Defoaming device for developing solution

Abstract

The utility model provides a developing solution defoaming device, which belongs to the technical field of developing solution processing and comprises a base, a tank is arranged on the upper surface of the base and matched with a defoaming part, a solution inlet pipe is arranged in an inner cavity of the tank, and the defoaming part comprises a partition plate adaptively mounted at the top of the inner wall surface of the tank. A partition plate is arranged in the tank body, a fastening bolt is arranged on the surface of the partition plate, a connecting base plate is installed on the side face of the partition plate in a matched mode, a boundary plate is arranged on one side of the connecting base plate, a plurality of boundary microgaps are formed in the end face of the boundary plate, and the bottom of the tank body communicates with a liquid outlet pipe; according to the defoaming device, the boundary plate, the boundary microgaps and the connecting base plate are arranged in a matched mode, so that foam with the large diameter cannot penetrate through the boundary microgaps and is finally physically extruded and broken, the situation that developing solution foam remains is reduced, the multiple pieces of foam are physically extruded at the same time due to the arrangement of the multiple boundary microgaps, and the defoaming efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the developing solution processing technical field, and specifically relates to developing solution defoaming device. BACKGROUND

[0002] Developing solution is a kind of chemical solvent, is used to dissolve the soluble area of photoresist caused by exposure, it is very important in photolithography process, is used to remove unexposed photoresist, to form the required pattern on substrate, developing solution will produce foam in the use process, this can influence the quality and efficiency of development, therefore, defoaming device plays an important role in the use of developing solution.

[0003] In the above, since developing solution directly acts on expensive photoresist, when considering how to defoam, physical structure is preferred to eliminate foam, to avoid using defoaming agent, to reduce the erosion pollution to photoresist. CONTENT OF THE UTILITY MODEL

[0004] The utility model discloses a developing solution defoaming device, aims at solving the problem in the above background technology.

[0005] To achieve the above object, the utility model provides the following technical scheme: including base, the upper surface of base is provided with jar body, the jar body is equipped with defoaming piece, and the inner chamber of jar body is provided with liquid inlet pipe, the defoaming piece includes the partition plate of adaptation installation in jar body inner wall top, the surface of partition plate is provided with fastening bolt, the side surface of partition plate is equipped with the connection base plate, one side of connection base plate is provided with boundary board, the end surface of boundary board is provided with boundary micro gap, the bottom of jar body is connected with liquid outlet pipe, the surface of liquid outlet pipe is equipped with butterfly valve of adaptation, and the number of boundary micro gap is several, the perpendicular distance of several boundary micro gaps is less than bubble diameter.

[0006] As a preferred scheme of the utility model, the side of jar body away from liquid outlet pipe is connected with vacuum pipe, the surface of vacuum pipe is provided with vacuum regulating valve, and the end surface of vacuum pipe is connected with vacuum pump.

[0007] As a preferred scheme of the utility model, the middle part of vacuum pipe is provided with pressure relief outer sleeve tube, and the top of pressure relief outer sleeve tube is provided with pressure relief valve.

[0008] As a preferred scheme of the utility model, one side of boundary board is equipped with liquid inlet pipe, and the bottom opening surface of liquid inlet pipe is kept away from jar body.

[0009] As a preferred scheme of the utility model, the number of partition plates is two groups, the unified shape of each group of partition plates is rectangle, and the straight line distance between the partition plates is consistent with the length of boundary board.

[0010] As a preferred scheme of the utility model, the upper surface of the tank body is adapted to be installed with a cover, the top of the cover is provided with a solenoid valve, the solenoid valve is electrically connected with a liquid inlet pipe, and the outer surface of the liquid inlet pipe is sleeved with a sealing ring.

[0011] As a preferred scheme of the utility model, the setting mode of the pressure relief outer sleeve pipe on the vacuum pipe is vertical placement, and the structure of the pressure relief valve is annular round valve.

[0012] As a preferred scheme of the utility model, the end face of the boundary plate is a flat face, and the arrangement mode of the plurality of boundary plates is equidistant distribution.

[0013] Compared with the prior art, the utility model has the beneficial effects that: through the cooperation of the boundary plate, the boundary micro gap and the connecting base plate, the foam with a larger diameter cannot pass through the boundary micro gap and is finally physically extruded and broken, the situation that the developing solution foam is retained is reduced, the butterfly valve is installed on the surface of the liquid outlet pipe, the entering flow of the developing solution is controlled, the generation of the foam is indirectly reduced, the plurality of boundary micro gaps are arranged, many foams are physically extruded at the same time, and the defoaming efficiency is accelerated; through the cooperation of the vacuum pipe, the vacuum regulating valve and the vacuum pump, the foam with a smaller diameter in the tank body and the foam not physically extruded are directly broken through pressure difference under the action of vacuum negative pressure, the physical effect is used in a simple and effective mode, and pollution caused by the defoaming agent and other chemical modes is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0014] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the drawings needed to be used in the embodiment description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained by those skilled in the art without creative labor under the premise of the drawings. Among them:

[0015] Figure 1 It is the overall structure schematic view of the utility model;

[0016] Figure 2 It is the structure schematic view of the related part for realizing the continuous defoaming effect in the utility model;

[0017] Figure 3 It is the structure schematic view of the related part for realizing the physical separation effect of the separation plate in the utility model;

[0018] Figure 4 It is the overall structure schematic view of the utility model Figure 2 The local enlarged schematic view of part A in the utility model;

[0019] Figure 5The utility model discloses a structure diagram of related parts for realizing the vacuumizing effect of the tank body.

[0020] In the drawing: 1, base; 2, tank body; 3, cover; 4, liquid inlet pipe; 41, sealing ring; 5, electromagnetic valve; 6, defoaming piece; 61, partition plate; 62, fastening bolt; 63, boundary plate; 64, boundary micro gap; 65, connecting base plate; 7, liquid outlet pipe; 8, butterfly valve; 9, vacuum pipe; 10, pressure relief outer sleeve pipe; 11, pressure relief valve; 12, vacuum regulating valve; 13, vacuum pump. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme and advantage of the utility model embodiment more clear, the technical scheme in the utility model embodiment will be clearly and completely explained in combination with the drawings in the utility model embodiment below, and obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiment. Based on the embodiment in the utility model, all other embodiments obtained by the ordinary skill in the art without creative labor belong to the protection scope of the utility model.

[0022] The utility model embodiment proposes developing solution defoaming device, including base 1, the exemplary, such as Figures 1-3 As shown.

[0023] The upper surface of base 1 is provided with tank body 2, tank body 2 is matched with defoaming piece 6, and the inner cavity of tank body 2 is provided with liquid inlet pipe 4, defoaming piece 6 includes the partition plate 61 of the top of the inner wall surface of tank body 2, the surface of partition plate 61 is provided with fastening bolt 62, the side of partition plate 61 is matched with the connecting base plate 65, one side of connecting base plate 65 is provided with boundary plate 63, the end surface of boundary plate 63 is provided with boundary micro gap 64, the bottom of tank body 2 is communicated with liquid outlet pipe 7, the surface of liquid outlet pipe 7 is matched with butterfly valve 8, and the number of boundary micro gap 64 is several, and the vertical distance of several boundary micro gap 64 is less than the bubble diameter.

[0024] The side of tank body 2 away from liquid outlet pipe 7 is communicated and is provided with vacuum pipe 9, the surface of vacuum pipe 9 is provided with vacuum regulating valve 12, and the end surface of vacuum pipe 9 is communicated and is installed with vacuum pump 13.

[0025] The middle part of vacuum pipe 9 is provided with pressure relief outer sleeve pipe 10, and the top of pressure relief outer sleeve pipe 10 is sleeved with pressure relief valve 11.

[0026] Specifically, the base 1 is arranged at the bottom of the tank body 2, which can stably place the tank body 2. Through the cooperation of the tank body 2 and the defoaming piece 6, the foam of the developing solution in the use process is significantly eliminated. Then the fastening bolt 62 is arranged on the surface of the partition plate 61, so that the partition plate 61 is fixed and placed, and the vertical separation effect of the foam is generated. Through the cooperation of the boundary plate 63, the boundary micro gap 64 and the connecting base plate 65, the foam with a larger diameter cannot pass through the boundary micro gap 64 and is finally physically extruded and broken, reducing the retention of the developing solution foam. The butterfly valve 8 is installed on the surface of the liquid outlet pipe 7, so that the entering flow of the developing solution is controlled, which indirectly reduces the generation of foam. The arrangement of a plurality of boundary micro gaps 64 enables many foams to be physically extruded at the same time, thereby accelerating the defoaming efficiency.

[0027] Through the cooperation of the vacuum pipe 9, the vacuum regulating valve 12 and the vacuum pump 13, the foam with a smaller diameter inside the tank body 2 and the foam not physically extruded are directly broken inside through the pressure difference under the action of vacuum negative pressure. This way of using physical effects is simple and effective, avoiding pollution caused by chemical methods such as defoaming agents. Further, the relief sleeve pipe 10 and the relief valve 11 are sleeved, so that the gas generated by the vacuum pipe 9 is adjusted, avoiding the collapse of the tank body 2 caused by pressure loss.

[0028] One side of the boundary plate 63 is cooperatively installed with the liquid inlet pipe 4. For example, as shown in Figures 2-4 .

[0029] The bottom opening surface of the liquid inlet pipe 4 is away from the tank body 2.

[0030] The number of the partition plates 61 is two groups. The unified shape of each group of the partition plates 61 is rectangular, and the straight line distance between the partition plates 61 is consistent with the length of the boundary plate 63.

[0031] The upper surface of the tank body 2 is adaptively installed with the cover 3. The top of the cover 3 is provided with the electromagnetic valve 5. The electromagnetic valve 5 is electrically connected with the liquid inlet pipe 4. The outer surface of the liquid inlet pipe 4 is sleeved with the sealing ring 41.

[0032] Specifically, the liquid inlet pipe 4 is arranged away from the tank body 2, so that the entering of the developing solution will not be congested, and the entering amount of the developing solution can meet the process requirements. Through the arrangement that the length of the partition plate 61 is consistent with the length of the boundary plate 63, no distance is generated between the two, and the foam is not easy to fill in the joint, avoiding poor defoaming quality. At the same time, the adaptive installation of the cover 3 and the tank body 2 can prevent the developing solution from splashing when pouring. The electrical connection of the electromagnetic valve 5 and the liquid inlet pipe 4 can precisely control the process of the liquid inlet pipe 4 absorbing the developing solution. Further, the arrangement that the sealing ring 41 is sleeved on the outer surface of the liquid inlet pipe 4 can enhance the sealing property of the liquid inlet pipe 4, so that impurities will not be mixed into the developing solution.

[0033] The pressure relief sleeve 10 is vertically placed on the vacuum tube 9; for example, as shown in the figure. Figures 3-5

[0034] The pressure relief valve 11 is a ring-shaped circular valve.

[0035] The end surface of the boundary plate 63 is a flat surface, and a plurality of boundary plates 63 are arranged at equal intervals.

[0036] Specifically, by vertically placing the pressure relief sleeve 10, the pressure generated by the vacuum tube 9 is not too large, and the tank 2 is not prone to deformation. At the same time, this vertical angle can also maximize the sharing of negative pressure, which reflects the good safety performance of the device. At the same time, the equidistant arrangement of the boundary plate 63 allows the foam at different positions and different layers to be continuously separated, significantly reducing the foam content in the developer.

[0037] Working principle: First, install the vacuum tube 9 on the side of the tank 2, install the vacuum pump 13 on the end surface of the vacuum tube 9, and set the vacuum regulating valve 12 on the side of the vacuum tube 9. At the same time, open the vacuum pump 13 to remove the air in the tank 2, so as to minimize the effect of air on the developer.

[0038] Further, pour the developer into the tank 2 through the liquid inlet pipe 4. When the developer fills the inner cavity of the tank 2, foam will be generated. As the developer is continuously added, the foam mass accumulated and connected will be quickly cut by the equidistantly distributed partition plate 61, and the mass will become independent individuals or smaller in size. Then, when the continuously moving foam passes through the boundary micro gap 64, it will be physically squeezed by the boundary micro gap 64 due to its large diameter, causing the foam to break on the outside, achieving a preliminary defoaming effect.

[0039] Finally, since the boundary plate 63 and the partition plate 61 are vertically placed, these two form a cross space in the inner cavity of the tank 2, which can cut and defoam the foam in a large range. Mass and connected foam can be eliminated. After defoaming, the developer flows out of the liquid outlet pipe 7 and participates in the subsequent process.

[0040] ​It is important to note that the construction and arrangements of the application shown in the various exemplary embodiments are illustrative only. Although only a few embodiments have been described in detail in this disclosure, those skilled in the art who review this disclosure will readily appreciate that many modifications can be made to the embodiments without departing from the novel teachings and advantages of the subject matter described herein. For example, elements described as integrated in a single unit can be separated, elements described as separate can be integrated, and the position, number, shape, and arrangements of elements can be varied. Accordingly, all such modifications are intended to be included within the scope of the present inventive subject matter. The order or sequence of any process or method steps can be varied or re-sequenced without departing from the general nature of the claims. Any "means plus function" clauses are intended to cover the structures described herein as performing the recited functionality and not only structural equivalents but also equivalent structures. Other substitutions, modifications, changes, and omissions can be made in the design, operating conditions, and arrangement of the exemplary embodiments without departing from the scope of the present inventive subject matter. Accordingly, the present inventive subject matter is not limited to the particular embodiments described and illustrated herein, but extends to equivalents of which the foregoing describes are intended to cover.

[0041] Furthermore, in order to provide a concise description of the exemplary embodiments, not all features of an actual implementation can be described (i.e., those pertaining to the

[0042] It is understood that in the development of any actual implementation, as in any engineering or design project, numerous implementation-specific decisions can be made. Such development efforts can inevitably lead to a number of substitutions, modifications, changes, and omissions of parts illustrated as having a specific configuration. Such are the natural consequences of design choices and manufacturing practices, and are to be expected by those skilled in the art. Accordingly, the scope of the present inventive subject matter is not limited to the specific embodiments described herein, but only by the claims that follow.

[0043] It should be noted that the above-mentioned embodiments are only used to illustrate the technical solutions of the present application but not to limit the present application, and although the present application is described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present application can be modified or replaced equivalently without departing from the spirit and scope of the present application, and all should be included in the scope of the claims of the present application.

Claims

1. A developer defoaming device characterized by comprising: The application relates to a defoaming device, which comprises a base (1), the upper surface of the base (1) is provided with a tank body (2), the tank body (2) is matched with a defoaming piece (6), the inner cavity of the tank body (2) is provided with a liquid inlet pipe (4), the defoaming piece (6) comprises a partition plate (61) which is adapted to be mounted on the top of the inner wall surface of the tank body (2), the surface of the partition plate (61) is provided with fastening bolts (62), the side surface of the partition plate (61) is adapted to be mounted with a connecting base plate (65), one side of the connecting base plate (65) is provided with a boundary plate (63), the end surface of the boundary plate (63) is provided with boundary micro gaps (64), the bottom of the tank body (2) is communicated with a liquid outlet pipe (7), the surface of the liquid outlet pipe (7) is adapted to be mounted with a butterfly valve (8), and the number of the boundary micro gaps (64) is several, and the vertical distance of the several boundary micro gaps (64) is smaller than the diameter of a bubble.

2. The developer defoaming device according to claim 1, characterized by: The side of the tank body (2) away from the liquid outlet pipe (7) is communicated and provided with a vacuum pipe (9), the surface of the vacuum pipe (9) is provided with a vacuum adjusting valve (12), and the end surface of the vacuum pipe (9) is communicated and mounted with a vacuum pump (13).

3. The developer defoaming device according to claim 2, characterized by: The middle part of the vacuum pipe (9) is provided with a pressure relief outer sleeve pipe (10), and the top of the pressure relief outer sleeve pipe (10) is sleeved with a pressure relief valve (11).

4. The developer defoaming device according to claim 1, characterized by: One side of the boundary plate (63) is matched and mounted with the liquid inlet pipe (4), and the bottom opening surface of the liquid inlet pipe (4) is kept away from the tank body (2).

5. The developer defoaming device according to claim 1, characterized by: The number of the partition plates (61) is two groups, the unified shape of each group of the partition plates (61) is rectangular, and the linear distance between the partition plates (61) is consistent with the length of the boundary plate (63).

6. The developer defoaming device according to claim 1, characterized by: The upper surface of the tank body (2) is adapted to be mounted with a cover (3), the top of the cover (3) is provided with a solenoid valve (5), the solenoid valve (5) is electrically connected with the liquid inlet pipe (4), and the outer surface of the liquid inlet pipe (4) is sleeved with a sealing ring (41).

7. The developer defoaming device according to claim 3, characterized by: The pressure relief outer sleeve pipe (10) is vertically arranged on the vacuum pipe (9), and the pressure relief valve (11) is annular.

8. The developer defoaming device according to claim 1, characterized by: The end surface of the boundary plate (63) is a flat surface, and a plurality of the boundary plates (63) are arranged at equal distances.

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