Etching molybdenum table
By designing an etching stage structure and using MPCVD equipment for reverse etching, the problem of amorphous carbon at the bottom of the diamond diaphragm was solved, improving the diaphragm's quality and working efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-24
- Publication Date
- 2026-04-10
AI Technical Summary
The diamond diaphragm prepared in the prior art has amorphous carbon at the bottom, which affects the sound characteristics of the diaphragm.
Design a molybdenum etching stage, including a cylindrical base and a vertically arranged etching cylinder. The top of the etching cylinder is a concave spherical surface. Amorphous carbon is removed by reverse etching using an MPCVD device.
It effectively removes the amorphous carbon phase at the bottom of the diamond diaphragm, reduces the edge effect of the diaphragm, avoids cracking caused by uneven heating, and improves the quality and working efficiency of the diaphragm.
Smart Images
Figure CN224105936U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to diamond film preparation field relates to a kind of etching molybdenum platform, more specifically, it is a kind of etching diamond diaphragm's molybdenum platform. BACKGROUND
[0002] Diamond diaphragm is a kind of element commonly seen in microelectronic devices, with some unique advantages. The advantages of diamond diaphragm include high hardness, low mass, ultra-high frequency response, low distortion, high temperature stability, corrosion resistance and long life, etc. These advantages make it an ideal choice in high-end audio equipment, especially for high fidelity and high performance sound.
[0003] Chemical vapor deposition (CVD) is an effective method for preparing high-quality diamond diaphragm, especially microwave chemical vapor deposition (MPCVD) with its advantages of high plasma density and no electrode pollution, has become the preferred solution for preparing high-quality diamond diaphragm. However, due to the nucleation process of preparation, there is amorphous carbon at the bottom of the prepared diamond diaphragm, which makes the prepared diamond diaphragm black, thereby affecting the sound characteristics of the diaphragm. SUMMARY
[0004] In view of the above problems existing in the prior art, the purpose of the utility model is to provide an etching molybdenum platform, which can etch the back of the diamond diaphragm and remove the amorphous carbon at the bottom of the diamond diaphragm.
[0005] To achieve the above purpose, the technical scheme adopted by the utility model is:
[0006] An etching molybdenum platform, the molybdenum platform includes a cylindrical structure or a circular platform structure base, the upper surface of the base is provided with an etching cylinder, the top of the etching cylinder is a concave spherical surface.
[0007] Further, the upper surface of the base is a horizontal surface, and the etching cylinder is vertically arranged on the upper surface of the base.
[0008] Further, the etching cylinder is provided with at least 3.
[0009] Further, a plurality of etching cylinders are uniformly distributed on the upper surface of the base.
[0010] Further preferably, a plurality of etching cylinders are uniformly distributed on the upper surface of the base in a circumferential array.
[0011] Further preferably, a plurality of etching cylinders are integrally formed.
[0012] Further, the diameter D of the base is less than or equal to 72 mm, the diameter d of the etching cylinder is less than the diameter D of the base, 10 mm < the diameter d of the etching cylinder < 25 mm, and the diameter of the concave spherical surface is 20-40 mm.
[0013] Further, 15 mm ≤ the height h1 of the base ≤ 20 mm, the sag h3 of the concave spherical surface ≤ 3 mm, and the height h2 of the etching cylinder = the sag h3 of the concave spherical surface + 1 mm.
[0014] Further, the curvature of the concave spherical surface is equal to the curvature of the diamond diaphragm to be etched.
[0015] Further, the depth of the concave spherical surface is greater than the sag of the diamond diaphragm to be etched.
[0016] It should be noted that the sag of the concave spherical surface refers to the maximum thickness of the concave spherical surface in the vertical direction.
[0017] Compared with the prior art, the utility model has the beneficial effects that:
[0018] (1) The molybdenum table of the utility model has simple structure, can batch etch the back of the diamond diaphragm, and removes the amorphous carbon existing at the bottom of the diamond diaphragm.
[0019] (2) The molybdenum table of the utility model can greatly slow down the edge effect of the diaphragm through the size limitation between the circumferential array cylinder and the circular groove, makes the temperature of the diaphragm more uniform, avoids the diaphragm from being broken due to uneven heating, etc., if the diaphragm is sunken without the groove structure, will cause the plasma to adhere to the edge of the diaphragm, the temperature is extremely high, and causes the diamond diaphragm to be broken. The quality and working efficiency of the diamond diaphragm are improved, and the utility model is suitable for industrial production. DRAWINGS
[0020] The drawings are used to provide further understanding of the utility model, and constitute a part of the specification, are used together with the embodiments of the utility model to explain the utility model, and do not constitute the limitation to the utility model. In the drawings:
[0021] Figure 1 It is the schematic diagram of the three-dimensional structure of the molybdenum table in embodiment 1.
[0022] Figure 2 It is the schematic diagram of the top view structure of the molybdenum table in embodiment 1.
[0023] Figure 3 It is the schematic diagram of the sectional structure of the molybdenum table in embodiment 1.
[0024] Figure 4 It is the Raman diagram of the bottom of the diamond diaphragm before etching in embodiment 1.
[0025] Figure 5 It is the Raman diagram of the bottom of the diamond diaphragm after etching in embodiment 1.
[0026] wherein:
[0027] 1 - etching cylinder, 2 - base, 3 - concave spherical surface. DETAILED DESCRIPTION
[0028] For the purpose of facilitating the understanding of the present application, the present application will be described in more detail below in conjunction with the accompanying drawings and preferred embodiments. However, the scope of protection of the present application is not limited to the following specific embodiments.
[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The technical terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the scope of protection of the present application.
[0030] Unless otherwise specified, various raw materials, reagents, instruments and equipment used in the present application can be purchased from the market or can be prepared by existing methods.
[0031] A molybdenum table for etching a diamond diaphragm, the molybdenum table comprising a cylindrical structure base, an etching cylinder is arranged on the upper surface of the base 2, and the top of the etching cylinder is a concave spherical surface.
[0032] Preferably, the upper surface of the base is a horizontal plane, and the etching cylinder is vertically arranged on the upper surface of the base.
[0033] Preferably, at least three etching cylinders are arranged.
[0034] Preferably, a plurality of etching cylinders are uniformly distributed on the upper surface of the base.
[0035] Preferably, a plurality of etching cylinders are uniformly distributed on the upper surface of the base in a circumferential array.
[0036] Preferably, a plurality of etching cylinders are integrally formed.
[0037] Preferably:
[0038] The diameter D of the base is ≤72mm, and the height h1 of the base is 15mm≤h1≤20mm.
[0039] The diameter d of the etching cylinder is 10mm
[0040] The diameter of the concave spherical surface at the top of the etching cylinder is 20~40mm, and the sag h3 is ≤3mm.
[0041] The curvature of the concave spherical surface is equal to the curvature of the diamond diaphragm to be etched.
[0042] The depth of the concave spherical surface is greater than the sag of the diamond diaphragm to be etched.
[0043] Preferably, the method for etching the polycrystalline diamond diaphragm using the etching molybdenum table comprises the following steps:
[0044] (1) Place the grown diaphragm on the etching molybdenum table, and the concave surface of the etching molybdenum table is exactly the same as the curvature of the diaphragm.
[0045] (2) Place the molybdenum table in the deposition cavity of the MPCVD device, and introduce hydrogen and oxygen, maintain the hydrogen concentration at 50-400 sccm / min, the oxygen concentration at 0.1-10 sccm / min, maintain the pressure in the deposition cavity at 8-30 Kpa, maintain the etching temperature in the deposition cavity at 500-1000℃, etch the diamond diaphragm, and the etching time is 10 min-5 h.
[0046] (3) After etching, cool down at a rate of 10-100℃ / min to avoid breaking the diamond diaphragm on the molybdenum table.
[0047] Embodiment 1
[0048] As shown in Figures 1-3 , the embodiment provides a molybdenum table for etching a diamond diaphragm, which comprises a cylindrical base 2, and an etching cylinder 1 is arranged on the upper surface of the base 2, and the top of the etching cylinder 1 is a concave spherical surface 3.
[0049] In this embodiment, the upper surface of the base 2 is a horizontal surface, and the etching cylinders 1 are vertically arranged on the upper surface of the base 2, and three etching cylinders 1 are arranged in a circumferential array on the upper surface of the base 3 and are uniformly distributed. The three etching cylinders 1 are integrally formed.
[0050] In this embodiment:
[0051] The diameter D of the base 2 is 72 mm, and the height h1 of the base 2 is 17 mm. The diameter d of the etching cylinder 1 is 24.5 mm, and the height h2 of the etching cylinder is 4 mm. The diameter of the concave spherical surface 3 at the top of the etching cylinder 1 is 23 mm, the sag h3 is 3 mm, and the depth of the concave spherical surface is 3 mm. The curvature of the concave spherical surface is equal to the curvature of the diamond diaphragm to be etched.
[0052] The method for etching the polycrystalline diamond diaphragm using the etching molybdenum table, the sag of the diamond diaphragm to be etched is 2.5 mm, comprises the following steps:
[0053] (1) Place the grown diamond diaphragm to be etched on the etching molybdenum table, and the concave surface of the etching molybdenum table is exactly the same as the curvature of the diaphragm.
[0054] (2) Put the molybdenum table in the deposition cavity of the MPCVD device, input hydrogen and oxygen, keep the hydrogen concentration at 300sccm, the oxygen concentration at 2sccm, keep the pressure in the deposition cavity at 15Kpa, keep the etching temperature in the deposition cavity at 850℃, etch the diamond diaphragm, and the etching time is 30min.
[0055] (3) After etching, cool down at a rate of 10℃ / min to avoid the diamond diaphragm from breaking on the molybdenum table.
[0056] As shown in Figs. Figure 4 and 5 , Raman spectrum detection is performed on the bottom of the diamond diaphragm before and after etching. It can be seen that the non-diamond phase is etched away after etching, leaving the diamond phase.
[0057] The above is only the preferred embodiment of the present application and is not used to limit the present application. For those skilled in the art, the present application can be variously changed and modified. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the scope of the present application.
Claims
1. A molybdenum etch station, comprising: The molybdenum platform comprises a base of a cylindrical structure or a circular platform structure, and an etching cylinder is arranged on the upper surface of the base, and the top of the etching cylinder is a concave spherical surface.
2. The molybdenum table of claim 1, wherein, The upper surface of the base is a horizontal surface, and the etching cylinder is vertically arranged on the upper surface of the base.
3. The molybdenum table of claim 1, wherein, The etching cylinder is provided with at least three.
4. The molybdenum table of claim 1, wherein, Multiple etching cylinders are uniformly distributed on the upper surface of the base.
5. The molybdenum table of claim 4, wherein, Multiple etching cylinders are uniformly distributed in a circumferential array on the upper surface of the base.
6. The molybdenum table of claim 4, wherein, Multiple etching cylinders are integrally formed.
7. The molybdenum table as claimed in any one of claims 1 to 6, characterized in that The diameter D of the base is less than or equal to 72 mm, the diameter d of the etching cylinder is less than the diameter D of the base, 10 mm < the diameter d of the etching cylinder < 25 mm, and the diameter of the concave spherical surface is 20-40 mm.
8. The molybdenum table as claimed in any one of claims 1 to 6, characterized in that 15 mm ≤ the height h1 of the base ≤ 20 mm, the sag h3 of the concave spherical surface ≤ 3 mm, and the height h2 of the etching cylinder = the sag h3 of the concave spherical surface + 1 mm.
9. The molybdenum table as claimed in any one of claims 1 to 6, characterized in that The curvature of the concave spherical surface is equal to the curvature of the diamond vibrating diaphragm to be etched.
10. The molybdenum table as claimed in any one of claims 1 to 6, characterized in that The depth of the concave spherical surface is greater than the sag of the diamond vibrating diaphragm to be etched.