Single-arm double-finger conveying equipment

Abstract

The utility model relates to the field of wafer manufacturing devices, in particular to single-arm double-finger conveying equipment. Comprising a driving device, and the execution end of the driving device is connected with an end effector; the driving device is internally provided with a plurality of coaxially arranged driving shafts, the end effector comprises arms and fingers, the number of the arms is multiple, and any arm is connected with the corresponding driving shaft through a transmission mechanism; any arm is rotationally connected with the adjacent arm, so that the multiple arms form a series connection structure, and the fingers are arranged at one end of the arm located at the tail end of the series connection structure; the multiple fingers are rotationally connected with one end of the same arm, and the rotating planes of the multiple fingers are located at different heights. The transmission mechanism comprises a transmission belt and belt wheels, the multiple belt wheels are arranged at least one end of the arm or the finger in parallel, and the belt wheels are sleeved with the two ends of the transmission belt.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer manufacturing device field especially relates to a single arm double finger conveying equipment. BACKGROUND

[0002] Wafer refers to the silicon wafer used for making silicon semiconductor circuit, and its raw material is silicon. With the semiconductor feature size smaller and smaller, its processing technology more and more complex, processing and measuring equipment more and more advanced, the precision requirement of wafer processing is more and more strict. Wafer's grabbing needs special mechanical equipment to carry out.

[0003] But the above technology at least has following technical problem:

[0004] The mechanical arm for grabbing and carrying wafer in prior art often only has a grabbing end, so that only one wafer can be carried at a time, and the arm joint is driven to rotate by installing driving motor, which causes the weight of the joint to be large, affecting the stability of the equipment. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a single arm double finger conveying equipment to solve the problems of less grabbing end and large weight of joint in prior art.

[0006] The technical scheme of the utility model is: a single arm double finger conveying equipment, including driving device, the execution end of driving device is connected with end effector;

[0007] The driving device is built in multiple coaxial driving shafts, the end effector includes arm and finger, the arm is provided with multiple, and any arm is connected with corresponding driving shaft through transmission mechanism;Any arm is rotatably connected with adjacent arm, so that multiple arms form series structure, the finger is arranged at one end of the arm at the end of series structure;

[0008] The finger is provided with multiple, multiple fingers are rotatably connected with one end of the same arm, and the rotation planes of multiple fingers are at different heights;

[0009] The transmission mechanism includes transmission belt and pulley, the pulley is provided with multiple and placed in at least one end of arm or finger, and both ends of transmission belt are sleeved on the pulley.

[0010] Preferably, the arm includes upper arm and lower arm;One end of the upper arm is connected with the finger, the other end is rotatably connected with the end of the lower arm, and the end of the lower arm away from the upper arm is rotatably arranged on the driving device.

[0011] Preferably, the finger is provided with two, including upper finger and lower finger.

[0012] Preferably, the driving shafts are arranged as four, including a first driving shaft, a second driving shaft, a third driving shaft and a fourth driving shaft, and are directly or transmissionally connected with the lower arm, the upper arm, the lower finger and the upper finger respectively.

[0013] Preferably, the upper arm, the lower arm, the upper finger and the lower finger can swing in the horizontal direction.

[0014] Preferably, the pulleys include a first pulley, a second pulley, a third pulley, a fourth pulley, a fifth pulley, a sixth pulley, a seventh pulley, an eighth pulley, a ninth pulley and a tenth pulley.

[0015] Preferably, the first rotating shaft, the second rotating shaft and the third rotating shaft are arranged along the vertical direction; the second rotating shaft is coaxially sleeved on the outer wall of the first rotating shaft.

[0016] Compared with the prior art, the utility model has the advantages of:

[0017] (1) the fingers rotating planes are arranged at different height layers, the upper finger and the lower finger do not interfere with each other during horizontal movement through the vertical direction dislocation, so that independent operation of double stations on the same actuator is realized.

[0018] (2) the multiple driving shafts are coaxially arranged, and the power of different driving shafts is transmitted to the corresponding arm and finger through the transmission mechanism composed of the transmission belt and the pulley and the rotating shaft, so that the weight of the end effector joint is saved, and the reaction is more sensitive. BRIEF DESCRIPTION OF DRAWINGS

[0019] The utility model will be further described below in combination with the drawings and examples:

[0020] Figure 1 It is a single arm double finger transmission equipment section view of the utility model;

[0021] Figure 2 It is a lower arm driving principle view of the utility model;

[0022] Figure 3 It is an upper arm driving principle view of the utility model;

[0023] Figure 4 It is a lower finger driving principle view of the utility model;

[0024] Figure 5 It is an upper finger driving principle view of the utility model;

[0025] Wherein: 1. Drive device, 11. First drive shaft, 12. Second drive shaft, 13. Third drive shaft, 14. Fourth drive shaft, 2. End effector, 21. Finger, 211. Upper finger, 212. Lower finger, 22. Arm, 221. Upper arm, 222. Lower arm, 3. Transmission mechanism, 31. Pulley, 311. First pulley, 312. Second pulley, 313. Third pulley, 314. Fourth pulley, 315. Fifth pulley, 316. Sixth pulley, 317. Seventh pulley, 318. Eighth pulley, 319. Ninth pulley, 310. Tenth pulley, 321. First rotating shaft, 322. Second rotating shaft, 323. Third rotating shaft. Detailed Implementation

[0026] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0027] The present invention will be further described in detail below with reference to specific embodiments:

[0028] like Figure 1 As shown, a single-arm, two-finger (21) transfer device is used for wafer handling. It includes a drive unit 1, with an end effector 2 connected to the actuator end of the drive unit 1.

[0029] The drive unit 1 has multiple coaxially arranged drive shafts, each connected to a servo motor, allowing the drive shaft to rotate around its own axis. The end effector 2 includes arms 22 and fingers 21. Multiple arms 22 are provided, and each arm 22 is connected to its corresponding drive shaft via a transmission mechanism 3. Each arm 22 is rotatably connected to adjacent arms 22, forming a series structure. Fingers 21 are used to carry the wafer and are located at one end of the arm 22 at the end of the series structure. In this application, multiple fingers 21 are provided, rotatably connected to one end of the same arm 22, and the rotation planes of the multiple fingers 21 are at different heights, ensuring that the rotation of any finger 21 does not affect other fingers 21. In a preferred embodiment of this application, combined with... Figures 3-5 As shown, the transmission mechanism 3 includes a transmission belt and pulleys 31. The pulleys 31 are arranged in multiple pairs and placed at least one end of the arm 22. The two ends of the transmission belt are arranged on two different pulleys 31.

[0030] In the preferred embodiment of the present application, two arms 22 are provided, i.e. an upper arm 221 and a lower arm 222. One end of the upper arm 221 is rotatably connected to the finger 21, and the other end is rotatably connected to one end of the lower arm 222. The other end of the lower arm 222, which is away from the upper arm 221, is rotatably arranged on the driving device 1. Two fingers 21 are provided, i.e. an upper finger 211 and a lower finger 212. Correspondingly, four driving shafts are provided, i.e. a first driving shaft 11, a second driving shaft 12, a third driving shaft 13 and a fourth driving shaft 14, which are directly or transmissionally connected to the lower arm 222, the upper arm 221, the lower finger 212 and the upper finger 211, respectively. The upper arm 221, the lower arm 222, the upper finger 211 and the lower finger 212 are arranged along the horizontal direction and swing in the horizontal direction, so that the upper finger 211 or the lower finger 212 can carry the wafer in the horizontal plane through the series movement of the upper arm 221, the lower arm 222 and the upper finger 211 or the lower finger 212.

[0031] A first rotating shaft 321, a second rotating shaft 322 and a third rotating shaft 323 are also provided along the vertical direction. The second rotating shaft 322 is sleeved on the outer wall of the first rotating shaft 321.

[0032] The action principle of each part of the end effector 2 in the present application is as follows:

[0033] As shown in Figure 2 , the first driving shaft 11 is fixed to the lower arm 222, so as to drive the lower arm 222 to move along the horizontal plane.

[0034] As shown in Figure 3 , the second driving shaft 12 is coaxially fixed to the first pulley 311, and transmits power to the second pulley 312 through the transmission belt. The second pulley 312 is coaxially fixed to one end of the first rotating shaft 321, and the other end of the first rotating shaft 321 is fixed to the upper arm 221, so that the second driving shaft 12 can drive the upper arm 221 to move.

[0035] As shown in Figure 4 , the third driving shaft 13 is coaxially fixed to the third pulley 313, and transmits power to the fourth pulley 314 through the transmission belt. The fourth pulley 314 is coaxially fixed to one end of the second rotating shaft 322, and the other end of the second rotating shaft 322 is coaxially fixed to the fifth pulley 315, which transmits power to the sixth pulley 316 through the transmission belt. The sixth pulley 316 is fixed to the lower finger 212, so that the third driving shaft 13 can drive the lower finger 212 to act.

[0036] As shown in Figure 5As shown, the fourth driving shaft 14 is fixed with the seventh belt wheel 317, and transmits power to the eighth belt wheel 318 through a transmission belt, the eighth belt wheel 318 is coaxially fixed with the ninth belt wheel 319 in the vertical direction, the ninth belt wheel 319 is connected with the tenth belt wheel 310 through a transmission belt, the tenth belt wheel 310 is coaxially fixed with one end of the third rotating shaft 323, the other end of the third rotating shaft 323 is fixed with the upper finger 211, so that the fourth driving shaft 14 can drive the upper finger 211 to act.

[0037] The above embodiments are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and it cannot limit the protection scope of the present application. For those skilled in the art, it is obvious that the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or basic characteristics of the present application, therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the present application is defined by the appended claims rather than the above description, therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application.

Claims

1. A single-arm, two-finger conveying device, characterized in that, It includes a drive device (1), the execution end of which is connected to an end effector (2); The drive device (1) has multiple coaxially arranged drive shafts built in. The end effector (2) includes an arm (22) and a finger (21). The arm (22) is configured as multiple, and any arm (22) is connected to the corresponding drive shaft through a transmission mechanism (3). Any arm (22) is rotatably connected to the adjacent arm (22), so that the multiple arms (22) form a series structure. The finger (21) is located at one end of the arm (22) at the end of the series structure. The fingers (21) are configured as multiple, and the multiple fingers (21) are rotatably connected to one end of the same arm (22), and the rotation planes of the multiple fingers (21) are at different heights; The transmission mechanism (3) includes a transmission belt and pulleys (31). The pulleys (31) are arranged in a plurality and placed at least one end of the arm (22) or finger (21). The two ends of the transmission belt are sleeved on the pulleys (31).

2. The single-arm, two-finger conveying device according to claim 1, characterized in that, The arm (22) includes an upper arm (221) and a lower arm (222); one end of the upper arm (221) is connected to the finger (21), and the other end is rotatably connected to the end of the lower arm (222); the end of the lower arm (222) away from the upper arm (221) is rotatably mounted on the drive device (1).

3. The single-arm, two-finger conveying device according to claim 2, characterized in that, The fingers (21) are configured as two, including an upper finger (211) and a lower finger (212).

4. A single-arm, two-finger conveying device according to claim 3, characterized in that, The drive shafts are configured as four, including a first drive shaft (11), a second drive shaft (12), a third drive shaft (13) and a fourth drive shaft (14), which are respectively directly or via transmission connected to the lower arm (222), the upper arm (221), the lower finger (212) and the upper finger (211).

5. A single-arm, two-finger conveying device according to claim 4, characterized in that, The upper arm (221), lower arm (222), upper fingers (211), and lower fingers (212) are all capable of swinging horizontally.

6. A single-arm, two-finger conveying device according to claim 5, characterized in that, The pulley (31) includes a first pulley (311), a second pulley (312), a third pulley (313), a fourth pulley (314), a fifth pulley (315), a sixth pulley (316), a seventh pulley (317), an eighth pulley (318), a ninth pulley (319), and a tenth pulley (310).

7. A single-arm, two-finger conveying device according to claim 5, characterized in that, It includes a first rotating shaft (321), a second rotating shaft (322), and a third rotating shaft (323), all of which are arranged vertically. The second rotating shaft (322) is coaxially sleeved on the outer wall of the first rotating shaft (321).

Images