Precise fine-tuning displacement platform

Abstract

The utility model relates to the technical field of displacement platforms, in particular to a precise fine-tuning displacement platform, which is characterized in that a sliding sleeve moves downwards, a compression spring II and the sliding sleeve move downwards to drive a connecting ring and a triangular embedding block to move downwards, and at the moment, the triangular embedding block is gradually inserted into a triangular gap between two groups of trapezoidal blocks on a gasket of a movable table; due to the fact that the trapezoid blocks are distributed in a circumferential array mode, the triangular embedding blocks are accurately embedded into the trapezoid blocks to achieve radial positioning and prevent the bolt from inclining, meanwhile, the sealing ring at the bottom of the connecting ring makes contact with the gasket to form sealing, the gap can prevent air pressure from hindering the downward pressing process, and in the embedding process of the triangular embedding blocks, the sealing effect is good. When the bolt is screwed, the inclined surface extrudes the arc-shaped end of the arc-surface push rod in the gap of the trapezoidal block, the arc-surface push rod is forced to slide towards the inner side of the fixing ring, the first spring is compressed, the rubber positioning block at the tail end of the arc-surface push rod contracts inwards, the head of the bolt is elastically clamped, and deflection of the bolt is further prevented.

Description

Technical Field

[0001] This utility model relates to the field of displacement platform technology, specifically a precision fine-tuning displacement platform. Background Technology

[0002] Precision micro-adjustment platforms are essential for optoelectronic semiconductor fabrication, primarily due to the extreme precision required for position control. In critical processes such as laser cutting, wafer alignment, photolithography, and chip packaging, even micrometer- or nanometer-level deviations can lead to performance degradation or yield losses. Driven by piezoelectric ceramics or servo motors and supported by high-resolution encoder feedback, precision platforms achieve sub-micrometer-level positioning, ensuring a precise match between the laser focus point or optical components and the semiconductor material. For example, in photolithography, multiple exposure processes require repeatability of wafer movement with a positioning accuracy better than 10 nanometers; only precision micro-adjustment platforms can meet this requirement. Optoelectronic semiconductor devices often require complex path processing in three-dimensional space. By stacking and combining multiple linear and rotary platforms, a six-degree-of-freedom motion system can be constructed, enabling both precise planar pattern processing and the adjustment of beam incident angles to create inclined or three-dimensional structures. This stacked design can also separate coarse and fine adjustment functions. First, a large-stroke platform is used for rapid positioning, and then the fine adjustment platform is switched to eliminate errors caused by mechanical backlash and thermal deformation, thus balancing efficiency and accuracy. When the precision fine adjustment platform is stacked, its screw holes and bolts are small. When the internal threads in the screw holes are small, if the bolts are misaligned, it can easily cause the connection between the two sets of fine adjustment platforms to tilt, thus affecting optoelectronic semiconductor processing.

[0003] In view of this, we propose a precision fine-tuning displacement platform. Utility Model Content

[0004] The purpose of this utility model is to provide a precision fine-tuning displacement platform, which solves the problem of stacking tilting when bolts cannot be positioned during stacking.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A precision fine-tuning displacement platform includes a fixed platform and a movable platform. Both the fixed platform and the movable platform have mounting screw holes on their surfaces. A fixing block is fixedly connected to the side of the fixed platform, and a micrometer is mounted on the surface of the fixing block. An L-shaped push block is fixedly connected to the side of the movable platform, and the linkage shaft of the micrometer is fixedly connected to the L-shaped push block. The platform also includes a positioning component for positioning the mounting bolts during stacking, preventing the mounting bolts from tilting and causing the displacement platform to tilt. The positioning component includes a shim located within a mounting screw hole on the surface of the movable platform and fixedly connected to the movable platform. A trapezoidal block is fixedly connected to the top surface of the shim. There are six sets of trapezoidal blocks arranged in a circular array around the center line of the shim, with a triangular interval between each two sets. A fixing ring is fixedly connected to the top surface of the shim.

[0007] Preferably, an arc-shaped push rod passes through the inner side of the fixing ring, the arc-shaped push rod is slidably connected to the fixing ring, and the arc-shaped push rod has an arc-shaped surface at one end of the gap between the two sets of trapezoidal blocks.

[0008] Preferably, a rubber positioning block is fixedly connected to one end of the arc-shaped push rod near the center of the gasket.

[0009] Preferably, a spring is sleeved on the outer side of the arc-shaped push rod, one end of the spring is fixedly connected to the surface of the rubber positioning block, and the other end of the spring is fixedly connected to the surface of the fixing ring.

[0010] Preferably, a sliding sleeve is slidably connected through the mounting screw hole on the surface of the fixed platform, an anti-detachment plate is fixedly connected to the top surface of the sliding sleeve, a second spring is fixedly connected to the bottom surface of the anti-detachment plate, and the end of the second spring away from the anti-detachment plate is fixedly connected to the inner side of the fixed platform.

[0011] Preferably, a connecting ring is rotatably connected to the bottom surface of the sliding sleeve, a triangular interlocking block is fixedly connected to the bottom surface of the connecting ring, and a sealing ring is fixedly connected to the bottom surface of the connecting ring, with a notch provided on the surface of the sealing ring.

[0012] Preferably, the gaps between the triangular interlocking blocks and the trapezoidal blocks are fitted together, and the number of triangular interlocking blocks is also six sets, with the triangular interlocking blocks arranged in a circumferential array with the center line of the connecting ring as the axis.

[0013] By employing the above technical solution, this utility model provides a precision fine-tuning displacement platform. It possesses at least the following beneficial effects:

[0014] 1. This utility model uses a sliding sleeve to move downwards, compressing the second spring. The downward movement of the sliding sleeve drives the connecting ring and the triangular interlocking block to move downwards. At this time, the triangular interlocking block will gradually insert into the triangular gap between the two sets of trapezoidal blocks on the moving table. Since the trapezoidal blocks are distributed in a circumferential array, the precise interlocking of the triangular interlocking block with them can achieve radial positioning and prevent the bolt from tilting. At the same time, the sealing ring at the bottom of the connecting ring contacts the gasket to form a seal, and its notch can prevent air pressure from hindering the downward pressing process. During the insertion process of the triangular interlocking block, its inclined surface will squeeze the arc-shaped end of the arc-shaped push rod in the gap of the trapezoidal block, forcing the arc-shaped push rod to slide towards the inside of the fixed ring, compressing the first spring. The rubber positioning block at the end of the arc-shaped push rod will then contract inwards, forming an elastic clamp on the bolt head and further preventing the bolt from swaying.

[0015] 2. Through the constraint of the positioning components, the overall stability of the stacked platform is guaranteed. The entire mechanism achieves rapid alignment, anti-tilting and stable connection when stacking multiple platforms through the geometric interlocking of trapezoidal blocks and triangular interlocking blocks, the elastic positioning of spring one and rubber positioning blocks, and the continuous pressing force of spring two. Attached Figure Description

[0016] The accompanying drawings, which are included to provide a further understanding of the present invention, form part of this application:

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a partially enlarged structural diagram of the top surface of this utility model;

[0019] Figure 3 This is a partially enlarged structural diagram of the bottom surface of this utility model;

[0020] Figure 4 This is an enlarged cross-sectional view of the mobile platform in this utility model;

[0021] Figure 5 This is an enlarged cross-sectional view of the fixed platform in this utility model.

[0022] In the diagram: 1. Fixed platform; 2. Positioning assembly; 21. Gasket; 22. Trapezoidal block; 23. Fixing ring; 24. Arc-shaped push rod; 25. Rubber positioning block; 26. Spring 1; 27. Sliding sleeve; 28. Anti-detachment plate; 29. ​​Spring 2; 210. Connecting ring; 211. Triangular interlocking block; 212. Sealing ring; 213. Notch; 3. Fixing block; 4. Micrometer; 5. L-shaped push block; 6. Moving platform; 9. Mounting screw hole. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] A precision fine-tuning displacement platform, such as Figure 1 - Figure 5As shown, the system includes a fixed platform 1 and a movable platform 6. Both the fixed platform 1 and the movable platform 6 have mounting screw holes 9 on their surfaces. A fixing block 3 is fixedly connected to the side of the fixed platform 1, and a micrometer 4 is mounted on the surface of the fixing block 3. An L-shaped push block 5 is fixedly connected to the side of the movable platform 6, and the linkage shaft of the micrometer 4 is fixedly connected to the L-shaped push block 5. The system also includes a positioning component 2, which positions the mounting bolts during stacking of the displacement platform to prevent tilting of the mounting bolts and thus tilting of the displacement platform. The positioning component 2 includes a gasket 21, which is located within the mounting screw holes 9 on the surface of the movable platform 6 and is fixedly connected to the movable platform 6. A trapezoidal block 22 is fixedly connected to the top surface of the gasket 21. There are six sets of trapezoidal blocks 22, arranged in a circular array around the center line of the gasket 21, with a triangular interval between each two sets of trapezoidal blocks. A fixing ring 23 is fixedly connected to the top surface of the gasket 21. An arc-shaped push rod 24 passes through the inner side of the fixing ring 23. The arc-shaped push rod 24 is slidably connected to the fixing ring 23. The end of the arc-shaped push rod 24 located between the two sets of trapezoidal blocks 22 has an arc-shaped surface. A rubber positioning block 25 is fixedly connected to the end of the arc-shaped push rod 24 near the center of the gasket 21. Since the trapezoidal blocks 22 are distributed in a circumferential array, the triangular fitting block 211 can be precisely fitted with them to achieve radial positioning and prevent the bolt from tilting. At the same time, the sealing ring 212 at the bottom of the connecting ring 210 contacts the gasket 21 to form a seal. Its notch 213 can prevent air pressure from hindering the downward pressing process. During the insertion of the triangular fitting block 211, its inclined surface will squeeze the arc-shaped end of the arc-shaped push rod 24 in the gap of the trapezoidal blocks 22, forcing the arc-shaped push rod 24 to slide inward to the fixing ring 23. A spring 26 is sleeved on the outer side of the arc-shaped push rod 24. One end of the spring 26 is fixedly connected to the surface of the rubber positioning block 25, and the other end of the spring 26 is fixedly connected to the surface of the fixing ring 23. A sliding sleeve 27 is slidably connected through the mounting screw holes 9 on the surface of the fixed platform 1. An anti-detachment plate 28 is fixedly connected to the top surface of the sliding sleeve 27, and a second spring 29 is fixedly connected to the bottom surface of the anti-detachment plate 28. Due to the constraint of the positioning component 2, the overall stability of the stacked platform is guaranteed. The entire mechanism achieves rapid alignment, anti-tilting, and stable connection when stacking multiple platforms through the geometric interlocking of the trapezoidal block 22 and the triangular interlocking block 211, the elastic positioning of the first spring 26 and the rubber positioning block 25, and the continuous pressing force of the second spring 29. The end of the second spring 29 away from the anti-detachment plate 28 is fixedly connected to the inner side of the fixed platform 1. A connecting ring 210 is rotatably connected to the bottom surface of the sliding sleeve 27, and a triangular interlocking block 211 is fixedly connected to the bottom surface of the connecting ring 210. First, the fixed platform 1 of the upper platform is aligned with the moving platform 6 of the lower platform through the mounting screw holes 9.When the mounting bolt passes through the mounting screw hole 9 of the fixed platform 1, it pushes the sliding sleeve 27 downward, compressing the second spring 29. The downward movement of the sliding sleeve 27 causes the connecting ring 210 and the triangular fitting block 211 to move downward. At this time, the triangular fitting block 211 gradually inserts into the triangular gap between the two sets of trapezoidal blocks 22 on the pad 21 of the moving platform 6. The bottom surface of the connecting ring 210 is fixedly connected to a sealing ring 212, and the surface of the sealing ring 212 has a notch 213. The gap between the triangular fitting block 211 and the trapezoidal block 22 is fitted together, and there are also six sets of triangular fitting blocks 211. The triangular fitting blocks 211 are arranged in a circular array with the center line of the connecting ring 210 as the axis.

[0025] When using the precision fine-tuning displacement platform of this utility model, if the displacement platforms need to be stacked, the fixed platform 1 of the upper platform is first aligned with the moving platform 6 of the lower platform through the mounting screw holes 9. When the mounting bolt passes through the mounting screw hole 9 of the fixed platform 1, it pushes the sliding sleeve 27 downward, compressing the spring 29. The downward movement of the sliding sleeve 27 causes the connecting ring 210 and the triangular fitting block 211 to move downward. At this time, the triangular fitting block 211 gradually inserts into the triangular gap between the two sets of trapezoidal blocks 22 on the gasket 21 of the moving platform 6. Since the trapezoidal blocks 22 are distributed in a circumferential array, the precise engagement of the triangular fitting block 211 with them can achieve radial positioning and prevent the bolt from tilting. At the same time, the sealing ring 212 at the bottom of the connecting ring 210 contacts the gasket 21 to form a seal, and its notch 213 can prevent air pressure from hindering the downward pressing process. During the insertion process of the triangular fitting block 211, its inclined surface will squeeze the arc-shaped end of the arc-shaped push rod 24 in the gap of the trapezoidal block 22, forcing the arc-shaped push rod 24 to slide inward toward the fixed ring 23, pressing... As the spring 26 contracts, the rubber positioning block 25 at the end of the arc-shaped push rod 24 contracts inward, forming an elastic clamp on the bolt head to further prevent bolt sway. When the bolt is fully tightened, the elastic force of the spring 29 pushes the sliding sleeve 27 upward through the anti-disengagement plate 28, so that the triangular interlocking block 211 and the trapezoidal block 22 remain tightly interlocked, ensuring that there is no looseness between the platforms. The linkage shaft of the micrometer 4 drives the moving platform 6 to make precise fine adjustments relative to the fixed platform 1 through the L-shaped push block 5. Due to the constraint of the positioning component 2, the overall stability of the stacked platform is guaranteed. The whole mechanism achieves rapid alignment, anti-tilting and stable connection when stacking multiple platforms through the geometric interlocking of the trapezoidal block 22 and the triangular interlocking block 211, the elastic positioning of the spring 26 and the rubber positioning block 25, and the continuous pressing force of the spring 29.

Claims

1. A precision fine adjustment displacement platform, comprising a fixed table (1) and a moving table (6), the surfaces of the fixed table (1) and the moving table (6) are provided with mounting screw holes (9), characterized in that: The side surface of the fixed table (1) is fixedly connected with a fixed block (3), the surface of the fixed block (3) is provided with a micrometer (4), the side surface of the moving table (6) is fixedly connected with an L-shaped push block (5), and the linkage shaft of the micrometer (4) is fixedly connected with the L-shaped push block (5); Further comprising a positioning assembly (2) for positioning the mounting bolt when the displacement platform is stacked to prevent the displacement platform from being installed obliquely due to the oblique mounting bolt; The positioning assembly (2) comprises a gasket (21) located in a mounting screw hole (9) formed on the surface of the moving table (6), and the gasket (21) is fixedly connected with the moving table (6); the top surface of the gasket (21) is fixedly connected with a trapezoidal block (22); the number of the trapezoidal blocks (22) is six groups, and the six groups of trapezoidal blocks (22) are arranged in a circular array with the center line of the gasket (21) as the axis; the interval between every two groups of trapezoidal blocks (22) is triangular; and the top surface of the gasket (21) is fixedly connected with a fixed ring (23).

2. The precision fine adjustment displacement platform according to claim 1, wherein: The inner side of the fixed ring (23) penetrates an arc surface push rod (24), the arc surface push rod (24) is in sliding connection with the fixed ring (23), and one end of the arc surface push rod (24) located at the gap between the two groups of trapezoidal blocks (22) is an arc surface.

3. The precision fine adjustment displacement platform according to claim 2, wherein: The end of the arc surface push rod (24) close to the center of the gasket (21) is fixedly connected with a rubber positioning block (25).

4. The precision fine adjustment displacement platform according to claim 2, wherein: The outer side of the arc surface push rod (24) is sleeved with a spring (26), one end of the spring (26) is fixedly connected with the surface of the rubber positioning block (25), and the other end of the spring (26) is fixedly connected with the surface of the fixed ring (23).

5. The precision fine adjustment displacement platform according to claim 1, wherein: The mounting screw hole (9) formed on the surface of the fixed table (1) penetrates and is in sliding connection with a sliding sleeve (27), the top surface of the sliding sleeve (27) is fixedly connected with an anti-dropping plate (28), the bottom surface of the anti-dropping plate (28) is fixedly connected with a spring (29), and the end of the spring (29) away from the anti-dropping plate (28) is fixedly connected with the inner side of the fixed table (1).

6. A precision fine adjustment displacement platform according to claim 5, wherein: The bottom surface of the sliding sleeve (27) is rotatably connected with a connecting ring (210), the bottom surface of the connecting ring (210) is fixedly connected with a triangular embedded block (211), the bottom surface of the connecting ring (210) is fixedly connected with a sealing ring (212), and the surface of the sealing ring (212) is provided with a notch (213).

7. A precision fine adjustment displacement platform according to claim 6, characterized in that: The gap between the triangular embedded block (211) and the trapezoidal block (22) is embedded, and the number of the triangular embedded blocks (211) is also six groups, and the triangular embedded blocks (211) are arranged in a circular array with the center line of the connecting ring (210) as the axis.

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