Upper light source type exposure machine

Abstract

The utility model discloses an upper light source type exposure machine. Comprising a box body, an exposure light source, a lens group and a lower frame assembly are arranged in the box body, the exposure light source is located over the lens group, the lower frame assembly is located under the lens group, the lower frame assembly comprises a frame body, non-breathable elastic cloth and a material supporting module, and a first driving device is arranged in the box body. The non-breathable elastic cloth covers an opening in the bottom of the frame body and seals the opening in the bottom of the frame body, the material supporting module comprises a sealing ring, a containing cylinder and a second driving device, a first through hole is formed in the center of the non-breathable elastic cloth, the bottom of the containing cylinder is sealed, and the top of the containing cylinder is connected with the first through hole through the sealing ring; the outer side of the top of the containing cylinder is sleeved with a supporting plate and fixedly connected with the supporting plate, and the supporting plate is located below the non-breathable elastic cloth. According to the utility model, the exposure precision can be improved, the exposure effect is good, irregular objects can be exposed, and the applicability is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to exposure machine technical field especially relates to a light source formula exposure machine of upper light. BACKGROUND

[0002] The exposure type of the existing exposure machine is mostly lower light source type exposure, and the lower light source type exposure is a technology of inverting the exposure surface of the to-be-exposed object and setting the exposure light source below the to-be-exposed object to expose it. However, because the exposure light source and other components in the exposure machine are set below, the exposure light source is easily affected by the vibration generated by the working of other working parts in the exposure machine during exposure, resulting in that the final exposure effect does not reach the expectation, the exposure precision is low, and most of the to-be-exposed objects are regular objects. If the to-be-exposed object is an irregular object, it cannot be exposed, and the applicability is low. SUMMARY

[0003] The utility model discloses to solve the above technical problem, provide a light source formula exposure machine of upper light, can promote exposure precision, and the exposure effect is good, and can expose the irregular object, and the applicability is high.

[0004] In order to solve the above problem, the utility model discloses the following technical scheme to realize:

[0005] The utility model discloses a light source formula exposure machine of upper light, including the box, be equipped with exposure light source, lens group and lower frame subassembly in the box, the exposure light source is located the lens group directly above, the lower frame subassembly is located the lens group directly below, the lower frame subassembly includes frame body, non -breathable elastic cloth and the material of supporting module, be equipped with first drive arrangement in the box for driving lens group is close to / away from the frame body, the non -breathable elastic cloth cover is equipped with frame body bottom opening and will frame body bottom opening seal, the material of supporting module includes sealing ring, containing cylinder and second drive arrangement, the non -breathable elastic cloth center is equipped with first through -hole, the containing cylinder bottom seal, the containing cylinder top is connected with first through -hole through sealing ring, the containing cylinder top outside is equipped with the supporting plate and is connected with the supporting plate fixedly, the supporting plate is located the non -breathable elastic cloth below, the second drive arrangement is used for driving the supporting plate to rise / drop, when lens group and frame body are close, lens group, frame body, non -breathable elastic cloth and containing cylinder enclose the sealed exposure cavity.

[0006] In the present scheme, when irregular items need to be exposed, the irregular items to be exposed are placed on the surface center of the non-breathable elastic cloth, at this time the exposure surface of the items to be exposed faces up, the irregular part of the bottom of the items to be exposed which does not need to be exposed is inserted into the containing cylinder, the rest of the items to be exposed is held up by the supporting plate, the second driving device drives the supporting plate to rise to the preset position, in the process of upward movement of the supporting plate, the top surface of the supporting plate pushes the non-breathable elastic cloth upward, so that the non-breathable elastic cloth is stretched, then the first driving device drives the lens group to move downward to the exposure position, at this time the lens group, the frame body, the non-breathable elastic cloth and the containing cylinder form a sealed exposure cavity, the exposure light source exposes the exposure surface of the items to be exposed through the lens group, until the exposure is completed. The exposure light source is arranged in the upper part of the box, which can reduce the vibration of the exposure light source caused by the movement of the lens group and the supporting plate or the external environment during exposure, improve the stability of the exposure light source during exposure, and the containing cylinder can accommodate the irregular part of the bottom of the items to be exposed which does not need to be exposed, so that the exposure machine can expose irregular items, and the applicability of the exposure machine is improved.

[0007] As a preferred, when the top surface of the supporting plate and the bottom surface of the frame body are located on the same horizontal plane, the top surface of the supporting plate and the non-breathable elastic cloth are completely attached.

[0008] As a preferred, the inside of the frame body is provided with a group of air extraction holes which are in communication with the outside, and the group of air extraction holes includes air extraction holes which are symmetrically arranged on the left and right side walls inside the frame body.

[0009] As a preferred, it further includes a leveling glass which is arranged on the exposure surface of the items to be exposed and attached to the exposure surface of the items to be exposed, and when the exposure cavity is extracted to vacuum, the lower surface of the lens group is tightly attached to the upper surface of the leveling glass group.

[0010] As a preferred, the second driving device includes a supporting plate frame and a supporting plate frame driving mechanism, the supporting plate frame is fixedly connected to the bottom of the supporting plate, the supporting plate frame driving mechanism includes a lifting rod driver and lifting rods which are symmetrically arranged on the left and right sides of the supporting plate frame, the lifting rods are fixedly connected to the corresponding side of the bottom of the supporting plate frame through connecting blocks, and the lifting rod driver is used to drive the two lifting rods to synchronously rise or fall.

[0011] As a preferred, the frame body is provided with protection blocks at the four corners, the bottom surface of the protection blocks and the bottom surface of the frame body are located on the same horizontal plane, the protection blocks are formed with protection inclined surfaces toward the side of the supporting plate, the protection inclined surfaces are inclined inward from bottom to top, and the supporting plate is provided with protection notches at the four corners.

[0012] The non-breathable elastic cloth is pulled by the supporting plate and the frame body when stretched, thereby reducing the service life of the non-breathable elastic cloth. In order to protect the non-breathable elastic cloth, protection blocks are arranged at four corners in the frame body, the bottom surfaces of the protection blocks are located on the same horizontal plane as the bottom surface of the frame body, and protection inclined surfaces are formed on the side of the protection blocks facing the supporting plate. The protection inclined surfaces are inclined inward from bottom to top. Protection notched corners are arranged at the positions corresponding to the protection blocks at four corners of the supporting plate. When the non-breathable elastic cloth is stretched, the protection blocks at four corners of the frame body avoid the problem that the four corners of the non-breathable elastic cloth are damaged due to excessive stretching in the vacuumizing process, greatly increasing the service life of the non-breathable elastic cloth and avoiding the non-breathable elastic cloth from being torn when stretched.

[0013] As preferred, linkage lifting structures are arranged at four corners of the bottom of the supporting plate, the linkage lifting structures comprise linkage columns and linkage gear boxes, the linkage columns are power-connected with the linkage gear boxes, the linkage columns are vertically arranged at the bottom of the supporting plate, the linkage gear boxes are fixedly connected with the box body, and adjacent two linkage gear boxes are power-connected through linkage shafts.

[0014] The center of gravity of the to-be-exposed article can not be located at the center of the supporting plate, which can cause the supporting plate to be tilted at one corner. When the supporting plate is tilted, the linkage column on the side will be lowered, thereby driving the linkage gear box on the side to rotate through the linkage shaft, thereby driving the gears in the remaining linkage gear boxes to rotate through the linkage shaft, thereby driving the remaining linkage columns to be lowered, and finally causing the four corners of the supporting plate to be lowered synchronously, so as to ensure that the supporting plate is horizontal and will not be tilted.

[0015] As preferred, exhaust hole groups are symmetrically arranged at the top of the supporting plate, the exhaust hole groups comprise exhaust holes symmetrically arranged left and right.

[0016] During the upward movement of the supporting plate, some air can be retained between the contact surface of the supporting plate and the non-breathable elastic cloth, which can cause the non-breathable elastic cloth to be bulged, and the exposure effect is poor. In order to prevent the bulging, exhaust hole groups are symmetrically arranged at the top of the supporting plate, the exhaust hole groups comprise exhaust holes symmetrically arranged left and right. During the upward movement of the supporting plate, the air between the supporting plate and the non-breathable elastic cloth can be discharged through the exhaust holes, the flowability of the air is enhanced, and the bulging is avoided.

[0017] As preferred, the first connecting plate is symmetrically arranged on the inner top of the box body, the exposure light source is located between the two first connecting plates, the first connecting plate is arranged in a left-right direction, the second connecting plate is symmetrically arranged on the top of the exposure light source, the second connecting plate is arranged in a front-rear direction, the second connecting plate is located above the first connecting plate, the connecting and locking module is symmetrically arranged on the top of the second connecting plate, the connecting and locking module comprises a first connecting structure and a locking mechanism, the locking mechanism is used for locking / unlocking the second connecting plate and the first connecting plate, the first connecting structure comprises a third through hole symmetrically arranged on the left and right sides of the second connecting plate, the upper fixed nut is arranged on the top of the second connecting plate and corresponds to the position of the third through hole, the adjusting bolt is threadedly connected in the upper fixed nut, and the lower part of the adjusting bolt penetrates through the third through hole and abuts against one side of the top of the first connecting plate.

[0018] As preferred, the locking mechanism comprises a locking hole symmetrically arranged on the left and right sides of the third through hole, the locking hole is arranged in a front-rear direction, the first connecting plate is provided with a locking threaded hole corresponding to the position of the locking hole, the locking hole is provided with an upper locking bolt, and the lower part of the upper locking bolt penetrates through the locking hole and is threadedly connected with the locking threaded hole.

[0019] Before exposure, the spatial posture of the exposure light source needs to be calibrated, the upper locking bolt is loosened first, so that the second connecting plate is unlocked with the first connecting plate, then the adjusting bolt is rotated to change the length of the lower part of the adjusting bolt extending out of the second connecting plate, so as to change the spatial posture of the four corners of the exposure light source, so as to realize the adjustment of the overall spatial posture of the exposure light source, and then the upper locking bolt is tightened, so that the second connecting plate is locked with the first connecting plate, and the exposure light source is locked

[0020] As preferred, the connecting disc is arranged between the lifting rod and the connecting block on the corresponding side, the top of the lifting rod is fixedly connected with the connecting disc and coaxial, a plurality of connecting arc holes are arranged on the top of the connecting disc along the circumference, the arc centers of the connecting arc holes coincide with the axis of the lifting rod, the upper connecting hole is arranged on the connecting block and corresponds to the position of the connecting arc hole, the lower locking bolt is arranged in the connecting arc hole, and the upper part of the lower locking bolt penetrates through the corresponding connecting arc hole and is threadedly connected with the corresponding upper connecting hole.

[0021] The lifting rod is a lead screw, and the radial angle of the lifting rod may not be consistent during installation, so that the horizontal positions of the connecting discs on the top of the lifting rod are not aligned, and finally the supporting plate is inclined. When the horizontal positions of the connecting discs are not aligned, the lifting rod is first rotated to align the horizontal positions of the two connecting discs, and then the lower locking bolt is screwed into the connecting arc hole, so that the upper part of the lower locking bolt is threadedly connected with the upper connecting hole, and the connecting disc is locked with the connecting block.

[0022] As preferred, the first driving device comprises first driving modules arranged symmetrically left and right, the first driving module comprises a lifting driver and first guide mechanisms arranged symmetrically on the front and back of the lifting driver, the output end of the lifting driver is fixedly connected with a corresponding side of the lens group, the first guide mechanism comprises a guide column and a guide block, the guide column is vertically arranged, the guide block is fixedly connected with a corresponding side of the inner wall of the box body, a guide through hole is vertically arranged on the guide block, and the lower part of the guide column extends into and can slide along the corresponding guide through hole.

[0023] The utility model discloses the beneficial effects are: exposure light source sets up in the upper portion in the box body, can reduce the vibration that exposure light source received lens group and the mobile of supporting plate generates, promotes the stability when exposure light source exposure, the accommodation cylinder can accommodate the irregular part of the bottom of the article to be exposed and does not need to be exposed, makes the exposure machine can expose the irregular article, has promoted the applicability of exposure machine, the linkage lifting structure can ensure that supporting plate always keeps the horizontal state, the protection block and the protection angle of defect can protect the non-breathable elastic cloth, promote the service life of non-breathable elastic cloth, the exhaust hole group can avoid the situation that the non-breathable elastic cloth stretches and bulges. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is the structure schematic diagram of the utility model;

[0025] Figure 2 It is the internal structure schematic diagram of the utility model;

[0026] Figure 3 It is the structure schematic diagram of lens group and lower frame assembly in the utility model;

[0027] Figure 4 It is Figure 3 The partial close -up of place A in it is;

[0028] Figure 5 It is Figure 3 The partial close -up of place B in it is;

[0029] Figure 6 It is the structure schematic diagram of supporting plate and connecting disc in the utility model;

[0030] Figure 7 It is Figure 6 The partial close -up of place C in it is;

[0031] Figure 8 It is the structure schematic diagram of exposure light source in the utility model;

[0032] Figure 9 It is Figure 8 The partial close -up of place D in it is;

[0033] Figure 10 This is a structural schematic diagram of the support plate and the protective block in this utility model;

[0034] Figure 11 yes Figure 10 A magnified view of a section at point E in the middle.

[0035] In the diagram: 1. Box body, 2. Exposure light source, 3. Lens assembly, 4. Lower frame assembly, 41. Frame body, 411. Exhaust vent, 42. Non-breathable elastic cloth, 43. Sealing ring, 44. Receiving cylinder, 45. Tray, 451. Protective notch, 452. Exhaust vent, 46. Tray frame, 47. Lifting rod driver, 471. Lifting rod, 472. Connecting block, 5. Protective block, 51. Protective inclined surface, 6. Linkage column, 61. Linkage gearbox, 62. Linkage shaft, 7. First connecting plate, 71. Second connecting plate, 72. Upper fixing nut, 73. Adjusting bolt, 74. Locking hole, 75. Upper locking bolt, 8. Connecting plate, 81. Connecting arc hole, 82. Lower locking bolt, 9. Retrieval window, 91. Flip plate, 92. Lifting driver, 93. Guide column, 94. Guide block. Detailed Implementation

[0036] The technical solution of this utility model will be further described in detail below through embodiments and in conjunction with the accompanying drawings.

[0037] Example: This example describes an upper-light source type exposure machine, such as... Figures 1 to 11 As shown, the device includes a housing 1, which contains an exposure light source 2, a lens assembly 3, and a lower frame assembly 4. The exposure light source 2 is located directly above the lens assembly 3, and the lower frame assembly 4 is located directly below the lens assembly 3. The lower frame assembly 4 includes a frame 41, a non-breathable elastic cloth 42, and a material support module. The housing 1 contains a first driving device for driving the lens assembly 3 closer to / away from the frame 41. The non-breathable elastic cloth 42 covers the bottom opening of the frame 41 and seals the bottom opening. The material support module includes a sealing ring 43, a receiving cylinder 44, and a second driving device. The non-breathable elastic cloth 42 has a first through hole in its center. The bottom of the receiving cylinder 44 is sealed, and the top of the receiving cylinder 44 is connected to the first through hole through the sealing ring 43. A support plate 45 is fitted on the outer side of the top of the receiving cylinder 44 and is fixedly connected to the support plate 45. The support plate 45 is located below the non-breathable elastic cloth 42. The front side of the box 1 is provided with a retrieval window 9, which is located on the front side of the lower frame component 4. The retrieval window 9 is provided with symmetrical flaps 91 on the left and right sides, and the flaps 91 are rotatably connected to the retrieval window 9.

[0038] The inner side of the frame 41 is provided with an air extraction hole group that communicates with the outside. The air extraction hole group includes air extraction holes 411 symmetrically arranged on the left and right side walls inside the frame 41.

[0039] The second driving device comprises a pallet frame 46 and a pallet frame driving mechanism. The pallet frame 46 is fixedly connected to the bottom of the pallet 45. The pallet frame 46 and the bottom plate 45 are both rectangular. The pallet frame 46 is coaxially arranged with the bottom plate 45. The pallet frame driving mechanism comprises a lifting rod driver 47 and lifting rods 471 symmetrically arranged on the left and right sides of the pallet frame 46. The lifting rods 471 are fixedly connected to the corresponding side of the bottom of the pallet frame 46 through connecting blocks 472. The lifting rod driver 47 is used to drive the two lifting rods 471 to synchronously ascend / descend.

[0040] The protection block 5 is arranged at the four corners of the frame 41. The bottom surface of the protection block 5 is located at the same horizontal plane as the bottom surface of the frame 41. The protection block 5 is formed with a protection inclined surface 51 on the side facing the pallet 45. The protection inclined surface 51 is inclined inward from bottom to top. The pallet 45 is provided with protection notches 451 at the four corners.

[0041] The pallet frame 46 is provided with linkage lifting structures at the four corners of the bottom. The linkage lifting structures comprise linkage columns 6 and linkage gear boxes 61. The linkage columns 6 are power-connected with the linkage gear boxes 61. The linkage columns 6 are vertically arranged at the bottom of the pallet frame 46. The linkage gear boxes 61 are fixedly connected with the box 1. Adjacent two linkage gear boxes 61 are power-connected through linkage shafts 62.

[0042] The pallet 45 is provided with exhaust hole groups at the top front and back. The exhaust hole groups comprise exhaust holes 452 symmetrically arranged on the left and right.

[0043] The first connecting plates 7 are symmetrically arranged at the top front and back in the box 1. The exposure light source 2 is located between the two first connecting plates 7. The first connecting plates 7 are arranged in a left-right direction. The second connecting plates 71 are symmetrically arranged at the top of the exposure light source 2 in a front-back direction. The second connecting plates 71 are located above the first connecting plates 7. The second connecting plates 71 are provided with connecting locking modules at the top front and back ends. The connecting locking modules comprise first connecting structures and locking mechanisms. The first connecting structures comprise third through holes symmetrically arranged on the left and right sides of the second connecting plates 71. The second connecting plates 71 are provided with upper fixed nuts 72 at the top corresponding to the positions of the third through holes. The upper fixed nuts 72 are internally threadedly connected with adjusting bolts 73. The adjusting bolts 73 pass through the third through holes and abut against the corresponding side of the top of the first connecting plates 7 at the lower part.

[0044] The locking mechanisms comprise locking holes 74 symmetrically arranged on the left and right sides of the third through holes. The locking holes 74 are arranged in a front-back direction. The first connecting plates 7 are provided with locking threaded holes corresponding to the positions of the locking holes 74. The locking holes 74 are internally provided with locking bolts 75. The locking bolts 75 pass through the locking holes 74 and are threadedly connected with the locking threaded holes at the lower part.

[0045] The lifting rod 471 and the connecting block 472 on the corresponding side are provided with a connecting disc 8, the top of the lifting rod 471 is fixedly connected with the connecting disc 8 and coaxial, the top of the connecting disc 8 is provided with a plurality of connecting arc holes 81 along the circumference, the arc centers of the connecting arc holes 81 coincide with the axis of the lifting rod 471, the connecting block 472 is provided with an upper connecting hole at the position corresponding to the connecting arc hole 81, and the connecting arc hole 81 is provided with a lower locking bolt 82, the upper part of the lower locking bolt 82 passes through the corresponding connecting arc hole 81 and is threadedly connected with the corresponding upper connecting hole.

[0046] The top outer edge of the supporting plate 45 is provided with a chamfer structure, and the top outer edge of the exhaust hole 452 is provided with a chamfer structure.

[0047] The exposure machine further comprises a leveling glass, the leveling glass is arranged on the exposure surface of the to-be-exposed object and is attached to the exposure surface of the to-be-exposed object, and when the lens group is tightly attached to the frame body, the lower surface of the lens group is tightly attached to the upper surface of the leveling glass.

[0048] The first driving device comprises first driving modules arranged symmetrically left and right, the first driving module comprises a lifting driver 92 and first guide mechanisms arranged symmetrically on the front and back of the lifting driver 92, the output end of the lifting driver 92 is fixedly connected with the corresponding side of the lens group 3, the first guide mechanism comprises a guide column 93 and a guide block 94, the guide column 93 is vertically arranged, the guide block 94 is fixedly connected with the inner wall of the corresponding side of the box body 1, the guide block 94 is vertically provided with a guide through hole, and the lower part of the guide column 93 extends into the corresponding guide through hole and can slide along the corresponding guide through hole.

[0049] In the scheme, the spatial posture of the exposure light source needs to be calibrated before the exposure machine is exposed, the upper locking bolt is loosened first, the second connecting plate is unlocked with the first connecting plate, then the adjusting bolt is rotated, the length of the lower part of the adjusting bolt extending out of the second connecting plate is changed, the spatial posture of the four corners of the exposure light source is changed, so that the adjustment of the overall spatial posture of the exposure light source is realized, and then the upper locking bolt is tightened, the second connecting plate is locked with the first connecting plate, and the exposure light source is locked.

[0050] After the exposure light source is locked, the two flaps are rotated outward to open, so that the two flaps no longer close the taking window, the taking window is opened, the lifting driver drives the corresponding side of the lens group to move upward to the upper limit position, the lifting rod driver drives the two lifting rods to synchronously descend to make the two lifting rods drive the supporting plate to descend to the lower limit position, the to-be-exposed object is placed on the center of the upper surface of the non-breathable elastic cloth, at this time the exposure surface of the to-be-exposed object faces upward, the irregular part at the bottom of the to-be-exposed object that does not need to be exposed is inserted into the containing cylinder, and the remaining part of the to-be-exposed object is supported by the supporting plate. The leveling glass is covered on the exposure surface of the to-be-exposed object, so that the lower surface of the leveling glass is attached to the exposure surface of the to-be-exposed object, and the upper surface of the leveling glass is parallel to the lower surface of the lens group. Then the two flaps are rotated inward to close the window, and then the lifting rod driver drives the two lifting rods to synchronously ascend, so that the two lifting rods drive the supporting plate and the containing cylinder to move upward to the preset supporting position. In the process of upward movement of the supporting plate, the top surface of the supporting plate lifts the non-breathable elastic cloth upward, so that the non-breathable elastic cloth is stretched. Then the lifting driver drives the corresponding side of the lens group to move downward to the exposure position. At this time, the lens group, the frame, the non-breathable elastic cloth and the containing cylinder form a sealed exposure cavity. Then the external air extractor draws vacuum in the exposure cavity through the air exhaust hole. After the exposure cavity is drawn vacuum, the lower surface of the lens group is attached to the upper surface of the leveling glass. The normal line of the exposure surface of the to-be-exposed object is parallel to the optical axis of the exposure light source through the arrangement of the leveling glass. The exposure light source exposes the exposure surface of the to-be-exposed object through the lens group until the exposure is completed.

[0051] After the exposure is completed, the exposure cavity is depressurized, the lifting driver drives the corresponding side of the lens group to move upward, and the lifting rod driver drives the two lifting rods to synchronously descend to make the two lifting rods drive the supporting plate to descend, so that the to-be-exposed object after the exposure can be taken out.

[0052] When the non-breathable elastic cloth is stretched, it will be pulled by the supporting plate and the frame, which will reduce the service life of the non-breathable elastic cloth. In order to protect the non-breathable elastic cloth, protection blocks are arranged at four corners in the frame. The bottom surface of the protection block is located on the same horizontal plane as the bottom surface of the frame. The side of the protection block facing the supporting plate forms a protection inclined surface which is inclined inward from bottom to top. The supporting plate is provided with a protection notch at the position corresponding to the protection block at four corners. The outer edge of the top of the supporting plate and the outer edge of the top of the exhaust hole are both provided with a chamfer structure. When the non-breathable elastic cloth is stretched, the protection blocks at four corners of the frame avoid the problem that the four corners of the non-breathable elastic cloth are excessively stretched and damaged in the process of vacuumizing, greatly increasing the service life of the non-breathable elastic cloth and avoiding the non-breathable elastic cloth from being torn when stretched.

[0053] The center of gravity of the to-be-exposed article can not be at the center of the support plate, which can cause one corner of the support plate to tilt, and when the support plate tilts, the linkage column on the side can descend, thereby driving the linkage gear box on the side to rotate through the linkage shaft to drive the gears in the remaining linkage gear boxes to rotate, thereby driving the remaining linkage columns to descend, and finally causing the four corners of the support plate to descend synchronously, thereby ensuring that the support plate is horizontal and does not tilt.

[0054] During upward movement of the support plate, some air can be trapped between the contact surface of the support plate and the non-air-permeable elastic cloth, causing the non-air-permeable elastic cloth to bulge, resulting in poor exposure effect. In order to prevent bulging, a set of exhaust holes is symmetrically arranged on the top of the support plate, and the set of exhaust holes includes left and right symmetrically arranged exhaust holes. During upward movement of the support plate, the air between the support plate and the non-air-permeable elastic cloth can be discharged through the exhaust holes, thereby enhancing the flowability of the air and avoiding the occurrence of the bulging condition.

[0055] The lifting rod is a lead screw, and during installation, the lifting rod can have inconsistent radial angles, causing the horizontal positions of the connecting discs at the top of the lifting rod to be misaligned, and finally causing the support plate to tilt. When the horizontal positions of the connecting discs are misaligned, the lifting rod is first rotated to align the horizontal positions of the two connecting discs, and then the lower locking bolt is screwed into the connecting circular arc hole, so that the upper part of the lower locking bolt is threadedly connected with the upper connecting hole, and the connecting disc is locked with the connecting block.

[0056] In order to ensure that the lens group is lifted stably, when the lifting driver drives the corresponding side of the lens group to lift, the lens group drives the corresponding guide column to slide along the corresponding guide through hole, thereby preventing the lens group from deviating during lifting.

[0057] When the upper surface of the support plate and the lower surface of the frame body are at the same horizontal plane, the top surface of the support plate is completely attached to the non-air-permeable elastic cloth.

Claims

1. A top-light source exposure machine, characterized in that: The device includes a housing (1), which contains an exposure light source (2), a lens assembly (3), and a lower frame assembly (4). The exposure light source (2) is located directly above the lens assembly (3), and the lower frame assembly (4) is located directly below the lens assembly (3). The lower frame assembly (4) includes a frame (41), a non-breathable elastic cloth (42), and a material support module. The housing (1) contains a first driving device for driving the lens assembly (3) closer to / away from the frame (41). The non-breathable elastic cloth (42) covers and seals the bottom opening of the frame (41). The material support module includes... The package includes a sealing ring (43), a receiving cylinder (44), and a second driving device. The non-breathable elastic cloth (42) has a first through hole in its center. The bottom of the receiving cylinder (44) is sealed. The top of the receiving cylinder (44) is connected to the first through hole through the sealing ring (43). A support plate (45) is fitted on the outer side of the top of the receiving cylinder (44) and is fixedly connected to the support plate (45). The support plate (45) is located below the non-breathable elastic cloth (42). The second driving device is used to drive the support plate (45) to rise / fall. When the lens assembly is in close contact with the frame, the lens assembly, the frame, the non-breathable elastic cloth, and the receiving cylinder form a sealed exposure cavity.

2. The top-light source exposure machine according to claim 1, characterized in that: The inner side of the frame (41) is provided with an air extraction hole group that communicates with the outside. The air extraction hole group includes air extraction holes (411) symmetrically arranged on the left and right side walls inside the frame (41).

3. The top-light source exposure machine according to claim 2, characterized in that: It also includes leveling glass, which is placed on the exposure surface of the item to be exposed and is in close contact with the exposure surface of the item to be exposed. When the exposure chamber is evacuated to a vacuum, the lower surface of the lens assembly is in close contact with the upper surface of the leveling glass assembly.

4. The top-light source exposure machine according to claim 1, characterized in that: The second driving device includes a pallet frame (46) and a pallet frame driving mechanism. The pallet frame (46) is fixedly connected to the bottom of the pallet (45). The pallet frame driving mechanism includes a lifting rod driver (47) and lifting rods (471) symmetrically arranged on the left and right sides of the pallet frame (46). The lifting rods (471) are fixedly connected to the bottom of the corresponding side of the pallet frame (46) through a connecting block (472). The lifting rod driver (47) is used to drive the two lifting rods (471) to rise / fall synchronously.

5. The top-light source exposure machine according to claim 1, characterized in that: The frame (41) has protective blocks (5) at its four corners. The bottom surface of the protective block (5) is on the same horizontal plane as the bottom surface of the frame (41). The protective block (5) has a protective slope (51) on the side facing the tray (45). The protective slope (51) is inclined inward from bottom to top. The tray (45) has protective notches (451) at its four corners.

6. The top-light source exposure machine according to claim 4, characterized in that: The pallet frame (46) has a linkage lifting structure at the four corners of its bottom. The linkage lifting structure includes a linkage column (6) and a linkage gearbox (61). The linkage column (6) is powered to the linkage gearbox (61). The linkage column (6) is vertically set at the bottom of the pallet frame (46). The linkage gearbox (61) is fixedly connected to the housing (1). Two adjacent linkage gearboxes (61) are powered to each other through a linkage shaft (62).

7. The top-light source exposure machine according to claim 1, characterized in that: The top of the tray (45) is symmetrically provided with a group of exhaust holes, which includes exhaust holes (452) symmetrically arranged on the left and right.

8. The top-light source exposure machine according to claim 1, characterized in that: The top of the housing (1) is symmetrically provided with first connecting plates (7) at the front and back. The exposure light source (2) is located between the two first connecting plates (7). The first connecting plates (7) are arranged in a left-right direction. The top of the exposure light source (2) is symmetrically provided with second connecting plates (71) at the front and back. The second connecting plates (71) are arranged in a front-back direction. The second connecting plates (71) are located above the first connecting plates (7). The top front and back ends of the second connecting plates (71) are symmetrically provided with connection locking modules. The connection locking modules include a first connecting structure and a locking mechanism. The locking mechanism is used to lock / unlock the second connecting plate (71) and the first connecting plate (7). The first connecting structure includes a third through hole symmetrically arranged on the front and back sides of the second connecting plate (71). The top of the second connecting plate (71) is provided with an upper fixing nut (72) corresponding to the position of the third through hole. The upper fixing nut (72) is internally threaded with an adjusting bolt (73). The lower part of the adjusting bolt (73) passes through the third through hole and abuts against the corresponding side of the top of the first connecting plate (7).

9. A top-light source exposure machine according to claim 4, characterized in that: A connecting plate (8) is provided between the lifting rod (471) and the connecting block (472) on the corresponding side. The top of the lifting rod (471) is fixedly connected to the connecting plate (8) and coaxial. The top of the connecting plate (8) is provided with a plurality of connecting arc holes (81) along the circumference. The center of the arc of the connecting arc hole (81) coincides with the axis of the lifting rod (471). The connecting block (472) is provided with an upper connecting hole at the position corresponding to the connecting arc hole (81). A lower locking bolt (82) is provided in the connecting arc hole (81). The upper part of the lower locking bolt (82) passes through the corresponding connecting arc hole (81) and is threadedly connected to the corresponding upper connecting hole.

10. A top-light source exposure machine according to claim 1, characterized in that: The first driving device includes a first driving module symmetrically arranged on the left and right. The first driving module includes a lifting driver (92) and a first guide mechanism symmetrically arranged on the front and rear sides of the lifting driver (92). The output end of the lifting driver (92) is fixedly connected to the corresponding side of the lens group (3). The first guide mechanism includes a guide post (93) and a guide block (94). The guide post (93) is vertically arranged. The guide block (94) is fixedly connected to the inner wall of the corresponding side of the housing (1). The guide block (94) is vertically provided with a guide through hole. The lower part of the guide post (93) extends into the corresponding guide through hole and can slide along the corresponding guide through hole.

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