Grinding device of electrostatic chuck

Abstract

The utility model discloses a grinding device of an electrostatic chuck. The grinding device comprises a driving part, a grinding assembly, an adjusting assembly and a plurality of compensation assemblies. The driving part provides power; the grinding assembly comprises a swing arm connected with the driving part, a fixing disc connected with the swing arm and a grinding disc. And the adjusting assembly is fixed on the swing arm. Each compensation assembly comprises an outer-layer loop bar, an inner-layer loop bar and a universal presser foot, the outer-layer loop bar is of a hollow structure, and the top end of the outer-layer loop bar is connected with the adjusting assembly; the top end of the inner-layer loop bar is inserted into the outer-layer loop bar, and a spherical connecting piece is arranged at the bottom end of the inner-layer loop bar; the inner-layer sleeve rod is elastically connected with the outer-side sleeve rod; the universal presser foot is fixed to the upper surface of the fixed disc, and the upper surface of the universal presser foot is connected with the spherical connecting piece, so that the inner-layer loop bar rotates with the spherical connecting piece as the circle center. Pressure is applied to the fixed disc through relative movement of the inner-layer sleeve rod and the outer-layer sleeve rod, and an included angle is prevented from being generated between the electrostatic chuck and the grinding disc.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor equipment technical field, concretely relates to a kind of grinding device of electrostatic chuck. BACKGROUND

[0002] Electrostatic Chuck (ESC) uses electrostatic adsorption technology, which is a non-contact clamping technology using electrostatic force to fix workpieces. It is particularly suitable for ultra-precision machining, semiconductor wafers, optical glass and other materials sensitive to surface damage. The good flatness ensures uniform gap between the electrostatic chuck and the adsorbed object, resulting in uniform adsorption force and increased effective adsorption area, improving the reliability of adsorption. Therefore, the flatness of the electrostatic chuck is crucial.

[0003] In the process of grinding the electrostatic chuck, a swing grinder is used to grind the electrostatic chuck. However, in the prior art, the swing arm may move too fast, causing the electrostatic chuck to not move due to inertia, causing the swing arm to deviate from the vertical direction due to inertia, resulting in uneven stress on the electrostatic chuck. When the swing arm drives the electrostatic chuck from a stationary state to a moving state, it causes a 1° angle between the electrostatic chuck and the grinding disc, affecting the flatness of the electrostatic chuck processing surface and causing poor electrostatic chuck processing precision. Therefore, a grinding device is needed to prevent the electrostatic chuck and the grinding disc from forming an angle, ensuring the processing precision of the electrostatic chuck. SUMMARY

[0004] The utility model aims to provide a kind of grinding device of electrostatic chuck, realize the compensation of pressure in the process of grinding electrostatic chuck, and then improve the processing precision of electrostatic chuck.

[0005] To achieve the above purpose, the utility model provides a kind of grinding device of electrostatic chuck, comprising:

[0006] Drive part, provide power;

[0007] Grinding assembly, including: swing arm connected with drive part, fixed disc connected with the swing arm, and grinding disc for grinding electrostatic chuck;The electrostatic chuck is fixed on the lower surface of fixed disc, placed between the fixed disc and the grinding disc;

[0008] Adjusting assembly, fixed on the swing arm;

[0009] A plurality of compensation assemblies are connected between the adjusting assembly and the fixed disc, each compensation assembly provides pressure compensation for the grinding assembly, comprising:

[0010] Outer sleeve rod, hollow structure, its top end is connected with the adjusting assembly;

[0011] The inner sleeve rod is inserted into the outer sleeve rod at its top end, and is provided with a spherical connector at its bottom end;

[0012] The elastic member is sleeved on the inner sleeve rod, and is connected to the inner sleeve rod at its bottom end and to the outer sleeve rod at its top end, and exerts pressure on the fixed disc when the inner sleeve rod and the outer sleeve rod move relative to each other.

[0013] The universal pressure foot has a planar structure on its lower surface, and is fixed to the upper surface of the fixed disc; and its upper surface is connected to the spherical connector, so that the inner sleeve rod rotates around the spherical connector as the center.

[0014] Optionally, a plurality of recesses are symmetrically arranged on the inner wall of the outer sleeve rod along its axial direction; the top end of the inner sleeve rod is provided with a pressure adjusting hole in the radial direction, and an elastic rod is arranged in the pressure adjusting hole, with both ends of the elastic rod fixed in the symmetrically arranged recesses on the inner wall of the outer sleeve rod to connect the inner sleeve rod and the outer sleeve rod; wherein the elastic rod can be stretched along its length direction, and generates tension and exerts pressure on the fixed disc when the inner sleeve rod and the outer sleeve rod move relative to each other.

[0015] Optionally, a plurality of symmetrically arranged recesses are uniformly arranged along the length direction of the outer sleeve rod; and the elastic rod is fixed in the corresponding recesses to ensure that the length of the compensation assembly in a natural state is greater than the length of the swing arm.

[0016] Optionally, a boss is arranged at the bottom end of the inner sleeve rod.

[0017] The bottom end of the elastic member is connected to the boss, and the top end of the elastic member is connected to the bottom edge of the outer sleeve rod.

[0018] Optionally, the inner diameter of the elastic member is greater than the outer diameter of the inner sleeve rod, and the outer diameter of the elastic member matches the outer diameter of the outer sleeve rod.

[0019] Optionally, the upper surface of the universal pressure foot is provided with a second positioning groove, and the size of the second positioning groove matches the size of the spherical connector, so that the second positioning groove can be sleeved on the surface of the spherical connector.

[0020] Optionally, a first positioning groove is arranged at the center position of the upper surface of the fixed disc.

[0021] The bottom of the swing arm has a spherical structure, and the spherical structure is placed in the first positioning groove.

[0022] Optionally, the adjustment assembly comprises:

[0023] A positioning sleeve is provided with a through hole in its axial direction, and is sleeved on the swing arm through the through hole.

[0024] A support assembly is fixed on the positioning sleeve, comprising a plurality of evenly distributed support rods, one end of each of the support rods is horizontally fixed on the positioning sleeve, and all the support rods are located in the same plane; and an adjusting groove is arranged on the support rod along the length direction of the support rod;

[0025] A plurality of positioning members are arranged, each of the positioning members passes through the adjusting groove and connects the outer sleeve rod of each of the compensation assemblies.

[0026] Optionally, the size of the bottom end of each of the positioning members is smaller than the width of the adjusting groove, the positioning member can pass through the adjusting groove; and the size of the top end of the positioning member is larger than the width of the adjusting groove, so that the depth of the positioning member inserted into the adjusting groove is limited.

[0027] Optionally, the number of the support rods is four, and a scale is marked at the edge of the adjusting groove of each of the support rods; the distance between each of the compensation assemblies fixed on the support rod and the positioning sleeve is the same.

[0028] Compared with the prior art, the technical scheme of the utility model has at least the following beneficial effects:

[0029] The grinding device disclosed by the utility model comprises a plurality of compensation assemblies and adjusting assemblies arranged on the swing arm, the outer sleeve rod and the inner sleeve rod of the compensation assembly are connected through an elastic rod, an elastic member is arranged between the outer sleeve rod and the inner sleeve rod, the outer sleeve rod and the inner sleeve rod can move relative to each other and generate a force along the axis direction of the inner sleeve rod at the same time, the compensation assembly can press the fixing disc through the force, the angle between the fixing disc, the electrostatic chuck and the grinding disc is prevented, the compensation of the pressure during the grinding of the electrostatic chuck is realized, the machining flatness of the electrostatic chuck is met, and the machining precision of the electrostatic chuck is improved.

[0030] The scale is marked on the support rod, the compensation assemblies can be evenly installed on the surface of the fixing disc, and the fixing disc is evenly stressed; meanwhile, the compensation assembly, the support rod and the fixing disc are detachably connected, the compensation assembly can be adjusted according to electrostatic chucks with different sizes, and the compensation assembly has good universality. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1 It is a grinding schematic view of the electrostatic chuck in the prior art.

[0032] Figure 2 It is a structural schematic view of the grinding device of the electrostatic chuck.

[0033] Figure 3 It is a structural schematic view of the adjusting assembly in the grinding device of the electrostatic chuck.

[0034] Figure 4 It is a structural schematic view of the positioning sleeve in the grinding device of the electrostatic chuck.

[0035] Figure 5 The compensation assembly structure schematic view of the grinding device of the electrostatic chuck.

[0036] In the figure, 11-grinding disc, 12-fixed disc, 13-swing arm, 21-positioning sleeve, 211-fixing hole, 212-through hole, 22-supporting rod, 221-adjusting groove, 31-outer sleeve rod, 311-connecting hole, 32-inner sleeve rod, 321-spherical connecting piece, 322- boss, 33-universal presser foot, 34-elastic rod, 35-elastic member, 4-electrostatic chuck. DETAILED DESCRIPTION

[0037] The technical solutions of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0038] In the description of the present application, it should be pointed out that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0039] In the description of the present application, it should be pointed out that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected; it can be directly connected, or indirectly connected through an intermediate medium; it can be the communication between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0040] As Figure 1As shown, existing electrostatic chuck grinding devices utilize a drive component to sequentially move a swing arm 13 and a fixed disk 12, along with the electrostatic chuck 4, in the horizontal direction. This causes the processing surface of the electrostatic chuck 4 to move on the grinding disk 11 of the grinding device, thus achieving grinding of the processing surface of the electrostatic chuck 4. Ideally, during the grinding process of the electrostatic chuck 4, the swing arm 13 remains perpendicular to the fixed disk 12, ensuring uniform force on the surface of the electrostatic chuck 4. However, in actual operation, when the swing arm 13 moves at an excessively high speed, and the electrostatic chuck 4 does not move due to inertia, the swing arm 13 deviates from the vertical direction due to inertia. Since neither the surface of the electrostatic chuck 4 nor the grinding disk 11 is a smooth plane, when the electrostatic chuck 4 changes from a stationary state to a moving state, it easily forms an angle of about 1° with the grinding disk 11. This causes the contact surface between the electrostatic chuck 4 and the grinding disk 11 to change from surface contact to line contact, affecting the grinding of the processing surface of the electrostatic chuck 4 and resulting in poor processing accuracy of the electrostatic chuck 4.

[0041] To solve the above problems, such as Figure 2 As shown, this utility model provides a grinding device for an electrostatic chuck, comprising: a driving unit, a grinding assembly, an adjusting assembly, and several compensation assemblies. The driving unit provides power; the grinding assembly is connected to the driving unit and moves under the drive of the driving unit to grind the processing surface of the electrostatic chuck 4; the adjusting assembly is fixed to the top of the grinding assembly and provides support for the compensation assemblies; each compensation assembly is connected at one end to the adjusting assembly and at the other end to the grinding assembly, providing pressure compensation for the grinding assembly to stabilize the grinding assembly.

[0042] The drive unit provides kinetic energy and is connected to the grinding assembly, enabling the grinding assembly to move vertically and horizontally.

[0043] like Figure 2 As shown, the grinding assembly includes a grinding disc 11, a fixed disc 12, and a swing arm 13. The grinding disc 11 is placed horizontally and is used to grind the processing surface of the electrostatic chuck 4. The fixed disc 12 is horizontally positioned, with a first positioning groove at the center of its upper surface, and the electrostatic chuck 4 is fixed to its lower surface, placing the electrostatic chuck 4 between the grinding disc 11 and the fixed disc 12. The bottom of the swing arm 13 has a spherical structure and is placed in the first positioning groove, connecting the swing arm 13 to the fixed disc 12; the top of the swing arm 13 is connected to the driving unit, which drives the swing arm 13 to move horizontally.

[0044] Furthermore, the size of the fixing plate 12 matches the size of the electrostatic chuck 4; and the ratio of the size of the grinding plate 11 to the size of the electrostatic chuck 4 is greater than or equal to 2.

[0045] Furthermore, the lower surface edge of the fixed disk 12 is provided with a plurality of evenly distributed limiting members, and the position of the limiting members matches the position of the limiting hole at the edge of the electrostatic chuck 4, so that the limiting members of the fixed disk 12 are inserted into the limiting hole of the electrostatic chuck 4, thereby realizing the limiting of the electrostatic chuck 4 by the fixed disk 12.

[0046] Furthermore, the size of the first positioning groove matches the size of the spherical structure at the bottom of the swing arm 13, enabling the swing arm 13 to rotate with its bottom end as the center.

[0047] In a preferred embodiment, the grinding disc 11 is a ceramic disc.

[0048] like Figures 2-4 As shown, the adjustment assembly is fixed to the swing arm 13 and includes: a positioning sleeve 21, a support assembly, and several positioning elements. See also Figure 4 The positioning sleeve 21 has a through hole 212 in the axial direction, through which it is sleeved onto the swing arm 13; and the surface of the positioning sleeve 21 has a fixing hole 211, which cooperates with a fixing component to fix the positioning sleeve 21 and the swing arm 13 together. See also Figure 3 The support assembly extends outward from the swing arm 13 as its axis and includes several evenly distributed support rods 22. One end of each support rod 22 is horizontally fixed to the positioning sleeve 21, and all support rods 22 are located in the same plane. Each support rod 22 has an adjustment groove 221 along its length. The bottom dimension of each positioning element is smaller than the width of the adjustment groove 221, allowing it to pass through the adjustment groove 221, while the top dimension is larger than the width of the adjustment groove 221, limiting the depth to which the positioning element can be inserted into the adjustment groove 221.

[0049] In one embodiment, one end of all the support rods 22 is welded to the positioning sleeve 21.

[0050] In another embodiment, the support rods 22 and the positioning sleeves 21 of the support assembly are integrally formed.

[0051] In a preferred embodiment, a compensation component is connected to the adjustment groove 221 of each support rod 22 via a positioning member, and the distance between the fixed position of each compensation component and the positioning sleeve 21 is the same, ensuring that the electrostatic chuck 4 is subjected to uniform force.

[0052] Furthermore, there are four support rods 22, which are respectively located on the front, rear, left and right sides of the outer surface of the positioning sleeve 21; and each support rod 22 has a scale marked on the edge of the adjustment groove 221 to facilitate the positioning of the compensation component in the adjustment groove 221.

[0053] like Figure 2 and Figure 5As shown, each compensation component includes: an outer sleeve rod 31, an inner sleeve rod 32, and a universal pressure foot 33. The outer sleeve rod 31 has a hollow structure with an opening at its bottom to allow the inner sleeve rod 32 to be inserted. Its top end has a connecting hole 311 for inserting a positioning element, allowing the outer sleeve rod 31 to connect to the support rod 22 via the positioning element. The top end of the inner sleeve rod 32 is inserted into the bottom opening of the outer sleeve rod 31 and is elastically connected to the outer sleeve rod 31, allowing the inner sleeve rod 32 to move radially within the outer sleeve rod 31. Simultaneously, the bottom end of the inner sleeve rod 32 has a ball-shaped connector 321 for connecting to the universal pressure foot 33. The lower surface of the universal presser foot 33 is a planar structure, allowing the universal presser foot 33 to be placed on the surface of the fixed plate 12, and the two can be connected by a cloth tape; the upper surface of the universal presser foot 33 is provided with a second positioning groove, and the size of the second positioning groove matches the size of the spherical connector 321, so that it can be sleeved on the surface of the spherical connector 321, allowing the inner sleeve rod 32 to rotate around the spherical connector 321 as the center.

[0054] In a preferred embodiment, for the elastic connection between the outer sleeve rod 31 and the inner sleeve rod 32, the inner wall of the outer sleeve rod 31 is symmetrically provided with several grooves along its axial direction for connecting the inner sleeve rod 32. These symmetrically arranged grooves are evenly distributed along the length of the outer sleeve rod 31, allowing the two ends of the elastic rod 34 to be fixed in the symmetrical grooves at different positions according to the length of the inner sleeve rod 32. Furthermore, the top end of the inner sleeve rod 32 is provided with a pressure adjusting hole along the radial direction, and the pressure adjusting hole contains the elastic rod 34 (see [reference]). Figure 5 The elastic rod 34 can be stretched along its length. When the elastic rod 34 is in its natural state (i.e., the elastic rod 34 is not subjected to external force), the two ends of the elastic rod 34 are respectively fixed in the grooves symmetrically arranged on the inner wall of the outer sleeve rod 31, connecting the inner sleeve rod 32 and the outer sleeve rod 31. When the inner sleeve rod 32 can move relative to the outer sleeve rod 31 along its length, the elastic rod 34 can be stretched along its length, and at this time the two ends of the elastic rod 34 are still fixed in the symmetrical grooves. The outer sleeve rod 31 and the inner sleeve rod 32 are reset by the influence of the elastic rod 34.

[0055] In a preferred embodiment, in addition to the method of connecting the universal presser foot 33 and the fixed plate 12 with cloth tape as mentioned above, a fastener can also be used to fix the universal presser foot 33 and the fixed plate 12 together to prevent relative movement between the universal presser foot 33 and the fixed plate 12.

[0056] Furthermore, the connecting hole 311 has internal threads, and the surface of the positioning member has matching threads, so that the connecting hole 311 and the positioning member are connected together by the threads.

[0057] In a preferred embodiment, for the elastic connection between the outer sleeve rod 31 and the inner sleeve rod 32, a boss 322 is provided at the bottom end of the inner sleeve rod 32, and each compensation component further includes an elastic element 35. The elastic element 35 (e.g., a spring) is sleeved on the inner sleeve rod 32, and the bottom end of the elastic element is connected to the boss 322, while its top end is connected to the bottom edge of the outer sleeve rod 31. The inner diameter of the elastic element 35 is larger than the outer diameter of the inner sleeve rod 32, and the outer diameter of the elastic element 35 matches the outer diameter of the outer sleeve rod 31. This ensures that when the inner sleeve rod 32 is continuously inserted into the outer sleeve rod 31, the elastic element 35 will not extend into the outer sleeve rod 31, but will also be compressed due to the pressure of the outer sleeve rod 31, generating a reverse force.

[0058] Furthermore, the elastic rod 34 and the elastic element 35 can be used simultaneously to achieve an elastic connection between the outer sleeve rod 31 and the inner sleeve rod 32, thereby enhancing the interaction force between the outer sleeve rod 31 and the inner sleeve rod 32 and increasing the pressure applied by the compensation component to the electrostatic chuck 4.

[0059] Furthermore, when the compensation component is in its initial state, both the elastic element 35 and the elastic rod 34 are in their natural state (i.e., the elastic element 35 and the elastic rod 34 are not subjected to any force). The length of the compensation component is greater than the length of the swing arm 13, ensuring that the elastic element 35 is always in a compressed state and the elastic rod 34 is always in a stretched state when the compensation component is in operation. This ensures that the compensation component remains operational even when the swing arm 13 forms an angle with the vertical direction (this angle is less than or equal to 30°), generating a downward force that presses the electrostatic chuck 4 onto the grinding disc 11 via the universal pressure foot 33 and the fixing plate 12. To ensure that the length of the compensation component in its natural state is greater than the length of the swing arm 13, the position of the elastic rod 34 fixed in the groove on the inner wall of the outer sleeve rod 31 can be adjusted.

[0060] See also Figure 5When using the compensation component, the elastic element 35 is fitted onto the inner sleeve rod 32, and the outer sleeve rod 31 and the inner sleeve rod 32 are connected by the elastic rod 34. A positioning element passes sequentially through the adjusting groove 221 and the connecting hole 311 of the outer sleeve rod 31, connecting the compensation component and the support rod 22. The universal pressure foot 33 is placed on the surface of the fixed plate 12, and after the bottom end of the swing arm 13 is inserted into the first positioning groove of the fixed plate 12, the spherical connector 321 of the inner sleeve rod 32 can be inserted into the second positioning groove of the universal pressure foot 33. Since the length of the compensation component in its initial state is greater than the length of the swing arm 13, the outer sleeve rod 31 and the inner sleeve rod 32 move in opposite directions to shorten the length of the compensation component during the process of inserting the bottom end of the swing arm 13 into the first positioning groove of the fixed plate 12. At this time, the elastic element 35 is in a compressed state, while the elastic rod 34 is in a stretched state. Since the compensation component is limited by the universal pressure foot 33 and the support rod 22, the elastic element 35 and the elastic rod 34 generate an outward force along the length direction of the inner sleeve rod 32, causing the compensation component to press the universal pressure foot 33, thereby making the fixed plate 12 and the electrostatic chuck 4 fit tightly against the grinding plate. When the swing arm 13 moves too fast, causing the electrostatic chuck 4 and the grinding disc 11 to form an angle, the swing arm 13 deviates from the vertical direction and forms an angle (the angle between the swing arm 13 and the vertical direction is less than or equal to 30°). At this time, the compensation component exerts an outward force along the length of the compensation component, and the downward component of this force is greater than its horizontal component, causing the compensation component to exert a downward force on the universal pressure foot 33, thereby pressing the fixed disc 12 and the electrostatic chuck 4 tightly, and finally making the electrostatic chuck 4 and the grinding disc 11 fit tightly together.

[0061] See also Figure 2 During the grinding process of the electrostatic chuck 4, the electrostatic chuck 4 is placed on the grinding disk 11, and the surface of the electrostatic chuck 4 to be processed is pressed tightly against the grinding disk 11. The limiting member at the lower edge of the fixing disk 12 is inserted into the limiting hole at the edge of the electrostatic chuck 4, so that the fixing disk 12 and the electrostatic chuck 4 are connected together. At the same time, in order to achieve a tight fit between the fixing disk 12 and the electrostatic chuck 4, cloth tape can be used to attach the edge of the fixing disk 12 to the edge of the electrostatic chuck 4. Then, the positioning sleeve 21 is placed on the swing arm 13, and the positioning components are sequentially passed through the connecting groove of the support rod 22 and the connecting hole 311 of the outer sleeve rod 31, with the distance between each positioning component and the positioning sleeve 21 being equal, so that the compensation components are evenly distributed above the fixed plate 12, ensuring that the fixed plate 12 is subjected to uniform force; the universal pressure foot 33 is fixed to the fixed plate 12 with cloth tape, and the swing arm 13 is lowered so that the bottom end of the swing arm 13 is inserted into the first positioning groove, and the ball-shaped connector 321 of the inner sleeve rod 32 is inserted into the second positioning groove, thus completing the connection of the grinding component and the compensation component.

[0062] When the electrostatic chuck 4 begins to grind, the swing arm 13 drives the fixed plate 12, which in turn drives the electrostatic chuck 4 to move on the grinding plate 11. If the swing arm 13 moves too fast, it will form an angle with the vertical direction. At this time, the compensation component tilts, and the elastic element 35 remains compressed while the elastic rod 34 remains stretched, so that the compensation component can generate a force along the length of the inner sleeve rod 32. Since the angle between the swing arm 13 and the vertical direction is less than or equal to 30°, the vertical component of the force generated by the compensation component is greater than its horizontal component, so that the compensation component always exerts a downward force on the fixed plate 12, preventing the swing arm 13 from moving too fast and causing the electrostatic chuck 4 to form an angle with the grinding plate 11, thereby improving the grinding accuracy of the electrostatic chuck 4.

[0063] In summary, the grinding device of this utility model, by setting an adjustment component and several compensation components on the swing arm, and in which the outer sleeve rod and the inner sleeve rod of the compensation component are connected by an elastic rod, and an elastic element is set between them, prevents the fixed plate and the electrostatic chuck from forming an angle with the grinding plate, realizes the compensation of pressure during the grinding process of the electrostatic chuck, meets the high requirements of the flatness of the electrostatic chuck, and thus improves the processing accuracy of the electrostatic chuck.

[0064] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A grinding device with an electrostatic chuck, characterized in that, include: The drive unit provides power; The grinding assembly includes: a swing arm connected to a drive unit, a fixed plate connected to the swing arm, and a grinding plate for grinding an electrostatic chuck; the electrostatic chuck is fixed to the lower surface of the fixed plate and placed between the fixed plate and the grinding plate. The adjustment component is fixed to the swing arm; A plurality of compensation components are connected between the adjusting component and the fixed plate, each of the compensation components providing pressure compensation for the grinding component, including: The outer sleeve rod has a hollow structure, and its top end is connected to the adjustment component. The inner sleeve rod has its top end inserted into the outer sleeve rod, and its bottom end is provided with a ball-shaped connector; An elastic element is sleeved on the inner sleeve rod, with its bottom end connected to the inner sleeve rod and its top end connected to the outer sleeve rod. When the inner sleeve rod and the outer sleeve rod move relative to each other, the elastic element is compressed to apply pressure to the fixed plate. The universal pressure foot has a flat lower surface and is fixed to the upper surface of the fixed plate; its upper surface is connected to the spherical connector, so that the inner sleeve rod rotates around the spherical connector.

2. The grinding apparatus for the electrostatic chuck according to claim 1, characterized in that, The inner wall of the outer sleeve is symmetrically provided with several grooves along its axial direction; the top end of the inner sleeve is provided with a pressure adjustment hole along the radial direction, and an elastic rod is provided in the pressure adjustment hole. The two ends of the elastic rod are respectively fixed in the grooves symmetrically provided on the inner wall of the outer sleeve, connecting the inner sleeve and the outer sleeve; wherein, the elastic rod can be stretched along its length direction, and when the inner sleeve and the outer sleeve move relative to each other, the elastic rod is stretched and applies pressure to the fixed plate.

3. The grinding apparatus for the electrostatic chuck according to claim 2, characterized in that, Several symmetrically arranged grooves are evenly distributed along the length of the outer sleeve rod; and the elastic rod is fixed on the corresponding groove to ensure that the length of the compensation component in its natural state is greater than the length of the swing arm.

4. The grinding apparatus for the electrostatic chuck according to claim 1, characterized in that, A boss is provided at the bottom end of the inner sleeve rod; The bottom end of the elastic element is connected to the boss, and its top end is connected to the bottom edge of the outer sleeve rod.

5. The grinding apparatus for the electrostatic chuck according to claim 1, characterized in that, The inner diameter of the elastic element is larger than the outer diameter of the inner sleeve rod, and the outer diameter of the elastic element matches the outer diameter of the outer sleeve rod.

6. The grinding apparatus for the electrostatic chuck according to claim 1, characterized in that, The upper surface of the universal presser foot is provided with a second positioning groove, and the size of the second positioning groove matches the size of the spherical connector, so that it can be fitted onto the surface of the spherical connector.

7. The grinding apparatus for the electrostatic chuck according to claim 1, characterized in that, A first positioning groove is provided at the center of the upper surface of the fixed plate; The bottom of the swing arm is a spherical structure, which is placed in the first positioning groove.

8. The grinding apparatus for the electrostatic chuck according to claim 1, characterized in that, The adjustment component includes: A positioning sleeve has a through hole in its axial direction, and is sleeved on the swing arm through the through hole; The support assembly, fixed on the positioning sleeve, includes several evenly distributed support rods, one end of each support rod being horizontally fixed on the positioning sleeve, and all support rods being located in the same plane; and each support rod is provided with an adjustment groove along its length. A plurality of positioning elements, each of which passes through the adjustment groove and is connected to the outer sleeve of each compensation component.

9. The grinding apparatus for the electrostatic chuck according to claim 8, characterized in that, The bottom of each positioning element is smaller than the width of the adjustment groove, allowing it to pass through the adjustment groove; and the top of each positioning element is larger than the width of the adjustment groove, limiting the depth to which the positioning element can be inserted into the adjustment groove.

10. The grinding apparatus for the electrostatic chuck according to claim 8, characterized in that, There are four support rods, and each support rod has a scale marked on the edge of its adjustment groove; the distance between each compensation component fixed on the support rod and the positioning sleeve is the same.

Images