Flat substrate high-precision alignment jig

Abstract

The utility model provides a high-precision alignment jig for a flat substrate, and relates to the technical field of alignment jigs. The flat substrate high-precision alignment jig comprises an inclined assembly, a rotating assembly, an X-axis assembly, a Y-axis assembly and a Z-axis assembly which are sequentially arranged from bottom to top, the X-axis assembly and the Y-axis assembly are horizontally arranged and perpendicular to each other, and the Z-axis assembly is vertically arranged; the Z-axis assembly comprises a three-dimensional objective table, a Z-axis sliding table and a transmission unit, the Z-axis sliding table is connected with the three-dimensional objective table in a sliding mode, the transmission unit is used for driving the Z-axis sliding table to move in the height direction of the three-dimensional objective table, a turnover upper objective table is installed on the Z-axis sliding table, and the transmission unit is used for driving the Z-axis sliding table to move in the height direction of the three-dimensional objective table. The upper objective table is provided with an adsorption hole in the first direction and a through hole in the second direction, and the adsorption hole is communicated with the through hole. According to the alignment jig, through adjustment in the X-axis direction, the Y-axis direction and the Z-axis direction and adjustment at different angles, rapid and accurate positioning is achieved, and the alignment precision is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a technology field of alignment tool, specifically, relate to a flat plate substrate high accuracy alignment tool. BACKGROUND

[0002] The flat plate substrate high accuracy alignment tool is a key equipment in electronic manufacturing and assembling industry, especially in the production process of panel display (such as LCD, OLED) and integrated circuit (IC) packaging. With the miniaturization and precision of electronic components, the accurate positioning requirement of the tool is higher and higher. The high accuracy alignment tool realizes the accurate alignment of the substrate through laser, optical, mechanical positioning and other technologies. With the increasing miniaturization and complexity of devices, the traditional alignment method cannot meet the demand of high accuracy and high efficiency, so the high accuracy alignment tool becomes an important tool to improve production process and product quality.

[0003] The existing flat plate substrate high accuracy alignment tool is realized through optical alignment and laser positioning. However, there are still a series of shortcomings such as insufficient accuracy, simple structure and incomplete functions. For example, the alignment only relies on the differential head assembled on the component for positioning, the movement stroke is short, the application range is narrow, and the size of the differential head needs to be adjusted by the machine operator to achieve the required alignment size. Or rely on the cylinder to drive the platform to slide on the micro slide rail to position the alignment device. The disadvantage of this device is that it only has one rough positioning (slide table sliding positioning), so that the alignment accuracy cannot meet the demand of high accuracy. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a flat plate substrate high accuracy alignment tool, which realizes rapid and accurate positioning and improves the alignment accuracy through the adjustment of X, Y and Z axis directions and the adjustment of different angles.

[0005] The utility model realizes the following technical scheme:

[0006] A flat plate substrate high accuracy alignment tool, comprising an inclined assembly, a rotating assembly, an X-axis assembly, a Y-axis assembly and a Z-axis assembly arranged in sequence from bottom to top, the X-axis assembly and the Y-axis assembly are horizontally arranged and perpendicular to each other, and the Z-axis assembly is vertically arranged;The Z-axis assembly comprises a three-dimensional loading platform, a Z-axis sliding table and a transmission unit, the Z-axis sliding table is slidably connected with the three-dimensional loading platform, the transmission unit is used for driving the Z-axis sliding table to move along the height direction of the three-dimensional loading platform, a reversible upper loading platform is installed on the Z-axis sliding table, the upper loading platform is provided with suction holes along a first direction and through holes along a second direction, and the suction holes are communicated with the through holes.

[0007] Further, the X-axis assembly comprises an X-axis base, an X-axis sliding table and a transmission unit, the X-axis sliding table is slidably connected with the X-axis base, and the transmission unit is used for driving the X-axis sliding table to move along the length direction of the X-axis base.

[0008] Further, the Y-axis assembly comprises a Y-axis base, a Y-axis sliding table and a transmission unit, the Y-axis base is installed on the X-axis sliding table, the Y-axis sliding table is slidably connected with the Y-axis base, and the transmission unit is used for driving the Y-axis sliding table to move along the length direction of the Y-axis base, and the Y-axis sliding table is provided with the three-dimensional object table.

[0009] Further, the transmission unit comprises a rack, a gear and a hand wheel, the three-dimensional object table, the X-axis sliding table and the Y-axis sliding table are all provided with the rack, the Z-axis sliding table, the X-axis base and the Y-axis base are all rotatably installed with a rotating shaft, the gear is fixedly connected with the rotating shaft, one end of the rotating shaft is connected with the hand wheel, and the gear is engaged with the rack.

[0010] Further, the Z-axis sliding table, the three-dimensional object table, the X-axis sliding table and the X-axis base, and the Y-axis sliding table and the Y-axis base are all connected through dovetail groove structures.

[0011] Further, the rotating assembly comprises a rotating platform and a mounting seat, the rotating platform is connected with the mounting seat through a rotating shaft, the mounting seat is internally provided with a cavity, the rotating platform is provided with a supporting rod, the supporting rod is located in the cavity, the mounting seat is provided with a first locking screw, a second locking screw and a differential head, the first locking screw and the differential head can extend into the cavity, and the second locking screw is threadedly connected with the supporting rod.

[0012] Further, the tilting assembly comprises a bottom plate, an adjusting shaft and a tilting platform, the adjusting shaft is installed on the base, and the movable end of the adjusting shaft is connected with the tilting platform.

[0013] Further, the Z-axis sliding table is provided with a suspension beam plate, the upper object table is connected with the suspension beam plate through a hinge, one side of the upper object table close to the suspension beam plate is provided with a positioning pin and a threaded hole, the suspension beam plate is provided with a pin hole matched with the positioning pin and a light hole corresponding to the threaded hole, and the upper object table is an acrylic plate.

[0014] Further, the adsorption holes are cylindrical holes, square holes, triangular holes and / or hexagonal holes, and the adsorption holes are arranged in a matrix, in a ring or irregularly.

[0015] Further, the adsorption holes are provided with a throttle valve or a filter.

[0016] The technical scheme of the utility model has at least the following advantages and beneficial effects:

[0017] The utility model discloses X axle assembly, Y axle assembly and Z axle assembly have been provided with, let the upper loading stage can move in X axle, Y axle and Z axle direction, be provided with the inclination component and the rotating component, can change the inclination angle and the rotation angle of upper loading stage, realize the adjustment of XYZ axle direction simultaneously, can also realize the adjustment of different angle, multidirectional cooperative adjustment, positioning precision of the alignment tool of significant improvement. The overturning of upper loading stage has increased functionality and practicality. The adsorption hole and the through -hole cooperation realize the adsorption of glass substrate. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme of the embodiment of the utility model, the following will be briefly introduced to the drawing needed in the embodiment, should understand, the following drawings only show some certain embodiments of the utility model, therefore should not be regarded as the limitation to the range, for the ordinary skill in the art person, under the premise of not paying the creative labor, can also obtain other related drawings according to these drawings.

[0019] Figure 1 The structure schematic view of the high-precision alignment jig for flat plate substrate provided by the embodiment 1 of the utility model is provided.

[0020] Figure 2 The partial structure schematic view of the high-precision alignment jig for flat plate substrate provided by the embodiment 1 of the utility model is provided.

[0021] Figure 3 The sectional view of the rotating component provided by the embodiment 1 of the utility model is provided.

[0022] Figure 4 The rear view of the high-precision alignment jig for flat plate substrate provided by the embodiment 1 of the utility model is provided. Figure 1

[0023] Figure 5 The structure schematic view of the upper loading stage provided by the embodiment 1 of the utility model is provided.

[0024] Figure 6 Another structure schematic view of the upper loading stage provided by the embodiment 1 of the utility model is provided.

[0025] ​Icon: 1-tilt assembly, 2-rotation assembly, 3-X axis assembly, 4-Y axis assembly, 5-Z axis assembly, 6- upper loading platform, 7-hanging beam plate, 8-hinge, 11-bottom plate, 12-tilt platform, 13-adjusting shaft, 21-rotation platform, 22-mounting seat, 23-first locking screw, 24-second locking screw, 25-differential head, 31-X axis base, 32-X axis sliding table, 41-Y axis base, 42-Y axis sliding table, 51-three-dimensional loading platform, 52-Z axis sliding table, 61-through hole, 62-suction hole, 63-positioning pin, 64-threaded hole, 71-pin hole, 72-light hole, 100-hand wheel, 101-rack. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0028] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0029] In the description of the present application, it should be noted that if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship of the product of the application when it is usually placed, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the present application.

[0030] In the description of the utility model, still need explaining, unless another explicit provision and limitation, if appearing term " setting " " install " " link " " connection " should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be direct connection, also can indirectly connect through intermediate medium, can be two element inside intercommunication. For ordinary skilled person in the art, can understand the specific meaning of above-mentioned term in the utility model according to specific circumstances.

[0031] Embodiment 1

[0032] As Figures 1-6 The utility model provides a kind of flat substrate high-precision alignment jig, including by sequentially setting from bottom to top tilt component 1, rotating component 2, X-axis component 3, Y-axis component 4 and Z-axis component 5, the X-axis component 3 and Y-axis component 4 are horizontally arranged and perpendicular to each other, the Z-axis component 5 is vertically arranged;The Z-axis component 5 includes three-dimensional stage 51, Z-axis sliding table 52 and transmission unit, the Z-axis sliding table 52 is slidably connected with the three-dimensional stage 51, the transmission unit is used to drive the Z-axis sliding table 52 along the three-dimensional stage 51 height direction moves, rotatable upper stage 6 is installed on the Z-axis sliding table 52, the upper stage 6 is opened with adsorption hole 62 along the first direction and through-hole 61 along the second direction, the adsorption hole 62 is communicated with the through-hole 61.

[0033] X-axis component 3, Y-axis component 4 and Z-axis component 5 cooperate, can let upper stage 6 move in X-axis, Y-axis and Z-axis direction, tilt component 1 and rotating component 2 cooperate, can change the inclination angle and rotation angle of upper stage 6, while realizing the adjustment of XYZ axis direction, different angle adjustment can also be realized, multidirectional collaborative adjustment, significantly improve the positioning accuracy of alignment jig. The turnover setting of upper stage 6 increases functionality and practicability. Adsorption hole 62 and through-hole 61 cooperate to realize the adsorption of glass substrate.

[0034] In the embodiment, the X-axis component 3 includes an X-axis base 31, an X-axis sliding table 32 and a transmission unit, the X-axis sliding table 32 is slidably connected with the X-axis base 31, and the transmission unit is used to drive the X-axis sliding table 32 to move along the length direction of the X-axis base 31.

[0035] In the embodiment, the Y-axis component 4 includes a Y-axis base 41, a Y-axis sliding table 42 and a transmission unit, the Y-axis base 41 is installed on the X-axis sliding table 32, the Y-axis sliding table 42 is slidably connected with the Y-axis base 41, and the transmission unit is used to drive the Y-axis sliding table 42 to move along the length direction of the Y-axis base 41, and the three-dimensional stage 51 is arranged on the Y-axis sliding table 42.

[0036] In this embodiment, the transmission unit includes a rack 101, a gear and a hand wheel 100, the three-dimensional carrier platform 51, the X-axis sliding table 32 and the Y-axis sliding table 42 are all provided with the rack, the Z-axis sliding table 52, the X-axis base 31 and the Y-axis base 41 are all rotatably installed with a rotating shaft, the gear is fixedly connected with the rotating shaft, one end of the rotating shaft is connected with the hand wheel 100, and the gear is engaged with the rack 101. Rotating the hand wheel 100 makes the gear rotate, moves the gear along the length direction of the rack 101 in the Z-axis assembly 5, moves the rack 101 along the length direction of the X-axis base 31 and the Y-axis base 41 in the X-axis assembly 3 and the Y-axis assembly 4, so as to realize the movement of the X-axis sliding table 32, the Y-axis sliding table 42 and the Z-axis sliding table 52.

[0037] In this embodiment, the Z-axis sliding table 52, the three-dimensional carrier platform 51, the X-axis sliding table 32 and the X-axis base 31, and the Y-axis sliding table 42 and the Y-axis base 42 are all connected through dovetail groove structures. The dovetail groove, the gear and the rack 101 cooperate to realize the accurate positioning and guiding of each sliding table, which helps the accuracy and stability of the upper carrier platform 6 during movement, so that the glass substrate adsorbed on the upper carrier platform 6 can accurately reach the predetermined position.

[0038] In this embodiment, the rotating assembly 2 includes a rotating platform 21 and a mounting seat 22, the rotating platform 21 is connected with the mounting seat 22 through a rotating shaft, the mounting seat 22 is internally provided with a cavity 26, the rotating platform 21 is provided with a supporting rod 27 on the outer wall, the supporting rod 27 is located in the cavity 26, the mounting seat 22 is provided with a first locking screw 23, a second locking screw 24 and a differential head 25, the first locking screw 23 and the differential head 25 can extend into the cavity 26, and the second locking screw 24 is threadedly connected with the supporting rod 27. Rotating the differential head 25 makes the supporting rod 27 move in the cavity 26, the movement of the supporting rod 27 drives the rotating platform 21 to rotate, so as to make the upper carrier platform 6 rotate, realize the fine adjustment of the glass substrate, and cooperate with the adjusting assembly to realize the adjustment in the XYZ direction, accurately place the glass substrate and improve the alignment accuracy of the jig.

[0039] In the embodiment, the tilting assembly 1 comprises a base plate 11, an adjusting shaft 13 and a tilting platform 12, the adjusting shaft 13 is installed on the base plate 1, and the movable end of the adjusting shaft 13 is connected with the tilting platform 12. Wherein, one adjusting shaft 13 is arranged at each end of the tilting platform 12. In use, one adjusting shaft 13 is rotated to extend the movable end of the adjusting shaft 13, so that the tilting platform 12 on the side is lifted, the tilting platform 12 forms different angles with the horizontal plane, and the adjustment of the tilting angle of the upper loading platform 6 is realized. Wherein, the adjusting shaft 13 is a stud, and the tilting platform 12 is jacked up by rotating the adjusting shaft 13.

[0040] In the embodiment, the Z-axis sliding table 52 is provided with a suspension beam plate 7, the upper loading platform 6 is connected with the suspension beam plate 7 through a hinge 8, the upper loading platform 6 is provided with a positioning pin 63 and a threaded hole 64 on the side close to the suspension beam plate 7, the suspension beam plate 7 is provided with a pin hole 71 matched with the positioning pin 63 and a light hole 72 corresponding to the threaded hole 64, and the upper loading platform 6 is an acrylic plate. The detachable design of the upper loading platform 6 realizes the quick disassembly and replacement of the upper loading platform 6. The acrylic plate has good optical performance, high transparency, strong gloss, good wear resistance and pressure resistance, and good toughness. The positioning pin 63 and the pin hole 71 are matched for quick positioning of the upper loading platform 6 after overturning, and the positioning accuracy is improved. The threaded hole 64 and the light hole 72 are fixed by screws to ensure the stability of the upper loading platform 6.

[0041] In the embodiment, the adsorption holes 62 are cylindrical holes, square holes, triangular holes and / or hexagonal holes, and the adsorption holes 62 are arranged in a matrix, a ring or irregularly. The cylindrical hole is relatively simple to manufacture, can adapt to the surfaces of various adsorbed objects while ensuring a certain adsorption force, and can be uniformly distributed on the adsorption panel to stably adsorb the product. The square hole can be more closely arranged to improve the distribution density of the adsorption holes, thereby obtaining greater adsorption force in a limited area. The triangular hole is more suitable for occasions that require specific angle adsorption. The hexagonal hole can ensure a higher adsorption hole density while making the connection between the adsorption holes more stable and reducing stress concentration. The matrix arrangement can make the adsorption force uniformly distributed, which is suitable for occasions with high requirements for uniform adsorption. By accurately controlling the spacing and size of the adsorption holes, the product can be kept horizontal and stable during processing, thereby improving the processing precision. The ring arrangement of the adsorption holes is distributed in a ring around a center point, which is commonly used in equipment that needs to adsorb circular or ring-shaped objects to provide uniform adsorption force. The irregular arrangement can better adapt to the surface profile of the product, provide reliable adsorption fixation, and prevent the product from being damaged during processing.

[0042] In the embodiment, the adsorption hole 62 is provided with a throttle valve or a filter. The throttle valve can adjust the air suction speed and adsorption force of the adsorption hole 62; and the filter can prevent impurities from entering the air passage and protect the vacuum system.

[0043] The working principle of the high-precision alignment jig for the flat substrate is that the through hole 61 of the upper loading stage 6 is connected with an external vacuum device, and the vacuum device, the through hole 61 and the adsorption hole 62 cooperate to adsorb the glass substrate on the surface of the upper loading stage 6.

[0044] The hand wheel 100 is rotated to drive the gear to move along the length direction of the rack 101 in the Z-axis assembly 5, synchronously drive the Z-axis sliding table 52 to move, drive the rack 101 to move along the length direction of the X-axis base 31 and the Y-axis base 41 in the X-axis assembly 3 and the Y-axis assembly 4, synchronously drive the X-axis sliding table 32 and the Y-axis sliding table 42 to move, so that the upper loading stage 6 moves, and the adjustment of the glass substrate in the XYZ-axis direction is realized. The differential head 25 is rotated to drive the supporting rod 27 to move in the cavity 26, drive the rotating platform 21 to rotate, so that the upper loading stage 6 rotates, and the rotation of the glass substrate is realized. The adjusting shaft 13 is rotated to drive the movable end of the adjusting shaft 13 to elongate, so that the inclined platform 12 on the side rises, the inclined platform 12 forms different angles with the horizontal plane, the upper loading stage 6 forms different angles with the horizontal plane, and the adjustment of the inclination angle of the glass substrate is realized. Multi-aspect coordinated adjustment is realized to accurately position the glass substrate, improve the alignment precision, and ensure the high stability and repeatability of the positioning precision.

[0045] The above is only the preferred embodiment of the utility model, and is not used for limiting the utility model. For the person skilled in the art, the utility model can have various changes and changes. Any modification, equivalent replacement, improvement and the like within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A high-precision alignment jig for flat plate substrates, characterized by: The device comprises, from bottom to top, a tilt assembly, a rotation assembly, an X-axis assembly, a Y-axis assembly and a Z-axis assembly, the X-axis assembly and the Y-axis assembly are horizontally arranged and perpendicular to each other, and the Z-axis assembly is vertically arranged; the Z-axis assembly comprises a three-dimensional loading platform, a Z-axis sliding table and a transmission unit, the Z-axis sliding table is slidably connected with the three-dimensional loading platform, the transmission unit is used to drive the Z-axis sliding table to move along the height direction of the three-dimensional loading platform, and a reversible upper loading platform is installed on the Z-axis sliding table, the upper loading platform is provided with suction holes in a first direction and through holes in a second direction, and the suction holes are communicated with the through holes.

2. The high-precision alignment tool for flat plate substrates according to claim 1, wherein The X-axis assembly comprises an X-axis base, an X-axis sliding table and a transmission unit, the X-axis sliding table is slidably connected with the X-axis base, and the transmission unit is used to drive the X-axis sliding table to move along the length direction of the X-axis base.

3. The high-precision alignment tool for flat plate substrates according to claim 2, wherein The Y-axis assembly comprises a Y-axis base, a Y-axis sliding table and a transmission unit, the Y-axis base is installed on the X-axis sliding table, the Y-axis sliding table is slidably connected with the Y-axis base, and the transmission unit is used to drive the Y-axis sliding table to move along the length direction of the Y-axis base, and the three-dimensional loading platform is arranged on the Y-axis sliding table.

4. The high-precision alignment tool for flat plate substrates according to claim 3, wherein The transmission unit comprises a rack, a gear and a hand wheel, the three-dimensional loading platform, the X-axis sliding table and the Y-axis sliding table are all provided with the rack, a rotating shaft is rotatably installed in the Z-axis sliding table, the X-axis base and the Y-axis base, the gear is fixedly connected with the rotating shaft, one end of the rotating shaft is connected with the hand wheel, and the gear is engaged with the rack.

5. The high-precision alignment tool for flat plate substrates according to claim 4, wherein The Z-axis sliding table, the three-dimensional loading platform, the X-axis sliding table and the X-axis base, and the Y-axis sliding table and the Y-axis base are connected through dovetail groove structures.

6. The high-precision alignment tool for flat plate substrates according to claim 1, wherein The rotation assembly comprises a rotating platform and a mounting seat, the rotating platform is connected with the mounting seat through a rotating shaft, the mounting seat is internally provided with a cavity, the rotating platform is provided with a support rod, the support rod is located in the cavity, the mounting seat is provided with a first locking screw, a second locking screw and a differential head, the first locking screw and the differential head can extend into the cavity, and the second locking screw is threadedly connected with the support rod.

7. The high-precision alignment tool for flat plate substrates according to claim 1, wherein The tilt assembly comprises a bottom plate, an adjusting shaft and a tilt platform, the adjusting shaft is installed on the bottom plate, and a movable end of the adjusting shaft is connected with the tilt platform.

8. The high-precision alignment tool for flat plate substrates according to claim 1, wherein A suspension beam plate is arranged on the Z-axis sliding table, the upper loading platform is connected with the suspension beam plate through a hinge, a positioning pin and a threaded hole are arranged on one side of the upper loading platform close to the suspension beam plate, the suspension beam plate is provided with a pin hole matched with the positioning pin and a light hole corresponding to the threaded hole, and the upper loading platform is an acrylic plate.

9. The high-precision alignment tool for flat plate substrates according to claim 1, wherein The suction holes are cylindrical holes, square holes, triangular holes and / or hexagonal holes, and the suction holes are arranged in a matrix or in a ring shape.

10. The high-precision alignment tool for flat plate substrates according to claim 9, wherein A throttle valve or a filter is arranged in the suction hole.

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