above-described acid dripping heads, wherein the acid dripping head is connected to the acid supply device.

[0018] Compared with the prior art, the beneficial effect of this utility model is that by connecting a ring-shaped breaking component to the outlet end of the acid dripping tube, the upper metal protrusion is broken during the acid dripping operation of the metal film layer, thus preventing the formation of film layer cavities. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of an acid dispensing head in the prior art;

[0020] Figure 2 This is a schematic diagram of the holes formed in the film layer after photoresist coating in the existing technology;

[0021] Figure 3 This is a schematic diagram of the acid dropper of this utility model after the acid drop is dispensed from the acid dropper in Example 1;

[0022] Figure 4 This is a schematic diagram of the acid-dispensing head of this utility model in Embodiment 1 when the breaking component contacts the upper metal protrusion;

[0023] Figure 5 This is a schematic diagram of the acid dispensing head of this utility model breaking the metal protrusion contact in Embodiment 1;

[0024] Figure 6 This is a schematic diagram of the acid dispensing head of this utility model having two breaking components;

[0025] Figure 7 This is a schematic diagram of the acid dispensing head of this utility model using laser ring ablation of the upper metal protrusion.

[0026] In the picture:

[0027] 1-Acid droplet; 2-Glass substrate; 3-Metal film layer; 3a-Upper metal protrusion; 3b-Lower metal protrusion; 4-Film layer void; 5-Acid drop tube; 6-Break-off component; 7-First channel; 8-Second channel; 9-Photoresist. Detailed Implementation

[0028] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0031] Figure 3 This is a schematic diagram of the acid dropper of this utility model after the acid drop has been dispensed from the acid dropper in Example 1. Figure 3 As shown, this utility model discloses an acid dispensing head for the acid dispensing process in the production of thin-film transistor liquid crystal displays. The acid dispensing head includes an acid dispensing tube 5 and a breaking component 6 for breaking the upper metal protrusion 3a. The acid dispensing tube 5 supplies acid drops 1. The breaking component 6 is annular and connected to the outlet end of the acid dispensing tube 5. During use, the acid dispensing head of this utility model breaks the upper metal protrusion 3a formed by the acid drop 1 by the breaking component 6, effectively preventing the formation of voids 4 in the film layer.

[0032] Specifically, during use, the acid-dispensing head of this invention employs various methods for the breaking component 6 to break the metal protrusion 3a. For example, the breaking component 6 can be a solid piece. After contacting the upper metal protrusion 3a, the breaking component 6 is pushed to move the upper metal protrusion 3a towards the lower protrusion metal 3b, thereby breaking the upper metal protrusion 3a from the metal film layer 3. Alternatively, the breaking component 6 can be an active device capable of emitting high heat energy, which ablates the upper metal protrusion 3a. Yet another example is that the breaking component 6 can be a sponge block soaked in strong acid or alkali. The sponge block is driven to contact the upper metal protrusion 3a, and the strong acid or alkali corrodes the upper metal protrusion 3a. Detailed methods for the breaking component 6 to break the metal protrusion 3a are described below using two examples, see Embodiment 1 and Embodiment 2.

[0033] Example 1:

[0034] In Embodiment 1, the breaking component 6 breaks the upper metal protrusion 3a by contacting it and pressing it off from the metal film layer 3. Specifically:

[0035] The acid-dispensing head of this utility model also includes a driving mechanism that drives the breaking component 6 to move in the direction of the downward protruding metal 3b. Figure 4 This is a schematic diagram of the acid-dispensing head of this utility model in Embodiment 1 when the breaking component contacts the upper metal protrusion. Figure 5 This is a schematic diagram of the acid dispensing head of this utility model breaking the metal protrusion contact in Embodiment 1, as shown. Figures 3 to 5 As shown, the glass substrate 2 is placed horizontally. When acid drop 1 is dispensed from the acid dispensing head, it falls onto the metal film layer 3 under gravity. The acid drop 1 corrodes and forms a ring-shaped lower protruding metal 3b and a ring-shaped upper metal protruding corner 3a above the lower protruding metal 3b. The driving mechanism then drives the ring-shaped breaking component 6 to move directly above the upper metal protruding corner 3a. Subsequently, the driving mechanism drives the breaking component 6 to move vertically downward, that is, it drives the breaking component 6 towards the lower protruding metal 3b, and the ring-shaped breaking component 6 contacts the ring-shaped upper metal protruding corner 3a. The driving mechanism continues to drive the breaking component 6 towards the lower protruding metal 3b. Since the upper metal protruding corner 3a is a sharp corner protruding from the metal film layer 3, it is easily broken under pressure. Therefore, the upper metal protruding corner 3a breaks under the pressure of the breaking component 6, thus breaking the upper metal protruding corner 3a and preventing the formation of voids 4 in the film layer.

[0036] like Figure 3 As shown, in Embodiment 1, the breaking component 6 is wedge-shaped and there is only one breaking component 6. The wedge-shaped tip of the breaking component 6 is located on the side of the breaking component 6 away from the acid dispensing tube 5. The acid dispensing tube 5 is a straight tube and the outlet direction of the outlet end of the acid dispensing tube 5 is perpendicular to the glass substrate 2. Since the breaking component 6 is ring-shaped, the acid drop 1 drips out from the acid dispensing tube 5. After passing through the hollow part in the breaking component 6, the acid drop 1 falls onto the surface of the metal film layer 3. Since the breaking component 6 is wedge-shaped, when the breaking component 6 contacts the upper metal protrusion 3a, the wedge-shaped tip of the breaking component 6 contacts the upper metal protrusion 3a. Therefore, after the breaking component 6 moves further toward the lower protrusion metal 3b, the wedge-shaped tip easily breaks the upper metal protrusion 3a from the metal film layer 3, thereby breaking the upper metal protrusion 3a.

[0037] In other embodiments, at least two breaking components 6 are provided, and each breaking component 6 is nested inside the other and coaxially arranged. Figure 6 This is a schematic diagram of the acid dispensing head of this utility model having two breaking components, as shown below. Figure 6As shown, two wedge-shaped ring-shaped breaking components 6 are provided. To improve the connection strength of each breaking component 6, the wedge-shaped roots of each breaking component 6 are connected to each other, and the wedge-shaped roots of each breaking component 6 are connected to the acid dripping tube 5, while the wedge-shaped tips of each breaking component 6 are separated from each other. Each breaking component 6 can be integrally molded. When the breaking component 6 breaks the upper metal protrusion 3a, the wedge-shaped tips of both breaking components 6 are in contact with the upper metal protrusion 3a. Therefore, the force required for two breaking components 6 to break the upper metal protrusion 3a is less than the force required for a single breaking component 6 to break the upper metal protrusion 3a. Furthermore, when two breaking components 6 break the upper metal protrusion 3a, the breaking effect is better due to the multi-point contact.

[0038] In Example 1, as Figure 3 As shown, the outlet channel of the acid dropper 5 is the first channel 7, and the inner wall of the breaking component 6 forms the second channel 8. The first channel 7 and the second channel 8 have the same cross-sectional size and are both cylindrical. At the same time, the first channel 7 and the second channel 8 are arranged coaxially. Therefore, the first channel 7 and the second channel 8 combine to form a complete cylindrical channel, which facilitates the dripping of acid drop 1.

[0039] In Example 1, as Figure 3 As shown, both the outer wall of the acid dispensing tube 5 and the outer wall of the breaking component 6 are provided with conical surfaces of the same taper, and these surfaces are interconnected to form a continuous conical surface. When the breaking component 6 contacts the metal protrusion 3a and moves toward the glass substrate 2, the outer wall of the acid dispensing tube 5 also enters the metal film layer 3. By connecting the outer walls of the acid dispensing tube 5 and the breaking component 6 to form a continuous conical surface, it is easier for the acid dispensing tube 5 to enter the metal film layer 3.

[0040] The acid dripping tube 5 and the breaking component 6 can be integrally molded or detachably connected. In Embodiment 1, the acid dripping tube 5 and the breaking component 6 are integrally molded.

[0041] Example 2:

[0042] In embodiment two, the breaking component 6 employs an active device capable of emitting high heat energy. The heat emitted by the breaking component 6 ablates the upper metal protrusion 3a. Specifically:

[0043] In Example 2, Figure 7 This is a schematic diagram of the acid dispensing head of this invention, showing the laser ring ablation of the upper metal protrusion. Figure 7As shown, the ablation component 6 is an ablation mechanism that uses radioactive thermal energy to erode the upper metal protrusion 3a. The glass substrate 2 is placed horizontally, and the annular ablation mechanism is located above the glass substrate 2. When the acid drop 1 is dripped from the acid drop head, the acid drop 1 erodes to form an annular lower metal protrusion 3b, and then forms an annular upper metal protrusion 3a located above the lower metal protrusion 3b. The annular ablation mechanism is then positioned directly above the annular upper metal protrusion 3a. Subsequently, the ablation mechanism uses radioactive thermal energy to ablate the upper metal protrusion 3a, thereby breaking the upper metal protrusion 3a and preventing the formation of film voids 4.

[0044] In Example 2, as Figure 7 As shown, the ablation mechanism is a laser ring, and the laser ring's irradiation direction is perpendicular to the glass substrate 2. The acid dispensing tube 5 is integrally formed with or detachably connected to the ablation component 6, that is, the acid dispensing tube 5 and the laser ring are integrally formed with or detachably connected. Considering that the laser ring generates a large amount of heat, which can easily damage the laser ring, it needs to be removed and replaced when the laser ring malfunctions. Therefore, in Embodiment 2, the acid dispensing tube 5 and the laser ring are detachably connected.

[0045] In other embodiments, at least two breaking components 6 are provided, each nested within the other and coaxially arranged. That is, at least two laser rings are provided, each nested within the other and coaxially arranged. By setting multiple laser rings, the breaking effect of the upper metal protrusion 3a is improved.

[0046] This utility model also discloses an acid dripping device, including the acid dripping head of this utility model and an acid supply device connected to the acid dripping head.

[0047] In summary, the acid dispensing head of this invention, through the setting of the breaking component 6, effectively prevents the formation of film voids 4 by breaking the upper metal protrusion 3a formed by the acid droplet 1. Furthermore, by setting the breaking component 6 into a wedge-shaped ring, the upper metal protrusion 3a is easily broken. The use of two or more breaking components 6 further enhances the breaking effect of the upper metal protrusion 3a. The shape of the first channel 7 and the second channel 8 is defined to facilitate the dispensing of the acid droplet 1. Finally, by connecting the outer wall of the acid dispensing tube 5 and the outer wall of the breaking component 6 to form a continuous conical surface, the acid dispensing tube 5 can easily enter the metal film layer 3.

[0048] It should be emphasized that the above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model in any way. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model shall still fall within the scope of the technical solution of the present utility model.

Claims

1. A drop acid head for dropping acid drops (1) to etch a metal film layer (3) on a glass substrate (2), the acid drops (1) etching the metal film layer (3) to form a lower metal horn (3b) and an upper metal horn (3a) above the lower metal horn (3b), the upper metal horn (3a) and the lower metal horn (3b) forming a film layer cavity (4) therebetween, characterized in that, the drop acid head comprises a drop acid tube (5) for the acid drops (1) to drop out and a breaking assembly (6) for breaking the upper metal horn (3a). The breaking assembly (6) is annular and connected to an outlet end of the drop acid tube (5). The drop acid head further comprises a driving mechanism for driving the breaking assembly (6) to move towards the lower metal horn (3b).

2. The acid drip head of claim 1, wherein, The breaking assembly (6) is wedge-shaped annular, and a wedge-shaped tip of the breaking assembly (6) is arranged on a side of the breaking assembly (6) away from the drop acid tube (5).

3. The acid drip head of claim 2, wherein, An outlet end channel of the drop acid tube (5) is a first channel (7), and an inner wall of the breaking assembly (6) forms a second channel (8), the first channel (7) and the second channel (8) have the same cross-sectional size and are both cylindrical, and the first channel (7) and the second channel (8) are coaxially arranged.

4. The acid drip head of claim 3, wherein, The drop acid tube (5) and the breaking assembly (6) are integrally formed or detachably connected.

5. The acid drip head of claim 4, wherein, The breaking assembly (6) is an ablation mechanism for ablating the upper metal horn (3a) by radiating thermal energy.

6. The acid drip head of claim 5, wherein, The ablation mechanism is a laser ring, and an irradiation direction of the laser ring is perpendicular to the glass substrate (2).

7. The acid drip head of claim 1, wherein, The breaking assembly (6) is provided with at least two, each of the breaking assemblies (6) is sleeved with each other and coaxially arranged.

8. The acid drip head of claim 7, wherein, The drop acid head according to any one of claims 1-9 is connected to an acid supply device.

9. The acid drip head of claim 1, wherein, The drop acid head according to any one of claims 1-9 is connected to an acid supply device.

10. A device for dispensing acid, characterized in that ​

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