Test platform for chip manufacturing

Abstract

The utility model relates to the field of chip testing, in particular to a testing platform for chip manufacturing, which comprises a testing platform. A cleaning mechanism located on the upper end face of the bottom plate is arranged on the inner wall of the testing platform. The cleaning mechanism comprises a fixed box located on the upper end face of the bottom plate, a dust collection box placed in the fixed box, a telescopic hose communicating with the outer wall of the dust collection box, and a dust suction hood in threaded connection with the other end of the telescopic hose. The cleaning mechanism further comprises a dust collection cylinder and a handheld dust collection cover which are arranged in the fixed box and are used for adsorbing dust and impurities on the surface of the test platform; when a gap between the test head and the chip clamp needs to be cleaned, dust, impurities and the like in the gap can be adsorbed and cleaned through a smaller adsorption head of the dust collection cylinder, and then dust on the surface of the test platform and the gap of an instrument can be cleaned in time through cooperative use of the dust collection cover and the dust collection cylinder; and the dust is prevented from polluting mechanical precision parts, optical parts and electric contact surfaces to reduce the instrument precision.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip test field, specifically disclose a test platform for chip manufacturing. BACKGROUND

[0002] Semiconductor chip is the cornerstone of information age, also is the commanding point of today's cutting -edge manufacturing, chip manufacturing has entered 10 nanometer to 7 nanometer device's production era, chip production needs to pass hundreds of steps process, any step error can lead to device failure, therefore, chip detection link is crucial, and good chip test equipment and method are one of the keys to improve chip manufacturing level.

[0003] At present, the dust impurity on the test platform cannot be cleaned in time before and after the chip test in the use process of the chip test platform, the dust is easy to contaminate the parts on the test platform, and the precision of the instrument is affected, therefore, a test platform for chip manufacturing is required to solve the problem. UTILITY MODEL CONTENT

[0004] The utility model provides a test platform for chip manufacturing, dust cover and dust absorption cylinder are used in cooperation, can clean the dust on the surface of test platform and instrument gap in time, avoid dust pollution mechanical precision parts, optical parts and electric contact surface, lead to instrument precision reduces.

[0005] The utility model is such a realization, a test platform for chip manufacturing, including the bottom plate, the upper end surface of bottom plate is provided with the test platform of middle part recessed structure, the upper end surface of bottom plate is provided with chip clamp, the upper end surface of test platform is provided with test head, the inner wall of test platform is provided with the cleaning mechanism of bottom plate upper end surface,

[0006] The cleaning mechanism includes a fixed box on the upper end surface of the bottom plate, a dust collection box placed inside the fixed box, a suction pump connected to the outer wall of the dust collection box, a flexible hose connected to the outer wall of the dust collection box, and a dust cover threadedly connected to the other end of the flexible hose.

[0007] The cleaning mechanism further includes a dust absorption cylinder placed inside the fixed box, and the bottom end of the dust absorption cylinder is provided with an internal thread matched with one end of the flexible hose.

[0008] As a preferred test platform for chip manufacturing of the utility model, a protective shell is arranged outside the test platform, limit columns are fixedly connected to the lower end surfaces of the left and right sides of the protective shell, support plates are fixedly connected to the left and right sides of the test platform, and limit holes matched with the limit columns are formed through the outer walls of the two support plates.

[0009] As a kind of chip manufacturing test platform preferred of the utility model, the outer wall of the fixed box is provided with electromagnet mutually attracted with the inner wall of test platform.

[0010] As a kind of chip manufacturing test platform preferred of the utility model, the outer wall of the two limiting posts is fixedly connected with the limiting plate located at the top end of support plate.

[0011] As a kind of chip manufacturing test platform preferred of the utility model, dust collecting box is inserted with filter screen in the inside.

[0012] As a kind of chip manufacturing test platform preferred of the utility model, the upper end face of fixed box is provided with cover plate.

[0013] As a kind of chip manufacturing test platform preferred of the utility model, the inside of fixed box is fixedly connected with hanging ring and support ring for supporting dust cover and dust suction cylinder, the inner wall of hanging ring and support ring is provided with anti-skid pattern.

[0014] The utility model has the advantages of:

[0015] 1. staff hand holds dust cover, and the dust and impurity on the surface of test platform are adsorbed, so that the dust and impurity on test platform are adsorbed to dust cover, and then are collected in dust collecting box through flexible hose;

[0016] 2. when needing to clean the gap of test head and chip clamp, the dust and impurity in the gap can be adsorbed and cleaned by the smaller adsorption head of dust suction cylinder, and then the surface of test platform and the dust in the gap of instrument can be cleaned in time by the cooperation of dust cover and dust suction cylinder, so as to avoid the pollution of dust to mechanical precision parts, optical parts and electrical contact surface, and reduce the precision of instrument. DRAWINGS

[0017] In order to more clearly illustrate the specific embodiment of the utility model or the technical scheme in prior art, the drawings needed in the specific embodiment or prior art description will be briefly introduced below. In all drawings, similar elements or parts are generally identified by similar reference signs. In the drawings, each element or part is not necessarily drawn according to the actual proportion.

[0018] Fig. 1 It is the overall structural drawing of the utility model chip manufacturing test platform;

[0019] Fig. 2 It is the fixed box sectional view structure drawing of the utility model;

[0020] Fig. 3 It is the fixed box structure drawing of the utility model.

[0021] Marked in the figure, 1, the base plate; 101, the chip clamp; 102, the test head; 2, the test platform; 201, the support plate; 202, the limiting hole; 3, the protective shell; 301, the limiting column; 302, the limiting plate; 4, the fixed box; 401, the electromagnet; 402, the dust collection box; 403, the filter screen; 404, the suction pump; 405, the flexible hose; 406, the dust cover; 407, the dust suction cylinder; 5, the hanging ring; 501, the support ring. DETAILED DESCRIPTION

[0022] The utility model will be further explained in connection with the drawings and specific embodiment, help understanding the contents of the utility model. The method used in the utility model is conventional if no special provision, the raw material and device used, if no special provision, are conventional market products.

[0023] Please refer to Figs. 1-3 A test platform for chip manufacturing, including base plate 1, the upper end surface of base plate 1 is provided with the test platform 2 of the concave structure in the middle, the upper end surface of base plate 1 is provided with chip clamp 101, the upper end surface of test platform 2 is provided with test head 102;The inner wall of test platform 2 is provided with cleaning mechanism located at the upper end surface of base plate 1;

[0024] Cleaning mechanism includes fixed box 4 located at the upper end surface of base plate 1, dust collection box 402 placed in fixed box 4, suction pump 404 communicated with the outer wall of dust collection box 402, flexible hose 405 communicated with the outer wall of dust collection box 402, dust cover 406 screw connected to the other end of flexible hose 405;

[0025] Cleaning mechanism further includes dust suction cylinder 407 placed in fixed box 4, the bottom end of dust suction cylinder 407 is provided with internal thread matched with one end of flexible hose 405.

[0026] In this embodiment: the chip to be detected is placed on the chip clamp 101, and the chip is detected by the test head 102;

[0027] Before or after detecting the chip each time using test platform 2, the dust cover 406 in the fixed box 4 can be taken out from the fixed box 4, and the suction pump 404 is worked, the worker holds the dust cover 406, the dust and impurities on the surface of the test platform 2 are adsorbed, the dust and impurities on the test platform 2 are adsorbed to the dust cover 406, and then collected into the dust collection box 402 through the flexible hose 405;

[0028] When it is needed to clean the gap of the test head 102 and the chip clamp 101, the dust cover 406 can be screwed off from the telescopic hose 405, and the dust suction cylinder 407 is screwed with the telescopic hose 405 through the inner thread at the bottom end of the dust suction cylinder 407, and the dust and impurities in the gap can be sucked and cleaned through the small suction head of the dust suction cylinder 407, and the dust on the surface of the test platform 2 and the gap of the instrument can be cleaned in time through the cooperation of the dust cover 406 and the dust suction cylinder 407, so as to avoid the dust from polluting the mechanical precision parts, optical parts and electrical contact surface, and reduce the precision of the instrument.

[0029] As a technical optimization scheme of the utility model, the test platform 2 is externally provided with a protective shell 3, the lower end faces of the left and right sides of the protective shell 3 are fixedly connected with limiting columns 301, and the left and right sides of the test platform 2 are fixedly connected with support plates 201; limiting holes 202 matched with the limiting columns 301 are formed in the outer walls of the two support plates 201.

[0030] In the embodiment, the limiting columns 301 are inserted into the limiting holes 202, and the protective shell 3 can be covered above the test platform 2, so that the test platform 2 can be protected, and the test head 102 and other equipment are prevented from being collided by external force when not in use.

[0031] As a technical optimization scheme of the utility model, the outer wall of the fixed box 4 and the inner wall of the test platform 2 are provided with electromagnets 401 that attract each other.

[0032] In the embodiment, the fixed box 4 can be attracted and fixed to the inner wall of the test platform 2 by the electromagnets 401.

[0033] As a technical optimization scheme of the utility model, the outer walls of the two limiting columns 301 are fixedly connected with limiting plates 302 located at the top ends of the support plates 201.

[0034] In the embodiment, the limiting plates 302 can increase the contact area of the limiting columns 301 and the support plates 201, and limit the limiting columns 301.

[0035] As a technical optimization scheme of the utility model, a filter screen 403 is inserted into the dust collecting box 402.

[0036] In the embodiment, the filter screen 403 can filter and block the dust entering the dust collecting box 402.

[0037] As a technical optimization scheme of the utility model, the upper end face of the fixed box 4 is provided with a cover plate.

[0038] In the embodiment, the cover plate can shield the structure in the fixed box 4.

[0039] As a technical optimization scheme of the utility model, the inside of the fixed box 4 is fixedly connected with a hanging ring 5 and a supporting ring 501 for supporting the dust cover 406 and the dust suction cylinder 407, and the inner wall of the hanging ring 5 and the supporting ring 501 is provided with anti-skid lines.

[0040] In the embodiment, the hanging ring 5 and the supporting ring 501 facilitate the hanging of the dust cover 406 and the dust suction cylinder 407.

[0041] The working principle and use process of the utility model are as follows: the chip to be detected is placed on the chip clamp 101, and the chip is detected by the test head 102.

[0042] Before or after detecting the chip each time by using the test platform 2, the whole device is connected with an external power supply, the electromagnet 401 and the suction pump 404 are powered on, the cover plate on the fixed box 4 is opened, the dust cover 406 in the fixed box 4 is taken out from the fixed box 4, and the suction pump 404 is operated, a worker holds the dust cover 406, dust and impurities on the surface of the test platform 2 are adsorbed, dust and impurities on the test platform 2 are adsorbed to the dust cover 406, and then the dust cover 406 enters the dust collecting box 402 through the flexible hose 405 and is filtered by the filter screen 403.

[0043] When it is necessary to clean the gap of the test head 102 and the chip clamp 101, the dust cover 406 can be spirally taken off from the flexible hose 405, the dust suction cylinder 407 is threadedly connected with the flexible hose 405 through the internal thread at the bottom end of the dust suction cylinder 407, dust and impurities in the gap can be adsorbed and cleaned by the smaller adsorption head of the dust suction cylinder 407, and then the dust cover 406 and the dust suction cylinder 407 are used in cooperation, dust on the surface of the test platform 2 and the gap of the instrument can be cleaned in time, dust pollution of mechanical precision parts, optical parts and electrical contact surfaces is avoided, and instrument precision is reduced.

[0044] Finally, the filter screen 403 can be taken out from the fixed box 4 for cleaning, or the dust collecting box 402 can be taken out from the fixed box 4 for cleaning or maintenance.

[0045] In the description of the utility model, it should be understood that the terms "left", "right", "up", "down", "top", "bottom", "front", "back", "inner", "outer", "back", "middle" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0046] The above is only a specific embodiment of the present application, and cannot limit the scope of the present application. The replacement of equivalent components or equivalent changes and modifications within the scope of the present application should still be within the scope of the present application.

Claims

1. A test platform for chip manufacturing, comprising a base plate (1), wherein a test platform (2) with a recessed structure in the middle is disposed on the upper surface of the base plate (1), a chip fixture (101) is disposed on the upper surface of the base plate (1), and a test head (102) is disposed on the upper surface of the test platform (2); characterized in that: The inner wall of the test platform (2) is provided with a cleaning mechanism on the upper end face of the bottom plate (1); The cleaning mechanism comprises a fixed box (4) on the upper end face of the bottom plate (1), a dust collection box (402) placed in the fixed box (4), a suction pump (404) communicated with the outer wall of the dust collection box (402), a flexible hose (405) communicated with the outer wall of the dust collection box (402), and a dust cover (406) screw-connected to the other end of the flexible hose (405). The cleaning mechanism further comprises a dust suction cylinder (407) placed in the fixed box (4), and the bottom end of the dust suction cylinder (407) is provided with an inner thread matched with one end of the flexible hose (405).

2. The test platform of claim 1, wherein: The outer wall of the test platform (2) is provided with a protective shell (3), and the lower end face of the left and right sides of the protective shell (3) is fixedly connected with a limiting column (301), and the left and right sides of the test platform (2) are fixedly connected with a supporting plate (201), and the outer wall of the two supporting plates (201) is provided with a limiting hole (202) matched with the limiting column (301).

3. The test platform of claim 1, wherein: The outer wall of the fixed box (4) and the inner wall of the test platform (2) are provided with electromagnets (401) that attract each other.

4. The test platform of claim 2, wherein: The outer wall of the two limiting columns (301) is fixedly connected with a limiting plate (302) located at the top end of the supporting plate (201).

5. The test platform of claim 1, wherein: The inside of the dust collection box (402) is inserted with a filter screen (403).

6. The test platform of claim 1, wherein: The upper end face of the fixed box (4) is provided with a cover plate.

7. The test platform of claim 1, wherein: The inside of the fixed box (4) is fixedly connected with a hanging ring (5) and a supporting ring (501) for supporting the dust cover (406) and the dust suction cylinder (407), and the inner wall of the hanging ring (5) and the supporting ring (501) is provided with anti-skid lines.

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