Wafer carrier inner frame detection jig

Abstract

The utility model discloses a wafer carrier inner frame detection tool comprising a test base plate and movable frame strips. The test bottom plate is used for placing a to-be-tested wafer carrier; the movable frame strip is mounted on the test bottom plate; the test bottom plate comprises a fixed frame strip; the fixed frame strip and the movable frame strip form a test frame, and the outer diameter of the test frame is used for detecting the inner frame of the to-be-tested wafer carrier. According to the jig, the test frame is formed by the fixed frame strips and the movable frame strips of the test bottom plate, whether the inner frame of the wafer carrier conforms to the qualified range or not is detected by using the test frame, the structure is simple, the cost is low, and the efficiency is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to container detection technical field especially relates to a wafer carrier inner frame detection fixture. BACKGROUND

[0002] The size of the inner frame needs to be guaranteed within a certain qualified range before the container is factory-produced, especially some high-precision containers, such as wafer carriers, etc., in order to avoid wafer damage caused by internal size error, each size needs to be guaranteed within a qualified range before factory production. At present, most container size detection, especially wafer carriers and other containers with high size precision requirements, uses automatic detection equipment for detection, and the automatic detection system has high cost and complex structure; or a high-precision ruler detection system is used for detection, which needs manual checking and testing, and the efficiency is low. SUMMARY

[0003] In order to reduce the detection cost and efficiency of the wafer carrier inner frame, the utility model provides a wafer carrier inner frame detection fixture.

[0004] In order to achieve the above purpose, the utility model provides a wafer carrier inner frame detection fixture, which comprises: a test bottom plate and a movable frame strip; the test bottom plate is used for placing a wafer carrier to be tested; the movable frame strip is installed on the test bottom plate; the test bottom plate comprises: a fixed frame strip; the fixed frame strip and the movable frame strip constitute a test frame, and the outer diameter of the test frame is used for detecting the inner frame of the wafer carrier to be tested.

[0005] Optionally, the movable frame strip can be installed at different positions of the test bottom plate to adjust the length and width of the test frame.

[0006] Optionally, the test bottom plate further comprises: a mounting groove; the movable frame strip is installed on the test bottom plate through the mounting groove.

[0007] Optionally, the movable frame strip comprises: a sliding block and a test strip; the sliding block is installed in the mounting groove, and the test strip forms a test frame with the fixed frame strip.

[0008] Optionally, the sliding block and the test strip are provided with through holes, and the sliding block and the test strip are fixed on the mounting groove through the through holes.

[0009] Optionally, the position of the movable frame strip on the movable bottom plate 1 is adjusted by adjusting the screw or bolt at different positions of the through hole, so as to adjust the length and width of the test frame.

[0010] Optionally, the test frame has a plurality of notches for avoiding the inner frame of the wafer carrier four corner structure, so as to test the different angle shape or angle structure of the wafer carrier.

[0011] Optionally, the fixed frame strip is L-shaped structure, and an arc-shaped notch is arranged at the outer diameter corner of the fixed frame strip.

[0012] Optionally, the maximum size test frame and the minimum size test frame are arranged according to the qualified range of the wafer carrier inner frame, and the maximum size test frame and the minimum size test frame are formed by one jig or two different jigs.

[0013] The wafer carrier inner frame detection jig has the following beneficial effects:

[0014] The wafer carrier inner frame detection jig forms a test frame through the fixed frame strip and the movable frame strip of the test base plate, detects whether the wafer carrier inner frame meets the qualified range by using the test frame, has simple structure, low cost and high efficiency.

[0015] The wafer carrier inner frame detection jig adjusts the position of the movable frame strip on the test base plate through the adjusting screw or bolt at different positions of the through hole of the movable frame strip, thereby adjusting the length and width of the test frame, and can set the wafer carrier with different inner frame sizes or detect the maximum and minimum size of the qualified range in the same jig, further reducing the cost.

[0016] The test frame formed by the wafer carrier inner frame detection jig has multiple notches for avoiding the four corner structures of the wafer carrier inner frame, so as to test the different corner shapes or corner structures of the wafer carrier, and reduce the manufacturing and use cost. BRIEF DESCRIPTION OF DRAWINGS

[0017] Fig. 1 is a structure schematic view of the wafer carrier inner frame detection jig provided by the embodiment of the utility model;

[0018] Fig. 2 is a structure schematic view of the wafer carrier inner frame detection jig provided by the embodiment of the utility model;

[0019] Fig. 3 is a structure schematic view of the movable frame strip provided by the embodiment of the utility model.

[0020] EXPLANATION OF DRAWINGS:

[0021] 1, test base plate;11, fixed frame strip;12, mounting groove;2, movable frame strip;21, sliding block;22, test strip;23, through hole. DETAILED DESCRIPTION

[0022] In order to make the above-mentioned purposes, features and advantages of the present application more apparent and understandable, the specific embodiments of the present application will be described in detail below with reference to the drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a number of different manners other than those described herein, and it is understood that similar modifications of this nature can be made by those skilled in the art, without departing from the spirit and scope of the present application, and therefore the present application is not limited to the specific embodiments disclosed below.

[0023] Referring to Figs. 1-3 A wafer carrier inner frame detection jig, comprising: a test base plate 1 and a movable frame strip 2; the test base plate 1 is used for placing a wafer carrier to be tested; the movable frame strip 2 is installed on the test base plate 1; the test base plate 1 comprises: a fixed frame strip 11; the fixed frame strip 11 and the movable frame strip 2 constitute a test frame, and the outer diameter of the test frame is used for detecting the inner frame of the wafer carrier to be tested.

[0024] Further, the movable frame strip 2 can be installed at different positions of the test base plate 1 to adjust the length and width of the test frame, so as to realize testing of the wafer carrier to be tested with different inner frames, or detecting whether the inner frame of the wafer carrier to be tested is within a qualified range.

[0025] The test base plate 1 further comprises: a mounting groove 12; the movable frame strip 2 is installed on the test base plate 1 through the mounting groove 12. Further, the movable frame strip 2 is fixed on the mounting groove 12 through screws or bolts.

[0026] The movable frame strip 2 comprises: a sliding block 21 and a test strip 22; the sliding block 21 is installed in the mounting groove 12, and the test strip 22 forms a test frame with the fixed frame strip 11.

[0027] The sliding block 21 and the test strip 22 are provided with through holes 23, and the sliding block 21 and the test strip 22 are fixed on the mounting groove 12 through the through holes 23. Further, the position of the movable frame strip 2 on the movable base plate 1 is adjusted by adjusting the screws or bolts at different positions of the through holes 23, so as to adjust the length and width of the test frame. Further, the through holes 23 are waist-shaped holes.

[0028] Further, the movable frame strip 2 is two, which are respectively used for adjusting the length and width of the test frame. The test frame has a plurality of notches for avoiding the inner frame of the wafer carrier four corner structures, so as to be used for testing different corner shapes or corner structures of the wafer carrier, and reduce the manufacturing and use cost.

[0029] Further, the fixed frame strip 11 is an L-shaped structure, and the outer diameter corner thereof is provided with an arc-shaped notch as a test frame notch.

[0030] In use, the length and width of the test frame are set by fixing the movable frame strip 2 on the mounting groove 12, and the maximum size test frame and the minimum size test frame are set according to the qualified range of the wafer carrier inner frame to be tested, and the two test frames can be formed by one jig or two different jigs. In testing, the wafer carrier inner frame to be tested is placed on the test frame, and if the wafer carrier inner frame to be tested can completely cover the outer diameter of the minimum size test frame and cannot completely cover the outer diameter of the maximum size test frame, the wafer carrier inner frame to be tested is qualified; otherwise, the wafer carrier inner frame to be tested is unqualified.

[0031] The technical features of the above embodiments can be combined in any manner. To make the description concise, not all possible combinations of the technical features in the above embodiments are described, but as long as the combinations of the technical features do not contradict, they should be considered as falling within the scope of the present disclosure.

[0032] The above embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the scope of the present application. It should be pointed out that, for those skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A wafer carrier inner frame detection jig, characterized by, The utility model relates to a test fixture for testing the inner frame of wafer carrier, and more particularly to a test fixture with adjustable length and width. The test fixture comprises: a test base plate (1) for placing wafer carrier to be tested; and 2. The wafer carrier inner frame inspection jig according to claim 1, wherein a movable frame (2) installed on the test base plate (1).

3. The wafer carrier inner frame inspection jig according to claim 1, wherein The test base plate (1) comprises a fixed frame (11) and the movable frame (2) forms a test frame with the fixed frame (11), and the outer diameter of the test frame is used for testing the inner frame of wafer carrier to be tested.

4. The wafer carrier inner frame inspection jig according to claim 3, wherein The movable frame (2) can be installed at different positions of the test base plate (1) to adjust the length and width of the test frame.

5. The wafer carrier inner frame detection jig according to claim 4, wherein The test base plate (1) further comprises an installation slot (12), and the movable frame (2) is installed on the test base plate (1) through the installation slot (12).

6. The wafer carrier inner frame inspection jig according to claim 5, wherein The movable frame (2) comprises a sliding block (21) and a test strip (22), the sliding block (21) is installed in the installation slot (12), and the test strip (22) forms the test frame with the fixed frame (11).

7. The wafer carrier inner frame inspection jig according to any one of claims 1-6, wherein The sliding block (21) and the test strip (22) are provided with through holes (23), and the sliding block (21) and the test strip (22) are fixed on the installation slot (12) through the through holes (23).

8. The wafer carrier inner frame inspection jig according to any one of claims 1-6, wherein, The position of the movable frame (2) on the test base plate (1) is adjusted by adjusting the screw or bolt at different positions of the through hole (23), so as to adjust the length and width of the test frame.

9. The wafer carrier inner frame inspection jig according to any one of claims 1-6, wherein, The movable frame (2) is two, which are used for adjusting the length and width of the test frame respectively.

10. The wafer carrier inner frame inspection jig according to any one of claims 1-6, wherein, The test frame has a plurality of notches for avoiding the four corner structures of the inner frame of wafer carrier, so as to test different corner shapes or corner structures of wafer carrier. The fixed frame (11) is an L-shaped structure, and the outer diameter corner of the L-shaped structure is provided with an arc-shaped notch. The test frame with the maximum size and the test frame with the minimum size are formed by one jig or two different jigs according to the qualified range of the inner frame of wafer carrier to be tested.

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