Indium phosphide charging device

Abstract

The utility model belongs to the field of semiconductor material single crystal growth, and particularly relates to an indium phosphide charging device which comprises a rack, a top seat is fixedly connected to the top of the rack, a rotating groove is formed in the top seat, a rotating disc is rotatably connected to the interior of the rotating groove, a plurality of through holes are formed in the top of the top seat, and a plurality of stock bins are fixedly connected to the top of the top seat; the stock bins are communicated with the through holes, the top of the top seat is fixedly connected with a motor, the output end of the motor is fixedly connected with a rotary table, during use, the rotary table is driven by the motor to rotate, the rotary table rotates to enable the material guide pipes to be communicated with the different through holes, and the upper portions of the different through holes are communicated with the corresponding stock bins; materials in the stock bin are fed into the crucible through the material guide pipe and the feeding pipe, so that the crucible is filled with the corresponding materials layer by layer, charging for indium phosphide single crystal growth is completed, use by workers is facilitated, and time and labor are saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor material single crystal growth, and specifically relates to an indium phosphide loading device. BACKGROUND

[0002] With the continuous development of science and technology, indium phosphide single crystal material has become another important semiconductor material after gallium arsenide material. Indium phosphide single crystal is divided into N type, P type and semi-insulating type according to electrical properties. N-type indium phosphide single crystal is mainly prepared by doping S or Sn and is mainly applied to high-speed optoelectronic devices in the field of optical fiber communication, such as laser diodes, light-emitting diodes and optical detectors.

[0003] At present, in the prior art, indium phosphide single crystal material is mainly obtained by growing single crystals by VGF or VB method, wherein, during preparation, indium phosphide polycrystal is used as raw material, and then a dopant, red phosphorus and a liquid sealant are added, and the above materials are stacked in a crucible, a seed crystal is placed at the bottom of the crucible, and then single crystal growth is carried out at high temperature and high pressure to obtain indium phosphide single crystal.

[0004] However, during use, the staff needs to manually load a plurality of different materials into the crucible, which is inconvenient and time-consuming and laborious, and therefore, an indium phosphide loading device is proposed to solve the above problems. UTILITY MODEL CONTENTS

[0005] In order to make up for the deficiencies of the prior art and solve at least one technical problem proposed in the background art, the utility model provides an indium phosphide loading device.

[0006] The utility model discloses a kind of indium phosphide loading devices, including rack;The top of the rack is fixedly connected with top seat, rotating groove is set in the inside of the top seat, rotating disc is rotatably connected in the inside of the rotating groove, the top of the top seat is equipped with a plurality of through holes, and the top of the top seat is fixedly connected with a plurality of warehouses;The warehouse and through hole are communicated, the top of the top seat is fixedly connected with motor, the output end of the motor is fixedly connected with rotating disc, the bottom of the rotating disc and the corresponding position of through hole are fixedly connected with guide tube, and the bottom of the guide tube is fixedly connected with feeding tube.

[0007] Preferably, the feeding tube includes an inner tube and an outer tube, the inner tube is fixedly connected to the bottom end of the guide tube, the inner tube and the guide tube are in communication, the outer tube is sleeved on the surface of the inner tube, and the outer tube and the inner tube are slidingly connected.

[0008] Preferably, the bottom of the rotating disc is fixedly connected with an electric push rod, the electric push rod is located on the side of the guide tube, the output end of the electric push rod is fixedly connected with a support, and the support is fixedly connected to the top end of the outer tube.

[0009] Preferably, the bottom of the rotating disc is fixedly connected with two guide columns, the bracket is fixedly connected with a sliding sleeve, the guide columns penetrate through the sliding sleeve, and the guide columns and the sliding sleeve are in sliding connection, and the two guide columns are located on the two sides of the outer pipe.

[0010] Preferably, the bottom end of the outer pipe is fixedly connected with a connecting frame, and the bottom of the connecting frame is fixedly connected with a scraper, and the scraper is located below the outer pipe.

[0011] Preferably, the bottom of the rack is fixedly connected with a base, and the inside of the base is provided with a positioning groove; a plurality of the material bins are arranged in a ring array, and a plurality of the through holes are arranged in a ring array.

[0012] The utility model discloses the beneficial effect that:

[0013] 1. The utility model discloses a top seat, rack, motor, rotating disc, a plurality of material bins, guide pipe and feeding pipe are set up, when using, the staff puts the crucible below the feeding pipe, then puts different material in the material bin respectively, then rotates the rotating disc by motor drive, and the guide pipe is communicated with different through -hole respectively by the rotating disc rotation, and the different through -hole is communicated with the corresponding material bin, and the material in the material bin is sent to the inside of the crucible through the guide pipe and the feeding pipe, and the corresponding material is filled to the crucible layer by layer, and the loading of indium phosphide single crystal growth is completed, so that the staff uses conveniently, saves time and energy.

[0014] 2. The utility model discloses an inner tube and outer tube are set up, when using, and the feeding pipe is formed by telescopic sliding inner tube and outer tube, can therefore make the pipeline lengthening, so that it is inserted into the crucible, so that the material can be filled to the inside of the crucible conveniently, and the material scattering condition is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0016] Figure 1 It is the structural schematic diagram of the utility model;

[0017] Figure 2 It is the structural schematic diagram of the plurality of material bins of the utility model;

[0018] Figure 3 It is the structural schematic diagram of the top seat of the utility model;

[0019] Figure 4 It is the structural schematic diagram of the rotating disc of the utility model;

[0020] Figure 5 The structure diagram of the outer tube of the utility model.

[0021] In the figure: 11, rack; 12, top cover; 13, hopper; 14, motor; 15, through hole; 16, rotating disc; 17, material guide pipe; 21, inner tube; 22, outer tube; 31, electric push rod; 32, support; 41, sliding sleeve; 42, guide column; 51, connecting frame; 52, scraper; 61, base; 62, positioning groove. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0023] The specific embodiments are given below.

[0024] Please refer to Figures 1-5 As shown in the figure, an indium phosphide loading device, comprising a rack 11; the top of the rack 11 is fixedly connected with a top seat 12, a rotating groove is formed in the inside of the top seat 12, a rotating disc 16 is rotatably connected in the inside of the rotating groove, a plurality of through holes 15 are formed in the top of the top seat 12, a plurality of hoppers 13 are fixedly connected with the top of the top seat 12; the hopper 13 and the through hole 15 are communicated, a motor 14 is fixedly connected with the top of the top seat 12, the output end of the motor 14 is fixedly connected with the rotating disc 16, the bottom of the rotating disc 16 and the corresponding position of the through hole 15 are fixedly connected with a material guide pipe 17, the bottom end of the material guide pipe 17 is fixedly connected with a feeding pipe;

[0025] In use, the worker places the crucible below the feeding pipe, then respectively puts a plurality of different materials in the hoppers 13, then relies on the motor 14 to drive the rotating disc 16 to rotate, the rotating disc 16 rotates to make the material guide pipes 17 respectively communicate with different through holes 15, different through holes 15 are communicated with corresponding hoppers 13 above, the materials in the hoppers 13 are sent into the inside of the crucible through the material guide pipes 17 and the feeding pipe, so as to fill the corresponding materials into the crucible layer by layer, so as to complete the loading of the indium phosphide single crystal growth, which is convenient for the worker to use, saves time and effort, and the motor 14 is preferably a servo motor 14.

[0026] Further, as Figures 1-5As shown, the feeding pipe comprises an inner pipe 21 and an outer pipe 22, the inner pipe 21 is fixedly connected at the bottom end of the material guide pipe 17, the inner pipe 21 and the material guide pipe 17 are communicated, the outer pipe 22 is sleeved on the surface of the inner pipe 21, and the outer pipe 22 and the inner pipe 21 are in sliding connection; the bottom of the rotating disc 16 is fixedly connected with an electric push rod 31, the electric push rod 31 is located at the side of the material guide pipe 17, the output end of the electric push rod 31 is fixedly connected with a support 32, and the support 32 is fixedly connected at the top end of the outer pipe 22; the bottom of the rotating disc 16 is fixedly connected with two guide columns 42, the support 32 is fixedly connected with a sliding sleeve 41, the guide columns 42 penetrate through the sliding sleeve 41, and the guide columns 42 and the sliding sleeve 41 are in sliding connection, and the two guide columns 42 are located at the two sides of the outer pipe 22 respectively;

[0027] In use, in the embodiment, the feeding pipe is composed of the telescopic sliding inner pipe 21 and outer pipe 22, so that the pipe can be elongated and inserted into the crucible, thereby facilitating the filling of the material into the crucible and reducing the scattering of the material. Further, the rotating disc 16 is fixedly connected with the electric push rod 31, the top end of the outer pipe 22 is fixedly connected with the support 32, the support 32 is connected with the electric push rod 31, and the outer pipe 22 can be driven to move up and down by the support 32 through the electric push rod 31, thereby facilitating the extraction and insertion into the crucible and facilitating the use of the staff. In use, a plurality of sliding sleeves 41 are fixedly connected to the support 32, the guide columns 42 are in sliding connection with the sliding sleeves 41 inside, and the stability of the up and down sliding of the outer pipe 22 can be improved by the structure.

[0028] Further, as shown in the drawings, Figures 1-5 The bottom end of the outer pipe 22 is fixedly connected with a connecting frame 51, the bottom of the connecting frame 51 is fixedly connected with a scraper 52, and the scraper 52 is located below the outer pipe 22; the bottom of the rack 11 is fixedly connected with a base 61, and the base 61 is internally provided with a positioning groove 62; a plurality of the material bins 13 are arranged in a ring array, and a plurality of the through holes 15 are arranged in a ring array.

[0029] In use, the bottom of the outer pipe 22 is fixedly connected with the connecting frame 51, and the connecting frame 51 is fixedly connected with the scraper 52. After each layer of raw material is filled, the outer pipe 22 is lifted upward, at this time the rotating disc 16 is rotated to switch different material bins 13, and the bottom material guide pipe 17, the outer pipe 22 and the scraper 52 are rotated to follow, and the scraper 52 is rotated to play a role in assisting the leveling of the material. The bottom of the rack 11 is fixedly connected with the base 61, and the positioning groove 62 on the base 61 is used to place and fix the crucible.

[0030] The working principle is that, in use, the worker places the crucible below the feeding pipe, then respectively puts different materials in the material bins 13, and then drives the rotating disc 16 to rotate by the motor 14, the rotation of the rotating disc 16 makes the material guide pipes 17 respectively communicate with different through holes 15, the different through holes 15 are communicated with corresponding material bins 13 above, the materials in the material bins 13 are sent into the inside of the crucible through the material guide pipes 17 and the feeding pipe, so as to fill the corresponding materials into the crucible layer by layer, so as to complete the loading of the indium phosphide single crystal growth, which is convenient for the worker to use, saves time and effort, and the motor 14 is preferably a servo motor 14; in use, the feeding pipe is composed of the telescopic inner pipe 21 and the outer pipe 22, so that the pipe can be elongated and inserted into the crucible, so that the material can be conveniently filled into the inside of the crucible, and the scattering of the material is reduced, further, the rotating disc 16 is fixedly connected with the electric push rod 31, the top end of the outer pipe 22 is fixedly connected with the support 32, the support 32 and the electric push rod 31 are connected, the outer pipe 22 can be driven to move up and down through the support 32 by the electric push rod 31, so that the outer pipe 22 can be conveniently pulled out and inserted into the crucible, which is convenient for the worker to use, in use, a plurality of sliding sleeves 41 are fixedly connected on the support 32, the sliding sleeves 41 are slidably connected with guide columns 42 inside, and the stability of the up and down sliding of the outer pipe 22 can be improved through the structure; in use, the bottom of the outer pipe 22 is fixedly connected with the connecting frame 51, the connecting frame 51 is fixedly connected with the scraper 52, after each layer of raw material is filled, the outer pipe 22 is lifted upwards, at this time, the rotating disc 16 is rotated to switch different material bins 13, and the bottom material guide pipe 17, the outer pipe 22 and the scraper 52 are rotated to follow, the scraper 52 is rotated to play the role of assisting to flatten the material, the bottom of the rack 11 is fixedly connected with the base 61, and the positioning groove 62 on the base 61 is used for placing and fixing the crucible.

[0031] In the description of the present specification, the description of the terms "one embodiment", "example", "specific example" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are contained in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0032] The basic principle, main features and advantages of the present application have been shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above embodiments, and the above embodiments and descriptions in the specification are only to illustrate the principle of the present application, and various changes and improvements can be made to the present application without departing from the spirit and scope of the present application, and these changes and improvements all fall within the scope of the claimed present application.

Claims

1. An indium phosphide charging device comprising a frame (11); characterized in that: The top of the rack (11) is fixed with a top seat (12), the inside of the top seat (12) is provided with a rotating groove, the inside of the rotating groove is rotatably connected with a rotating disc (16), the top of the top seat (12) is provided with a plurality of through holes (15), the top of the top seat (12) is fixed with a plurality of material bins (13); the material bin (13) and the through hole (15) are communicated, the top of the top seat (12) is fixed with a motor (14), the output end of the motor (14) is fixed with the rotating disc (16), the bottom of the rotating disc (16) is fixed with a material guide pipe (17) at the corresponding position of the through hole (15), the bottom end of the material guide pipe (17) is fixed with a feeding pipe.

2. An indium phosphide charging device according to claim 1, characterized in that: The feeding pipe comprises an inner pipe (21) and an outer pipe (22), the inner pipe (21) is fixed at the bottom end of the material guide pipe (17), the inner pipe (21) and the material guide pipe (17) are communicated, the outer pipe (22) is sleeved on the surface of the inner pipe (21), and the outer pipe (22) and the inner pipe (21) are slidably connected.

3. An indium phosphide charge device according to claim 2, wherein: The bottom of the rotating disc (16) is fixed with an electric push rod (31), the electric push rod (31) is located on the side of the material guide pipe (17), the output end of the electric push rod (31) is fixed with a support (32), and the support (32) is fixed at the top end of the outer pipe (22).

4. An indium phosphide charge device according to claim 3, wherein: The bottom of the rotating disc (16) is fixed with two guide columns (42), the support (32) is fixed with a sliding sleeve (41), the guide columns (42) penetrate through the sliding sleeve (41), and the guide columns (42) and the sliding sleeve (41) are slidably connected. Two guide columns (42) are located on both sides of the outer pipe (22).

5. An indium phosphide charge device according to claim 4, wherein: The bottom end of the outer pipe (22) is fixed with a connecting frame (51), the bottom of the connecting frame (51) is fixed with a scraper (52), and the scraper (52) is located below the outer pipe (22).

6. An indium phosphide charge device according to claim 5, wherein: The bottom of the rack (11) is fixed with a base (61), and the inside of the base (61) is provided with a positioning groove (62); a plurality of material bins (13) are arranged in an annular array, and a plurality of through holes (15) are arranged in an annular array.

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