Protective plate mounting structure of vacuum evaporator door

Abstract

The utility model provides an anti-attachment plate mounting structure of a vacuum evaporator door, which comprises a side wall anti-attachment structure mounted on the inner side of a cavity door of a vacuum evaporator, the side wall anti-attachment structure comprises a plurality of anti-attachment plates, and the adjacent anti-attachment plates are arranged up and down or left and right. The bottom edge of the upper anti-attachment plate and the top edge of the lower anti-attachment plate are overlapped in space, when the adjacent anti-attachment plates are arranged left and right, an anti-attachment piece is arranged on the side edge of one of the two adjacent anti-attachment plates, one side of the anti-attachment piece is fixedly connected with the installation face of one of the anti-attachment plates, and the other side of the anti-attachment piece is fixedly connected with the installation face of the other anti-attachment plate. The height of the anti-sticking sheet is flush with the height of the anti-sticking plate on the layer where the anti-sticking sheet is installed, deposition dead angles caused by height difference are avoided, gaps between the anti-sticking plates are eliminated through up-down and left-right all-dimensional overlapping, and evaporation materials are prevented from being deposited on the cavity door through the gaps. And the equipment cleanliness and the coating quality are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum evaporation machine technical field, more specifically, relate to a kind of anti-plate mounting structure of vacuum evaporation machine door. BACKGROUND

[0002] In vacuum evaporation process, evaporation material (such as metal, oxide, etc.) is deposited on the substrate surface in the form of gas phase to form a thin film after high-temperature evaporation or electron beam bombardment gasification. In this process, the evaporation material will not only be deposited on the target substrate, but also may be attached to the inner wall of the evaporation chamber and the surface of the chamber door due to scattering or airflow disturbance. The industry generally uses anti-plate as a physical barrier, installed on the inside of the chamber door to block the direct attachment of evaporation material.

[0003] However, the anti-plate mounting structure has significant defects, such as the anti-plate mounting structure of the prior art CN112626486B, which has insufficient sealing, and the anti-plate is installed independently in a single layer. The gaps between the plates are prone to cause evaporation material leakage due to thermal deformation or vibration, increasing material loss and pollution risk.

[0004] Therefore, there is a need for an anti-plate mounting structure for a vacuum evaporation machine door with high sealing performance. SUMMARY

[0005] In view of the above, in order to solve the problem of insufficient sealing of the prior art, the anti-plate is installed independently in a single layer, and the gaps between the plates are prone to cause evaporation material leakage due to thermal deformation or vibration, increasing material loss and pollution risk, the utility model provides an anti-plate mounting structure for a vacuum evaporation machine door. The utility model adopts a tile type design of overlapping anti-plates and anti-plates, forms a continuous barrier to block the penetration of film material from the vertical gap, and integrates a modular design to support overall replacement or individual adjustment.

[0006] An anti-plate mounting structure for a vacuum evaporation machine door includes a side wall anti-plate structure installed on the inside of the chamber door 1 of a vacuum evaporation machine. The side wall anti-plate structure includes multiple anti-plates 3. Adjacent anti-plates 3 are arranged vertically or horizontally. When adjacent anti-plates 3 are arranged vertically, the bottom edge of the upper anti-plate 3 overlaps the top edge of the lower anti-plate 3 in space. When adjacent anti-plates 3 are arranged horizontally, one of the two adjacent anti-plates 3 is provided with an anti-plate 6. One side of the anti-plate 6 is fixedly connected to the mounting surface of one of the anti-plates 3, and the other side overlaps the edge of the adjacent anti-plate 3 of the anti-plate 3. The height of the anti-plate 6 is flush with the height of the layer of anti-plates 3 it is installed on, avoiding the formation of deposition dead angles due to height differences. The gaps between the anti-plates are eliminated through vertical and horizontal overlapping, preventing evaporation material from depositing into the chamber door through the gaps and improving equipment cleanliness and film deposition quality.

[0007] In some embodiments, the overlap width of the anti-fouling sheet 6 and the anti-fouling plate 3 is 10mm.

[0008] In some embodiments, the anti-fouling sheet 6 is located at the edge of the same anti-fouling plate 3 or the anti-fouling sheet 6 is located at the edge of the different anti-fouling plate 3.

[0009] Further, the anti-fouling sheet 6 is made of flexible or elastic material, which can automatically fill the gap when it expands due to heat, solve the sealing failure problem caused by thermal deformation of traditional rigid anti-fouling sheet 6, and prolong the service life.

[0010] In some embodiments, the anti-fouling sheet 6 is made of high-temperature-resistant silica gel.

[0011] Further, the cavity door 1 is provided with a plurality of hook sheets 2, and each anti-fouling plate 3 is provided with a hook 5 at the four corners near the cavity door 1. The hook 5 is a Z-shaped right-angle bending piece, which includes a first bending edge 51, a second bending edge 52, and a third bending edge 53. The first bending edge 51 is connected with the anti-fouling plate 3, the second bending edge 52 is slidably connected with the upper edge of the hook sheet 2, and the third bending edge 53 is vertically bent downward and parallel to the hook sheet 2. By adjusting the position of the hook 5 on the hook sheet 2, the anti-fouling plate 3 can be adjusted forward and backward, which is convenient for installation and forms an overlap.

[0012] Further, a plurality of rows of mounting columns 11 are provided on the cavity door 1 at intervals, and the mounting columns 11 in each row are located on the same straight line. Each row of mounting columns 11 is connected with a hook sheet 2. The hook sheet 2 is a long strip-shaped metal plate. Each layer of anti-fouling plate 3 is connected with the hook sheet 2 through at least two rows of mounting columns 11. A gap is left between the hook sheet 2 and the cavity door 1.

[0013] Further, a plurality of connecting grooves 21 are provided on the hook sheet 2. The mounting columns 11 and the connecting grooves 21 are connected one by one through bolts. The connecting grooves 21 are one of waist-shaped or circular.

[0014] Further, when the adjacent anti-fouling plates 3 are arranged upward and downward, the anti-fouling plate located at the upper part and the anti-fouling plate located at the lower part are not located on the same curved surface. The curved surface where the anti-fouling plate located at the upper part is located inside the curved surface where the anti-fouling plate located at the lower part. The film material on the anti-fouling plate located at the upper part can be prevented from fouling through the anti-fouling plate located at the lower part after it settles over time, without affecting the cavity door 1.

[0015] Further, an opening 31 is provided on the anti-fouling plate 3 located at the lower part. The opening 31 corresponds to the observation window on the cavity door 1 one by one.

[0016] Further, the anti-deposition plate mounting structure further comprises edge anti-deposition structures 7 arranged on both sides of the cavity door 1, the edge anti-deposition structures 7 comprise a plurality of edge anti-deposition plates, the edge anti-deposition plates are bent structures, one side of the edge anti-deposition plates is connected with both sides of the cavity door 1, the other side is bent towards the anti-deposition plate 3 or the direction of the anti-deposition plate 3, and the bent part overlaps the anti-deposition plate 3 or the anti-deposition plate 3, so that the film material is prevented from being deposited on the cavity door 1 through the gap on both sides of the side wall anti-deposition structure.

[0017] Further, the anti-deposition plate mounting structure further comprises a bottom anti-deposition plate 38, the bottom surface of the bottom anti-deposition plate 38 is connected with the cavity door 1 through a plurality of vertical columns 81, and the edge of the bottom anti-deposition plate 38 close to the cavity door 1 is fitted with the curvature of the anti-deposition plate 3, so that the film material is prevented from being deposited on the cavity door 1.

[0018] The anti-deposition plate mounting structure of the vacuum evaporation machine door has the advantages that the anti-deposition plate mounting structure comprises a side wall anti-deposition structure arranged on the inner side of a cavity door 1 of a vacuum evaporation machine, the side wall anti-deposition structure comprises a plurality of anti-deposition plates 3, adjacent anti-deposition plates 3 are arranged in a vertical or horizontal manner, when the adjacent anti-deposition plates 3 are arranged in a vertical manner, the bottom edge of the anti-deposition plate 3 located at the upper part overlaps the top edge of the anti-deposition plate 3 located at the lower part in space, when the adjacent anti-deposition plates 3 are arranged in a horizontal manner, one of the two adjacent anti-deposition plates 3 is provided with an anti-deposition sheet 6, one side of the anti-deposition sheet 6 is fixedly connected with the mounting surface of one of the anti-deposition plates 3, the other side of the anti-deposition sheet 6 overlaps the edge of the adjacent anti-deposition plate 3 of the anti-deposition plate 3, the height of the anti-deposition sheet 6 is flush with the height of the layer anti-deposition plate 3 on which the anti-deposition sheet 6 is mounted, deposition dead angles are avoided due to height differences, gaps between the anti-deposition plates are eliminated through omnibearing overlapping, evaporation materials are prevented from being deposited on the cavity door through the gaps, and the cleanliness of the equipment and the film deposition quality are improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a whole structure diagram of the anti-deposition plate mounting structure of the vacuum evaporation machine door.

[0020] Figure 2 It is a partial structure diagram of the anti-deposition plate mounting structure of the vacuum evaporation machine door.

[0021] Figure 3 It is a connection structure diagram of the anti-deposition plate of the anti-deposition plate mounting structure of the vacuum evaporation machine door.

[0022] Figure 4 It is a schematic diagram of the superimposed anti-deposition sheet of the anti-deposition plate mounting structure of the vacuum evaporation machine door Figure 1 .

[0023] Figure 5 It is a schematic diagram of the superimposed anti-deposition sheet of the anti-deposition plate mounting structure of the vacuum evaporation machine doorFigure 2 .

[0024] Main element symbol explanation

[0025] Cavity door 1, mounting column 11, hook piece 2, connecting groove 21, anti-attachment plate 3, opening 31, hook 5, first folding edge 51, second folding edge 52, third folding edge 53, anti-attachment piece 6, edge anti-attachment structure 7, bottom anti-attachment plate 38, upright column 81.

[0026] The following specific embodiments will further illustrate the utility model in conjunction with the above-mentioned drawings. Specific embodiments Example 1:

[0027] An anti-attachment plate mounting structure of a vacuum evaporation machine door, comprising a side wall anti-attachment structure mounted on the inner side of a cavity door 1 of a vacuum evaporation machine, characterized in that: the side wall anti-attachment structure comprises a plurality of anti-attachment plates 3, adjacent anti-attachment plates 3 are arranged up and down or left and right, when adjacent anti-attachment plates 3 are arranged up and down, the bottom edge of the anti-attachment plate 3 located at the upper part overlaps in space with the top edge of the anti-attachment plate 3 located at the lower part, when adjacent anti-attachment plates 3 are arranged left and right, one of the two adjacent anti-attachment plates 3 is provided with an anti-attachment piece 6, one side of the anti-attachment piece 6 is fixedly connected with the mounting surface of one of the anti-attachment plates 3, and the other side overlaps with the edge of the adjacent anti-attachment plate 3 of the anti-attachment plate 3, the height of the anti-attachment piece 6 is flush with the height of the layer anti-attachment plate 3 on which the anti-attachment piece 6 is mounted, so as to avoid the formation of a deposition dead angle due to the height difference, eliminate the gap between the anti-attachment plates in all directions through up and down and left and right overlapping, avoid the deposition of evaporation materials to the cavity door through the gap, and improve the cleanliness of the equipment and the film coating quality.

[0028] The overlapping width of the anti-attachment piece 6 and the anti-attachment plate 3 is 10 mm.

[0029] The anti-attachment piece 6 is located at the edges of both sides of the same anti-attachment plate 3, or the anti-attachment piece 6 is located at the edge of one side of different anti-attachment plates 3.

[0030] The anti-attachment piece 6 is made of flexible or elastic material, so that it can automatically fill the gap when it is heated and expanded, solve the sealing failure problem caused by the thermal deformation of the traditional rigid anti-attachment piece 6, and prolong the service life.

[0031] The anti-attachment piece 6 is made of high-temperature-resistant silica gel.

[0032] The cavity door 1 is provided with a plurality of hook pieces 2, and each of the four corners of the anti-deposition plate 3 is provided with a hook 5. The hook 5 is a Z-shaped right-angle bending piece, which comprises a first bending edge 51, a second bending edge 52, and a third bending edge 53. The first bending edge 51 is connected with the anti-deposition plate 3, the second bending edge 52 is slidably connected with the upper edge of the hook piece 2, and the third bending edge 53 is vertically bent downward and parallel to the hook piece 2. The position of the hook 5 on the hook piece 2 is adjusted so that the anti-deposition plate 3 can be adjusted forward and backward, thereby facilitating the installation and forming of the overlap.

[0033] A plurality of rows of mounting columns 11 are arranged on the cavity door 1 at intervals, and the mounting columns 11 in each row are located on the same straight line. Each row of mounting columns 11 is connected with a hook piece 2. The hook piece 2 is a long strip-shaped metal plate. Each layer of anti-deposition plate 3 is connected with the hook piece 2 through at least two rows of mounting columns 11. A gap is left between the hook piece 2 and the cavity door 1.

[0034] A plurality of connecting grooves 21 are arranged on the hook piece 2. The mounting column 11 and the connecting groove 21 are connected one by one through a bolt. The connecting groove 21 is one of a waist-shaped groove or a circular groove.

[0035] When the adjacent anti-deposition plates 3 are arranged upward and downward, the anti-deposition plate located on the upper part is not located on the same curved surface as the anti-deposition plate located on the lower part. The curved surface on which the anti-deposition plate located on the upper part is located is located on the inner side of the curved surface on which the anti-deposition plate located on the lower part is located. The film material on the anti-deposition plate located on the upper part can be prevented from being deposited through the anti-deposition plate located on the lower part over time, without affecting the cavity door 1.

[0036] An opening 31 is arranged on the anti-deposition plate located on the lower part. The opening 31 corresponds to the observation window on the cavity door 1 one by one.

[0037] The anti-deposition plate mounting structure further comprises edge anti-deposition structures 7 arranged on both sides of the cavity door 1. The edge anti-deposition structure 7 comprises a plurality of edge anti-deposition plates. The edge anti-deposition plate is a bending structure. One side of the edge anti-deposition plate is connected with both sides of the cavity door 1, and the other side is bent toward the anti-deposition plate 3 or the direction of the anti-deposition plate 3. The bent part overlaps with the anti-deposition plate 3 or the anti-deposition plate 3, thereby preventing the film material from being deposited on the cavity door 1 from the gap between the two sides of the side wall anti-deposition structure.

[0038] The anti-deposition plate mounting structure further comprises a bottom anti-deposition plate 38. The bottom surface of the bottom anti-deposition plate 38 is connected with the cavity door 1 through a plurality of vertical columns 81. The edge of the bottom anti-deposition plate 38 close to the cavity door 1 is matched with the curvature of the anti-deposition plate 3, thereby preventing the film material from being deposited on the cavity door 1.

[0039] The utility model discloses a vacuum evaporation machine door's prevent the installation structure of board, including the side wall prevent the structure of installation in the inner side of the cavity door 1 of vacuum evaporation machine, the side wall prevent the structure includes a plurality of prevent the board 3, a plurality of prevent the board 3, the bottom edge of prevent the board 3 and the top edge of prevent the board 3 overlap in space, every prevent the board 3 with the prevent the board 3 of adjacent between, every prevent the board 3 with the prevent the board 3 of adjacent between is equipped with a prevent the sheet 6, prevent the sheet 6 is located close to the cavity door 1 one side, the both sides of prevent the sheet 6 respectively with the edge of prevent the board 3 or prevent the board 3 of adjacent overlap, the height of prevent the sheet 6 and the height of corresponding prevent the board 3 flush, prevent the film material from the gap between the prevent the board 3 of adjacent and evaporates on the cavity door 1 through prevent the board 3 upper and lower overlap installation and cooperate prevent the sheet 6 left and right overlap installation, be equipped with a plurality of hook sheet 2 on the cavity door 1, every prevent the board 3 close to the cavity door 1 one side four corners are equipped with hook 5, the hook 5 is the Z type right angle bending piece, the hook 5 includes first folding edge 51, second folding edge 52, third folding edge 53, the first folding edge 51 is connected with prevent the board 3, and the second folding edge 52 is slidably connected with the upper edge of hook sheet 2, and the third folding edge 53 is vertically bent downward and parallel to hook sheet 2, the position of hook 5 on hook sheet 2 is adjusted to make prevent the board 3 can be adjusted back and forth, adopt the design of overlapping prevent the board 3+prevent the sheet, and dynamically fill the gap between prevent the board 3, and integrated modular design, support overall replacement or individual adjustment.

[0040] The above-mentioned embodiments only express several implementation manners of the utility model, and the description is more specific and detailed, but it can not be understood as the limitation of the utility model patent scope. It should be pointed out that for ordinary skilled person in the art, without departing from the utility model concept, can make several deformation and improvement, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent should be according to the attached claims.

Claims

1. A vacuum deposition machine door anti-sticking plate mounting structure, comprising a side wall anti-sticking structure mounted on the inner side of a chamber door (1) of a vacuum deposition machine, characterized in that: The side wall anti-deposition structure comprises a plurality of anti-deposition plates (3), adjacent anti-deposition plates (3) are arranged in up-down or left-right, when the adjacent anti-deposition plates (3) are arranged in up-down, the bottom edge of the anti-deposition plate (3) in the upper part overlaps the top edge of the anti-deposition plate (3) in the lower part in space, when the adjacent anti-deposition plates (3) are arranged in left-right, the side edge of one of the two adjacent anti-deposition plates (3) is provided with an anti-deposition sheet (6), one side of the anti-deposition sheet (6) is fixedly connected with the mounting surface of the anti-deposition plate (3), the other side overlaps the edge of the adjacent anti-deposition plate (3), the height of the anti-deposition sheet (6) is flush with the height of the layer anti-deposition plate (3) mounted thereby, so as to avoid the deposition dead angle formed by the height difference, the gaps between the anti-deposition plates are eliminated through the up-down and left-right overall overlap, the evaporation material is prevented from being deposited into the cavity door through the gaps, and the equipment cleanliness and the film coating quality are improved.

2. The anti-sticking plate mounting structure for a vacuum evaporation machine door according to claim 1, characterized by: The anti-deposition sheet (6) is located at the edges of the two sides of the same anti-deposition plate (3) or the anti-deposition sheet (6) is located at the edge of one side of different anti-deposition plates (3).

3. The anti-sticking plate mounting structure for a vacuum evaporation machine door according to claim 1, characterized by: The anti-deposition sheet (6) is made of flexible or elastic material.

4. The anti-sticking plate mounting structure for a vacuum evaporation machine door according to claim 1, characterized by: The cavity door (1) is provided with a plurality of hook sheets (2), each anti-deposition plate (3) is provided with a hook (5) at each corner close to the cavity door (1), the hook (5) is a Z-shaped right-angle bending piece, the hook (5) comprises a first bending edge (51), a second bending edge (52) and a third bending edge (53), the first bending edge (51) is connected with the anti-deposition plate (3), the second bending edge (52) is slidably connected with the upper edge of the hook sheet (2), and the third bending edge (53) is vertically bent downward and parallel to the hook sheet (2), the position of the hook (5) on the hook sheet (2) is adjusted, so that the anti-deposition plate (3) can be adjusted forward and backward.

5. The anti-sticking plate mounting structure for a vacuum evaporation machine door according to claim 4, characterized by: The cavity door (1) is provided with a plurality of rows of mounting columns (11) at intervals, the mounting columns (11) in each row are located on the same straight line, and the mounting columns (11) in each row are connected with a hook sheet (2), the hook sheet (2) is a long strip-shaped metal plate, and each layer of anti-deposition plate (3) is connected with the hook sheet (2) through at least two rows of mounting columns (11), and a gap is left between the hook sheet (2) and the cavity door (1).

6. The anti-sticking plate mounting structure for a vacuum evaporation machine door according to claim 5, characterized by: The hook sheet (2) is provided with a plurality of connecting grooves (21), the mounting columns (11) and the connecting grooves (21) are connected one by one through bolts, and the connecting grooves (21) are one of a waist-shaped or a circular shape.

7. The anti-sticking plate mounting structure for a vacuum evaporation machine door according to claim 1, characterized by: When the adjacent anti-deposition plates (3) are arranged in up-down, the anti-deposition plate in the upper part and the anti-deposition plate in the lower part are not located on the same curved surface, the curved surface where the anti-deposition plate in the upper part is located is located on the inner side of the curved surface where the anti-deposition plate in the lower part is located, and the film material on the anti-deposition plate in the upper part can be prevented from depositing through the anti-deposition plate in the lower part after the film material on the anti-deposition plate in the upper part is deposited over time, and the cavity door (1) is not affected.

8. The anti-sticking plate mounting structure for a vacuum evaporation machine door according to claim 1, characterized by: The anti-deposition plate mounting structure further comprises edge anti-deposition structures (7) arranged on both sides of the cavity door (1), wherein the edge anti-deposition structures (7) comprise a plurality of edge anti-deposition plates, the edge anti-deposition plates are in a bent structure, one side of the edge anti-deposition plates is connected with both sides of the cavity door (1), the other side is bent towards the anti-deposition plate (3) or the direction of the anti-deposition plate (3), and the bent part overlaps the anti-deposition plate (3) or the anti-deposition plate (3), thereby preventing the film material from being deposited on the cavity door (1) through the gap on both sides of the side wall anti-deposition structure.

9. The anti-sticking plate mounting structure for a vacuum evaporation machine door according to claim 1, characterized by: The anti-deposition plate mounting structure further comprises a bottom anti-deposition plate (38), the bottom surface of the bottom anti-deposition plate (38) is connected with the cavity door (1) through a plurality of vertical columns (81), and the edge of the bottom anti-deposition plate (38) close to the cavity door (1) is matched with the curvature of the anti-deposition plate (3), thereby preventing the film material from being deposited on the cavity door (1).

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