Arc ion plating clamp for insulating film
By designing an insulating film arc ion plating fixture, a gapless connection is formed using an elastic pressure ring, which solves the problem of charge accumulation between the fixture and the insulating material, avoids electrostatic discharge and mechanical damage, improves the plating quality and efficiency, and is suitable for various temperature environments.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-24
- Publication Date
- 2026-04-10
AI Technical Summary
When performing arc ion plating on the surface of insulating materials, the gap between the fixture and the insulating material causes charge accumulation, which can lead to electrostatic discharge and mechanical damage, affecting the quality and performance of the film.
An insulating film arc ion plating fixture was designed, including a side sealing plate, a clamping plate assembly, an elastic pressure ring, and an adjustment assembly. The elastic pressure ring forms a gapless connection through deformation, eliminating the air layer between the fixture and the insulating material, and avoiding charge accumulation and electrostatic discharge.
It effectively avoids electrostatic discharge and mechanical damage, improves film quality and coating efficiency, saves conductive adhesive consumables, reduces costs, is suitable for complex working conditions, and works stably over a wide temperature range.
Smart Images
Figure CN224105924U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to film fixture technical field, concretely relates to an insulating film arc ion plating film fixture. BACKGROUND
[0002] Among the common film preparation methods, magnetron sputtering, vacuum thermal evaporation and arc ion plating each occupies an important position. These methods have shown their unique advantages in different application scenarios. Among them, the arc ion plating method has become the preferred method in large-scale applications due to its large loading capacity, high efficiency and relatively low cost. In industrial production, especially in situations that require rapid and large-scale preparation of thin films, the arc ion plating method has shown unparalleled advantages with its high production capacity and economic cost-effectiveness.
[0003] However, when using the arc ion plating method to coat films on the surface of insulating materials, some technical problems are also encountered. During the coating process, the insulating material is clamped using a coating fixture, and the coating fixture is usually made of conductive metal. In the vacuum coating environment, there is a gap between the insulating film and the metal clamp. Ion beam current will deposit on the sample surface, accompanied by the accumulation of electric charge. If these accumulated charges are not discharged or neutralized in time, when they accumulate to a certain extent exceeding a certain threshold, they will cause electrostatic discharge. Electrostatic discharge not only causes sparks and electric shocks, but also introduces high temperatures in local areas, causing ablation of the workpiece, which in turn causes damage to the film material. At the same time, the micro-nano structure on the surface of the polymer is also prone to mechanical damage. This damage not only affects the quality and performance of the thin film, but also may have adverse effects on subsequent applications.
[0004] Therefore, how to effectively solve the problem of charge accumulation and mechanical damage of insulating films during arc ion plating has become a hot and difficult topic of current research. UTILITY MODEL CONTENTS
[0005] In order to solve the deficiencies of the prior art, the utility model provides an insulating film arc ion plating film fixture.
[0006] The technical effects achieved by the utility model are realized through the following technical aspects:
[0007] An insulating film arc ion plating film fixture, comprising: a side sealing plate, a clamp plate assembly, an elastic compression ring and a suspended adjustment assembly.
[0008] The clamping plate assembly comprises an upper clamping plate and a lower clamping plate for supporting positioning, the upper clamping plate is attached to the insulating material, and the mounting space is formed between the upper clamping plate and the lower clamping plate, the insulating material and the elastic compression ring are arranged in the mounting space, the side sealing plate cover is arranged on the clamping plate assembly and seals the mounting space, and the adjusting assembly is connected with the side sealing plate, the upper clamping plate, the insulating material, the elastic compression ring and the lower clamping plate to adjust the elastic compression ring to press the upper clamping plate, so that the upper clamping plate is attached to the insulating material.
[0009] In some embodiments, the circumferential side of the elastic compression ring is arranged in the mounting space of the clamping plate assembly.
[0010] In some embodiments, the lower clamping plate is arranged as a solid lower clamping plate or a hollow lower clamping plate.
[0011] In some embodiments, a supporting plate is further arranged between the lower clamping plate and the elastic compression ring, and the supporting plate and the lower clamping plate are arranged in a spaced manner.
[0012] In some embodiments, the adjusting assembly comprises a suspended adjusting part, and the suspended adjusting part adjusts the spacing between the supporting plate and the lower clamping plate.
[0013] In some embodiments, the adjusting assembly is arranged in a structure of a screw rod matched with a nut, and the suspended adjusting part is arranged as a plurality of nuts.
[0014] In some embodiments, the adjusting assembly is arranged in a structure of a screw rod matched with a nut or a U-shaped hook latch clamp structure.
[0015] In some embodiments, when the adjusting assembly is arranged in a structure of a screw rod matched with a nut, the screw rod is arranged as a single-head screw rod or a double-head adjusting screw rod.
[0016] In some embodiments, the cross-sectional shape of the side sealing plate, the clamping plate assembly and the supporting plate is arranged as a circle, a rectangle or a polygon.
[0017] In some embodiments, the material of the side sealing plate, the clamping plate assembly and the supporting plate is pure metal or alloy.
[0018] In summary, the utility model has at least the following advantages:
[0019] The insulating film arc ion plating fixture provided by this utility model involves placing the insulating material between the upper clamping plate and the elastic pressure ring. An adjusting component causes the upper clamping plate to press against the lower clamping plate, resulting in deformation of the elastic pressure ring. Under the action of the elastic pressure ring, the insulating material can be tightly connected to the upper clamping plate. This elastic deformation of the pressure ring creates a gapless connection between the insulating material and the fixture, thus preventing localized electric shocks to the insulating material and eliminating air layers between them. Therefore, it can be seen that the fixture of this application can completely eliminate gaps between the insulating material and the metal fixture, thereby preventing electrostatic discharge during the plating process. This effectively avoids electrostatic discharge and arcing caused by surface charge accumulation on the insulating material, prevents localized high-temperature ablation damage to the insulating material, and also prevents mechanical damage to the micro-nano structures on the polymer surface. Attached Figure Description
[0020] Figure 1 This is a schematic diagram of the overall structure of the insulating film arc ion plating fixture according to an embodiment of the present invention;
[0021] Figure 2 This is an exploded structural diagram of the insulating film arc ion plating fixture according to an embodiment of the present invention, taken in one direction.
[0022] Figure 3 This is an exploded structural diagram of the insulating film arc ion plating fixture according to an embodiment of the present invention from another direction;
[0023] Figure 4 This is a cross-sectional view of the insulating film arc ion plating fixture according to an embodiment of the present invention.
[0024] Marked in the image:
[0025] 10. Insulating film arc ion plating fixture; 100. Side sealing plate; 200. Clamping plate assembly; 210. Upper clamping plate; 220. Lower clamping plate; 300. Support plate; 400. Elastic pressure ring; 500. Adjustment assembly; 510. Screw; 520. Nut; 600. Insulating material. Detailed Implementation
[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. The described embodiments are some, but not all, of the embodiments of this utility model.
[0027] The following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the application claimed, but merely represents the preferred application of the application. Based on the embodiments of the application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the application.
[0028] In the following examples and drawings, a coordinate system is referred to as Figure 1 , with the direction indicated by the arrow of the X-axis being right, the direction indicated by the arrow of the Y-axis being front, and the direction indicated by the arrow of the Z-axis being up.
[0029] Example 1
[0030] As shown in Figure 1 and Figure 2 , in this embodiment, an insulating film arc ion plating film clamp 10 is provided, comprising a side sealing plate 100, a clamp plate assembly 200, an elastic compression ring 400, and a suspension adjustment assembly 500; the clamp plate assembly 200 comprises an upper clamp plate 210 and a lower clamp plate 220 for supporting positioning, which are in close contact with an insulating material 600; an installation space is formed between the upper clamp plate 210 and the lower clamp plate 220, and the insulating material 600 and the elastic compression ring 400 are arranged in the installation space; the side sealing plate 100 is arranged on the clamp plate assembly 200 and seals the installation space; and the adjustment assembly 500 is connected with the side sealing plate 100, the upper clamp plate 210, the insulating material 600, the elastic compression ring 400, and the lower clamp plate 220 to adjust the compression of the elastic compression ring 400 on the upper clamp plate 210, so that the upper clamp plate 210 is in close contact with the insulating material 600.
[0031] Specifically, the insulating material 600 can be a flexible film material or sheet material, the clamp assembly 200 is composed of an upper clamp plate 210 and a lower clamp plate 220, the surfaces of the upper clamp plate 210 and the lower clamp plate 220 are smooth and flat, and the upper clamp plate 210 and the lower clamp plate 220 are arranged opposite to each other, and the gap between the upper clamp plate 210 and the lower clamp plate 220 forms a mounting space. The side sealing plate 100 is used to seal the side of the clamp and seal the outer circumferential side of the mounting space to prevent discharge, sparking and breakdown damage caused by charge accumulation on the side of the insulating material 600, and the side sealing plate 100 is fixed on the upper clamp plate 210 by the adjusting assembly 500. The elastic compression ring 400 can be made of insulating material or conductive material, the elastic compression ring 400 is arranged between the insulating material 600 and the lower clamp plate 220, and the elastic compression ring 400 and the lower clamp plate 220 are arranged in cooperation with each other, and the elastic compression ring 400 can be selected but not limited to an elastic rubber material containing conductive filler. The adjusting assembly 500 is used to connect and fix the side sealing plate 100, the clamp assembly 200 and the elastic compression ring 400 of the clamp, so as to sequentially connect the side sealing plate 100, the upper clamp plate 210, the insulating material 600, the elastic compression ring 400 and the lower clamp plate 220 from top to bottom, and the adjusting workpiece of the adjusting assembly 500 is arranged outside the side sealing plate 100 and the lower clamp plate 220, so that the adjusting can be performed outside the side sealing plate 100 and the lower clamp plate 220, and the adjusting assembly 500 can apply adjustable pressure, i.e. by the adjusting assembly 500, the force is transmitted between the upper clamp plate 210 and the lower clamp plate 220 and applied to the elastic compression ring 400. In addition, the bottom of the lower clamp plate 220 is provided with a lifting opening for fixing the clamp in the coating device.
[0032] It is worth mentioning that in the clamp of the present application, the insulating material 600 is placed between the upper clamp plate 210 and the elastic compression ring 400, and the upper clamp plate 210 is driven by the adjusting assembly 500 to press the lower clamp plate 220, so that the elastic compression ring 400 deforms, at this time, the insulating material 600 can be closely connected with the upper clamp plate 210 under the action of the elastic compression ring 400, that is, the elastic deformation of the elastic compression ring 400 can form a gapless connection between the insulating material 600 and the clamp, so as to avoid the phenomenon of local electrical shock of the insulating material 600 and eliminate the air layer between the insulating material 600 and the clamp. Therefore, it can be seen that the clamp of the present application can completely eliminate the gap between the insulating material 600 and the metal clamp, thereby avoiding the electrostatic discharge phenomenon in the plating process, and further effectively avoiding the electrostatic discharge and sparking phenomenon caused by the accumulation of surface charge of the insulating material 600, avoiding the ablation damage of local high temperature to the insulating material 600, and also avoiding the mechanical damage of the micro-nano structure on the surface of the polymer. At the same time, the clamp can save the use of conductive adhesive consumables, the elastic compression ring 400 can be reused, reducing the process and saving the cost. At the same time, the clamp structure is simple, easy to install, saves installation time, can improve the loading and unloading efficiency, and improves the plating efficiency. And the material selection is various, different elastic compression ring 400 materials can be selected according to the working temperature of plating, in addition, the clamp can also meet the complex working conditions, and it can work stably for a long time between liquid nitrogen temperature and 800°C.
[0033] In order to further reduce the charge accumulation of the clamp in the arc ion plating process, as shown in Figure 1 and Figure 3 , in some embodiments, the peripheral side of the elastic compression ring 400 is arranged in the installation space of the clamp plate assembly 200.
[0034] Specifically, the cross-sectional area of the elastic compression ring 400 is smaller than the cross-sectional area of the clamp plate assembly 200, that is, the elastic compression ring 400 is arranged in the coverage area of the upper clamp plate 210 and the lower clamp plate 220, so that the upper clamp plate 210 and the lower clamp plate 220 can exert complete pressure on the surface of the elastic compression ring 400, thereby more effectively avoiding the charge accumulation generated in the arc ion plating process.
[0035] Embodiment 2
[0036] This embodiment is a further implementation of embodiment 1, in which the adjusting assembly 500 is arranged in the structure of screw rod 510 and nut 520 cooperation or U-shaped hook latch clamp structure.
[0037] Specifically, referring to Figure 2 and Figure 3The side sealing plate 100, the upper clamping plate 210, the insulating material 600, the elastic compression ring 400 and the lower clamping plate 220 are provided with screw holes, the length of the screw rod 510 is greater than the total thickness of the side sealing plate 100, the upper clamping plate 210, the insulating material 600, the elastic compression ring 400 and the lower clamping plate 220, and at least two screw rods 510 are sequentially arranged in the screw holes of the side sealing plate 100, the upper clamping plate 210, the insulating material 600, the elastic compression ring 400 and the lower clamping plate 220 from top to bottom.
[0038] In another embodiment, the adjusting assembly 500 can be provided as a U-shaped hook latch clamping structure, and the adjusting assembly 500 can adjust the spacing in the clamp in a manner known to those skilled in the art and can be achieved, and the specific structure is not described in detail in this embodiment.
[0039] In order to facilitate the use of the adjusting assembly 500, in some embodiments, when the adjusting assembly 500 is provided as a structure in which the screw rod 510 cooperates with the nut 520, the screw rod 510 is provided as a single-head screw rod 510 or a double-head adjusting screw rod 510.
[0040] Specifically, referring to Figure 2 , the screw rod 510 is provided as a double-head adjusting screw rod 510, that is, the screw rod 510 at the upper surface of the side sealing plate 100 is provided with a nut 520, and the screw rod 510 at the lower surface of the lower clamping plate 220 is provided with a nut 520, so as to correspondingly achieve the adjusting and fixing effect of the clamp.
[0041] In another embodiment, the screw rod 510 is provided as a common single-head screw rod 510.
[0042] In order to facilitate the implementation of different plating methods, in some embodiments, the lower clamping plate 220 is provided as a solid lower clamping plate 220 or a hollow lower clamping plate 220.
[0043] Specifically, the clamp can select different structures of the lower clamping plate 220 according to the plating requirements and the self-rotation mode of the plating equipment, so as to achieve single-sided or double-sided plating. For example, when double-sided plating is performed, the hollow lower clamping plate 220, that is, the hollowed-out lower clamping plate 220, can be selected. For another example, as shown in Figure 2 , when single-sided plating is performed, the solid lower clamping plate 220 can be selected.
[0044] Embodiment 3
[0045] It can be understood that, in order to avoid the extension of the insulating material to the lower clamping plate 220, the embodiment is similar to the embodiment 1 or 2, and the difference lies in that, as shown in Figure 4 , in the embodiment, the arc ion plating clamp 10 further comprises a support plate 300, the support plate 300 is arranged between the lower clamping plate 220 and the elastic compression ring 400, and the support plate 300 and the lower clamping plate 220 are arranged in a spaced manner.
[0046] Specifically, the support plate 300 can be used to fix the insulating material 600, and is arranged at the center of the clamp and adjacent to the upper clamp plate 210. The support plate 300 is provided with screw holes, so that the screw rod 510 is sequentially arranged from top to bottom on the side sealing plate 100, the upper clamp plate 210, the insulating material 600, the elastic pressing ring 400, the support plate 300 and the lower clamp plate 220, and the support plate 300 is arranged in a spaced-apart manner from the lower clamp plate 220 to avoid the extended part of the insulating material 600 from reaching the lower clamp plate 220 during the electroplating process, so that the microstructure on the back of the insulating material is prevented from being in contact with the lower clamp plate 220 and being mechanically damaged. That is, when the upper and lower surfaces of the insulating material 600 need to be protected, the suspended mounting mode can be selected.
[0047] In order to facilitate the support plate 300 to be close to the insulating material 600, as shown in some embodiments, the adjusting assembly 500 includes a suspended adjusting part which adjusts the distance between the support plate 300 and the lower clamp plate 220. Figure 4
[0048] Specifically, the suspended adjusting part includes a plurality of nuts 520 matched with the screw rod 510, wherein part of the nuts 520 is arranged below the support plate 300, that is, the bottom end of the support plate 300 is provided with a plurality of nuts 520, so that the position of the support plate 300 close to the upper clamp plate 210 can be adjusted by the position of the nuts 520 on the screw rod 510; and the other part of the nuts 520 is arranged above the lower clamp plate 220, that is, the side of the lower clamp plate 220 close to the support plate 300 is provided with a plurality of nuts 520, so that the nuts 520 above the lower clamp plate 220 can be matched with the original nuts 520 below the lower clamp plate 220, thereby fixing the lower clamp plate 220 at the required position and avoiding the position deviation of the lower clamp plate 220 due to the absence of a locking structure. In addition, the number of the nuts 520 for adjusting the height can be increased according to the actual thickness of the workpiece to be plated, so as to adjust the distance between the lower clamp plate 220 and the support plate 300 and realize the suspended fixation of the bottom of the workpiece.
[0049] It can be understood that the features in the embodiments of the utility model patent can be combined with each other without conflict.
[0050] In the clamp, the side sealing plate 100, the clamp plate assembly 200 and the support plate 300 are all made of conductive materials, which can be pure metal materials such as aluminum and copper, or alloy materials such as stainless steel. In addition, the cross-sectional shape of the clamp as a whole can be adjusted to be circular, rectangular or polygonal according to the shape of the workpiece to be plated.
[0051] In the utility model, unless another definite provision and limitation, the terms "mount", "link", "connect", "fix" and so on should do the broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be direct connection, also can indirectly connect through the intermediate medium, can be two element internal communication or two element mutual action relation.For the ordinary skilled person in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0052] In the description of the utility model, it needs to be explained that the orientation or position relation indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and so on is based on the orientation or position relation shown in the drawing, or the orientation or position relation of the utility model product when it is usually placed, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, so it cannot be understood as a limitation on the utility model.In addition, the terms "first", "second", "third" and so on are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.
[0053] In addition, the terms "horizontal", "vertical", "overhang" and so on do not mean that the component must be absolutely horizontal or overhanging, but can be slightly inclined."Horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.
[0054] In the utility model, unless another definite provision and limitation, the first feature above or below the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them.Moreover, the first feature above, above and above the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature.The first feature below, below and below the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.
[0055] Although the description of the utility model is combined with the above specific embodiments, it is obvious that many substitutions, modifications and changes can be made by the person skilled in the art according to the above content.Therefore, all such alternatives, improvements and changes are included in the spirit and scope of the appended claims.
Claims
1. A fixture for arc ion plating of insulating film, characterized in that, The utility model relates to a side sealing plate (100), a clamp plate assembly (200), an elastic compression ring (400) and a suspension adjustment assembly (500). The clamp plate assembly (200) comprises an upper clamp plate (210) and a lower clamp plate (220) for supporting positioning, and an installation space is formed between the upper clamp plate (210) and the lower clamp plate (220), wherein the insulation material (600) and the elastic compression ring (400) are arranged in the installation space, the side sealing plate (100) is arranged on the clamp plate assembly (200) and covers the installation space, and the adjustment assembly (500) is connected with the side sealing plate (100), the upper clamp plate (210), the insulation material (600), the elastic compression ring (400) and the lower clamp plate (220) to adjust the elastic compression ring (400) to press the upper clamp plate (210) so that the upper clamp plate (210) is attached to the insulation material (600). The peripheral side of the elastic compression ring (400) is arranged in the installation space of the clamp plate assembly (200).
2. The insulating film arc ion plating film jig according to claim 1, wherein The lower clamp plate (220) is arranged as a solid lower clamp plate (220) or a hollow lower clamp plate (220).
3. The insulating film arc ion plating film fixture according to claim 1, wherein A support plate (300) is further arranged between the lower clamp plate (220) and the elastic compression ring (400), and the support plate (300) and the lower clamp plate (220) are arranged at a distance from each other.
4. The insulating film arc ion plating film fixture according to claim 1, wherein The adjustment assembly (500) comprises a suspension adjustment member for adjusting the distance between the support plate (300) and the lower clamp plate (220).
5. The insulating film arc ion plating film fixture according to claim 4, wherein The adjustment assembly (500) is arranged in a structure in which a screw rod (510) cooperates with a nut (520), and the suspension adjustment member is arranged as a plurality of nuts.
6. The insulating film arc ion plating film fixture according to claim 5, wherein The adjustment assembly (500) is arranged in a structure in which a screw rod (510) cooperates with a nut (520) or a U-shaped hook latch clamp structure.
7. The insulating film arc ion plating film jig according to any one of claims 1 to 5, wherein The adjustment assembly (500) is arranged in a structure in which a screw rod (510) cooperates with a nut (520), and the screw rod (510) is arranged as a single-end screw rod (510) or a double-end adjustment screw rod (510).
8. The insulating film arc ion plating film fixture according to claim 7, wherein The side sealing plate (100), the clamp plate assembly (200) and the support plate (300) are arranged in a circular, rectangular or polygonal cross-sectional shape.
9. The insulating film arc ion plating film j ig according to claim 4 or 5, characterized by The side sealing plate (100), the clamp plate assembly (200) and the support plate (300) are made of pure metal or alloy.
10. The insulating film arc ion plating film fixture according to claim 4, 5 or 6, wherein