High-pressure water jet filter and high-pressure water jet equipment

Abstract

The utility model discloses a high-pressure water jet scalpel filter and high-pressure water jet scalpel equipment, including: filter body, filter element subassembly, water inlet joint and water outlet joint, filter body is provided with flow channel and filter element mounting hole, flow channel and filter element mounting hole are communicated, filter element subassembly is detachably connected to filter element mounting hole, and the filter element subassembly is detachably connected to the filter element mounting hole. The water inlet connector is connected to a water inlet of the flow channel, and the water outlet connector is connected to a water outlet of the flow channel. When the filter element assembly needs to be maintained, the filter body does not need to be disassembled, and only the filter element assembly needs to be taken out from the filter element mounting hole to replace the filter element, so that the connection stability of the filter body and equipment can be ensured, and the problems of abrasion and leakage caused by frequent disassembly are avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially to a high pressure water jet filter and high pressure water jet equipment. BACKGROUND

[0002] In the field of semiconductor manufacturing, there is currently a technology of applying high pressure water jet equipment on wafers, for example, after wafer cutting, cleaning the silicon chips and residues generated by cutting, or removing the mold overflow attached to the product pin before electroplating.

[0003] The high pressure water jet filter is a relatively important component of the high pressure water jet equipment. After being used for a period of time, the filter needs to be removed from the equipment, and then the filter is installed on the equipment after replacing the filter screen.

[0004] Currently, the filter is mainly connected to the equipment by threads. Since the filter screen needs to be replaced frequently, the filter is disassembled and assembled frequently, which can easily cause thread wear and result in leakage due to poor sealing, thereby increasing maintenance costs.

[0005] Therefore, how to improve the service life of the high pressure water jet filter to reduce maintenance costs is a technical problem that needs to be solved by those skilled in the art at present. UTILITY MODEL CONTENT

[0006] The utility model aims to provide a high pressure water jet filter and high pressure water jet equipment, which can effectively improve the service life of the high pressure water jet filter and reduce maintenance costs.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0008] A high pressure water jet filter comprises a filter body, a filter core assembly, a water inlet joint, and a water outlet joint. The filter body is provided with a flow channel and a filter core mounting hole. The flow channel and the filter core mounting hole are communicated. The filter core assembly is detachably connected to the filter core mounting hole. The water inlet joint is connected to the water inlet of the flow channel. The water outlet joint is connected to the water outlet of the flow channel.

[0009] In some technical solutions, the flow channel penetrates the filter core mounting hole from the side of the filter core mounting hole.

[0010] In some technical solutions, the flow channel comprises a water inlet flow channel, a water outlet flow channel, and a filter flow channel. The water inlet joint is connected to the water inlet of the water inlet flow channel. The water outlet joint is connected to the water outlet of the water outlet flow channel. The filter flow channel is communicated with the filter core mounting hole from the side of the filter core mounting hole. The axis of the filter flow channel is parallel to or coaxial with the axis of the water inlet flow channel or the water outlet flow channel.

[0011] In some embodiments, the axes of the water inlet channel and the water outlet channel are parallel to each other or coaxial.

[0012] In some embodiments, the filter body is provided with a plurality of filter core mounting holes, which are distributed along the flow direction of the flow channel. Each filter core mounting hole is detachably connected with a filter core assembly.

[0013] In some embodiments, the filter core assembly comprises a filter core and a fastener. The filter core is detachably connected to one end of the fastener, and the fastener is sealingly connected to the filter core mounting hole.

[0014] In some embodiments, the filter core mounting hole is provided with a contraction channel at the end away from the opening. The inner diameter of the contraction channel is smaller than that of the flow channel. The inner wall of the contraction channel is provided with internal threads. The end of the fastener extending into the filter body is provided with external threads matching the internal threads.

[0015] In some embodiments, the fastener is provided with a filter cavity. The side wall of the fastener is provided with a filter slot in communication with the filter cavity. The filter core is a filter mesh, which is sleeved outside the fastener.

[0016] In some embodiments, the fastener is provided with a plurality of filter meshes distributed along the axial direction of the fastener. Adjacent filter meshes are provided with a spacer ring.

[0017] In some embodiments, the filter body has a cuboid structure. The water inlet of the flow channel is located on the first side of the filter body, and the water outlet of the flow channel is located on the second side of the filter body. The first side and the second side are opposite sides of the filter body. The opening of the filter core mounting hole is located on the third side of the filter body, which is adjacent to the first side and the second side. Alternatively, the third side and the fourth side of the filter body are respectively provided with at least one filter core mounting hole. The fourth side is opposite to the third side.

[0018] In some embodiments, the filter body is provided with at least one filter mounting hole.

[0019] In some embodiments, the axes of the flow channel, the filter core mounting hole and the filter mounting hole are perpendicular to each other.

[0020] A high-pressure water jet device comprising the high-pressure water jet filter of any one of the above.

[0021] Compared with the prior art, the above technical solutions have the following advantages:

[0022] The utility model provides a kind of high-pressure water sword filter and high-pressure water sword equipment, comprising: filter body, filter core subassembly, water inlet connector and water outlet connector, flow channel and filter core mounting hole are equipped in filter body, flow channel and filter core mounting hole are communicated, filter core subassembly is detachably connected in filter core mounting hole, water inlet connector is connected in the water inlet of flow channel, and water outlet connector is connected in the water outlet of flow channel.When it is necessary to maintain filter core subassembly, filter body does not need to be disassembled, just filter core subassembly is taken out from filter core mounting hole and filter core is replaced, so the connection stability of filter body and equipment can be guaranteed, to avoid the problem of wear and tear leakage caused by frequent disassembly. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or prior art, the drawings needed to be used in the following embodiment or prior art description will be briefly introduced, and obviously, the drawings in the following description are only embodiments of the utility model, and other drawings can be obtained according to the provided drawings without creative labor for those skilled in the art.

[0024] Figure 1 It is an explosion diagram of a high-pressure water sword filter provided by a specific embodiment of the utility model;

[0025] Figure 2 It is a perspective structural schematic view of filter body;

[0026] Figure 3 It is a front view structural schematic view of filter body;

[0027] Figure 4 It is a top view structural schematic view of filter body;

[0028] Figure 5 It is a structural schematic view of a high-pressure water sword filter provided by another specific embodiment of the utility model;

[0029] Figure 6 It is a structural schematic view of fastener;

[0030] Figure 7 It is a structural schematic view of filter screen.

[0031] The following are the signs of the drawings:

[0032] 10 is filter body, 11 is flow channel, 111 is water inlet flow channel, 112 is water outlet flow channel, 113 is filter flow channel, 12 is filter core mounting hole, 13 is filter mounting hole;

[0033] 20 is filter core subassembly, 21 is filter core, 211 is filter screen, 212 is isolation ring, 22 is fastener, 221 is filter through slot;

[0034] 30 is a water inlet joint;

[0035] 40 is a water outlet joint. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the utility model will be apparently and completely described in connection with the drawings of the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all the other embodiments obtained by the ordinary skilled in the art without creative labor belong to the protection scope of the utility model.

[0037] Please refer to Figures 1-7 .

[0038] The high-pressure water cutter filter provided by the embodiment of the utility model comprises a filter body 10, a filter core assembly 20, a water inlet joint 30 and a water outlet joint 40. The filter body 10 is internally provided with a flow channel 11 and a filter core mounting hole 12. The flow channel 11 and the filter core mounting hole 12 are communicated. The water inlet and the water outlet of the flow channel 11 and the filter core mounting hole 12 are located at different positions on the filter body 10. When being installed, the filter core assembly 20 is detachably connected to the filter core mounting hole 12. The water inlet joint 30 is connected to the water inlet of the flow channel 11. The water outlet joint 40 is connected to the water outlet of the flow channel 11. When the filter core assembly 20 needs to be maintained, the filter body 10 does not need to be disassembled. That is, the water inlet joint 30 and the water outlet joint 40 do not need to be separated from the filter body 10. Only the filter core assembly 20 needs to be taken out from the filter core mounting hole 12 to replace the filter core 21. Therefore, the connection stability of the filter body 10 and the equipment can be ensured to avoid the problem of abrasion and leakage caused by frequent disassembly. In addition, the water inlet joint 30 is detachably connected to the water inlet of the flow channel 11. The water inlet joint 30 is preferably threadedly connected to the water inlet of the flow channel 11. The water outlet joint 40 is detachably connected to the water outlet of the flow channel 11. The water outlet joint 40 is preferably threadedly connected to the water outlet of the flow channel 11. When the filter core 21 is replaced, the water inlet joint 30 and the water outlet joint 40 are not disassembled. Only the filter core assembly 20 needs to be disassembled from the side of the filter body 10.

[0039] In some embodiments, the flow channel 11 penetrates the filter core mounting hole 12 from the side of the filter core mounting hole 12. For example, the filter core mounting hole 12 and the flow channel 11 can be vertically arranged. When filtering, water enters the flow channel 11 from the water inlet of the flow channel 11, then enters the filter core assembly 20 from the side of the filter core assembly 20 to be filtered, and then the filtered water is discharged from the filter core assembly 20. This arrangement facilitates the filter core assembly 20 to be taken out from the side of the filter body 10.

[0040] It should be noted that the arrangement of penetrating the filter core mounting hole 12 from the side of the filter core mounting hole 12 is only one arrangement, and in addition, the flow channel 11 can be coaxially arranged with the filter core mounting hole 12, for example, a water inlet channel and a water outlet channel are arranged in the filter body 10, one end of the water inlet channel is connected with the water inlet connector 30, and the other end of the water inlet channel is communicated with the filter core mounting hole 12, or the filter core mounting hole 12 is arranged inside the other end of the water inlet channel, and the water outlet channel is communicated with the filter core mounting hole 12 from the side of the filter core mounting hole 12, specifically, a water inlet channel extending in the left-right direction and a water outlet channel extending in the up-down direction can be arranged in the filter body 10, the left end of the water inlet channel is connected with the water inlet connector 30, and the filter core mounting hole 12 is communicated with the water inlet channel from the right end of the water inlet channel, and the filter core assembly 20 can be mounted in the filter core mounting hole 12 from the right end of the filter body 10, and the outlet of the water outlet channel is at a different position on the filter body 10 from the filter core mounting hole 12, so that when disassembled, the filter core assembly 20 can be taken out of the filter core mounting hole 12 without disassembling the water inlet connector 30 and the water outlet connector 40.

[0041] In some embodiments, the flow channel includes a water inlet flow channel 111, a water outlet flow channel 112, and a filter flow channel 113, and the three flow channels are sequentially communicated, wherein the water inlet connector 30 is connected to the water inlet port of the water inlet flow channel 111, the water outlet connector 40 is connected to the water outlet port of the water outlet flow channel 112, and the filter flow channel 113 is communicated with the filter core mounting hole 12 from the side of the filter core mounting hole 12, and the axis of the filter flow channel 113 is parallel or coaxial with the axis of the water inlet flow channel 111 or the water outlet flow channel 112. Among them, the axes of the water inlet flow channel 111 and the water outlet flow channel 112 are parallel to each other, as shown in Figure 1 Specifically, two filter flow channels 113 are arranged in parallel in the filter body 10, one of which is coaxially arranged with the water inlet flow channel 111, and the other of which is coaxially arranged with the water outlet flow channel 112; as shown in Figure 5 The axes of the water inlet flow channel 111 and the water outlet flow channel 112 are coaxial, and the filter flow channel 113 is parallel to the water inlet flow channel 111 or the water outlet flow channel 112. By arranging the water inlet flow channel 111 and the water outlet flow channel parallel to each other, or arranging the filter flow channel 113 parallel to the water inlet flow channel 111 or the water outlet flow channel 112, the water can flow in a stepped manner in the flow channel 11, the flow resistance can be increased, and the water can be fully filtered by the filter core assembly 20.

[0042] In some embodiments, a plurality of filter core mounting holes 12 are arranged in the filter body 10, and the plurality of filter core mounting holes 12 are distributed along the flow direction of the flow channel 11, as shown in Figure 1 and Figure 3As shown, two filter core mounting holes 12 are arranged in the filter body 10, the filter core mounting holes 12 are blind holes, preferably perpendicular to the flow channel 11, and each filter core mounting hole 12 is detachably connected with a filter core assembly 20, that is, the filter can realize multi-stage filtration through multiple filter core assemblies 20, thereby ensuring the water quality and avoiding the high-pressure nozzle from being frequently blocked to affect its normal use.

[0043] In some embodiments, as shown in Figure 3 As shown, the multiple filter core mounting holes 12 are respectively communicated with the water inlet flow channel 111 and the water outlet flow channel 112, that is, each filter core mounting hole 12 is communicated with the water inlet flow channel 111 and the water outlet flow channel 112, specifically, the water flows out from the filter core assembly 20 on the left side after passing through the left section of the water inlet flow channel 111, and is divided into two paths, one of which passes through one of the filter flow channels 113, and then passes through the filter core assembly 20 on the right side, and finally flows out through the water outlet flow channel 112; the other path flows to the other filter flow channel 113, and then passes through the filter core assembly 20 on the right side, and finally flows out through the water outlet flow channel 112, the water flow direction can be described by the arrows in Figure 1 For example, as shown in Figure 3 The water inlet flow channel 111 is arranged above the filter body 10, and the water outlet flow channel 112 is arranged below the filter body 10, and such distribution of the water inlet flow channel 111 and the water outlet flow channel 112 can make the water flow in a step-by-step manner, increase the filtration process of the water in the filter, and thus improve the filtration effect of the water.

[0044] In some embodiments, as shown in Figure 5 As shown, the axes of the water inlet flow channel 111 and the water outlet flow channel 112 are coaxial, the axis of the filter flow channel 113 is parallel to the water inlet flow channel 111, the filter body 10 is provided with two filter core mounting holes 12, the lower left end of the filter core mounting hole 12 on the left side is communicated with the right end of the water inlet flow channel 111, and the lower right end of the filter core mounting hole 12 on the right side is communicated with the left end of the water outlet flow channel 112, and the two ends of the filter flow channel 113 are respectively communicated with the side portions of the two filter core mounting holes 12, and the water flow direction is shown by the arrows in Figure 5 The filter core assembly 20 can be disassembled from the upper end of the filter body 10.

[0045] In some embodiments, the filter core assembly 20 comprises a filter core 21 and a fastener 22, the filter core 21 is detachably connected to one end of the fastener 22, so that the filter core 21 can be replaced after the filter core assembly 20 is disassembled, and the fastener 22 is sealingly connected to the filter core mounting hole 12, the fastener 22 is preferably a threaded member, and a threaded hole matched with the threaded member is arranged at the opening of the filter core mounting hole 12, and in addition, a sealing ring can be arranged between the threaded member and the filter body 10 to improve the sealing performance.

[0046] In some embodiments, as shown in Figure 5As shown, the filter core mounting hole 12 is provided with a contraction channel 121 away from the opening of the filter core mounting hole 12, the inner diameter of the contraction channel 121 is smaller than the inner diameter of the flow channel 11, when water passes through the contraction channel, the water pressure and flow rate will increase due to the decrease of the inner diameter, wherein the inner wall of the contraction channel 121 is provided with an internal thread, the end of the fastener 22 extending into the filter body 10 is provided with an external thread matched with the internal thread, by screwing the end of the fastener 22 to the inside of the filter body 10, the installation stability of the filter core assembly 20 can be effectively improved.

[0047] In some embodiments, as shown in Figure 6 As shown, the fastener 22 is provided with a filter cavity, that is, the fastener 22 is a hollow structure, the side wall of the fastener 22 is provided with a filter through slot 221 communicating with the filter cavity, the filter core 21 is a filter screen 211, the filter screen 211 is sleeved outside the fastener 22, as shown in Figure 5 and Figure 6 As shown, after the water passes through the water inlet flow channel 111, it enters the filter cavity through the lower end of the fastener 22, and then only passes through the filter through slot 221 and then flows out through the filter screen 211. As shown in Figure 1 and Figure 6 As shown, water can enter the filter cavity after passing through the filter screen 211 and the filter through slot 221, and then flow out of the filter assembly 21 after passing through the filter through slot 221 and the filter screen 211. That is, the filter assembly 21 provided by the utility model can realize bidirectional filtering.

[0048] In some embodiments, as shown in Figure 7 As shown, the fastener 22 is provided with a plurality of filter screens 211 distributed along the axial direction of the fastener 22, and a spacing ring 212 is arranged between two adjacent filter screens 211, as shown in Figure 1 and Figure 7 As shown, the filter screen 211 corresponds to the position of the flow channel 11, and the filter screen 211 is provided with a spacing ring at a position not corresponding to the flow channel 11, which can reduce the use of the filter screen 211.

[0049] In some embodiments, the filter body 10 is a cuboid structure, the water inlet of the flow channel 11 is located on the first side surface of the filter body 10, the water outlet of the flow channel 11 is located on the second side surface of the filter body 10, the first side surface and the second side surface are opposite two surfaces of the filter body 10, and the opening of the filter core mounting hole 12 is located on the third side surface of the filter body 10, the third side surface is adjacent to the first side surface and the second side surface, as shown in Figure 1As shown in the drawings, the water inlet of the flow channel 11 is located at the upper left side of the filter body 10, the water outlet of the flow channel 11 is located at the lower right side of the filter body 10, and the opening of the filter core mounting hole 12 is located at the upper surface of the filter body 10. Alternatively, the third side and the fourth side of the filter body 10 are respectively provided with at least one filter core mounting hole 12, and the fourth side is opposite to the third side. For example, one filter core mounting hole 12 can be arranged on the upper surface of the filter body 10, and one filter core mounting hole 12 can be arranged on the lower surface of the filter body 10. The two filter core mounting holes 12 are distributed in a staggered manner, for example, the axes of the two filter core mounting holes 12 are parallel to each other, and the openings are opposite to each other.

[0050] In specific applications, the corresponding filter core mounting hole 12 can be selected according to the installation environment to connect the filter core assembly 20, and the other unnecessary filter core mounting holes 12 can be plugged by connecting the cover plate. For example, when there is only installation space on the upper surface of the filter body 10, one or more filter core assemblies 20 can be installed on the upper surface of the filter body 10, and the other filter core mounting holes 12 are plugged. When there is installation space on the upper surface and the lower surface of the filter body 10, one filter core assembly 20 can be connected to the upper surface and the lower surface of the filter body 10 respectively.

[0051] In some embodiments, at least one filter mounting hole 13 is arranged on the filter body 10, as shown in the drawings. Figure 1 As shown in the drawings, two filter mounting holes 13 are arranged on the filter body 10, and the two filter mounting holes 13 are arranged between the two filter core mounting holes 12 or at opposite positions of the filter body 10. For example, one filter mounting hole 13 is arranged at the lower left position and the upper right position of the filter body 10 in the drawings, so as to ensure the stability of the installation of the filter body 10. Figure 1

[0052] In some embodiments, the axes of the flow channel 11, the filter core mounting hole 12 and the filter mounting hole 13 are perpendicular to each other, as shown in the drawings. Figure 1 Figure 1 The flow channel 11 extends along the left-right direction of the filter body 10, the filter core mounting hole 12 extends along the up-down direction of the filter body 10, and the filter mounting hole 13 extends along the front-rear direction of the filter body 10. That is, the flow channel 11, the filter core mounting hole 12 and the filter mounting hole 13 are arranged in different directions, so as to avoid affecting each other during disassembly and assembly, thereby improving the convenience of disassembly and assembly.

[0053] The utility model embodiment further provides a high pressure water jet equipment, including any one embodiment provided by the high pressure water jet filter of the above, high pressure water jet equipment can be applied to wafer cutting operation or cleaning operation, the beneficial effect of high pressure water jet equipment refers to the above high pressure water jet filter, here will not repeat.

[0054] ​It should be noted that the relative terms, such as first and second, are used herein solely to distinguish one entity from another entity, and do not necessarily require or imply any actual relationship or order between such entities.

[0055] The various embodiments in the specification are described in a progressive manner, and each embodiment focuses on the difference from other embodiments, and the same or similar parts between the various embodiments can be referred to each other.

[0056] The high-pressure water jet filter and the high-pressure water jet equipment provided by the utility model are described in detail. The principle and implementation mode of the utility model are described by applying specific examples. The description of the above embodiments is only used to help understand the core idea of the utility model. It should be pointed out that, for ordinary skilled persons in the technical field, some improvements and modifications can be made to the utility model without departing from the principle of the utility model, and these improvements and modifications also fall within the protection scope of the utility model claims.

Claims

1. A high pressure water jet filter, characterized in that, The filter body (10) is provided with a flow channel (11) and a filter core mounting hole (12) therein, the flow channel (11) and the filter core mounting hole (12) are communicated, the filter core assembly (20) is detachably connected to the filter core mounting hole (12), the water inlet joint (30) is connected to a water inlet of the flow channel (11), and the water outlet joint (40) is connected to a water outlet of the flow channel (11). The flow channel (11) communicates with the filter core mounting hole (12) from a side of the filter core mounting hole (12).

2. The high-pressure water jet filter according to claim 1, characterized in that The flow channel (11) comprises a water inlet flow channel (111), a water outlet flow channel (112) and a filter flow channel (113), the water inlet joint (30) is connected to a water inlet of the water inlet flow channel (111), the water outlet joint (40) is connected to a water outlet of the water outlet flow channel (112), the filter flow channel (113) communicates with the filter core mounting hole (12) from a side of the filter core mounting hole (12), and an axis of the filter flow channel (113) is parallel to or coaxial with an axis of the water inlet flow channel (111) or the water outlet flow channel (112).

3. The high-pressure water jet filter according to claim 2, characterized in that The axes of the water inlet flow channel (111) and the water outlet flow channel (112) are parallel to or coaxial with each other.

4. The high-pressure water jet filter according to claim 3, characterized in that The filter body (10) is provided with a plurality of filter core mounting holes (12) therein, the plurality of filter core mounting holes (12) are distributed along a flow direction of the flow channel (11), and one filter core assembly (20) is detachably connected to each filter core mounting hole (12).

5. The high pressure water jet filter of claim 2, wherein, The filter core assembly (20) comprises a filter core (21) and a fastener (22), the filter core (21) is detachably connected to one end of the fastener (22), and the fastener (22) is sealingly connected to the filter core mounting hole (12).

6. The high pressure water jet filter of claim 1, wherein, A contraction passage (121) is arranged at an end of the filter core mounting hole (12) away from an opening thereof, an inner diameter of the contraction passage (121) is smaller than an inner diameter of the flow channel (11), an inner wall of the contraction passage (121) is provided with an internal thread, and an end of the fastener (22) extending into the filter body (10) is provided with an external thread matched with the internal thread.

7. The high-pressure water jet filter according to claim 6, characterized in that The fastener (22) is provided with a filter cavity therein, a filter through slot (221) is arranged on a side wall of the fastener (22) and communicated with the filter cavity, the filter core (21) is a filter screen (211), and the filter screen (211) is sleeved outside the fastener (22).

8. The high-pressure water jet filter according to claim 7, characterized in that The fastener (22) is provided with a plurality of filter screens (211) distributed along an axial direction of the fastener (22), and a spacing ring (212) is arranged between two adjacent filter screens (211).

9. The high-pressure water jet filter according to claim 8, characterized in that ​ 10. The high pressure water jet filter of claim 1, wherein, The filter body (10) is a cuboid structure, the water inlet of the flow channel (11) is located on the first side of the filter body (10), the water outlet of the flow channel (11) is located on the second side of the filter body (10), the first side and the second side are opposite two sides of the filter body (10), the opening of the filter element mounting hole (12) is located on the third side of the filter body (10), the third side is a side adjacent to the first side and the second side, or the third side and the fourth side of the filter body (10) are respectively provided with at least one filter element mounting hole (12), and the fourth side is a side opposite to the third side.

11. The high pressure water jet filter of claim 1, wherein, At least one filter mounting hole (13) is arranged on the filter body (10).

12. The high-pressure water jet filter according to claim 11, characterized in that The axes of the flow channel (11), the filter element mounting hole (12) and the filter mounting hole (13) are perpendicular to each other.

13. A high-pressure water jet device, characterized in that The high-pressure water jet filter comprises the filter body according to any one of claims 1 to 12.

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