Substrate clamping device and double-sided scrubbing equipment

Abstract

The embodiment of the utility model provides a substrate clamping device and double-sided scrubbing equipment, and relates to the technical field of semiconductor processing. The substrate clamping device comprises a first clamping assembly, and two first driving wheels are arranged on a first shell of the first clamping assembly; two second driving wheels are arranged on a second shell of the second clamping assembly, and a clamping space is formed between the first driving wheel and the second driving wheel; the rotating part is used for driving the first driving wheel and the second driving wheel to rotate; the moving part is used for driving the first clamping assembly and the second clamping assembly to move in the face-to-face or back-to-back mode. The double-sided scrubbing equipment provided by the utility model comprises a treatment box, a double-sided scrubbing assembly and the substrate clamping device. The substrate clamping device and the double-face scrubbing equipment can be compatible with substrates of different sizes, the cleaning effect is guaranteed, and the application range of the double-face scrubbing equipment is widened.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and more specifically, to a substrate clamping device and a double-sided brushing device. Background Technology

[0002] During substrate processing, the substrate needs to be cleaned to remove particulate contaminants, organic residues, and metallic impurities from both sides, preventing contaminants from affecting device performance. Currently, a clamping device is typically used to fix the substrate in a double-sided brushing machine, where both sides of the substrate are brushed.

[0003] However, current clamping devices cannot be compatible with substrates of different sizes and guarantee cleaning results, especially irregular substrates with flat edges, resulting in a limited range of applications and poor compatibility for double-sided brushing equipment. Utility Model Content

[0004] The purpose of this invention is to provide a device that is compatible with substrates of different sizes while ensuring cleaning effectiveness, thereby expanding the applicability of double-sided brushing equipment.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] In a first aspect, this utility model provides a substrate clamping device, comprising:

[0007] The first clamping assembly has a first housing, on which two first drive wheels are spaced apart;

[0008] The second clamping assembly has a second housing, on which two second drive wheels are spaced apart, and a clamping space for clamping the substrate is formed between the two first drive wheels and the two second drive wheels;

[0009] A rotating component is provided inside both the first housing and the second housing to drive the first driving wheel and the second driving wheel to rotate, thereby causing the substrate to rotate.

[0010] The movable component is connected to the first clamping assembly and the second clamping assembly respectively, and is used to drive the first clamping assembly and the second clamping assembly to move towards or away from each other, so as to change the distance between the two first driving wheels and the two second driving wheels.

[0011] In an optional embodiment, both the first drive wheel and the second drive wheel have arc-shaped grooves around their sides to hold the edge of the substrate.

[0012] In an optional embodiment, a first auxiliary wheel is disposed on the first housing and located between the two first drive wheels, and a second auxiliary wheel is disposed on the second housing and located between the two second drive wheels.

[0013] In an optional embodiment, a guide plate is provided on the first housing and located between the first drive wheel and the first auxiliary wheel, and a guide plate is also provided on the second housing and located between the second drive wheel and the second auxiliary wheel. The guide plates have inclined surfaces on both sides for guiding the cleaning fluid.

[0014] Secondly, this utility model provides a double-sided brushing device, including a processing box, a double-sided brushing assembly, and a substrate clamping device as described in any of the foregoing embodiments, wherein...

[0015] The processing box has a processing cavity. The double-sided brushing assembly and the substrate clamping device are both disposed in the processing box and located in the processing cavity. The double-sided brushing assembly is configured to brush the substrate when the first clamping assembly and the second clamping assembly jointly clamp the substrate and drive the substrate to rotate.

[0016] In an optional embodiment, the moving component includes two drive structures disposed outside the processing box and two shafts. One end of each shaft is connected to one of the two drive structures, and the other end of each shaft extends into the processing box and is connected to the first clamping assembly and the second clamping assembly, respectively. The bottom wall of the processing box has a through hole for the shafts to pass through and move.

[0017] The double-sided scrubbing device also includes a seal, which is sleeved on the outside of the shaft to separate the moving part from the processing chamber.

[0018] In an optional embodiment, the through hole is a strip-shaped hole that extends in a direction opposite to the first clamping assembly and the second clamping assembly, and the moving member drives the shaft to move along the length direction of the strip-shaped hole.

[0019] In an optional embodiment, the sealing element includes a flange and a flexible tube. The flange is disposed on the bottom wall of the processing box and covers the outside of the through hole. The two flexible tubes are respectively sleeved on the outside of the two shafts, and one end of the flexible tube is connected to the first clamping assembly and the second clamping assembly respectively, and the other end of the flexible tube is connected to the flange.

[0020] In an optional embodiment, sealing rings are provided between the flexible tube and the flange, between the flexible tube and the first clamping assembly, and between the flexible tube and the second clamping assembly.

[0021] In an optional embodiment, a sensor for detecting the substrate is disposed inside the processing box and between the first clamping assembly and the second clamping assembly.

[0022] The beneficial effects of the substrate clamping device and double-sided brushing equipment provided in this embodiment of the invention include:

[0023] By setting up a first clamping component and a second clamping component, the substrate to be cleaned is clamped and fixed. A movable component drives the first and second clamping components to move towards or away from each other, adjusting the distance between the first and second drive wheels to clamp substrates of different sizes. A rotating component then drives the substrate to rotate, ensuring thorough cleaning and improving the cleaning effect. Furthermore, when clamping irregular substrates, such as those with flat edges, the distance between the first and second clamping components can be dynamically adjusted during substrate rotation, ensuring the irregular substrate is stably clamped between them. Therefore, the substrate clamping device provided in this embodiment is compatible with substrates of different sizes and specifications, ensuring effective cleaning and improving the compatibility and applicability of the double-sided cleaning equipment. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a structural schematic diagram of the double-sided brushing device provided in this embodiment from a first-view perspective;

[0026] Figure 2 This is a structural schematic diagram of the double-sided brushing device provided in this embodiment from a second perspective;

[0027] Figure 3 This is a first-view cross-sectional view showing the structure of the substrate clamping device in this embodiment;

[0028] Figure 4 This is a cross-sectional view from a second perspective showing the structure of the substrate clamping device in this embodiment.

[0029] Icons: 100-Processing box; 110-Processing chamber; 120-Through hole; 200-Substrate clamping device; 210-First clamping assembly; 211-First housing; 212-First drive wheel; 213-First auxiliary wheel; 220-Second clamping assembly; 221-Second housing; 222-Second drive wheel; 223-Second auxiliary wheel; 230-Rotating component; 240-Moving component; 250-Guide plate; 260-Shaft; 261-Shaft housing; 270-Seal; 271-Flange; 272-Flexible tube; 300-Sensor. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0032] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0033] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0034] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0035] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0036] Cleaning is a crucial step in substrate processing to remove particulate contaminants, organic / inorganic residues, and natural oxide layers from the substrate surface, thereby improving process compatibility and enhancing the performance of semiconductor devices.

[0037] To improve the cleaning effect on substrates, they are typically clamped in a double-sided brushing device, which cleans both the front and back sides of the wafer substrate. However, current double-sided brushing clamping devices are generally designed for wafers of fixed sizes and cannot guarantee the cleaning effect of the clamped substrates while being compatible with substrates of different specifications.

[0038] To address the aforementioned technical problems, this utility model provides a substrate clamping device and a double-sided brushing device. The following detailed description of the overall structure, working principle, and technical effects of the substrate clamping device and double-sided brushing device provided by this utility model, through embodiments and in conjunction with the accompanying drawings, is provided in detail.

[0039] On the one hand, this utility model provides a double-sided brushing equipment, which is applied to the cleaning process in the substrate production process to achieve double-sided cleaning of substrates of different sizes and specifications. This not only improves the compatibility and application range of the double-sided brushing equipment, but also ensures the effectiveness of double-sided cleaning of substrates.

[0040] Please refer to Figures 1-2 The double-sided brushing equipment provided by this utility model includes a processing box 100, a double-sided brushing assembly, and a substrate clamping device 200. The processing box 100 has a processing cavity 110 for brushing the substrate. The double-sided brushing assembly and the substrate clamping device 200 are both located in the processing cavity 110. The substrate clamping device 200 can change the clamping space to clamp substrates of different sizes, thereby expanding the applicability of the double-sided brushing equipment and improving compatibility. Furthermore, the substrate clamping device 200 can drive the substrate to rotate, while the double-sided brushing assembly brushes the rotating substrate, achieving a more comprehensive cleaning effect. In this embodiment, the substrate can be a 4-inch, 6-inch, or 8-inch wafer, or an irregular wafer with flat edges or notches, etc.

[0041] On the other hand, this utility model also provides a substrate clamping device 200, which is applied to the above-mentioned substrate double-sided brushing equipment.

[0042] For details, please refer to Figures 2-4 The substrate clamping device 200 provided by this utility model includes a first clamping assembly 210, a second clamping assembly 220, a rotating member 230, and a moving member 240. The first clamping assembly 210 has a first housing 211, which is hollow, and two first drive wheels 212 are installed at intervals on the first housing 211. The second clamping assembly 220 has a second housing 221, which is also hollow, and two second drive wheels 222 are installed at intervals on the second housing 221. A clamping space for clamping the substrate is formed between the two first driving wheels 212 and the two second driving wheels 222. The rotating member 230 is used to drive the first driving wheels 212 and the second driving wheels 222 to rotate, so as to drive the substrate clamped in the clamping space to rotate. The moving member 240 is used to drive the first clamping assembly 210 and the second clamping assembly 220 to move towards or away from each other, so as to change the distance between the first clamping assembly 210 and the second clamping assembly 220, which can also be understood as changing the width of the clamping space, so as to be suitable for clamping substrates of different sizes.

[0043] Understandably, by using two first driving wheels 212 and two second driving wheels 222 to jointly clamp the substrate, stable clamping of irregular substrates can be achieved. For example, when the substrate is an irregular substrate with flat edges, if one of the two first driving wheels 212 and two second driving wheels 222 corresponds to the flat edge of the substrate, while the other three correspond to and clamp the arc edge of the substrate, the two opposing first driving wheels 212 and second driving wheels 222 exert clamping forces on the substrate in opposite directions, thus ensuring the clamping stability of the irregular substrate. When only one first driving wheel 212 and one second driving wheel 222 are used, if one of them corresponds to the flat edge of the irregular substrate, only the first driving wheel 212 or the second driving wheel 222 contacts the arc edge of the substrate, and clamping of the substrate cannot be achieved. The same applies to irregular substrates with notches.

[0044] Please refer to 2- Figure 4 Furthermore, in this embodiment, both the first drive wheel 212 and the second drive wheel 222 have arc-shaped grooves circumferentially formed on their sides, and the arc-shaped grooves on the sides of the first drive wheel 212 and the second drive wheel 222 are located on the same horizontal plane. The arc-shaped grooves are used to hold the edge of the substrate. By forming the arc-shaped grooves, when the substrate is clamped between the first drive wheel 212 and the second drive wheel 222, the edge of the substrate is held in the arc-shaped grooves, thereby improving the holding and fixing effect of the substrate. It can also reduce the contact area between the substrate and other components, thereby reducing the retention of cleaning fluid in the dead corners where the substrate connects with other components.

[0045] Please refer to Figures 2-4 During the process of clamping an irregular substrate (taking a substrate with a flat edge as an example) with the first clamping component 210 and the second clamping component 220, and driving the substrate to rotate, the flat edge of the substrate cannot be in contact with the first drive wheel 212 and the second drive wheel 222. This may cause the substrate to tilt during the brushing process due to the pressure from the double-sided brushing components, affecting the cleaning effect of the substrate. Based on this, in this embodiment, a first auxiliary wheel 213 is provided on the first housing 211 and located between the two first drive wheels 212, and a second auxiliary wheel 223 is provided on the second housing 221 and located between the two second drive wheels 222. When the substrate is held between the first drive wheel 212 and the second drive wheel 222, the substrate also abuts against the first auxiliary wheel 213 and the second auxiliary wheel 223, thereby increasing the force points of the substrate and improving the stability of the substrate clamping. Especially when clamping irregular substrates with flat edges, the setting of the first auxiliary wheel 213 and the second auxiliary wheel 223 increases the force-bearing points of the substrate with flat edges, improves the clamping stability of the substrate, and to a certain extent avoids the substrate from tilting during the brushing process, which would affect the brushing effect.

[0046] Please refer to Figures 2-4During substrate brushing, cleaning fluid may accumulate and remain on the first housing 211 and the second housing 221, affecting the brushing effect. To facilitate the removal of cleaning fluid from the first housing 211 and the second housing 221 and prevent residue buildup, in some optional embodiments, a guide plate 250 is provided on the first housing 211 between the first drive wheel 212 and the first auxiliary wheel 213, and a guide plate 250 is also provided on the second housing 221 between the second drive wheel 222 and the second auxiliary wheel 223. Both sides of the guide plate 250 have inclined surfaces, giving it an arched structure that is higher in the middle and gradually decreases in the sides, facilitating the flow of the cleaning fluid.

[0047] In this embodiment, the rotating component 230 is installed inside both the first housing 211 and the second housing 221. The rotating component 230 inside the first housing 211 is connected to the first drive wheel 212, and the rotating component 230 inside the second housing 221 is connected to the second drive wheel 222. The rotating component 230 drives the first drive wheel 212 and the second drive wheel 222 to rotate, thereby driving the substrate clamped between the first drive wheel 212 and the second drive wheel 222 to rotate.

[0048] By placing the rotating component 230 inside the sealed first housing 211 and second housing 221 respectively, the rotating component 230 can be prevented from contacting the cleaning fluid, thereby ensuring the service life of the rotating component 230 and preventing the rotating component 230 from getting stuck during the process of driving the substrate to rotate.

[0049] In this embodiment, the movable component 240 is connected to the first clamping assembly 210 and the second clamping assembly 220 respectively. The movable component 240 connected to the first clamping assembly 210 drives the first clamping assembly 210 to move independently, and the movable component 240 connected to the second clamping assembly 220 drives the second clamping assembly 220 to move independently. This allows the movable component 240 to drive the first clamping assembly 210 and the second clamping assembly 220 to move towards or away from each other, thereby changing the distance between the two first driving wheels 212 and the two second driving wheels 222. In other embodiments, the movable component 240 can also drive the first clamping assembly 210 and the second clamping assembly 220 to move towards or away from each other simultaneously via a transmission component.

[0050] Please refer to Figures 2-4 The moving part 240 includes a drive structure and shafts 260. The drive structure is located outside the processing box 100. One end of each of the two shafts 260 is connected to the drive structure, and the other end of each shaft 260 extends into the processing box 100 and is connected to the first clamping assembly 210 and the second clamping assembly 220, respectively.

[0051] Furthermore, a through hole 120 is provided on the bottom wall of the processing box 100 for two shafts 260 to pass through, and the two shafts 260 can move within the two through holes 120 respectively, thereby realizing the relative movement of the first housing 211 and the second housing 221. The drive structure is connected to the end of each shaft 260 located outside the processing box 100. The drive structure is used to drive the shafts 260 to move, thereby driving the first clamping assembly 210 and the second clamping assembly 220 to move relative to each other. The drive structure can be an electric cylinder, a pneumatic cylinder, or other similar structure; this invention does not limit the specific structural form of the drive structure.

[0052] To prevent the cleaning fluid in the treatment tank 100 from leaking out of the treatment tank 100 through the through hole 120, which would lead to waste of cleaning fluid and damage to the drive structure, in this embodiment, the double-sided brushing device also includes a seal 270. The seal 270 is provided on both shafts 260. The two seals 270 are respectively provided between the first clamping assembly 210 and the treatment tank 100 and between the second clamping assembly 220 and the treatment tank 100. The seal 270 is used to separate the two shafts 260 from the treatment tank 100 when the two shafts 260 move in the two through holes 120, so as to prevent the cleaning fluid from flowing out through the through holes 120.

[0053] Please refer to Figures 2-4 In some optional embodiments, the through hole 120 can be a circular hole, an elliptical hole, or other structures, as long as it allows the two shafts 260 to move towards or away from each other. However, to minimize the cross-sectional area of ​​the through hole 120 and thus maintain the structural strength of the processing box 100 while ensuring the two shafts 260 can move towards or away from each other, in this embodiment, the through hole 120 is a strip-shaped hole. The two strip-shaped holes are parallel to each other, and both extend along the opposite direction of the first clamping component 210 and the second clamping component 220.

[0054] Please refer to Figures 2-4 In some optional embodiments, in order to improve the connection and sealing effect between the first housing 211, the second housing 221 and the shaft 260, a shaft housing 261 is provided between the shaft 260 and the first clamping assembly 210 and between the shaft 260 and the second clamping assembly 220, and the two shaft housings 261 are respectively sealed to the first housing 211 and the second housing 221.

[0055] The sealing element 270 includes a flange 271 and a flexible tube 272. The flange 271 is installed on the bottom wall of the processing box 100 and covers the outside of the strip hole. The flexible tube 272 is sleeved on the outside of the shaft 260. The lower end of the flexible tube 272 is connected to the flange 271, and the upper end of the flexible tube 272 is connected to the shaft housing 261.

[0056] The flexible tube 272 has a certain amount of expansion and contraction in both the axial and radial directions, so that when the two shafts 260 move towards or away from each other, the flexible tube 272 can adapt to the deformation. At the same time, the flexible tube 272 can also achieve a sealing effect on the through hole 120 during the deformation process, preventing the cleaning fluid from flowing out through the through hole 120.

[0057] In this embodiment, the flexible tube 272 is a corrugated tube. In other alternative embodiments, the flexible tube 272 can also be a braided tube, a spring tube, or other structural forms, as long as the flexible tube 272 has a certain deformation while having a sealing effect.

[0058] It is understood that in some alternative embodiments, the shaft housing 261 is hollow, so that the first housing 211 and the second housing 221 are connected to the external environment through the internal space of the shaft housing 261 and the flexible tube 272, thereby achieving the effect of sufficient ventilation and heat dissipation for the rotating parts 230 in the first housing 211 and the second housing 221.

[0059] Please refer to Figures 2-4 Furthermore, in order to improve the sealing effect of the flexible tube 272 on the through hole 120, sealing rings are installed between the flexible tube 272 and the flange 271, and between the flexible tube 272 and the outer shell of the shaft 260, so as to improve the sealing effect between the flexible tube 272 and the flange 271, and between the flexible tube 272 and the outer shell of the shaft 260, prevent the cleaning fluid from penetrating, and thus improve the sealing effect on the through hole 120.

[0060] In addition, please refer to Figure 4 In some optional embodiments, a sensor 300 is provided on the bottom wall of the processing box 100 and between the first clamping assembly 210 and the second clamping assembly 220 to detect whether a substrate is clamped and fixed between the first clamping assembly 210 and the second clamping assembly 220. The sensor 300 can be a photoelectric sensor 300, a proximity sensor 300, etc., and the specific structural form of the sensor 300 is not limited in this invention.

[0061] In summary, the structural principle of the substrate clamping device 200 and double-sided brushing equipment provided by this utility model is as follows: A first clamping component 210 and a second clamping component 220 are set to clamp and fix the substrate to be brushed. A moving component 240 drives the first clamping component 210 and the second clamping component 220 to move towards or away from each other, adjusting the distance between the first driving wheel 212 and the second driving wheel 222, thereby achieving the clamping of substrates of different sizes. The rotating component 230 then drives the substrate to rotate, ensuring thorough brushing and improving the brushing effect. Furthermore, when clamping irregular substrates, such as those with flat edges, the distance between the first clamping component 210 and the second clamping component 220 via the moving component 240 can be dynamically adjusted during substrate rotation, ensuring the irregular substrate is stably clamped between the two components. Therefore, the substrate clamping device 200 provided in this embodiment can be compatible with substrates of different sizes and specifications, thereby ensuring the cleaning effect of the substrate and improving the compatibility and applicability of the double-sided brushing equipment.

[0062] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A substrate holding device characterized by comprising: The utility model relates to a substrate clamping device and a double-sided brush cleaning equipment, and belongs to the field of substrate cleaning equipment. The utility model discloses a substrate clamping device, which comprises a first clamping assembly, a second clamping assembly and a rotating member. The first clamping assembly comprises a first housing, and two first driving wheels are arranged on the first housing. The second clamping assembly comprises a second housing, and two second driving wheels are arranged on the second housing. The rotating member is arranged in the first housing and the second housing, and is used for driving the first driving wheels and the second driving wheels to rotate, so as to drive the substrate to rotate.

2. The substrate holding apparatus according to claim 1, wherein The moving member is connected with the first clamping assembly and the second clamping assembly respectively, and is used for driving the first clamping assembly and the second clamping assembly to move towards each other or away from each other, so as to change the distance between the two first driving wheels and the two second driving wheels.

3. The substrate holding apparatus according to claim 1, wherein Arc-shaped grooves are formed around the side surfaces of the first driving wheels and the second driving wheels, and are used for clamping the edges of the substrate.

4. The substrate holding apparatus according to claim 3, wherein A first auxiliary wheel is arranged on the first housing between the two first driving wheels, and a second auxiliary wheel is arranged on the second housing between the two second driving wheels.

5. A double-sided brushing apparatus, characterized in that, A guide plate is arranged on the first housing between the first driving wheel and the first auxiliary wheel, and a guide plate is also arranged on the second housing between the second driving wheel and the second auxiliary wheel. The double-sided brush cleaning equipment comprises a processing box, a double-sided brush cleaning assembly and the substrate clamping device of any one of claims 1-4.

6. The double-sided brushing apparatus of claim 5, wherein, The processing box has a processing cavity, and the double-sided brush cleaning assembly and the substrate clamping device are arranged in the processing box and located in the processing cavity. The double-sided brush cleaning assembly is configured to clean the substrate when the first clamping assembly and the second clamping assembly jointly clamp the substrate and drive the substrate to rotate.

7. The double-sided brushing apparatus of claim 6, wherein, The moving member comprises two driving structures arranged outside the processing box and two shaft bodies.

8. The double-sided brushing apparatus of claim 6, wherein, One end of each of the two shaft bodies is connected with one of the two driving structures, and the other end of each of the two shaft bodies extends into the processing box and is connected with the first clamping assembly and the second clamping assembly respectively.

9. The double-sided brushing apparatus of claim 8, wherein, A through hole is formed in the bottom wall of the processing box for the shaft bodies to pass through and move. The moving member and the processing cavity are separated by a sealing member. The through hole is a strip-shaped hole, which extends in the direction opposite to the first clamping assembly and the second clamping assembly. The moving member drives the shaft bodies to move along the length direction of the strip-shaped hole. The sealing member comprises a flange and two flexible pipe bodies. The flange is arranged on the bottom wall of the processing box and covers the outside of the through hole. One end of each of the two flexible pipe bodies is connected with the first clamping assembly and the second clamping assembly respectively, and the other end of each of the two flexible pipe bodies is connected with the flange. Sealing rings are arranged between the flexible pipe bodies and the flange, between the flexible pipe bodies and the first clamping assembly, and between the flexible pipe bodies and the second clamping assembly.

10. The double-sided brushing apparatus of claim 5, wherein, A sensor for detecting the substrate is disposed within the process box between the first clamping assembly and the second clamping assembly.

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