Double-arm robot for semiconductor black lamp working room

Abstract

The utility model relates to the technical field of semiconductor production, and particularly discloses a double-arm robot for a semiconductor black lamp working room, which comprises a moving trolley, a supporting seat and a working assembly, the supporting seat is arranged on the moving trolley; the operation assembly comprises a mounting seat and two multi-axis mechanical arms; the mounting seat is arranged on the supporting seat; the two multi-axis mechanical arms are arranged at the two ends of the mounting base; a mechanical gripper quick-change connector is arranged at the execution end of the multi-axis mechanical arm. According to the double-arm robot provided by the scheme, automatic navigation and positioning in the working chamber can be achieved through the moving trolley, and then automatic operation of the semiconductor production process is achieved through mutual cooperation of the two multi-axis mechanical arms. And moreover, the multi-axis mechanical arm can be in butt joint with different mechanical claws through the mechanical claw quick-change connectors, so that different working procedure operations are achieved, applicability and high efficiency are achieved, and therefore the frequency of workers going in and out of a working room is reduced, and the influence on the working environment is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and more particularly to a dual-arm robot for use in a semiconductor light-out workshop. Background Technology

[0002] Semiconductor manufacturing typically involves three main stages: wafer fabrication, wafer processing, and packaging and testing. Each stage requires multiple steps. For example, wafer fabrication includes silicon wafer preparation, deposition, photolithography, etching, ion implantation, cleaning, and testing. These steps are performed by different equipment, thus requiring workers to handle material transfers and operate equipment doors for material entry and exit.

[0003] Because semiconductor manufacturing is a highly precise process, the entry and exit of workers in the semiconductor workshop will disturb the environment. Therefore, the workshop needs time to be cleaned after workers enter and exit, which affects production efficiency. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a dual-arm robot for semiconductor light-out workshops to solve the problem that human involvement in the semiconductor manufacturing process disturbs the working environment and affects production efficiency.

[0005] To achieve the above technical objectives, this application provides a dual-arm robot for a semiconductor light-out workshop, comprising: a mobile cart, a support base, and working components;

[0006] The support base is mounted on the mobile trolley;

[0007] The working components include: a mounting base and two multi-axis robotic arms;

[0008] The mounting base is disposed on the support base;

[0009] The two multi-axis robotic arms are positioned at both ends of the mounting base;

[0010] The multi-axis robotic arm is equipped with a quick-change connector for the robotic gripper at its execution end.

[0011] Furthermore, a column is provided on the support base;

[0012] The operating components also include: a lifting drive component;

[0013] The mounting base is slidably disposed on the column in the vertical direction;

[0014] The lifting drive component is disposed on the column, and the output end of the lifting drive component is connected to the mounting base.

[0015] Furthermore, the support base is provided with a rotating seat that can rotate in the horizontal direction;

[0016] The operating component also includes: a rotary drive;

[0017] The column is mounted on the rotating base;

[0018] The rotary drive is disposed on the support base, and the output end of the rotary drive is connected to the rotary base.

[0019] Furthermore, it also includes storage boxes;

[0020] The storage box is mounted on the support base.

[0021] Furthermore, the top of the storage box is provided with an openable and closable lid.

[0022] Furthermore, a handle is provided on the lid of the box.

[0023] Furthermore, a tray is provided inside the storage box;

[0024] The tray is used to place the feeding box or tray.

[0025] Furthermore, the material box includes a first material box;

[0026] The tray is provided with multiple first locking components;

[0027] The tray is provided with a first area for placing the first material box;

[0028] Multiple first locking members are disposed on the outer periphery of the first area and are used to abut against the first material box within the first area.

[0029] Furthermore, the material box includes a second material box;

[0030] The tray is provided with a second locking component and a third locking component;

[0031] The tray is provided with a second area for placing the second material box;

[0032] The second region covers the first region;

[0033] The second locking component and the third locking component are respectively disposed in the front and rear areas of the second region;

[0034] The second locking member and the third locking member are respectively used to abut the front end and the rear end of the second material box in the second area;

[0035] The second material box has avoidance zones on its left and right sides to avoid the first locking component.

[0036] Furthermore, the material box includes a third material box;

[0037] The tray is equipped with a fourth locking component;

[0038] The tray is provided with a third area for placing the third material box;

[0039] The third region covers the second region;

[0040] The fourth locking component is disposed at the front end of the third region;

[0041] The fourth locking member and the third locking member are respectively used to abut the front end and the rear end of the third material box in the third area;

[0042] The height of both the second and first locking components is smaller than that of the fourth locking component.

[0043] Furthermore, the tray is provided with a fifth locking element;

[0044] The fifth locking component is located on the left and right sides outside the second area;

[0045] The fifth locking component is used to place the material tray;

[0046] The height of the fifth locking component is less than that of the fourth locking component.

[0047] Furthermore, the tray is provided with a sliding abutment block and a horizontal drive component;

[0048] The horizontal drive component is used to drive the abutment block to abut against or separate from the wall of the storage box.

[0049] Furthermore, the mounting base is disposed at the front end of the column.

[0050] Furthermore, the multi-axis robotic arm includes: a first joint, a second joint, and a third joint;

[0051] The first joint is rotatably mounted on the mounting base along the first plane;

[0052] The second joint is rotatably disposed on the first joint along a second plane, the second plane being perpendicular to the first plane;

[0053] The third joint is rotatably disposed on the second joint along a third plane, the third plane being perpendicular to the first plane and the second plane;

[0054] The quick-change connector of the robotic gripper can be rotatably connected to the third joint.

[0055] Furthermore, the multi-axis robotic arm also includes a fourth joint, a fifth joint, and a sixth joint;

[0056] The fourth joint is rotatably disposed on the third joint along the first plane;

[0057] The fifth joint is rotatably disposed on the fourth joint along the third plane;

[0058] The sixth joint is rotatably disposed on the fifth joint along the second plane;

[0059] The quick-change connector of the robotic gripper is rotatably disposed on the sixth joint along the first plane.

[0060] Furthermore, it also includes a first robotic gripper, a second robotic gripper, and a third robotic gripper;

[0061] The first robotic gripper, the second robotic gripper, and the third robotic gripper are all detachably mounted on the support base;

[0062] The first robotic gripper, the second robotic gripper, and the third robotic gripper are all equipped with quick-change connectors;

[0063] The quick-connect coupling is used for detachable docking with the quick-connect coupling of the robotic gripper;

[0064] The first robotic gripper is used to hold the door handle;

[0065] The second robotic gripper is used to hold the material box;

[0066] The third robotic gripper is used to hold the sample.

[0067] As can be seen from the above technical solutions, this application provides a dual-arm robot for a semiconductor light-out workshop, including: a mobile cart, a support base, and a working component; the support base is disposed on the mobile cart; the working component includes: a mounting base and two multi-axis robotic arms; the mounting base is disposed on the support base; the two multi-axis robotic arms are disposed at both ends of the mounting base; the execution end of the multi-axis robotic arms is provided with a quick-change robotic gripper connector.

[0068] The dual-arm robot provided in this solution can automatically navigate and locate within the workshop via a mobile cart. Then, through the cooperation of two multi-axis robotic arms, it automates semiconductor manufacturing processes. Furthermore, the multi-axis robotic arms can interface with different robotic grippers via quick-change connectors to perform various processes, achieving both applicability and high efficiency. This reduces the frequency of workers entering and leaving the workshop, minimizing the impact on the working environment. Attached Figure Description

[0069] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0070] Figure 1 A schematic diagram of the overall structure of a dual-arm robot for a semiconductor light-out workshop is provided in this application embodiment;

[0071] Figure 2 A schematic diagram of the internal structure of a multi-axis robotic arm for a dual-arm robot used in a semiconductor light-out workshop, provided as an embodiment of this application;

[0072] Figure 3 A schematic diagram of a storage box and material box for a dual-arm robot used in a semiconductor light-up workshop, provided as an embodiment of this application;

[0073] Figure 4 A schematic diagram of a tray for a dual-arm robot used in a semiconductor light-up workshop, provided as an embodiment of this application;

[0074] Figure 5 A schematic diagram of a tray placing a first material box for a dual-arm robot used in a semiconductor light-up workshop, provided as an embodiment of this application;

[0075] Figure 6 Another schematic diagram of a tray placing a first material box for a dual-arm robot used in a semiconductor light-up workshop, provided as an embodiment of this application;

[0076] Figure 7 A schematic diagram illustrating the placement of a second material box on a tray of a dual-arm robot for a semiconductor light-out workshop, provided as an embodiment of this application;

[0077] Figure 8 Another schematic diagram of a tray for placing a second material box for a dual-arm robot in a semiconductor light-up workshop, provided as an embodiment of this application;

[0078] Figure 9 A schematic diagram illustrating the placement of a third material box on a tray of a dual-arm robot used in a semiconductor light-up workshop, provided as an embodiment of this application;

[0079] Figure 10 A schematic diagram of a tray placement device for a dual-arm robot used in a semiconductor light-up workshop, provided as an embodiment of this application;

[0080] In the picture:

[0081] 100. Mobile cart;

[0082] 200. Support base; 210. Column; 220. Rotary base;

[0083] 300. Working component; 310. Multi-axis robotic arm; 311. First joint; 312. Second joint; 313. Third joint; 314. Fourth joint; 315. Fifth joint; 316. Sixth joint; 320. Mounting base; 330. Quick-change connector for robotic gripper;

[0084] 400. Storage box; 410. Box lid; 411. Handle; 420. Tray; 421. First locking component; 422. Second locking component; 423. Third locking component; 424. Fourth locking component; 425. Fifth locking component; 426. Horizontal drive component; 427. Abutment block; 430. Material box; 431. First material box; 432. Second material box; 433. Third material box; 440. Material tray. Detailed Implementation

[0085] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments in this application specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection claimed in this application.

[0086] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0087] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application according to the specific circumstances.

[0088] Please see Figure 1The present application provides a dual-arm robot for a semiconductor light-up workshop, comprising: a mobile vehicle 100, a support base 200, and a working component 300.

[0089] The support base 200 is mounted on the mobile trolley 100. In this embodiment, the support base 200 contains a control component and a power supply component for controlling the mobile trolley 100 and the working component 300. The mobile trolley 100 contains a navigation component, a sensing component, and a drive component, enabling it to travel along a planned route to move the support base 200 and the working component 300 to a preset position.

[0090] The working assembly 300 includes: a mounting base 320 and two multi-axis robotic arms 310; the mounting base 320 is disposed on the support base 200; the two multi-axis robotic arms 310 are disposed at both ends of the mounting base 320; the actuator of the multi-axis robotic arms 310 is provided with a quick-change connector 330 for the robotic gripper. In this embodiment, the mounting base 320 is provided with electrical control components for controlling the rotation of the multi-axis robotic arms 310, and the multi-axis robotic arms 310 themselves have multiple rotatable joints.

[0091] The multi-axis robotic arm 310 can quickly dock and detach with different robotic grippers via the quick-change connector 330, so as to change different robotic grippers as needed during operation.

[0092] In one embodiment, the robotic gripper may include a first robotic gripper, a second robotic gripper, and a third robotic gripper; each of the first, second, and third robotic grippers is provided with a quick-change connector; the quick-change connector is used to detachably connect with the quick-change connector 330 of the robotic gripper; the first robotic gripper is used to hold a door handle; the second robotic gripper is used to hold a material box; and the third robotic gripper is used to hold a sample.

[0093] When the multi-axis robotic arm 310 is connected to the first robotic gripper, it can grip the door handle of the work equipment and control the opening and closing of the door. Correspondingly, the first robotic gripper can have two first grippers that can open and close to grip the door handle. Here, the door refers to the material entry and exit gate of different semiconductor work equipment. In application, the door structure of different work equipment varies. Therefore, the first robotic gripper can be configured with various models, and the first robotic gripper is placed accordingly next to the work equipment. When the work assembly 300 moves to the front of the work equipment, the multi-axis robotic arm 310 can dock with the first robotic gripper to open and close the door.

[0094] When the multi-axis robotic arm 310 is connected to the second robotic gripper, it can grip the material box to realize the transfer of the material box. Correspondingly, the second robotic gripper can have two second grippers that can open and close to grip the material box; wherein, the shape of the second grippers is adapted to the material box.

[0095] When the multi-axis robotic arm 310 is connected to the third robotic gripper, it can grip the sheet material to remove it from the material box. Correspondingly, the third robotic gripper can have two third grippers that can open and close to grip the sheet material; wherein, the shape of the third grippers can be flat and sheet-like to firmly grip the sheet material.

[0096] In practical applications, each robotic gripper can be configured in multiples and placed next to each working device.

[0097] Specifically, in application, the mobile trolley 100 can travel according to a planned route to move the support 200 and the working component 300 between different workstations. Taking the deposition process in wafer manufacturing as an example, after the silicon wafer is prepared, it is placed in a material box. A dual-arm robot located in the workshop can move to the silicon wafer preparation station and obtain the material box through a multi-axis robotic arm 310 connected to a second robotic gripper. Then, it moves to the deposition station, where another multi-axis robotic arm 310 connected to a first robotic gripper opens the door of the deposition equipment, and a multi-axis robotic arm 310 feeds the material box into the deposition equipment.

[0098] In other processes, when it is necessary to remove the sheet from the material box, another multi-axis robotic arm 310 can connect to a third robotic arm after separating from the first robotic gripper to achieve the gripping and transfer of the sheet. As can be seen from the above, the dual-arm robot provided in this embodiment can be applied to semiconductor light-out workshops to automate processes such as material transfer, door opening and closing, and feeding and picking, thereby reducing the degree of human involvement in the semiconductor production process and reducing the time spent on environmental clean-up. Furthermore, the collaborative operation of the two multi-axis robotic arms 310 further improves work efficiency.

[0099] In one embodiment, the first, second, and third robotic grippers are all detachably mounted on the support base 200. During the movement of the dual-arm robot, multiple robotic grippers can move synchronously with it. Correspondingly, the support base 200 may be provided with a placement platform (not shown in the drawings) for placing the robotic grippers. In this embodiment, the robotic grippers shared by the working equipment can be integrated onto the dual-arm robot, reducing the number of robotic grippers that need to be configured in the working chamber.

[0100] In one embodiment, a column 210 is provided on the support base 200; the working component 300 further includes: a lifting drive; a mounting base 320 is slidably disposed on the column 210 in the vertical direction; the lifting drive is disposed on the column 210, and the output end of the lifting drive is connected to the mounting base 320.

[0101] In this embodiment, the lifting drive can be a motor, and it is connected to the mounting base 320 via a transmission component such as a lead screw. A slide rail can be provided on the column 210 for the mounting base 320 to slide on. When the lifting drive is activated, it can drive the mounting base 320 to rise or fall, thereby adjusting the vertical position of the two multi-axis robotic arms 310.

[0102] In one embodiment, the support base 200 is provided with a rotating base 220 that can rotate in the horizontal direction; the working assembly 300 further includes: a rotation drive; a column 210 is disposed on the rotating base 220; the rotation drive is disposed on the support base 200, and the output end of the rotation drive is connected to the rotating base 220.

[0103] The rotary drive can be a motor, which is connected to the rotary base 220 via transmission components such as gears. The rotary base 220 enables the column 210 to rotate in the horizontal direction, thereby adjusting the position of the two multi-axis robotic arms 310 in the horizontal circumferential direction.

[0104] In one embodiment, a storage box 400 is also included; the storage box 400 is disposed on the support base 200.

[0105] In this embodiment, the storage box 400 can be used to store multiple material boxes to improve the efficiency and stability of material box transfer.

[0106] Optionally, the top of the storage box 400 is provided with an openable and closable lid 410. During the transfer of the material box, closing the lid 410 can protect the materials inside the storage box 400.

[0107] In scenarios where dual-arm robots are required to move materials within and outside the work area, such as when silicon wafer fabrication equipment is located outside the work area, the storage tank 400 helps prevent contamination of the wafers during transport. Correspondingly, in such cases, the semiconductor lights-out work area can be equipped with an air shower for cleaning during the entry and exit of the dual-arm robots.

[0108] In practical applications, the lid 410 can be opened in a detachable manner, for example, by removing the entire lid 410 from the storage box 400. In other embodiments, the lid 410 can be opened in a non-detachable manner using a flip-top or sliding structure as known in the prior art.

[0109] In one embodiment, a handle 411 is provided on the lid 410 to facilitate the removal of the storage box 400 by workers or other machinery and equipment.

[0110] In one embodiment, see Figure 3 The storage box 400 is equipped with a tray 420; the tray 420 is used to place the feeding box 430 or the material tray 440.

[0111] The tray 420 can provide a positioning position for the cassette 430 or the tray 440, so as to achieve stable placement of the cassette 430 or the tray 440. The cassette 430 can be used to hold multiple wafers. The tray 440 can be used to hold a single sample wafer.

[0112] In a more specific embodiment, please refer to Figures 4 to 6 The material box 430 includes a first material box 431; a tray 420 is provided with a plurality of first locking members 421; the tray 420 is provided with a first area for placing the first material box 431; the plurality of first locking members 421 are provided on the outer periphery of the first area for abutting the first material box 431 in the first area.

[0113] In this embodiment, the first material box 431 can be used to place 4-inch wafers. After the first material box 431 is placed in the first area, the outer periphery of the first material box 431 abuts against the first locking member 421 to fix the first material box 431 in place.

[0114] In a further improved embodiment, please refer to Figures 4 to 8 The material box 430 includes a second material box 432; a second locking member 422 and a third locking member 423 are provided on the tray 420; the tray 420 is provided with a second area for placing the second material box 432; the second area covers the first area; the second locking member 422 and the third locking member 423 are respectively provided in the front and rear areas of the second area; the second locking member 422 and the third locking member 423 are respectively used to abut the front end and the rear end of the second material box 432 in the second area; the left and right sides of the second material box 432 are provided with avoidance areas to avoid the first locking member 421.

[0115] In this embodiment, the second wafer tray 432 can be used to place 6-inch wafers. Therefore, the area of ​​the second region is larger than the area of ​​the first region. After the second wafer tray 432 is placed, its front end and rear end abut against the second locking member 422 and the third locking member 423, respectively, to fix the second wafer tray 432 in place. Simultaneously, the placement of the second wafer tray 432 does not interfere with the first locking member 421.

[0116] In one embodiment, see Figures 4 to 9 The material box 430 includes a third material box 433; a fourth locking member 424 is provided on the tray 420; the tray 420 is provided with a third area for placing the third material box 433; the third area covers the second area; the fourth locking member 424 is provided at the front end of the third area; the fourth locking member 424 and the third locking member 423 are respectively used to abut the front end and the rear end of the third material box 433 in the third area; the height of the second locking member 422 and the first locking member 421 is less than that of the fourth locking member 424.

[0117] In this embodiment, the third wafer tray 433 can be used to place an 8-inch wafer. When placing the third wafer tray 433, the first locking member 421 and / or the second locking member 422 can be used to support the third wafer tray 433.

[0118] In one embodiment, see Figures 4 to 10 A fifth locking element 425 is provided on the tray 420; the fifth locking element 425 is located on the left and right sides outside the second area; the fifth locking element 425 is used for placing the feed tray 440; the height of the fifth locking element 425 is less than that of the fourth locking element 424.

[0119] In this embodiment, the fifth locking member 425 allows the material tray 440 to be placed without interfering with the third material box 433, ensuring that the material tray 440 is stably placed on the fifth locking member 425. In practical applications, the height of the fifth locking member 425 can be configured to be greater than that of the first locking member 421 and the second locking member 422. Furthermore, the top surface of the fifth locking member 425 can be stepped to ensure the stable placement of the material tray 440.

[0120] In one embodiment, the tray 420 is provided with a horizontally slidable abutment block 427 and a horizontal drive member 426; the horizontal drive member 426 is used to drive the abutment block 427 to abut or separate from the wall of the storage box 400.

[0121] Specifically, after the tray 420 is placed into the storage box 400, the horizontal drive 426 can control the abutment block 427 to extend, so that the abutment block 427 abuts against the wall of the storage box 400, thus preventing the tray 420 from shaking and causing the chip to fall off during the transfer of the storage box 400.

[0122] In one embodiment, the mounting base 320 is disposed at the front end of the column 210. Correspondingly, two multi-axis robotic arms are disposed at the front end of the column 210, which reduces the structural volume of the rear end of the dual-arm robot and contributes to the compactness of the overall structure.

[0123] In one embodiment, see Figure 1 and Figure 2 The multi-axis robotic arm 310 includes a first joint 311, a second joint 312, and a third joint 313. The first joint 311 is rotatably mounted on the mounting base 320 along a first plane; the second joint 312 is rotatably mounted on the first joint 311 along a second plane, which is perpendicular to the first plane; the third joint 313 is rotatably mounted on the second joint 312 along a third plane, which is perpendicular to both the first and second planes; and a quick-connect coupling 330 is rotatably connected to the third joint 313.

[0124] In this embodiment, the first plane can be Figure 2In the XZ plane, the second plane can be Figure 2 The XY plane in the first joint 310 and the YZ plane in the second joint 312 can be used as the third joint 313. The multi-axis robotic arm 310 can drive the quick-change joint 330 of the robotic gripper to move in multiple axes through the first joint 311, the second joint 312, and the third joint 313.

[0125] In a more specific embodiment, the multi-axis robotic arm 310 further includes: a fourth joint 314, a fifth joint 315, and a sixth joint 316; the fourth joint 314 is rotatably disposed on the third joint 313 along a first plane; the fifth joint 315 is rotatably disposed on the fourth joint 314 along a third plane; the sixth joint 316 is rotatably disposed on the fifth joint 315 along a second plane; and the robotic gripper quick-change joint 330 is rotatably disposed on the sixth joint 316 along a first plane.

[0126] In this embodiment, the flexibility of the multi-axis robotic arm 310 can be improved by using the fourth joint 314, the fifth joint 315 and the sixth joint 316.

[0127] The above are merely preferred embodiments of this application and are not intended to limit the present invention. Although the present application has been described in detail with reference to examples, those skilled in the art can still modify the technical solutions described in the foregoing examples or make equivalent substitutions for some of the technical features. However, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A dual-arm robot for a semiconductor black light studio, characterized by, The utility model relates to a kind of mobile trolley, support seat, work assembly and storage box. The support seat (200) is arranged on the mobile trolley (100). The work assembly (300) includes a mounting seat (320) and two multi-axis robot arms (310). The mounting seat (320) is arranged on the support seat (200). Two multi-axis robot arms (310) are arranged at both ends of the mounting seat (320). The execution end of the multi-axis robot arm (310) is provided with a mechanical hand claw quick-change joint (330). The storage box (400) is arranged on the support seat (200). The storage box (400) is provided with a tray (420). The tray (420) is used for placing a supply box (430) or a tray (440). The supply box (430) includes a first supply box (431). The tray (420) is provided with a plurality of first clamping parts (421). The tray (420) is provided with a first area for placing the first supply box (431). A plurality of first clamping parts (421) are arranged on the outer periphery of the first area for abutting the first supply box (431) in the first area. The support seat (200) is provided with a stand (210).

2. The dual-arm robot for a semiconductor black light workcell of claim 1, wherein, The work assembly (300) further includes a lifting drive. The mounting seat (320) is slidably arranged in the vertical direction on the stand (210). The lifting drive is arranged on the stand (210), and the output end of the lifting drive is connected to the mounting seat (320). The support seat (200) is provided with a rotating seat (220) that can rotate in the horizontal direction.

3. The dual-arm robot for a semiconductor black light workcell of claim 2, wherein, The work assembly (300) further includes a rotating drive. The stand (210) is arranged on the rotating seat (220). The rotating drive is arranged on the support seat (200), and the output end of the rotating drive is connected to the rotating seat (220). The top of the storage box (400) is provided with a box cover (410) that can be opened and closed.

4. The dual-arm robot for a semiconductor black light workcell of claim 1, wherein, The box cover (410) is provided with a handle (411).

5. The dual-arm robot for a semiconductor black light workcell of claim 4, wherein, The supply box (430) includes a second supply box (432).

6. The dual-arm robot for a semiconductor black light workcell of claim 1, wherein, The tray (420) is provided with a second clamping part (422) and a third clamping part (423). The tray (420) is provided with a second area for placing the second supply box (432). The second area covers the first area. The second clamping part (422) and the third clamping part (423) are respectively arranged in the front and rear areas of the second area. The second clamping part (422) and the third clamping part (423) are respectively used for abutting the front end and the rear end of the second supply box (432) in the second area. The left and right sides of the second supply box (432) are provided with a clearance area to avoid the first clamping part (421). The supply box (430) includes a third supply box (433).

7. The dual-arm robot for a semiconductor black light workcell of claim 6, wherein, The tray (420) is provided with a fourth clamping part (424). ​ The tray (420) is provided with a third area for placing the third magazine (433); The third area covers the second area; The fourth clamping part (424) is arranged at the front end of the third area; The fourth clamping part (424) and the third clamping part (423) are respectively used for abutting against the front end and the rear end of the third magazine (433) in the third area; The height of the second clamping part (422) and the first clamping part (421) is less than that of the fourth clamping part (424).

8. The dual-arm robot for a semiconductor black light workcell of claim 7, wherein, The tray (420) is provided with a fifth clamping part (425); The fifth clamping part (425) is arranged at the left and right sides outside the second area; The fifth clamping part (425) is used for placing the tray (440); The height of the fifth clamping part (425) is less than that of the fourth clamping part (424).

9. The dual-arm robot for a semiconductor black light workcell of claim 1, wherein, The tray (420) is provided with an abutting block (427) and a horizontal driving part (426) which can slide in the horizontal direction; The horizontal driving part (426) is used for driving the abutting block (427) to abut against or separate from the wall of the storage box (400).

10. The dual-arm robot for a semiconductor black light workcell of claim 2, wherein, The mounting seat (320) is arranged at the front end of the stand (210).

11. The dual-arm robot for a semiconductor black light workcell of claim 10, wherein, The multi-axis mechanical arm (310) comprises a first joint (311), a second joint (312) and a third joint (313); The first joint (311) is rotatably arranged at the mounting seat (320) along a first plane; The second joint (312) is rotatably arranged at the first joint (311) along a second plane, and the second plane is perpendicular to the first plane; The third joint (313) is rotatably arranged at the second joint (312) along a third plane, and the third plane is perpendicular to the first plane and the second plane; The mechanical hand quick-change joint (330) is rotatably connected to the third joint (313).

12. The dual-arm robot for a semiconductor black light workcell of claim 11, wherein, The multi-axis mechanical arm (310) further comprises a fourth joint (314), a fifth joint (315) and a sixth joint (316); The fourth joint (314) is rotatably arranged at the third joint (313) along the first plane; The fifth joint (315) is rotatably arranged at the fourth joint (314) along the third plane; The sixth joint (316) is rotatably arranged at the fifth joint (315) along the second plane; The mechanical hand quick-change joint (330) is rotatably arranged at the sixth joint (316) along the first plane.

13. The dual-arm robot for a semiconductor black light workcell of claim 1, wherein, Further comprising a first mechanical hand, a second mechanical hand and a third mechanical hand; The first mechanical hand, the second mechanical hand and the third mechanical hand are detachably arranged at the support seat (200); The first mechanical hand, the second mechanical hand and the third mechanical hand are provided with quick-change joints; The quick-change joints are used for detachably docking with the mechanical hand quick-change joint (330); The first mechanical hand is used for clamping a door handle; The second mechanical hand is used for clamping a magazine; The third mechanical gripper is used to grip the coupon. The third mechanical gripper is used to grip the coupon.

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