Film coating target mechanism integrated with automatic opening and closing baffle

Abstract

The utility model relates to a coating target mechanism integrated with an automatic opening and closing baffle plate. The coating target mechanism comprises a fixed main body; a first dismounting part and a second dismounting part are arranged at the two ends of the coating target frame respectively; the film coating target assembly comprises a film coating target, a first target head and a second target head, the two ends of the film coating target are rotatably connected with the first target head and the second target head respectively, and the first target head and the second target head are detachably arranged on the first dismounting and mounting piece and the second dismounting and mounting piece respectively; the baffle assembly is automatically opened when the coating target is used for coating, the two ends of the baffle assembly are movably arranged on the first target head and the second target head respectively, and the baffle assembly is located on the side edge of the coating target. According to the utility model, when the film coating target is subjected to film coating processing, the baffle assembly positioned on the side edge of the film coating target can be automatically opened, so that the film coating target is subjected to film coating processing; and when the coating target does not work, the baffle assembly shields the coating target, so that the coating target is prevented from being polluted.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of vacuum coating, and particularly relates to a coating target mechanism integrated with an automatic opening and closing baffle. BACKGROUND

[0002] The field of vacuum coating is an important branch of material science, which involves the technology of depositing materials onto the surface of a substrate to form a thin film in a vacuum environment using physical or chemical methods. This technology is widely used in electronics, optics, decoration, automotive and aerospace industries. With the progress of science and technology and the development of industry, the demand for thin film materials is increasing, especially for thin film materials with specific properties such as high conductivity, high hardness, wear resistance, corrosion resistance and high temperature resistance. These demands have driven the continuous innovation and development of vacuum coating technology.

[0003] As a key material in the vacuum coating process, the quality and performance of the coating target directly affect the quality and performance of the final thin film. In the vacuum coating process, the coating target is heated, evaporated or sputtered to make atoms or molecules detach from the target surface, and then condense on the substrate surface to form a thin film. This process requires the coating target to have good thermal stability, chemical stability and high purity to ensure the uniformity, adhesion and performance stability of the thin film. For coating equipment, there are often multiple different coating targets in the coating chamber, so the coating target is at risk of being contaminated when it is not working. SUMMARY

[0004] To solve the above problems, the utility model aims at providing a coating target mechanism integrated with an automatic opening and closing baffle, which can shield the coating target during non-coating processing to avoid contamination.

[0005] A coating target mechanism integrated with an automatic opening and closing baffle, characterized in that it comprises:

[0006] A fixed main body;

[0007] A coating target holder, which is provided with a first dismounting part and a second dismounting part at both ends, respectively, and a dismounting position is formed between the first dismounting part and the second dismounting part;

[0008] A coating target assembly, which comprises a coating target, a first target head and a second target head, both ends of the coating target are rotatably connected with the first target head and the second target head, respectively, and the first target head and the second target head are detachably arranged on the first dismounting part and the second dismounting part, respectively, so that the coating target can be detachably installed in the dismounting position;

[0009] The baffle assembly is automatically opened when the coating target is coated, and is movably arranged on the first target head and the second target head at both ends, and is located at the side of the coating target.

[0010] In the coating target mechanism, the baffle assembly located at the side of the coating target can be automatically opened when the coating target is coated, so that the coating target is coated; and when the coating target is not working, the baffle assembly shields the coating target to avoid pollution. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 It is a structural schematic diagram of the embodiment of the application.

[0012] Figure 2 It is a sectional view of the embodiment of the application.

[0013] Figure 3 It is a sectional view of the cooling assembly, the coating target frame and the coating target assembly.

[0014] Figure 4 It is a sectional view of the displacement driving assembly.

[0015] Figure 5 It is a sectional view of the rotation driving assembly.

[0016] LIST OF REFERENCE NUMERALS

[0017] 1, fixed main body;

[0018] 2, coating target frame; 21, first dismounting part; 211, insertion hole; 212, insertion port; 22, second dismounting part; 221, first connecting channel; 222, second connecting channel; 223, positioning groove; 224, dismounting part; 225, limiting plate; 226, limiting groove; 23, dismounting position; 24, limiting part;

[0019] 3, coating target assembly; 31, coating target; 311, upper end cover; 312, lower end cover; 313, water guide rod; 314, yoke; 315, target body; 316, magnet; 317, inner water channel; 318, outer water channel; 319, second gear; 32, first target head; 321, insertion part; 322, fixed part; 33, second target head; 331, discharge port; 332, discharge port; 333, positioning convex ring;

[0020] 4, displacement driving assembly; 41, displacement driving part; 42, displacement mounting seat; 43, push-pull rod; 44, first insulating sleeve; 45, first guide sleeve; 46, first oil seal;

[0021] 5, rotation driving assembly; 51, rotation driving piece; 511, motor; 512, fourth gear; 52, rotation mounting base; 53, first gear; 54, rotation telescopic rod assembly; 541, rotation rod; 542, telescopic rod; 543, telescopic cavity; 544, third gear; 55, second insulation sleeve; 56, second guide sleeve; 57, second oil seal; 58, guide column; 581, bearing; 582, third oil seal;

[0022] 6, cooling assembly; 61, liquid inlet channel; 62, liquid outlet channel;

[0023] 7, baffle assembly; 71, movable baffle; 72, rotation baffle ring; 73, limiting block; 74, fixed baffle;

[0024] 8, vacuum cavity. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application is further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application.

[0026] Reference Figures 1-5 In the present embodiment, an integrated automatic switching baffle film coating target mechanism is provided. It is worth noting that a complete film coating target mechanism is provided in the present embodiment, and only the improvement of a part thereof is protected by the present application. The film coating target mechanism comprises:

[0027] A fixed body 1, which is specifically a part of a film coating equipment housing;

[0028] A film coating target frame 2 movably arranged on one side of the fixed body 1, i.e. the side of the fixed body 1 facing the vacuum cavity 8 used for film coating. Correspondingly, the other side thereof is the side facing the outside world. The film coating target frame 2 is vertically provided with a first dismounting piece 21 and a second dismounting piece 22 at two ends thereof, and a dismounting position 23 is formed between the first dismounting piece 21 and the second dismounting piece 22;

[0029] A film coating target assembly 3 comprising a film coating target 31, a first target head 32 and a second target head 33. The film coating target 31 is rotatably connected with the first target head 32 and the second target head 33 at two ends thereof. The first target head 32 and the second target head 33 are detachably arranged on the first dismounting piece 21 and the second dismounting piece 22, respectively, so that the film coating target 31 is detachably mounted in the dismounting position 23;

[0030] A displacement driving assembly 4 for driving the coating target holder 2 to move close to or away from the fixed body 1, the displacement driving assembly 4 is fixedly arranged on the other side of the fixed body 1 and movably penetrates the fixed body 1 to be drivingly connected with the coating target holder 2, by driving the coating target holder 2 to move close to or away from the fixed body 1, the position of the coating target assembly 3 is controlled;

[0031] A rotation driving assembly 5 for driving the coating target 31 to rotate, the rotation driving assembly 5 is arranged on the other side of the fixed body 1 and movably penetrates the fixed body 1 to be connected with the coating target holder 2 and drivingly connected with the coating target 31 on the dismounting position 23, the rotation driving assembly 5 can drive the coating target 31 to rotate in real time, when the displacement driving assembly 4 drives the coating target holder 2 to move, the rotation driving assembly 5 can continuously drive the coating target 31 to rotate while synchronously moving;

[0032] A cooling assembly 6 for inputting and outputting cooling liquid, the cooling assembly 6 is provided with an inlet channel 61 and an outlet channel 62, the cooling assembly 6 is arranged on the other side of the fixed body 1 and movably penetrates the fixed body 1 to be connected with the coating target holder 2, and the outlet channel 62 and the inlet channel 61 are connected with the coating target 31 on the dismounting position 23, so that the cooling liquid is discharged into the coating target 31 through the inlet channel 61 and the cooling liquid in the coating target 31 is discharged through the outlet channel 62, to adjust the temperature of the coating target 31 in real time;

[0033] A baffle assembly 7 which is automatically opened when the coating target is coated, the baffle assembly 7 is movably arranged on the first target head 32 and the second target head 33 respectively.

[0034] It is worth mentioning that when the displacement driving assembly 4 drives the coating target holder 2 to move close to or away from the fixed body 1, the rotation driving assembly 5 and the cooling assembly 6 follow the coating target holder 2 to move correspondingly at the fixed body 1, to ensure that the cooling function, the rotation function and the displacement function of the coating target 31 can be realized at the same time.

[0035] In the embodiment, the coating target 31 is provided with a circulating cooling channel, and the second target head 33 is further provided with a discharge inlet 331 and a discharge outlet 332 connected with the circulating cooling channel, the inlet channel 61 and the outlet channel 62 are connected with the discharge inlet 331 and the discharge outlet 332 respectively.

[0036] In the embodiment, the second detachable part 22 is provided with a first connecting channel 221 and a second connecting channel 222, the liquid inlet channel 61 is connected with the discharge inlet 331 through the first connecting channel 221, and the liquid outlet channel 62 is connected with the discharge outlet 332 through the second connecting channel 222; that is, the liquid inlet channel 61 and the liquid outlet channel 62 are indirectly connected with the circulating cooling channel through the first connecting channel 221 and the second connecting channel 222 of the second detachable part 22, and when the film-coating target assembly 3 is installed, it only needs to be installed on the film-coating target frame 2 to realize the connection between the liquid inlet channel 61, the liquid outlet channel 62 and the circulating cooling channel.

[0037] In the embodiment, the second detachable part 22 is provided with a plurality of positioning grooves 223, which are respectively connected with the first connecting channel 221 and the second connecting channel 222, and the second target head 33 is fixed with a plurality of positioning convex rings 333, which are respectively arranged outside the discharge outlet 332 and the discharge inlet 331; when the film-coating target assembly 3 is installed on the film-coating target frame 2, the plurality of positioning convex rings 333 are respectively inserted into the plurality of positioning grooves 223, so that the first connecting channel 221 and the second connecting channel 222 are respectively connected with the liquid inlet channel 61 and the liquid outlet channel 62. It can be known that when the film-coating target assembly 3 is installed, the plurality of positioning convex rings 333 can be aligned with the positioning grooves 223 and then inserted, which completes the alignment and installation between the first connecting channel 221, the second connecting channel 222 and the liquid inlet channel 61, the liquid outlet channel 62, and ensures the accurate and stable installation position of the film-coating target assembly 3.

[0038] In the embodiment, the film-coating target 31 includes an upper end cover 311, a lower end cover 312, a water guide rod 313, a yoke 314, a target body 315 and a magnet 316. The upper end cover 311 is rotatably arranged on the second target head 33, the lower end cover 312 is rotatably arranged on the first target head 32, the target body 315 is sleeved outside the yoke 314, and the two ends of the target body 315 are fixed with the upper end cover 311 and the lower end cover 312 respectively. The magnet 316 is fixedly arranged on the yoke 314. One end of the water guide rod 313 penetrates through the upper end cover 311 and is connected with the yoke 314, and the other end of the water guide rod 313 extends into the second target head 33.

[0039] The circulating cooling channel comprises an inner water channel 317 and an outer water channel 318. The inner water channel 317 is connected to one end of the discharge port 331, and the other end of the inner water channel 317 passes through the water guide rod 313 and the yoke 314 in sequence. The outer water channel 318 is connected to one end of the discharge port 332, and the other end of the outer water channel 318 passes through the space between the upper end cover 311 and the water guide rod 313, the space between the yoke 314 and the target body 315, and the space between the other end of the outer water channel 318 and the other end of the inner water channel 317 at or near the lower end cover 312. After the external cooling liquid enters the liquid inlet channel 61, it passes through the first connecting channel 221 to the discharge port 331, enters the inner water channel 317 of the water guide rod 313, and then enters the inner water channel 317 of the yoke 314. Finally, the cooling liquid enters the outer water channel 318 between the yoke 314 and the target body 315, and then passes through the discharge port 332 and the second connecting channel 222 before being discharged from the liquid outlet channel 62.

[0040] In the embodiment, the first dismounting member 21 is located below the second dismounting member 22. The first dismounting member 21 is provided with an insertion hole 211. The first target head 32 comprises an insertion part 321 and a fixing part 322. The insertion part 321 is fixedly arranged on the lower side of the fixing part 322. The insertion part 321 extends into the insertion hole 211, and the fixing part 322 abuts against the first dismounting member 21, so that the first dismounting member 21 first bears the weight of the coating target 31. A first locking member is arranged between the fixing part 322 and the first dismounting member 21 to lock them. The first locking member can be preferably a screw.

[0041] In the embodiment, the side edge of the insertion hole 211 penetrates through one end of the first dismounting member 21 away from the coating target frame 2 to form an insertion port 212. The insertion port 212 is adapted to the insertion part 321. When the first target head 32 is mounted to the first dismounting member 21, the insertion part 321 is pushed into the insertion hole 211 through the insertion port 212, so as to reduce the installation difficulty of the coating target 31.

[0042] In the embodiment, the insertion hole 211, the insertion part 321 and the fixing part 322 are circular in design. The diameter of the insertion part 321 is smaller than that of the fixing part 322.

[0043] In the embodiment, the second dismounting member 22 comprises a dismounting part 224 and two limiting plates 225. The two limiting plates 225 are fixedly arranged on the left and right sides of the dismounting part 224, respectively. A limiting groove 226 is formed between the second dismounting member 22 and the two limiting plates 225. The second target head 33 is arranged in the limiting groove 226. The left and right sides of the second target head 33 are respectively attached to the two limiting plates 225. The second target head 33 is detachably connected to the dismounting part 224. The detachable connection can be realized by a screw.

[0044] Specifically, the positioning groove 223 is arranged at one side of the dismounting part 224 located in the limiting groove 226.

[0045] In the embodiment, the displacement driving assembly 4 comprises a displacement driving part 41, a displacement mounting base 42, and a push-pull rod 43. The displacement driving part 41 is fixedly arranged on the displacement mounting base 42. One end of the push-pull rod 43 is movably arranged through the displacement mounting base 42 and the fixed main body 1 to be fixed with the coating target holder 2. The other end of the push-pull rod 43 is drivingly connected with the displacement driving part 41. The displacement driving part 41 drives the push-pull rod 43 to push and pull the coating target holder 2, so that the coating target holder 2 is away from the fixed main body 1 to be close to the workpiece to be coated in the vacuum cavity 8, or the coating target holder 2 is close to the fixed main body 2 to be away from the workpiece to be coated close to the vacuum cavity 8.

[0046] In the embodiment, the displacement driving part 41 comprises an adjustable stroke air cylinder, and the stroke thereof can be adjusted as required. It is worth noting that the displacement driving part 41 can also be replaced by other driving structures capable of driving the push-pull rod 43.

[0047] In the embodiment, one side of the displacement mounting base 42 is embedded in the fixed main body 1, and a first insulation sleeve 44 is arranged between the displacement mounting base 42 and the fixed main body 1.

[0048] In the embodiment, a first guide sleeve 45 is arranged between the push-pull rod 43 and the displacement mounting base 42.

[0049] In the embodiment, a first oil seal 46 is arranged between the push-pull rod 43 and the displacement mounting base 42.

[0050] In the embodiment, the rotation driving assembly 5 comprises a rotation driving part 51, a rotation mounting base 52, a first gear 53, a rotation telescopic rod group 54 capable of being driven to rotate by the rotation driving part 51 while being capable of being telescoped, and a second gear 319 arranged on the coating target 31. The rotation mounting base 52 is fixedly arranged on the fixed main body 1. The rotation driving part 51 is fixedly arranged on the rotation mounting base 52. One end of the rotation telescopic rod group 54 is drivingly connected with the rotation driving part 51 to be driven to rotate by the rotation driving part 51. The other end of the rotation telescopic rod group 54 penetrates through the rotation mounting base 52 and the fixed main body 1 to extend into the dismounting position 23 of the coating target holder 2. The first gear 53 is sleeved on the other end of the rotation telescopic rod group 54, and the first gear 53 is engaged with the second gear 319. When the coating target holder 2 moves, the rotation telescopic rod group 54 moves synchronously with the coating target holder 2. At this time, the relative position of the first gear 53 on the dismounting position 23 is always unchanged, and the first gear 53 can continuously work.

[0051] In the embodiment, the first gear 53 and the second gear 319 are bevel gears.

[0052] It is worth mentioning that when the coating target 31 is installed, the first target head 32 at the lower end of the coating target 31 is placed and installed on the first dismounting piece 21 and is carried by the first dismounting piece 21, at this time, the second gear 319 on the coating target 31 can be engaged with the first gear 53; and the second target head 33 at the upper end is placed in the limiting groove 226 of the second dismounting piece 22, and finally the first target head 32 and the second target head 33 are locked by screws on the first dismounting piece 21 and the second dismounting piece 22, respectively, to complete the installation process.

[0053] In the embodiment, the rotary telescopic rod set 54 includes a rotary rod 541 and a telescopic rod 542. The rotary drive member 51 is drivingly connected with the rotary rod 541 to drive the rotary rod 541 to rotate. The rotary rod 541 is provided with a telescopic cavity 543 which restricts the telescopic rod 542 from rotating relative to the rotary rod 541. One end of the telescopic rod 542 is telescopically arranged in the telescopic cavity 543, and the other end of the telescopic rod 542 extends through the rotary mounting seat 52 and the fixed main body 1 to extend into the dismounting position 23 of the coating target holder 2, and the first gear 53 is sleeved on the other end of the telescopic rod 542. It can be understood that when the rotary drive member 51 drives the rotary rod 541 to rotate, the rotary rod 541 will drive the telescopic rod 542 to rotate synchronously to drive the first gear 53 to rotate through the telescopic rod 542. At the same time, the telescopic rod 542 can also move under the drive of the coating target holder 2 to telescopically move relative to the rotary rod 541. Specifically, the telescopic cavity 543 and the telescopic rod 542 can be designed as flat positions or non-cylindrical column structures to realize the function that the telescopic rod 542 can telescopically move in the telescopic cavity 543 but cannot rotate.

[0054] In the embodiment, the rotary drive member 51 includes a motor 511 which is fixedly arranged on the rotary mounting seat 52. The rotary rod 541 is externally fixed with a third gear 544, and the output shaft of the motor 511 is fixed with a fourth gear 512 which is engaged with the third gear 544.

[0055] In the embodiment, one side of the rotary mounting seat 52 is embedded into the fixed main body 1, and the second insulating sleeve 55 is arranged between the rotary mounting seat 52 and the fixed main body 1.

[0056] In the embodiment, the second guide sleeve 56 is arranged between the telescopic rod 542 and the rotary mounting seat 52.

[0057] In the embodiment, the second oil seal 57 is arranged between the telescopic rod 542 and the rotary mounting seat 52.

[0058] In the embodiment, the rotary telescopic rod set 54 further includes a guide column 58 which telescopically and movably extends through the rotary mounting seat 52 and the fixed main body 1 and is rotatably and movably sleeved on the outside of the telescopic rod 542. Specifically, the second guide sleeve 56 and the second oil seal 57 are located between the guide column 58 and the rotary mounting seat 52.

[0059] In this embodiment, a bearing 581 is arranged between the telescopic rod 542 and the guide column 58.

[0060] In this embodiment, a third oil seal 582 is arranged between the telescopic rod 542 and the guide column 58.

[0061] In this embodiment, the baffle assembly 7 comprises a movable baffle 71, two rotating baffle rings 72, the movable baffle 71 is fixed at both ends with the two rotating baffle rings 72 respectively, and the rotating baffle rings 72 are rotatably connected with the coated target 31 respectively.

[0062] The rotating process of the rotating baffle ring 72 comprises a first position for shielding the coated target 31 and a second position for exposing the coated target 31; when the rotating baffle ring 72 rotates to the first position, the movable baffle 71 will be rotated synchronously to shield the coated target 31; when the rotating baffle ring 72 rotates to the second position, the movable baffle 71 will be rotated synchronously to expose the coated target 31.

[0063] The first dismounting part 21 or / and the second dismounting part 22 is provided with a limiting part 24 for limiting the rotation of the movable baffle 71 when it rotates to the first position in the first direction and rotates to the second position in the second direction. When the coated target 31 rotates, the rotating baffle ring 72 and the movable baffle 71 are rotated synchronously based on the existence of a certain damping between the coated target 31 and the rotating baffle ring 72, and when they rotate to the first position in the first direction and rotate to the second position in the second direction, the limiting part 24 limits the baffle assembly 7 to stop rotating; the specific “ / ” is “or”, and the first direction and the second direction are opposite directions.

[0064] In this embodiment, the rotating baffle ring 72 is provided with a limiting block 73, and the limiting part 24 corresponds to the limiting block 73.

[0065] In this embodiment, the number of limiting blocks 73 is two, and the two limiting blocks 73 are fixed on the two limiting plates 225 respectively to correspond to the two limiting blocks 73 respectively.

[0066] In this embodiment, at least one limiting plate 225 is detachably provided with a fixed baffle 74 at the side away from the limiting groove 226.

[0067] In this embodiment, the two limiting plates 225 are both detachably provided with a fixed baffle 74 at the side away from the limiting groove 226, and the coated target 31 is located between the two fixed baffles 74.

[0068] It should be emphasized that in this application, the displacement driving assembly 4, the rotating driving assembly 5 and the baffle assembly 7 can also work cooperatively:

[0069] Before working, the coating target frame 2 is close to the fixed main body 1 to be far away from the coating workpiece in the vacuum cavity 8;

[0070] When working, the displacement driving assembly 4 drives the coating target frame 2 to drive the coating target assembly 3 to be close to the coating workpiece in the vacuum cavity 8 through the coating target frame 2; at the same time, the rotary driving assembly 5 works to drive the coating target 31 to rotate, and when the coating target 31 rotates, the rotary baffle 72 will be synchronously rotated under the action of damping to drive the movable baffle 71 to rotate to the first position in the first direction through the rotary baffle 72, so that the coating target 31 is exposed, at this time, the coating target 31 can be coated; it should be noted that when the coating target 31 rotates to coat, the displacement driving assembly 4 can stop to keep a fixed position, or continue to work to change the position in real time;

[0071] After working, the displacement driving assembly 4 drives the coating target frame 2 to drive the coating target assembly 3 to be far away from the coating workpiece in the vacuum cavity 8 through the coating target frame 2; at the same time, the rotary driving assembly 5 drives the coating target 31 to rotate reversely, and when the coating target 31 rotates reversely, the rotary baffle 72 will be synchronously rotated under the action of damping to drive the movable baffle 71 to rotate to the second position in the second direction through the rotary baffle 72, so that the coating target is shielded, at this time, the coating target 31 can avoid pollution.

[0072] The above is only the preferred embodiment of the present application, and is not used to limit the present application, any modification, equivalent replacement and improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. An integrated auto shuttered target mechanism, comprising: The coating target mechanism comprises: a fixed body; a coating target frame, which is provided with a first dismounting part and a second dismounting part at two ends respectively, and a dismounting position is formed between the first dismounting part and the second dismounting part; a coating target assembly, which comprises a coating target, a first target head and a second target head, and the two ends of the coating target are rotatably connected with the first target head and the second target head respectively, the first target head and the second target head are detachably arranged on the first dismounting part and the second dismounting part respectively, so that the coating target is detachably arranged in the dismounting position of the coating target frame; a baffle assembly which is automatically opened when the coating target is coated, and the two ends of the baffle assembly are movably arranged on the first target head and the second target head respectively.

2. The integrated automatically shuttered target mechanism according to claim 1, wherein, The baffle assembly comprises a movable baffle and two rotating baffle rings, the two ends of the movable baffle are fixed with the two rotating baffle rings respectively, and the rotating baffle rings are rotatably connected with the coating target respectively. The rotating process of the rotating baffle ring comprises a first position for shielding the coating target and a second position for exposing the coating target. The first dismounting part or / and the second dismounting part is provided with a limiting part for limiting the rotation of the movable baffle when the movable baffle rotates to the first position in the first direction and rotates to the second position in the second direction.

3. The integrated automatically shuttered target mechanism according to claim 2, wherein, The rotating baffle ring is provided with a limiting block, and the limiting part corresponds to the limiting block.

4. The integrated automatically shuttered target apparatus of claim 3, wherein, Two limiting plates are detachably provided with fixed baffles at the side away from the limiting groove, and the coating target is located between the two fixed baffles.

5. The integrated automatically shuttered target mechanism according to any one of claims 1-4, wherein, The coating target mechanism further comprises a rotating driving assembly for driving the coating target to rotate, the rotating driving assembly is arranged on the other side of the fixed body, the rotating driving assembly passes through the fixed body to be connected with the coating target frame, and is drivingly connected with the coating target in the dismounting position.

6. The integrated automatically shuttered target apparatus of claim 5, wherein, The rotating driving assembly is movably arranged on the other side of the fixed body, and the coating target frame is movably arranged on one side of the fixed body. The rotating driving assembly comprises a rotating driving part, a rotating mounting seat, a first gear, a rotating telescopic rod group which can be telescoped while being driven to rotate by the rotating driving part, and a second gear arranged on the coating target; the rotating mounting seat is fixedly arranged on the fixed body, the rotating driving part is fixedly arranged on the rotating mounting seat, one end of the rotating telescopic rod group is drivingly connected with the rotating driving part, the other end of the rotating telescopic rod group passes through the rotating mounting seat and the fixed body to extend into the dismounting position of the coating target frame, and the first gear is sleeved on the other end of the rotating telescopic rod group and engaged with the second gear.

7. The integrated automatically shuttered target apparatus of claim 6, wherein, The rotating telescopic rod group comprises a rotating rod and a telescopic rod, the rotating driving part is drivingly connected with the rotating rod, the rotating rod is internally provided with a telescopic cavity for limiting the rotation of the telescopic rod, one end of the telescopic rod is telescopically arranged in the telescopic cavity, the other end of the telescopic rod passes through the rotating mounting seat and the fixed body to extend into the dismounting position of the coating target frame, and the first gear is sleeved on the other end of the telescopic rod.

8. The integrated automatically shuttered target apparatus of claim 7, wherein, The rotating driving part comprises a motor, the motor is fixedly arranged on the rotating mounting seat, the outer side of the rotating rod is fixedly provided with a third gear, and the output shaft of the motor is fixedly provided with a fourth gear, the fourth gear is engaged with the third gear.

9. The integrated automatically shuttered target apparatus of claim 6, wherein, The rotating mounting seat is embedded in the fixed body on one side, and a second insulation sleeve is arranged between the rotating mounting seat and the fixed body; A second guide sleeve is arranged between the telescopic rod and the rotating mounting seat; A second oil seal is arranged between the telescopic rod and the rotating mounting seat.

10. The integrated automatically shuttered target apparatus of claim 6, wherein, The rotating telescopic rod assembly further comprises a guide column, which is telescopically movable through the rotating mounting seat and the fixed body, and is rotatably movably sleeved outside the telescopic rod.

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