Formic acid tail gas treatment device and vacuum furnace

By designing a formic acid tail gas treatment device, the contact area is increased by using atomizing nozzles and stirring mechanisms. Combined with pH detection sensors and stirring mechanisms, the problem of slow absorption rate of formic acid tail gas is solved, achieving efficient treatment and reducing environmental pollution and resource waste.

CN224100383UActive Publication Date: 2026-04-10ZHONGKE TONGQI SEMICON (JIANGSU) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-04-16
Publication Date
2026-04-10

AI Technical Summary

Technical Problem

The current absorption rate of formic acid tail gas is slow and the treatment efficiency is low, resulting in the direct emission of formic acid tail gas, which causes harm to the environment and human health.

Method used

A formic acid tail gas treatment device was designed, including a recovery component, a spray component, and a circulation component. Multiple atomizing nozzles are used to increase the contact area between the liquid and formic acid. Combined with a pH detection sensor and a stirring mechanism, a rapid neutralization reaction is achieved, and the stirring mechanism prevents precipitation and clogging.

Benefits of technology

It improves the absorption rate and treatment efficiency of formic acid tail gas, ensures that the absorption liquid is within a suitable pH range, has good stability, avoids resource waste, and reduces costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of welding processing, and provides a formic acid tail gas treatment device and a vacuum furnace, the formic acid tail gas treatment device comprises a recovery assembly, a spraying assembly and a circulation assembly; the recycling assembly is arranged below the spraying assembly and communicates with the spraying assembly, the recycling assembly is arranged at the inlet end of the circulating assembly, and the spraying assembly is arranged at the outlet end of the circulating assembly. The formic acid tail gas is high in absorption rate and high in treatment efficiency.
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Description

TECHNICAL FIELD

[0001] The utility model relates to welding processing technical field especially relates to a formic acid tail gas treatment device and vacuum furnace. BACKGROUND

[0002] Formic acid, commonly known as ant acid, is a colorless liquid with irritating odor, easy to volatilize, weak electrolyte, melting point 8.6 DEG C, boiling point 100.8 DEG C, strong acidity, corrosive, can stimulate the skin to bubble, is organic chemical raw material.Formic acid is strong reducing agent, formic acid gas itself can consume oxygen by chemical reaction under high temperature to form oxygen-free welding, can also reduce the surface of the metal oxidized to form clean metal surface.Therefore in the field of semiconductors and other welding packaging field, as cleaning agent or reducing agent, the equipment using formic acid process is more and more.

[0003] At present, after the use of formic acid, the direct discharge type is mostly used, that is, formic acid is directly discharged into the pipeline and finally discharged into the air.Because formic acid is a strong acid, it can cause skin and mucous membrane irritation symptoms such as inflammation and ulcer when contacting with human body in the air, and can cause conjunctivitis, eyelid edema, rhinitis, bronchitis, and severe cases can cause acute chemical pneumonia.The absorption rate of formic acid tail gas in the prior art is slow, and the treatment efficiency is low. SUMMARY

[0004] The utility model provides a formic acid tail gas treatment device to solve the absorption rate of formic acid tail gas in the prior art is slow, and the treatment efficiency is low.

[0005] A formic acid tail gas treatment device, comprising a recovery assembly, a spray assembly and a circulating assembly, wherein the spray assembly is arranged below the recovery assembly and is communicated with the recovery assembly, the inlet end of the circulating assembly is arranged with the recovery assembly, and the outlet end of the circulating assembly is arranged with the spray assembly.

[0006] According to the formic acid tail gas treatment device of the utility model, the recovery assembly comprises a storage tank and a water injection pipe, the spray assembly comprises a plurality of spray tanks and a formic acid mixed gas inlet pipe, the inlet end of the spray tank is arranged with the formic acid mixed gas inlet pipe, the outlet end of the spray tank is arranged with a spray tank outlet pipe, the storage tank is arranged below the spray tank, and the storage tank is arranged with a water injection pipe.

[0007] According to the formic acid tail gas treatment device of the utility model, the spray tank is arranged with a plurality of atomizing nozzles, a water-vapor separation filter element and a switch valve, the inlet end of the spray tank is arranged with the switch valve, the outlet end of the spray tank is arranged with the water-vapor separation filter element, the spray tank is arranged with the atomizing nozzles, and the outlet end of the circulating assembly is arranged with the atomizing nozzles.

[0008] The formic acid tail gas treatment device also comprises a first collecting pipe and a second collecting pipe, the inlet end of the first collecting pipe and the second collecting pipe is provided with the spray box, and the outlet end of the first collecting pipe and the second collecting pipe is provided with the storage box.

[0009] The formic acid tail gas treatment device also comprises a stirring mechanism, and the stirring mechanism is arranged in the storage box.

[0010] The formic acid tail gas treatment device also comprises an alkaline substance, and the alkaline substance is arranged in the storage box.

[0011] The formic acid tail gas treatment device also comprises a circulating assembly, wherein the circulating assembly comprises a water pump and a water pump outlet pipe; water in the circulating assembly is driven by the water pump, and the water pump outlet pipe is connected to the spray box.

[0012] The formic acid tail gas treatment device also comprises a PH detection sensor, and the PH detection sensor is arranged at the inlet end of the circulating assembly.

[0013] The formic acid tail gas treatment device also comprises a supporting seat, and the supporting seat is arranged below the recycling assembly and the circulating assembly.

[0014] A vacuum furnace comprises the formic acid tail gas treatment device.

[0015] The formic acid tail gas treatment device can increase the contact area between the liquid and the formic acid, accelerate the absorption rate of the formic acid, and improve the treatment efficiency. The PH detection sensor can detect the acidity and alkalinity of the absorption liquid in real time, and the alkaline substance can be accurately added to neutralize the formic acid according to the feedback information of the PH detection sensor, so that the absorption liquid is maintained in a suitable PH range, the stability of the absorption effect is ensured, the overuse of the alkaline substance is avoided, resources are saved, and costs are reduced. In actual production, the concentration and flow of the formic acid tail gas may fluctuate, and the working pressure of the atomizing nozzle or the comb can be adjusted to meet the requirements of tail gas treatment under different working conditions. The fan blades of the stirring mechanism can fully contact and mix the formic acid and the alkaline substance, accelerate the neutralization reaction, improve the treatment efficiency, prevent solid deposition and liquid stratification, prevent the deposition and accumulation on the bottom plate of the storage box, avoid pipeline blockage, ensure the uniformity of the mixed liquid, and utilize the stability and consistency of the formic acid tail gas treatment. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0017] Figure 1 It is a schematic structural diagram of a perspective view of a formic acid tail gas treatment device;

[0018] Figure 2 It is a schematic structural diagram of a perspective view of a spray assembly;

[0019] Figure 3 It is a schematic structural diagram of a front view of a recovery assembly;

[0020] Figure 4 It is a schematic structural diagram of a cross-sectional view of a recovery assembly;

[0021] Figure 5 It is a schematic structural diagram of a perspective view of a circulation assembly;

[0022] The drawings are as follows: 1, a recovery assembly; 2, a spray assembly; 3, a circulation assembly; 4, a support seat; 11, a storage box; 12, a stirring mechanism; 13, a water injection pipe; 14, a storage box water inlet pipe; 21, a formic acid mixed gas inlet pipe; 22, an atomizing nozzle; 23, a spray box; 24, an on-off valve; 25, a water vapor separation filter element; 26, a first manifold; 27, a second manifold; 31, a water pump; 32, a water pump outlet pipe; 33, a PH detection sensor. DETAILED DESCRIPTION

[0023] The embodiments of the present application will be further described in detail below in combination with the drawings and examples. The following examples are used to illustrate the present application, but cannot be used to limit the scope of the present application.

[0024] In the description of the embodiments of the present application, it should be noted that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0025] In the description of the embodiments of the utility model, it needs to be explained that, unless there is definite stipulation and limitation, the term "connection" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integral connection, it can be mechanical connection, or electrical connection, it can be direct connection, or indirect connection through intermediate medium. For ordinary skilled in the art, the specific meaning of the above-mentioned term in the embodiments of the utility model can be understood according to the specific circumstances.

[0026] In the embodiments of the utility model, unless there is definite stipulation and limitation, the first feature is "on" or "under" the second feature, which can be that the first and second features are in direct contact, or the first and second features are in indirect contact through intermediate medium. Moreover, the first feature can be above or obliquely above the second feature, or it only means that the horizontal height of the first feature is higher than that of the second feature. The first feature can be below or obliquely below the second feature, or it only means that the horizontal height of the first feature is lower than that of the second feature.

[0027] In the description of the specification, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiments of the utility model. In the specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, the skilled in the art can combine and combine the different embodiments or examples described in the specification and the features of different embodiments or examples without contradiction.

[0028] The following will be described in combination with Figures 1-5 The utility model discloses a formic acid tail gas treatment device, including recovery subassembly 1, spray subassembly 2 and circulating component 3, the lower part of spray subassembly 2 is set up and communicates recovery subassembly 1, and the import end of circulating component 3 sets recovery subassembly 1, and the export end of circulating component 3 sets spray subassembly 2.

[0029] In some embodiments, recovery subassembly 1 includes storage tank 11, water injection pipe 13, the spray subassembly includes a plurality of spray tank 23 and formic acid mixed gas import pipe 21, the import end of spray tank 23 sets formic acid mixed gas import pipe 21, and the export end of spray tank 23 sets spray tank export pipe, and the lower part of spray tank 23 sets storage tank 11, and storage tank 11 sets water injection pipe 13. Water injection pipe 13 can set quantitative alkali substance and neutralize formic acid.

[0030] In some embodiments, the spray box 23 further comprises a plurality of atomizing nozzles 22, a water-vapor separation filter 25 and a switch valve 24; the switch valve 24 is arranged at the inlet end of the spray box 23, the water-vapor separation filter 25 is arranged at the outlet end of the spray box 23, the spray box 23 is provided with the atomizing nozzles 22, and the outlet end of the circulating assembly 3 is provided with the atomizing nozzles 22. The plurality of atomizing nozzles 22 increases the contact area between the liquid and the formic acid, accelerates the absorption rate of the formic acid, and improves the treatment efficiency. In actual production, the concentration and flow of the formic acid tail gas may fluctuate, and the working pressure of the atomizing nozzles or the opening of the combing can be adjusted to meet the requirements of tail gas treatment under different working conditions.

[0031] In some embodiments, the spray box 23 further comprises a first manifold 26 and a second manifold 27; the inlet ends of the first manifold 26 and the second manifold 27 are provided with the spray box 23, and the outlet ends of the first manifold 26 and the second manifold 27 are provided with the storage tank 11.

[0032] In some embodiments, the storage tank 11 further comprises a stirring mechanism 12; the stirring mechanism 12 is arranged inside the storage tank 11. The stirring mechanism 12 can stir the fan blades, which can fully contact and mix the formic acid and the alkaline substance, accelerate the neutralization reaction, improve the treatment efficiency, prevent solid deposition and prevent liquid stratification, prevent the deposition from accumulating at the bottom of the storage tank, avoid blocking the pipeline, ensure the uniformity of the mixed liquid, and utilize the stability and consistency of the formic acid tail gas treatment.

[0033] In some embodiments, the storage tank 11 further comprises an alkaline substance; the alkaline substance is arranged inside the storage tank 11.

[0034] In some embodiments, the circulating assembly 3 comprises a water pump 31 and a water pump outlet pipe 32; the water pump outlet pipe 32 is connected to the atomizing nozzles 22, the water in the circulating assembly 3 is driven by the water pump 31, and the water pump outlet pipe 32 is connected to the spray box 23.

[0035] In some embodiments, the circulating assembly 3 further comprises a PH detection sensor 33; the PH detection sensor 33 is arranged at the inlet end of the circulating assembly 3. The PH detection sensor 33 can detect the acidity and alkalinity of the absorption liquid in real time, the alkaline substance can be accurately added to neutralize the formic acid through the feedback information of the PH detection sensor 33, the absorption liquid can be maintained within a suitable PH range to ensure the stability of the absorption effect, and the overuse of the alkaline substance can be avoided to save resources and reduce costs.

[0036] In some embodiments, the recovery assembly 1 and the circulating assembly 3 are provided with a support seat 4.

[0037] A vacuum furnace comprises the formic acid tail gas treatment device.

[0038] It should be finally pointed out that: the above examples are only used to illustrate the technical solutions of the utility model, and not to limit them; although the utility model has been explained in detail with reference to the foregoing examples, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing examples, or make equivalent replacement to part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the utility model.

Claims

1. A formic acid off-gas treatment device, characterized by, The device comprises a recovery assembly, a spraying assembly and a circulation assembly; the spraying assembly is arranged below the recovery assembly and communicates with the recovery assembly; the inlet end of the circulation assembly is arranged with the recovery assembly; and the outlet end of the circulation assembly is arranged with the spraying assembly.

2. The formic acid off-gas treatment device according to claim 1, characterized in that The recovery assembly comprises a storage tank and a water injection pipe; the spraying assembly comprises a plurality of spraying tanks and a formic acid mixed gas inlet pipe; the inlet end of the spraying tank is arranged with the formic acid mixed gas inlet pipe; the outlet end of the spraying tank is arranged with a spraying tank outlet pipe; the storage tank is arranged below the spraying tank; and the storage tank is arranged with the water injection pipe.

3. The formic acid off-gas treatment device according to claim 2, characterized in that The device further comprises a plurality of atomizing nozzles, a water-vapor separation filter and a switch valve; the inlet end of the spraying tank is arranged with the switch valve; the outlet end of the spraying tank is arranged with the water-vapor separation filter; the spraying tank is arranged with the atomizing nozzles; and the outlet end of the circulation assembly is arranged with the atomizing nozzles.

4. The formic acid off-gas treatment device according to claim 3, characterized in that The device further comprises a first collecting pipe and a second collecting pipe; the inlet end of the first collecting pipe and the second collecting pipe is arranged with the spraying tank; and the outlet end of the first collecting pipe and the second collecting pipe is arranged with the storage tank.

5. The formic acid off-gas treatment device according to claim 2, characterized in that The device further comprises a stirring mechanism; the storage tank is arranged with the stirring mechanism.

6. The formic acid off-gas treatment device according to claim 2, characterized in that The device further comprises an alkaline substance; the storage tank is arranged with the alkaline substance.

7. The formic acid off-gas treatment device according to claim 2, characterized in that The circulation assembly comprises a water pump and a water pump outlet pipe; the water in the circulation assembly is driven by the water pump; and the water pump outlet pipe is connected with the spraying tank.

8. The formic acid off-gas treatment device according to claim 7, characterized in that The device further comprises a PH detection sensor; the inlet end of the circulation assembly is arranged with the PH detection sensor.

9. The formic acid off-gas treatment device according to claim 1, characterized in that The device further comprises a support seat; the recovery assembly and the circulation assembly are arranged below the support seat.

10. A vacuum furnace characterized by, The device comprises the formic acid tail gas treatment device of any one of claims 1-9.