Wafer detection jig

Abstract

The utility model relates to the technical field of wafer detection equipment, and discloses a wafer detection jig which comprises a supporting bottom plate and a lamp bar, the top of the supporting bottom plate is connected with a positioning assembly, the top of the supporting bottom plate is fixedly connected with a supporting frame through bolts, and one end of the supporting frame is connected with an adjusting assembly; the positioning assembly comprises a supporting rod which is rotationally connected to the top of the supporting bottom plate, a rotating disc is fixedly connected to the top of the supporting rod, and an arc-shaped groove is formed in the rotating disc. Compared with the prior art, the wafer detection jig has the advantages that in the wafer detection jig, wafers of different sizes can be conveniently straightened to central positions by using the positioning assembly, so that subsequent detection is facilitated; and by using the adjusting assembly, the illumination position of the wafer can be adjusted conveniently, and defects at different positions can be detected more clearly.

Description

Technical Field

[0001] This utility model relates to the field of wafer inspection equipment technology, and in particular to a wafer inspection fixture. Background Technology

[0002] After the semiconductor wafer fabrication process is completed, the wafers need to be inspected to confirm their quality. The typical procedure involves placing the wafer on an inspection platform, where a visual recognition device photographs and inspects it. The images are then analyzed and compared to determine the wafer's suitability for inspection. Before inspection, the wafer needs to be properly positioned.

[0003] Existing wafer inspection fixtures are not convenient for centering wafers of different sizes, resulting in incomplete subsequent inspections; they also cannot easily adjust the illumination position on the wafer, making it impossible to perform comprehensive illumination inspections on different parts of the wafer, thus the device has certain shortcomings. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a wafer inspection fixture.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a wafer inspection fixture, comprising a support base plate and a lamp rod, wherein a positioning component is connected to the top of the support base plate, and a support frame is fixedly connected to the top of the support base plate by bolts, and an adjustment component is connected to one end of the support frame;

[0006] The positioning component includes a support rod rotatably connected to the top of a support base plate. A turntable is fixedly connected to the top of the support rod, and an arc-shaped groove is formed inside the turntable. A support column is fixedly connected to the top of the support base plate, and a fixing sleeve is fixedly connected to the top of the support column. A sliding groove is formed inside the fixing sleeve, and a sliding plate is slidably connected inside the sliding groove. A sliding rod is fixedly connected to one end of the sliding plate, and a clamping plate is fixedly connected to the other end of the sliding plate. The sliding rod slides inside the arc-shaped groove, and a drive component is externally connected to the support rod.

[0007] As a further description of the above technical solution:

[0008] The adjustment assembly includes a side plate, which is fixedly connected to one end of the support frame. A connecting block is fixedly connected to the side of the side plate, and a second worm gear is rotatably connected inside the connecting block. A fixed crossbar is rotatably connected to the side of the side plate, and a second worm wheel is fixedly connected to the outside of the fixed crossbar. The second worm wheel meshes with the second worm gear.

[0009] As a further description of the above technical solution:

[0010] The drive assembly includes a first worm gear, which is fixedly connected to the outer wall of the support rod. A fixing block is fixedly connected to the top of the support base plate, and a first worm is rotatably connected inside the fixing block. The first worm meshes with the first worm gear.

[0011] As a further description of the above technical solution:

[0012] A handle is fixedly connected to one end of the first worm gear.

[0013] As a further description of the above technical solution:

[0014] A crank handle is fixedly connected to one end of the second worm gear.

[0015] As a further description of the above technical solution:

[0016] The clamping plate is fixedly connected to the side with anti-slip particles, and multiple sets of anti-slip particles are provided.

[0017] As a further description of the above technical solution:

[0018] The lamp stick is fixedly connected to one end of the support frame.

[0019] This utility model has the following beneficial effects:

[0020] 1. In this utility model, in the wafer inspection fixture, a positioning component is used to facilitate the alignment of wafers of different sizes to the center position for subsequent inspection.

[0021] 2. In this utility model, the use of an adjustment component in the wafer inspection fixture facilitates the adjustment of the illumination position on the wafer, enabling clearer detection of defects at different locations. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of a wafer inspection fixture proposed in this utility model. Figure 1 ;

[0023] Figure 2 This is a schematic diagram of the overall structure of a wafer inspection fixture proposed in this utility model. Figure 2 ;

[0024] Figure 3 This utility model proposes a wafer inspection fixture. Figure 1 Enlarged view of point A in the middle;

[0025] Figure 4 This utility model proposes a wafer inspection fixture. Figure 1 Enlarged view of section B in the middle.

[0026] Legend:

[0027] 1. Support base plate; 2. Support rod; 3. Turntable; 4. Arc groove; 5. Fixing sleeve; 6. Slide groove; 7. Slide plate; 8. Slide rod; 9. Clamping plate; 10. Anti-slip particles; 11. Fixing block; 12. First worm gear; 13. First worm wheel; 14. Handle; 15. Support frame; 16. Side plate; 17. Connecting block; 18. Second worm gear; 19. Fixing crossbar; 20. Second worm wheel; 21. Crank handle; 22. Light stick; 23. Support column. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Reference Figures 1-4 An embodiment of this utility model is provided: a wafer inspection fixture, including a support base plate 1 and a lamp rod 22. A positioning component is connected to the top of the support base plate 1, and a support frame 15 is fixedly connected to the top of the support base plate 1 by bolts. An adjustment component is connected to one end of the support frame 15.

[0030] The positioning assembly includes a support rod 2, which is rotatably connected to the top of the support base plate 1. A turntable 3 is fixedly connected to the top of the support rod 2, and an arc-shaped groove 4 is provided in the turntable 3. A support column 23 is fixedly connected to the top of the support base plate 1, and a fixing sleeve 5 is fixedly connected to the top of the support column 23. A sliding groove 6 is provided in the fixing sleeve 5, and a sliding plate 7 is slidably connected in the sliding groove 6. A sliding rod 8 is fixedly connected to one end of the sliding plate 7, and a clamping plate 9 is fixedly connected to the other end of the sliding plate 7. The sliding rod 8 slides in the arc-shaped groove 4. A drive assembly is connected to the outside of the support rod 2 to drive the support rod 2 to rotate.

[0031] The adjustment assembly includes a side plate 16, which is fixedly connected to one end of the support frame 15. A connecting block 17 is fixedly connected to the side of the side plate 16, and a second worm gear 18 is rotatably connected inside the connecting block 17. A fixed crossbar 19 is rotatably connected to the side of the side plate 16, and a second worm wheel 20 is fixedly connected to the outside of the fixed crossbar 19. The second worm wheel 20 meshes with the second worm gear 18. The drive assembly includes a first worm wheel 13, which is fixedly connected to the outer wall of the support rod 2. A fixed block 11 is fixedly connected to the top of the support base plate 1, and a first worm gear 12 is rotatably connected inside the fixed block 11. The first worm gear 12 meshes with the first worm wheel 13. Anti-slip particles 10 are fixedly connected to the side of the clamping plate 9, and multiple sets of anti-slip particles 10 are provided. A lamp rod 22 is fixedly connected to one end of the support frame 15. The fixed crossbar 19 drives the lamp rod 22 to rotate, which facilitates the adjustment of the illumination position on the wafer.

[0032] Working principle: In the wafer inspection fixture, rotating the handle 14 drives the first worm gear 12 to rotate, the first worm gear 12 drives the first worm wheel 13 to rotate, the first worm wheel 13 drives the support rod 2 to rotate, the support rod 2 drives the turntable 3 to rotate, the turntable 3 drives the slide rod 8 to slide in the arc groove 4, thereby driving the slide plate 7 to slide in the slide groove 6, driving multiple sets of clamping plates 9 to move inward, making it easier to place wafers of different sizes on this fixture and align them in the center position for subsequent inspection; rotating the crank handle 21 drives the second worm gear 18 to rotate, the second worm gear 18 drives the second worm wheel 20 to rotate, the second worm wheel 20 drives the fixed crossbar 19 to rotate, the fixed crossbar 19 drives the lamp bar 22 to rotate, making it easier to adjust the illumination position on the wafer and more clearly detect defects in different positions.

[0033] All electrical components mentioned in this article are electrically connected to an external main controller and 220V AC mains power. The main controller can be a conventional known device such as a computer for control. The detailed description of known functions and known components is omitted in the specific embodiments disclosed herein. To ensure the compatibility of the device, the operating methods used are consistent with the parameters of commercially available instruments.

[0034] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A wafer inspection fixture, comprising a support base plate (1) and a lamp rod (22), characterized in that: The top of the support base plate (1) is provided with a positioning component, and the top of the support base plate (1) is fixedly connected with a support frame (15) by bolts. One end of the support frame (15) is provided with an adjustment component. The positioning component includes a support rod (2), which is rotatably connected to the top of the support base plate (1). A turntable (3) is fixedly connected to the top of the support rod (2). An arc groove (4) is provided in the turntable (3). A support column (23) is fixedly connected to the top of the support base plate (1). A fixing sleeve (5) is fixedly connected to the top of the support column (23). A sliding groove (6) is provided in the fixing sleeve (5). A sliding plate (7) is slidably connected in the sliding groove (6). A sliding rod (8) is fixedly connected to one end of the sliding plate (7). A clamping plate (9) is fixedly connected to the other end of the sliding plate (7). The sliding rod (8) slides in the arc groove (4). A drive component is connected to the outside of the support rod (2).

2. The wafer inspection fixture according to claim 1, characterized in that: The adjustment assembly includes a side plate (16), which is fixedly connected to one end of the support frame (15). A connecting block (17) is fixedly connected to the side of the side plate (16). A second worm (18) is rotatably connected inside the connecting block (17). A fixed crossbar (19) is rotatably connected to the side of the side plate (16). A second worm wheel (20) is fixedly connected to the outside of the fixed crossbar (19). The second worm wheel (20) meshes with the second worm (18).

3. The wafer inspection fixture according to claim 1, characterized in that: The drive assembly includes a first worm gear (13), which is fixedly connected to the outer wall of the support rod (2). A fixing block (11) is fixedly connected to the top of the support base plate (1). A first worm (12) is rotatably connected inside the fixing block (11). The first worm (12) meshes with the first worm gear (13).

4. A wafer inspection fixture according to claim 3, characterized in that: A handle (14) is fixedly connected to one end of the first worm (12).

5. A wafer inspection fixture according to claim 2, characterized in that: A crank (21) is fixedly connected to one end of the second worm (18).

6. A wafer inspection fixture according to claim 1, characterized in that: The clamping plate (9) is fixedly connected to the side with anti-slip particles (10), and the anti-slip particles (10) are provided in multiple sets.

7. A wafer inspection fixture according to claim 1, characterized in that: The lamp rod (22) is fixedly connected to one end of the support frame (15).

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