Polycrystal growth furnace for gallium arsenide crystal production

Abstract

The utility model discloses a polycrystal growth furnace for producing gallium arsenide crystals, and particularly relates to the technical field of polycrystal growth furnaces, the polycrystal growth furnace comprises a polycrystal growth furnace body and a furnace cover arranged at the top end of the polycrystal growth furnace body, a production assembly is fixedly arranged at the bottom end of the furnace cover, and the production assembly comprises a crucible for producing the gallium arsenide crystals. A heat preservation cylinder sleeves the outer side of the crucible, the top end of the heat preservation cylinder is detachably connected with the furnace cover, an induction coil is detachably connected into the heat preservation cylinder, and the induction coil sleeves the outer side of the crucible. Heat dissipation can be effectively reduced through the heat preservation barrel and the heat preservation cotton sleeve, so that production efficiency is improved, energy is saved, when the crucible is accidentally broken and leaks, the heat preservation barrel can serve as a collecting container, raw materials are prevented from being scattered, and the interior of the crucible and the interior of the heat preservation barrel are shot in real time through the camera. And a worker can timely find abnormal conditions in the growth of the gallium arsenide crystal and timely take measures for adjustment, so that the production process is ensured to be smoothly carried out.

Description

TECHNICAL FIELD

[0001] The utility model relates to polycrystal growth furnace technical field more specifically, it is polycrystal growth furnace for gallium arsenide crystal production. BACKGROUND

[0002] Gallium arsenide crystal is an important compound semiconductor material, it has the dark gray crystal or gray powder of metal green blue luster. In addition, gallium arsenide also has good radiation resistance. Utilize the high electron mobility of gallium arsenide, large band gap, direct band gap, low power consumption etc. characteristics, make microwave high -power device, low noise piece, microwave millimeter wave monolithic integrated circuit, super -speed digital integrated circuit etc. The operation speed of gallium arsenide chip is ten times of silicon chip, can complete information transmission, storage and processing on single chip, be widely used in high -speed computer, mobile phone voice data conversion field effect transistor and 5G mobile phone chip.

[0003] At present, gallium arsenide crystal generally uses polycrystal growth furnace to produce, and quartz crucible is mostly used as reaction container, and heating assembly is used to heat the outer wall of quartz crucible and adjust the temperature during preparation, for example, the prior art disclosed in CN214458452U polycrystal growth furnace for gallium arsenide crystal production.

[0004] But the above prior art still has the following problems when using: the heat loss in the polycrystal growth furnace is fast, which increases the energy consumption, and the strength of the crucible in the polycrystal growth furnace decreases after frequent use, which can easily cause the gallium arsenide crystal raw material to fall and contaminate the entire polycrystal growth furnace. Utility model content

[0005] In order to overcome the above-mentioned defects of the prior art, the utility model provides a polycrystal growth furnace for gallium arsenide crystal production, which can effectively reduce heat dissipation by using heat preservation cylinder and heat preservation cotton cover, thereby improving production efficiency and saving energy. When the crucible is accidentally broken and leaks, the heat preservation cylinder can act as a collection container to prevent the raw material from falling, and the camera can take real-time pictures of the inside of the crucible and the heat preservation cylinder. The staff can timely find abnormal conditions in the growth of gallium arsenide crystal and take timely measures to adjust, ensuring the smooth progress of the production process, to solve the problems in the above background technology.

[0006] In order to achieve the above object, the utility model provides the following technical scheme: A polycrystal growth furnace for gallium arsenide crystal production, including polycrystal growth furnace body and the furnace cover that establishes at polycrystal growth furnace body top, the production assembly is fixedly arranged at the furnace cover bottom, the production assembly includes the crucible for producing gallium arsenide crystal, the heat preservation cylinder is sleeved with the outside of crucible, the heat preservation cylinder top is detachably connected with the furnace cover, the heat preservation cylinder inside is detachably connected with the induction coil, and the induction coil is sleeved with the outside of crucible, the heat preservation cylinder outer wall is fixedly sleeved with the heat preservation cotton cover, the heat preservation cylinder inside is detachably connected with the monitoring assembly, the polycrystal growth furnace body outer wall is equipped with the lifting assembly for driving the furnace cover lifting.

[0007] In a preferred embodiment, the monitoring assembly includes a camera, the top of the camera is detachably connected with a long plate, the long plate is detachably installed inside the heat preservation cylinder, and the camera is arranged above the crucible. The camera is used to take pictures of the inside of the crucible and the heat preservation cylinder in real time, so that the staff can check at any time, and the safety of gallium arsenide crystal production is improved.

[0008] In a preferred embodiment, a square slot is formed in the inner wall of the bottom end of the heat preservation cylinder, a square block adapted to the square slot is fixedly arranged at the bottom end of the crucible, the square block is inserted into the square slot, and the heat preservation cylinder and the square block are detachably connected. The heat preservation cylinder and the square block can be connected by bolts, thereby improving the stability of the crucible inside the heat preservation cylinder.

[0009] In a preferred embodiment, the lifting assembly includes two electric push rods detachably fixed on the outer wall of the polycrystal growth furnace body. The piston rod of each electric push rod is detachably connected with a connecting plate at the top end. The connecting plate is fixed to the furnace cover. The electric push rod drives the furnace cover to lift through the connecting plate. The electric push rod and the furnace cover can be separated and replaced.

[0010] In a preferred embodiment, a plurality of O-shaped sealing rings are arranged between the furnace cover and the polycrystal growth furnace body. The O-shaped sealing rings are arranged to improve the sealing performance between the furnace cover and the polycrystal growth furnace body.

[0011] In a preferred embodiment, a gas pipe and a pressure relief valve are fixedly arranged on the outer wall of the polycrystal growth furnace body. The gas pipe and the pressure relief valve are in communication with the inside of the polycrystal growth furnace body. The gas pipe, the pressure relief valve, and the two electric push rods are distributed at intervals. An air filter is connected to the pressure relief valve. The air filter is used to filter the gas to prevent toxic substances from polluting the environment.

[0012] In a preferred embodiment, a plurality of communication air holes are formed on the outer wall of the heat preservation cylinder and the outer wall of the heat preservation cotton cover. The plurality of air holes are arranged in a ring array above the crucible. The gas in the heat preservation cylinder can flow, and the internal pressure of the heat preservation cylinder can be prevented from being too high, thereby balancing the pressure.

[0013] The technical effects and advantages of the utility model are as follows:

[0014] 1、The utility model discloses a heat preservation cylinder and heat preservation cotton cover can effectively reduce heat dissipation, thereby improving production efficiency and saving energy, when the crucible breaks unexpectedly and appears leakage, the heat preservation cylinder can act as a collection container, prevents raw materials from scattering, and utilizes the camera to shoot the inside of the crucible and the heat preservation cylinder in real time, the staff can discover abnormal conditions in the gallium arsenide crystal growth in time and take measures to adjust in time, ensure that the production process proceeds smoothly.

[0015] 2、Through setting up detachable crucible and heat preservation cylinder, the crucible can be conveniently detached and replaced, and the lifting assembly is used to automatically adjust the height of the furnace cover, so that the efficiency of feeding, discharging and maintenance and replacement can be improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the whole structure schematic view of the utility model;

[0017] Figure 2 It is the whole structure rear view of the utility model;

[0018] Figure 3 It is the polycrystal growth furnace body, heat preservation cylinder and crucible sectional view of the utility model;

[0019] Figure 4 It is the furnace cover and heat preservation cylinder structure diagram of the utility model;

[0020] Figure 5 It is the heat preservation cylinder plan view of the utility model.

[0021] The figure mark is: 1, polycrystal growth furnace body;2, furnace cover;3, production assembly;4, monitoring assembly;5, lifting assembly;6, square groove;7, square block;8, O type sealing ring;9, gas pipe;10, pressure relief valve;11, air filter;12, air hole;

[0022] 31, crucible;32, heat preservation cylinder;33, induction coil;34, heat preservation cotton cover;

[0023] 41, camera;42, long plate;

[0024] 51, electric push rod;52, connecting plate. DETAILED DESCRIPTION

[0025] Clearly and completely describe the technical scheme in the embodiments of the utility model with reference to the drawings in the embodiments of the utility model, obviously, the described embodiment is only a part of the embodiment of the utility model, and is not all the embodiment. Based on the embodiment in the utility model, all other embodiments obtained by the ordinary skill in the art without making creative labor belong to the range of protection of the utility model.

[0026] Referring to the drawings attached in the description Figures 1-5 The utility model provides a kind of polycrystal growth furnace for gallium arsenide crystal production, including polycrystal growth furnace body 1 and the furnace cover 2 being located at the top of polycrystal growth furnace body 1, and multiple O-shaped sealing rings 8 are equipped between furnace cover 2 and polycrystal growth furnace body 1, and O-shaped sealing ring 8 is arranged to improve the sealing between furnace cover 2 and polycrystal growth furnace body 1, production assembly 3 is fixedly arranged at the bottom of furnace cover 2, and production assembly 3 includes crucible 31 for producing gallium arsenide crystal, heat preservation cylinder 32 is sleeved on the outside of crucible 31, and heat preservation cylinder 32 is detachably connected with furnace cover 2, and induction coil 33 is detachably connected in heat preservation cylinder 32, and induction coil 33 is sleeved on the outside of crucible 31, and heat preservation cotton sleeve 34 is fixedly sleeved on the outer wall of heat preservation cylinder 32.

[0027] Monitoring assembly 4 is detachably connected in heat preservation cylinder 32, specifically, monitoring assembly 4 includes camera 41, camera 41 selects LCG070-01S9, long plate 42 is detachably connected at the top of camera 41, long plate 42 is detachably installed in heat preservation cylinder 32, and camera 41 is arranged above crucible 31, camera 41 is used to shoot crucible 31 and heat preservation cylinder 32 in real time, so that staff can check at any time, improve the security of gallium arsenide crystal production, and illuminating lamp is also arranged at the bottom of long plate 42, for camera 41 shooting.

[0028] Lifting assembly 5 for driving furnace cover 2 to lift is arranged on the outer wall of polycrystal growth furnace body 1, specifically, lifting assembly 5 includes two electric push rods 51 detachably fixed on the outer wall of polycrystal growth furnace body 1, specifically, electric push rod 51 selects DTⅡ2000-400, and the thrust of this model electric push rod 51 is 2000N, so it is suitable for the height adjustment of furnace cover 2 and production assembly 3 of the utility model, the top of the piston rod of two electric push rods 51 is detachably connected with connecting plate 52, and connecting plate 52 is fixed with furnace cover 2, by the telescopic function of electric push rod 51, furnace cover 2 can be automatically opened and closed, manual operation is not needed, and the efficiency of opening and closing can be improved.

[0029] In actual use, the raw materials for producing gallium arsenide crystals are placed in the crucible 31, then the lifting assembly 5 is used to drive the furnace cover 2 and the heat preservation cylinder 32 and the crucible 31 to move downwards to the inside of the polycrystal growth furnace body 1, and the furnace cover 2 is sealed with the polycrystal growth furnace body 1, the induction coil 33 is used to heat the gallium arsenide crystal raw materials in the crucible 31 to produce gallium arsenide crystals, in the production process, the camera 41 is used to take pictures of the inside of the crucible 31 and the heat preservation cylinder 32 in real time, so that the workers can find abnormal conditions in the growth of gallium arsenide crystals in time and take measures to adjust in time to ensure the normal production of gallium arsenide crystals, and the heat preservation cylinder 32 and the heat preservation cotton sleeve 34 can reduce the heat dissipation of the induction coil 33, and when the crucible 31 is accidentally broken and leaks, the heat preservation cylinder 32 can also collect gallium arsenide crystals.

[0030] With reference to the drawings accompanying the specification Figures 1-5 A square groove 6 is formed in the inner wall of the bottom end of the heat preservation cylinder 32, a square block 7 is fixedly arranged at the bottom end of the crucible 31 and is matched with the square groove 6, the square block 7 is inserted into the square groove 6, and the heat preservation cylinder 32 and the square block 7 are detachably connected through bolts, so that the heat preservation cylinder 32 can be taken off the furnace cover 2, the long plate 42 is disassembled, the bolts are loosened, and the crucible 31 can be taken out from the inside of the heat preservation cylinder 32 for maintenance and replacement.

[0031] The gas conveying pipe 9 and the pressure relief valve 10 are fixedly penetrated on the outer wall of the polycrystal growth furnace body 1, specifically, the A61Y type pressure relief valve 10 is selected, which is suitable for high temperature and high pressure working conditions, so it is suitable for the use of the utility model, and the gas conveying pipe 9 and the pressure relief valve 10 are both communicated with the inside of the polycrystal growth furnace body 1, the gas conveying pipe 9, the pressure relief valve 10 and the two electric push rods 51 are distributed at intervals, and the pressure relief valve 10 is communicated with the air filter 11, when the gas pressure in the polycrystal growth furnace body 1 is too large, the pressure relief valve 10 is opened to exhaust, and the air filter 11 is used to filter the gas, so as to prevent harmful substances in the gas from being discharged to pollute the environment.

[0032] Furthermore, a plurality of communicating air holes 12 are processed on the outer wall of the heat preservation cylinder 32 and the outer wall of the heat preservation cotton sleeve 34, the plurality of air holes 12 are annularly arranged and located above the crucible 31, the air holes 12 are arranged to enable the gas filled in the polycrystal growth furnace body 1 to flow into the crucible 31 to contact and react with the gallium arsenide crystal production raw materials, and to balance the air pressure in the heat preservation cylinder 32.

[0033] Finally: the above only describes the preferred embodiments of the utility model and is not used to limit the utility model, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A polycrystal growth furnace for producing a gallium arsenide crystal, comprising a polycrystal growth furnace body (1) and a furnace cover (2) provided at the top end of the polycrystal growth furnace body (1), characterized in that: The bottom end of the furnace cover (2) is fixedly provided with a production assembly (3), the production assembly (3) comprises a crucible (31) for producing a gallium arsenide crystal, the crucible (31) is sleeved with a heat preservation cylinder (32) outside, and the top end of the heat preservation cylinder (32) is detachably connected with the furnace cover (2); The inside of the heat preservation cylinder (32) is detachably connected with an induction coil (33), and the induction coil (33) is sleeved outside the crucible (31), the outer wall of the heat preservation cylinder (32) is fixedly sleeved with a heat preservation cotton sleeve (34), and the inside of the heat preservation cylinder (32) is detachably connected with a monitoring assembly (4), and the outer wall of the multi-crystal growth furnace body (1) is provided with a lifting assembly (5) for driving the furnace cover (2) to lift.

2. The polycrystal growth furnace for producing a gallium arsenide crystal according to claim 1, characterized by: The monitoring assembly (4) comprises a camera (41), and the top end of the camera (41) is detachably connected with a long plate (42), the long plate (42) is detachably installed in the inside of the heat preservation cylinder (32), and the camera (41) is arranged above the crucible (31).

3. The polycrystal growth furnace for gallium arsenide crystal production according to claim 1, characterized in that: The bottom end of the heat preservation cylinder (32) is provided with a square groove (6) in the inner wall, the bottom end of the crucible (31) is fixedly provided with a square block (7) matched with the square groove (6), the square block (7) is inserted into the square groove (6), and the heat preservation cylinder (32) and the square block (7) are detachably connected.

4. The polycrystal growth furnace for producing a gallium arsenide crystal according to claim 1, characterized by: The lifting assembly (5) comprises two electric push rods (51) which are detachably fixed on the outer wall of the multi-crystal growth furnace body (1), the piston rod top ends of the two electric push rods (51) are detachably connected with a connecting plate (52), and the connecting plate (52) is fixed with the furnace cover (2).

5. The polycrystal growth furnace for producing a gallium arsenide crystal according to claim 1, characterized by: A plurality of O-shaped sealing rings (8) are arranged between the furnace cover (2) and the multi-crystal growth furnace body (1).

6. The polycrystal growth furnace for producing a gallium arsenide crystal according to claim 4, characterized by: The outer wall of the multi-crystal growth furnace body (1) is fixedly penetrated with a gas conveying pipe (9) and a pressure relief valve (10), the gas conveying pipe (9) and the pressure relief valve (10) are in communication with the inside of the multi-crystal growth furnace body (1), the gas conveying pipe (9), the pressure relief valve (10) and the two electric push rods (51) are distributed at intervals, and the pressure relief valve (10) is communicated with an air filter (11).

7. The polycrystal growth furnace for gallium arsenide crystal production according to claim 1, characterized in that: The outer wall of the heat preservation cylinder (32) and the outer wall of the heat preservation cotton sleeve (34) are processed with a plurality of communicated air holes (12), and the plurality of air holes (12) are arranged in an annular array and located above the crucible (31).

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